WO2009037724A1 - 小型流量制御弁 - Google Patents

小型流量制御弁 Download PDF

Info

Publication number
WO2009037724A1
WO2009037724A1 PCT/JP2007/001009 JP2007001009W WO2009037724A1 WO 2009037724 A1 WO2009037724 A1 WO 2009037724A1 JP 2007001009 W JP2007001009 W JP 2007001009W WO 2009037724 A1 WO2009037724 A1 WO 2009037724A1
Authority
WO
WIPO (PCT)
Prior art keywords
flow rate
valve
rate control
movable body
small flow
Prior art date
Application number
PCT/JP2007/001009
Other languages
English (en)
French (fr)
Inventor
Ryousuke Dohi
Kouji Nishino
Kaoru Hirata
Nobukazu Ikeda
Original Assignee
Fujikin Incorporated
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Incorporated filed Critical Fujikin Incorporated
Priority to PCT/JP2007/001009 priority Critical patent/WO2009037724A1/ja
Priority to JP2009532960A priority patent/JPWO2009037724A1/ja
Priority to TW096136295A priority patent/TW200914756A/zh
Publication of WO2009037724A1 publication Critical patent/WO2009037724A1/ja

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/12—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with streamlined valve member around which the fluid flows when the valve is opened
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F16K31/52—Mechanical actuating means with crank, eccentric, or cam

Abstract

　半導体製造設備や化学品製造設備等の圧力式流量制御装置に適用される小型流量制御弁であって、コストの低減が図れると共に、構造を簡単化してコンパクトに形成でき、それでいて高精度の作動が行なえる様にする。 　流入路７と流出路８が左右に離間して形成されて流入路７側又は流出路８側に弁座９を備えた弁箱２と、弁箱２に設けられて左右方向に移動可能な可動体３と、可動体３に設けられて弁座９に当離座し得る弁体４と、弁箱２と可動体３との間に設けられて可動体３の左右方向の移動を許容すると共に流入路７と流出路８を連通し得る伸縮可能な伸縮筒体５と、弁箱２に設けられて可動体３を移動させる為のアクチュエータ６とで構成する。
PCT/JP2007/001009 2007-09-18 2007-09-18 小型流量制御弁 WO2009037724A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
PCT/JP2007/001009 WO2009037724A1 (ja) 2007-09-18 2007-09-18 小型流量制御弁
JP2009532960A JPWO2009037724A1 (ja) 2007-09-18 2007-09-18 小型流量制御弁
TW096136295A TW200914756A (en) 2007-09-18 2007-09-28 Small flow rate control valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/001009 WO2009037724A1 (ja) 2007-09-18 2007-09-18 小型流量制御弁

Publications (1)

Publication Number Publication Date
WO2009037724A1 true WO2009037724A1 (ja) 2009-03-26

Family

ID=40467557

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/001009 WO2009037724A1 (ja) 2007-09-18 2007-09-18 小型流量制御弁

Country Status (3)

Country Link
JP (1) JPWO2009037724A1 (ja)
TW (1) TW200914756A (ja)
WO (1) WO2009037724A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103162477A (zh) * 2011-12-15 2013-06-19 株式会社不二工机 组合阀
JP2021063996A (ja) * 2016-10-20 2021-04-22 エーエスエムエル ネザーランズ ビー．ブイ． 圧力制御弁、リソグラフィ装置のための流体ハンドリング構造、及びリソグラフィ装置
WO2022091313A1 (ja) * 2020-10-29 2022-05-05 ミライアル株式会社 流体制御装置
WO2023153151A1 (ja) * 2022-02-10 2023-08-17 株式会社デンソー 膨張弁

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1182363A (fr) * 1957-07-12 1959-06-24 Vanne à soufflet perfectionnée
JPS6173979U (ja) * 1984-10-23 1986-05-19
JPS61262285A (ja) * 1985-05-13 1986-11-20 Nippon Kentetsu Co Ltd 真空装置用自動バルブ
JPH02253066A (ja) * 1989-03-28 1990-10-11 Oki Electric Ind Co Ltd 絞り弁
JPH11108228A (ja) * 1997-10-01 1999-04-20 Saginomiya Seisakusho Inc 電動式コントロールバルブ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4820745B2 (ja) * 2006-12-27 2011-11-24 株式会社フジキン 小型流量制御弁

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1182363A (fr) * 1957-07-12 1959-06-24 Vanne à soufflet perfectionnée
JPS6173979U (ja) * 1984-10-23 1986-05-19
JPS61262285A (ja) * 1985-05-13 1986-11-20 Nippon Kentetsu Co Ltd 真空装置用自動バルブ
JPH02253066A (ja) * 1989-03-28 1990-10-11 Oki Electric Ind Co Ltd 絞り弁
JPH11108228A (ja) * 1997-10-01 1999-04-20 Saginomiya Seisakusho Inc 電動式コントロールバルブ

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103162477A (zh) * 2011-12-15 2013-06-19 株式会社不二工机 组合阀
JP2021063996A (ja) * 2016-10-20 2021-04-22 エーエスエムエル ネザーランズ ビー．ブイ． 圧力制御弁、リソグラフィ装置のための流体ハンドリング構造、及びリソグラフィ装置
US11199771B2 (en) 2016-10-20 2021-12-14 Asml Netherlands B.V. Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus
JP7126543B2 (ja) 2016-10-20 2022-08-26 エーエスエムエル ネザーランズ ビー．ブイ． 圧力制御弁、リソグラフィ装置のための流体ハンドリング構造、及びリソグラフィ装置
WO2022091313A1 (ja) * 2020-10-29 2022-05-05 ミライアル株式会社 流体制御装置
WO2023153151A1 (ja) * 2022-02-10 2023-08-17 株式会社デンソー 膨張弁

Also Published As

Publication number Publication date
JPWO2009037724A1 (ja) 2010-12-24
TW200914756A (en) 2009-04-01

Similar Documents

Publication Publication Date Title
GB2455264A (en) Actuator for an aerosol container
WO2009035926A3 (en) Double action directional fluid flow valve
WO2008093529A1 (ja) 流体制御器
JP2010536679A5 (ja)
WO2007103384A3 (en) Fluidic energy transfer devices
GB2479112A (en) Micro-valve and micro-fluidic device using such
WO2006044458A3 (en) Electrostatic actuation for management of flow
JP2012530544A5 (ja)
WO2011106193A3 (en) Tool coupler assembly
WO2009034766A1 (ja) レンジ切換え装置
WO2009037724A1 (ja) 小型流量制御弁
MX2013002950A (es) Activador de freno neumatico con valvula de control de dos vias insensible al flujo.
WO2013009616A3 (en) A double valve block and actuator assembly including same
WO2009025366A1 (ja) 制御弁
WO2002084118A1 (fr) Micropompe
WO2010004224A3 (fr) Pompe de distribution de produit fluide
WO2008129274A3 (en) Passively controlled turbocharger
WO2010076779A3 (en) High and low range flow valve
WO2010025727A3 (en) An expansion valve with force equalization
WO2011101832A8 (en) An electric valve device
US20130192704A1 (en) Mems valve operating profile
WO2009005916A3 (en) 3-way high-pressure air operated valve
MY181679A (en) Improvements in or relating to gate valves
EP1988440A1 (en) Fluid valve
JP2011207189A5 (ja)

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 07827790

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 2009532960

Country of ref document: JP

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 07827790

Country of ref document: EP

Kind code of ref document: A1