TW200914756A - Small flow rate control valve - Google Patents

Small flow rate control valve Download PDF

Info

Publication number
TW200914756A
TW200914756A TW096136295A TW96136295A TW200914756A TW 200914756 A TW200914756 A TW 200914756A TW 096136295 A TW096136295 A TW 096136295A TW 96136295 A TW96136295 A TW 96136295A TW 200914756 A TW200914756 A TW 200914756A
Authority
TW
Taiwan
Prior art keywords
valve
movable body
valve box
stepping motor
actuator
Prior art date
Application number
TW096136295A
Other languages
English (en)
Chinese (zh)
Inventor
Ryousuke Dohi
Kouji Nishino
Kaoru Hirata
Nobukazu Ikeda
Original Assignee
Fujikin Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Kk filed Critical Fujikin Kk
Publication of TW200914756A publication Critical patent/TW200914756A/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/12—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with streamlined valve member around which the fluid flows when the valve is opened
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F16K31/52—Mechanical actuating means with crank, eccentric, or cam

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Lift Valve (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Mechanically-Actuated Valves (AREA)
  • Valve Housings (AREA)
  • Flow Control (AREA)
  • Fluid-Driven Valves (AREA)
TW096136295A 2007-09-18 2007-09-28 Small flow rate control valve TW200914756A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/001009 WO2009037724A1 (ja) 2007-09-18 2007-09-18 小型流量制御弁

Publications (1)

Publication Number Publication Date
TW200914756A true TW200914756A (en) 2009-04-01

Family

ID=40467557

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096136295A TW200914756A (en) 2007-09-18 2007-09-28 Small flow rate control valve

Country Status (3)

Country Link
JP (1) JPWO2009037724A1 (ja)
TW (1) TW200914756A (ja)
WO (1) WO2009037724A1 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5802539B2 (ja) * 2011-12-15 2015-10-28 株式会社不二工機 複合弁
KR102269453B1 (ko) 2016-10-20 2021-06-29 에이에스엠엘 네델란즈 비.브이. 압력 제어 밸브, 리소그래피 장치용 유체 핸들링 구조체 및 리소그래피 장치
WO2022091313A1 (ja) * 2020-10-29 2022-05-05 ミライアル株式会社 流体制御装置
WO2023153151A1 (ja) * 2022-02-10 2023-08-17 株式会社デンソー 膨張弁

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1182363A (fr) * 1957-07-12 1959-06-24 Vanne à soufflet perfectionnée
JPS6173979U (ja) * 1984-10-23 1986-05-19
JPS61262285A (ja) * 1985-05-13 1986-11-20 Nippon Kentetsu Co Ltd 真空装置用自動バルブ
JPH02253066A (ja) * 1989-03-28 1990-10-11 Oki Electric Ind Co Ltd 絞り弁
JPH11108228A (ja) * 1997-10-01 1999-04-20 Saginomiya Seisakusho Inc 電動式コントロールバルブ
JP4820745B2 (ja) * 2006-12-27 2011-11-24 株式会社フジキン 小型流量制御弁

Also Published As

Publication number Publication date
JPWO2009037724A1 (ja) 2010-12-24
WO2009037724A1 (ja) 2009-03-26

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