JPS55109343A - Cathode for electron gun - Google Patents
Cathode for electron gunInfo
- Publication number
- JPS55109343A JPS55109343A JP1617779A JP1617779A JPS55109343A JP S55109343 A JPS55109343 A JP S55109343A JP 1617779 A JP1617779 A JP 1617779A JP 1617779 A JP1617779 A JP 1617779A JP S55109343 A JPS55109343 A JP S55109343A
- Authority
- JP
- Japan
- Prior art keywords
- wires
- chip
- welded
- vibration
- service life
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Solid Thermionic Cathode (AREA)
Abstract
PURPOSE: To increase long-term stability for vibration and scheme to prevent alteration of characteristics and increase service life by fixing strips or wires at three points or more and allowing said strips or wires to be fixed each other through a chip or at the position farthest from the fixing point.
CONSTITUTION: The flat part 8 is formed so as to be at right angle to the surface formed with ternianal 2, and at both ends of the flat part, two pieces of tungsten wires 9 having small cross-sectional area are spot-welded at four positions separately each other as far as possible. At near each middle point of two wires 9, a chip consisting of single crystal is interposed, and from the both ends of the chip, the wires 9 are welded, and the top of the tungsten chip is pointed. Thus, the long- term stability for vibration can be improved, and the alteration of characteristics can be prevented, and service life can be elongated.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1617779A JPS55109343A (en) | 1979-02-16 | 1979-02-16 | Cathode for electron gun |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1617779A JPS55109343A (en) | 1979-02-16 | 1979-02-16 | Cathode for electron gun |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS55109343A true JPS55109343A (en) | 1980-08-22 |
Family
ID=11909221
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1617779A Pending JPS55109343A (en) | 1979-02-16 | 1979-02-16 | Cathode for electron gun |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55109343A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2672156A1 (en) * | 1989-08-29 | 1992-07-31 | Babich Olgerd | Thermoelectronic (thermionic) cathode assembly for electron beam devices |
| EP1705684A1 (en) * | 2005-03-22 | 2006-09-27 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Stabilized emitter and method for stabilizing same |
| EP2061064A1 (en) * | 2006-09-05 | 2009-05-20 | Denki Kagaku Kogyo Kabushiki Kaisha | Electron source |
| EP2197015A1 (en) * | 2007-10-05 | 2010-06-16 | Denki Kagaku Kogyo Kabushiki Kaisha | Electron source and electron beam apparatus |
| WO2023001480A1 (en) * | 2021-07-22 | 2023-01-26 | Asml Netherlands B.V. | System and apparatus for stabilizing electron sources in charged particle systems |
-
1979
- 1979-02-16 JP JP1617779A patent/JPS55109343A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2672156A1 (en) * | 1989-08-29 | 1992-07-31 | Babich Olgerd | Thermoelectronic (thermionic) cathode assembly for electron beam devices |
| EP1705684A1 (en) * | 2005-03-22 | 2006-09-27 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Stabilized emitter and method for stabilizing same |
| EP2061064A1 (en) * | 2006-09-05 | 2009-05-20 | Denki Kagaku Kogyo Kabushiki Kaisha | Electron source |
| EP2061064A4 (en) * | 2006-09-05 | 2011-09-14 | Denki Kagaku Kogyo Kk | Electron source |
| EP2197015A1 (en) * | 2007-10-05 | 2010-06-16 | Denki Kagaku Kogyo Kabushiki Kaisha | Electron source and electron beam apparatus |
| EP2197015A4 (en) * | 2007-10-05 | 2012-01-04 | Denki Kagaku Kogyo Kk | Electron source and electron beam apparatus |
| US8519608B2 (en) | 2007-10-05 | 2013-08-27 | Denki Kagaku Kogyo Kabushiki Kaisha | Electron source and electron beam apparatus |
| WO2023001480A1 (en) * | 2021-07-22 | 2023-01-26 | Asml Netherlands B.V. | System and apparatus for stabilizing electron sources in charged particle systems |
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