WO2009044871A1 - 電子源及び電子ビーム装置 - Google Patents
電子源及び電子ビーム装置 Download PDFInfo
- Publication number
- WO2009044871A1 WO2009044871A1 PCT/JP2008/068077 JP2008068077W WO2009044871A1 WO 2009044871 A1 WO2009044871 A1 WO 2009044871A1 JP 2008068077 W JP2008068077 W JP 2008068077W WO 2009044871 A1 WO2009044871 A1 WO 2009044871A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- electron
- electron source
- filament
- beam apparatus
- long
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/13—Solid thermionic cathodes
- H01J1/15—Cathodes heated directly by an electric current
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/13—Solid thermionic cathodes
- H01J1/15—Cathodes heated directly by an electric current
- H01J1/18—Supports; Vibration-damping arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/065—Construction of guns or parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/02—Details
- H01J2237/0216—Means for avoiding or correcting vibration effects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/063—Electron sources
- H01J2237/06308—Thermionic sources
- H01J2237/06316—Schottky emission
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Electron Sources, Ion Sources (AREA)
- Solid Thermionic Cathode (AREA)
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
Abstract
電子源を用いる装置が外部より振動を受けても、安定した電子線を与える電子源を提供する。 絶縁碍子(5)と、絶縁碍子(5)に間隔を空けて配置された2つの導電端子(4)と、導電端子(4)の間に張られている長尺のフィラメント(3)と、フィラメント(3)に取り付けられた電子放射部を有する針状の陰極(1)とを備える電子源であって、フィラメント(3)の軸方向に対する垂直断面形状が長方向と短方向を有し、長方向の最大長がその短方向の最大長の1.5倍以上5倍以下である電子源。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP08836265.2A EP2197015B1 (en) | 2007-10-05 | 2008-10-03 | Electron source and electron beam apparatus |
JP2009536111A JP5171836B2 (ja) | 2007-10-05 | 2008-10-03 | 電子源及び電子ビーム装置 |
US12/680,918 US8519608B2 (en) | 2007-10-05 | 2008-10-03 | Electron source and electron beam apparatus |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-262046 | 2007-10-05 | ||
JP2007262046 | 2007-10-05 | ||
PCT/JP2008/054359 WO2009044564A1 (ja) | 2007-10-05 | 2008-03-11 | 電子源及び電子ビーム装置 |
JPPCT/JP2008/054359 | 2008-03-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009044871A1 true WO2009044871A1 (ja) | 2009-04-09 |
Family
ID=40525996
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/054359 WO2009044564A1 (ja) | 2007-10-05 | 2008-03-11 | 電子源及び電子ビーム装置 |
PCT/JP2008/068077 WO2009044871A1 (ja) | 2007-10-05 | 2008-10-03 | 電子源及び電子ビーム装置 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/054359 WO2009044564A1 (ja) | 2007-10-05 | 2008-03-11 | 電子源及び電子ビーム装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8519608B2 (ja) |
EP (1) | EP2197015B1 (ja) |
JP (1) | JP5171836B2 (ja) |
WO (2) | WO2009044564A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20240029989A1 (en) * | 2020-12-25 | 2024-01-25 | Denka Company Limited | Electron source, method for manufacturing same, and device provided with electron source |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8896195B2 (en) * | 2010-10-21 | 2014-11-25 | Hermes Microvision, Inc. | Filament for electron source |
JP6043476B2 (ja) * | 2011-10-12 | 2016-12-14 | 株式会社日立ハイテクノロジーズ | イオン源およびそれを用いたイオンビーム装置 |
CN109791862A (zh) | 2016-08-08 | 2019-05-21 | Asml荷兰有限公司 | 电子发射器及其制造方法 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4827623A (ja) | 1971-07-16 | 1973-04-12 | ||
JPS4827623Y1 (ja) * | 1969-12-26 | 1973-08-15 | ||
JPS55148339A (en) | 1979-05-09 | 1980-11-18 | Mitsubishi Electric Corp | Direct heat type cathode frame body |
JPH0541057U (ja) * | 1991-10-31 | 1993-06-01 | 川崎製鉄株式会社 | 電子ビーム照射装置 |
JP2004265614A (ja) | 2003-02-03 | 2004-09-24 | Denki Kagaku Kogyo Kk | 電子源 |
JP2005222945A (ja) | 2004-02-03 | 2005-08-18 | Denki Kagaku Kogyo Kk | 電子源の製造方法と使用方法 |
JP2005332677A (ja) | 2004-05-19 | 2005-12-02 | Denki Kagaku Kogyo Kk | 電子源の製造方法と使用方法 |
JP2005339922A (ja) | 2004-05-26 | 2005-12-08 | Denki Kagaku Kogyo Kk | 電子源及びその製造方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5718655B2 (ja) | 1974-11-12 | 1982-04-17 | ||
JPS53128971A (en) | 1977-04-18 | 1978-11-10 | Hitachi Ltd | Manufacture of electron radiation cathode |
JPS55109343A (en) | 1979-02-16 | 1980-08-22 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Cathode for electron gun |
JPH0619956B2 (ja) | 1986-03-19 | 1994-03-16 | 日本電気株式会社 | 線源グリツド |
JPH04215231A (ja) | 1990-12-10 | 1992-08-06 | Hitachi Ltd | 電子管用ヘリカルコイル陰極 |
JPH0541057A (ja) | 1991-08-05 | 1993-02-19 | Tdk Corp | 磁気テープカセツトにおけるフロントリツド |
JP4215231B2 (ja) | 2001-05-21 | 2009-01-28 | 株式会社リコー | 画像読み取り装置及び画像形成装置 |
JP3832402B2 (ja) * | 2002-08-12 | 2006-10-11 | 株式会社日立製作所 | カーボンナノチューブを有する電子源とそれを用いた電子顕微鏡および電子線描画装置 |
JP5155666B2 (ja) | 2004-12-22 | 2013-03-06 | イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー | グリコロニトリルの合成のための方法 |
JP4827623B2 (ja) | 2006-06-08 | 2011-11-30 | 新電元工業株式会社 | 圧入端子 |
-
2008
- 2008-03-11 WO PCT/JP2008/054359 patent/WO2009044564A1/ja active Application Filing
- 2008-10-03 WO PCT/JP2008/068077 patent/WO2009044871A1/ja active Application Filing
- 2008-10-03 US US12/680,918 patent/US8519608B2/en active Active
- 2008-10-03 EP EP08836265.2A patent/EP2197015B1/en active Active
- 2008-10-03 JP JP2009536111A patent/JP5171836B2/ja active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4827623Y1 (ja) * | 1969-12-26 | 1973-08-15 | ||
JPS4827623A (ja) | 1971-07-16 | 1973-04-12 | ||
JPS55148339A (en) | 1979-05-09 | 1980-11-18 | Mitsubishi Electric Corp | Direct heat type cathode frame body |
JPH0541057U (ja) * | 1991-10-31 | 1993-06-01 | 川崎製鉄株式会社 | 電子ビーム照射装置 |
JP2004265614A (ja) | 2003-02-03 | 2004-09-24 | Denki Kagaku Kogyo Kk | 電子源 |
JP2005222945A (ja) | 2004-02-03 | 2005-08-18 | Denki Kagaku Kogyo Kk | 電子源の製造方法と使用方法 |
JP2005332677A (ja) | 2004-05-19 | 2005-12-02 | Denki Kagaku Kogyo Kk | 電子源の製造方法と使用方法 |
JP2005339922A (ja) | 2004-05-26 | 2005-12-08 | Denki Kagaku Kogyo Kk | 電子源及びその製造方法 |
Non-Patent Citations (2)
Title |
---|
D. TUGGLE, J. VAC. SCI. TECHNOL., vol. 16, 1979, pages 1699 |
See also references of EP2197015A4 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20240029989A1 (en) * | 2020-12-25 | 2024-01-25 | Denka Company Limited | Electron source, method for manufacturing same, and device provided with electron source |
Also Published As
Publication number | Publication date |
---|---|
EP2197015A1 (en) | 2010-06-16 |
JPWO2009044871A1 (ja) | 2011-02-10 |
US8519608B2 (en) | 2013-08-27 |
WO2009044564A1 (ja) | 2009-04-09 |
US20100237762A1 (en) | 2010-09-23 |
EP2197015A4 (en) | 2012-01-04 |
JP5171836B2 (ja) | 2013-03-27 |
EP2197015B1 (en) | 2014-02-19 |
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