WO2009008254A1 - 電子源 - Google Patents

電子源 Download PDF

Info

Publication number
WO2009008254A1
WO2009008254A1 PCT/JP2008/061233 JP2008061233W WO2009008254A1 WO 2009008254 A1 WO2009008254 A1 WO 2009008254A1 JP 2008061233 W JP2008061233 W JP 2008061233W WO 2009008254 A1 WO2009008254 A1 WO 2009008254A1
Authority
WO
WIPO (PCT)
Prior art keywords
cathode
insulating glass
glass member
filaments
electron
Prior art date
Application number
PCT/JP2008/061233
Other languages
English (en)
French (fr)
Inventor
Ryozo Nonogaki
Yoshinori Terui
Original Assignee
Denki Kagaku Kogyo Kabushiki Kaisha
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo Kabushiki Kaisha filed Critical Denki Kagaku Kogyo Kabushiki Kaisha
Priority to US12/667,762 priority Critical patent/US8040034B2/en
Priority to EP08777394.1A priority patent/EP2175472B1/en
Publication of WO2009008254A1 publication Critical patent/WO2009008254A1/ja

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/15—Cathodes heated directly by an electric current
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/061—Construction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Solid Thermionic Cathode (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)

Abstract

外部から振動を受けても、信頼性の高い安定した電子線を与える電子源を提供する。 本願発明の電子源は、電子放射部を有する陰極（１）が、絶縁碍子（５）に設けられた２つの導電端子（４）のそれぞれに接続された２本のフィラメント（３）の先端で挟むように接合され、前記陰極の電子放射部とは異なる端部が絶縁碍子（５）に固定された電子源であって、前記２本のフィラメント（３）が陰極（１）の中心軸に対して２回対称である、好ましくは、陰極の電子放射部とは異なる端部が、絶縁碍子にろう付けされた金属部材（６）を介して絶縁碍子に固定される、さらに好ましくは、前記フィラメントに曲部を設けていることを特徴とするものである。
PCT/JP2008/061233 2007-07-12 2008-06-19 電子源 WO2009008254A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/667,762 US8040034B2 (en) 2007-07-12 2008-06-19 Electron source
EP08777394.1A EP2175472B1 (en) 2007-07-12 2008-06-19 Electron source

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-183452 2007-07-12
JP2007183452A JP4782736B2 (ja) 2007-07-12 2007-07-12 電子源

Publications (1)

Publication Number Publication Date
WO2009008254A1 true WO2009008254A1 (ja) 2009-01-15

Family

ID=40228433

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/061233 WO2009008254A1 (ja) 2007-07-12 2008-06-19 電子源

Country Status (4)

Country Link
US (1) US8040034B2 (ja)
EP (1) EP2175472B1 (ja)
JP (1) JP4782736B2 (ja)
WO (1) WO2009008254A1 (ja)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112012001287B4 (de) * 2011-03-18 2016-01-21 Denka Company Limited Gehäuse und Verfahren zum Handhaben einer Elektronenkanone oder Ionenkanone
JP6043476B2 (ja) * 2011-10-12 2016-12-14 株式会社日立ハイテクノロジーズ イオン源およびそれを用いたイオンビーム装置
US9240301B1 (en) 2012-03-27 2016-01-19 Applied Physics Technologies, Inc. Thermal-field type electron source composed of transition metal carbide material with artificial facet
US10083812B1 (en) 2015-12-04 2018-09-25 Applied Physics Technologies, Inc. Thermionic-enhanced field emission electron source composed of transition metal carbide material with sharp emitter end-form
US9847208B1 (en) * 2016-08-10 2017-12-19 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Electron beam device, cold field emitter, and method for regeneration of a cold field emitter
KR102523388B1 (ko) 2018-09-25 2023-04-20 주식회사 히타치하이테크 열전계 방출 전자원 및 전자빔 응용 장치
CN110223900B (zh) * 2019-05-09 2021-07-30 广东省韶关市质量计量监督检测所 一种利用体视显微镜对中扫描电镜钨灯丝的操作方法
EP4057318A1 (en) 2021-03-12 2022-09-14 FEI Company Mechanically-stable electron source
WO2022196499A1 (ja) * 2021-03-19 2022-09-22 デンカ株式会社 エミッター及びこれを備える装置

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03192643A (ja) * 1989-12-21 1991-08-22 Jeol Ltd 電界放出型電子銃
JP2001052596A (ja) * 1999-06-29 2001-02-23 Schlumberger Technologies Inc 安定化ＺｒＯ２リザーバーを有するショットキーエミッタカソード
JP2003507872A (ja) * 1999-08-20 2003-02-25 フェイ カンパニ 寿命が延長されたショットキーエミッター
JP2006240100A (ja) 2005-03-03 2006-09-14 Fuji Xerox Co Ltd 画像形成装置
JP2006269431A (ja) * 2005-03-22 2006-10-05 Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh 安定化したエミッタおよびエミッタを安定化させる方法
JP2006285864A (ja) 2005-04-04 2006-10-19 Aruze Corp 発券システム
JP2008091307A (ja) * 2006-09-05 2008-04-17 Denki Kagaku Kogyo Kk 電子源

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US226753A (en) * 1880-04-20 Soldering-iron heater
US145585A (en) * 1873-12-16 Improvement in tree-protectors
US1850981A (en) * 1924-11-28 1932-03-22 Radio Inventions Inc Rectifier
JPS5688226A (en) * 1979-12-21 1981-07-17 Toshiba Corp Directly-heated cathode structural body
US5449968A (en) * 1992-06-24 1995-09-12 Denki Kagaku Kogyo Kabushiki Kaisha Thermal field emission cathode
JPH0676730A (ja) * 1992-08-24 1994-03-18 Denki Kagaku Kogyo Kk 熱電子放射陰極
US6680562B1 (en) 1999-08-20 2004-01-20 Fei Company Schottky emitter having extended life
JP3192643B2 (ja) 1999-10-07 2001-07-30 川崎重工業株式会社 四輪車の操舵装置
JP4210131B2 (ja) 2003-02-03 2009-01-14 電気化学工業株式会社 電子源及び電子源の使用方法
EP1596418B1 (en) 2003-02-17 2011-07-27 Denki Kagaku Kogyo Kabushiki Kaisha Electron gun
JP3810395B2 (ja) * 2003-08-15 2006-08-16 電気化学工業株式会社 荷電粒子放射源
EP1777730B1 (en) * 2005-10-19 2018-05-30 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Arrangement and method for compensating emitter tip vibrations
JP2007149659A (ja) * 2005-10-27 2007-06-14 Sumitomo Electric Ind Ltd 電界放出型電子銃、電子顕微鏡、及び電子ビーム露光機

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03192643A (ja) * 1989-12-21 1991-08-22 Jeol Ltd 電界放出型電子銃
JP2001052596A (ja) * 1999-06-29 2001-02-23 Schlumberger Technologies Inc 安定化ＺｒＯ２リザーバーを有するショットキーエミッタカソード
JP2003507872A (ja) * 1999-08-20 2003-02-25 フェイ カンパニ 寿命が延長されたショットキーエミッター
JP2006240100A (ja) 2005-03-03 2006-09-14 Fuji Xerox Co Ltd 画像形成装置
JP2006269431A (ja) * 2005-03-22 2006-10-05 Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh 安定化したエミッタおよびエミッタを安定化させる方法
JP2006285864A (ja) 2005-04-04 2006-10-19 Aruze Corp 発券システム
JP2008091307A (ja) * 2006-09-05 2008-04-17 Denki Kagaku Kogyo Kk 電子源

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
D. TUGGLE, J. VAC. SCI. TECHNOL., vol. 16, 1979, pages 1699
See also references of EP2175472A4 *

Also Published As

Publication number Publication date
EP2175472A4 (en) 2012-01-04
US8040034B2 (en) 2011-10-18
JP4782736B2 (ja) 2011-09-28
US20100194262A1 (en) 2010-08-05
JP2009021128A (ja) 2009-01-29
EP2175472A1 (en) 2010-04-14
EP2175472B1 (en) 2014-02-19

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