WO2009031258A1 - 水晶デバイス及び水晶デバイスの製造方法 - Google Patents

水晶デバイス及び水晶デバイスの製造方法 Download PDF

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Publication number
WO2009031258A1
WO2009031258A1 PCT/JP2008/001751 JP2008001751W WO2009031258A1 WO 2009031258 A1 WO2009031258 A1 WO 2009031258A1 JP 2008001751 W JP2008001751 W JP 2008001751W WO 2009031258 A1 WO2009031258 A1 WO 2009031258A1
Authority
WO
WIPO (PCT)
Prior art keywords
crystal
crystal device
base
frame
connection electrode
Prior art date
Application number
PCT/JP2008/001751
Other languages
English (en)
French (fr)
Inventor
Naoto Inose
Toshiaki Takeuchi
Original Assignee
Nihon Dempa Kogyo Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co., Ltd. filed Critical Nihon Dempa Kogyo Co., Ltd.
Priority to US12/676,349 priority Critical patent/US8261427B2/en
Priority to CN200880105296.6A priority patent/CN101816125B/zh
Priority to EP08776763A priority patent/EP2187519A4/en
Publication of WO2009031258A1 publication Critical patent/WO2009031258A1/ja

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H03H9/215—Crystal tuning forks consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0595—Holders; Supports the holder support and resonator being formed in one body
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1035—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/02—Containers; Seals
    • H01L23/10—Containers; Seals characterised by the material or arrangement of seals between parts, e.g. between cap and base of the container or between leads and walls of the container
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/4908—Acoustic transducer

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

【課題】　リッド及びベースもすべて水晶から形成してそれぞれをシロキサン結合（Ｓｉ－Ｏ－Ｓｉ）により接合した水晶デバイスを提供する。 【解決手段】水晶デバイス（１００）は、電極パターンを有する水晶振動片とこの水晶振動片を支える外枠（５１）とを有する水晶からなる水晶フレーム（５０）と、第１面に形成された接続電極と第１面の反対側の第２面に形成され接続電極に導通する外部電極とを有し水晶からなる水晶ベース（４０）と、を備え、水晶フレームと水晶ベースとを重ねて結合する際に、電極パターン（３３）に接続電極（４２）が接触し、外枠（５１）と水晶ベース（４０）とが接触していない。  
PCT/JP2008/001751 2007-09-03 2008-07-03 水晶デバイス及び水晶デバイスの製造方法 WO2009031258A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US12/676,349 US8261427B2 (en) 2007-09-03 2008-07-03 Methods for manufacturing crystal devices
CN200880105296.6A CN101816125B (zh) 2007-09-03 2008-07-03 水晶装置及水晶装置的制造方法
EP08776763A EP2187519A4 (en) 2007-09-03 2008-07-03 CRYSTAL ASSEMBLY AND METHOD FOR PRODUCING THE CRYSTAL ASSEMBLY

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007227344A JP5085240B2 (ja) 2007-09-03 2007-09-03 水晶デバイス及び水晶デバイスの製造方法
JP2007-227344 2007-09-03

Publications (1)

Publication Number Publication Date
WO2009031258A1 true WO2009031258A1 (ja) 2009-03-12

Family

ID=40428583

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/001751 WO2009031258A1 (ja) 2007-09-03 2008-07-03 水晶デバイス及び水晶デバイスの製造方法

Country Status (5)

Country Link
US (1) US8261427B2 (ja)
EP (1) EP2187519A4 (ja)
JP (1) JP5085240B2 (ja)
CN (1) CN101816125B (ja)
WO (1) WO2009031258A1 (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8261427B2 (en) 2007-09-03 2012-09-11 Nihon Dempa Kogyo Co., Ltd. Methods for manufacturing crystal devices
US10080808B2 (en) 2012-10-11 2018-09-25 Uti Limited Partnership Methods and compositions for treating multiple sclerosis and related disorders
US10124045B2 (en) 2013-11-04 2018-11-13 Uti Limited Partnership Methods and compositions for sustained immunotherapy
US10172955B2 (en) 2010-11-12 2019-01-08 Uti Limited Partnership Compositions and methods for the prevention and treatment of cancer
US10485882B2 (en) 2015-05-06 2019-11-26 Uti Limited Partnership Nanoparticle compositions for sustained therapy
US10988516B2 (en) 2012-03-26 2021-04-27 Uti Limited Partnership Methods and compositions for treating inflammation

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5113870B2 (ja) 2009-08-27 2013-01-09 日本電波工業株式会社 表面実装用水晶振動子の製造方法
JP5880538B2 (ja) * 2011-02-25 2016-03-09 株式会社大真空 圧電振動片、圧電振動子、圧電振動片の製造方法、および圧電振動子の製造方法
JP2012195918A (ja) * 2011-03-18 2012-10-11 Nippon Dempa Kogyo Co Ltd 圧電デバイス
CN108496307B (zh) * 2016-01-21 2021-07-23 株式会社村田制作所 水晶振子及其制造方法
KR101872599B1 (ko) * 2016-08-26 2018-06-28 삼성전기주식회사 탄성파 필터 장치

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06343017A (ja) 1993-04-09 1994-12-13 Citizen Watch Co Ltd 圧電振動子およびその製造方法
JPH1022773A (ja) * 1996-07-03 1998-01-23 Matsushita Electric Ind Co Ltd 振動子とその製造方法
JPH1032293A (ja) * 1996-07-17 1998-02-03 Matsushita Electric Ind Co Ltd 電子部品の製造方法
JPH1041771A (ja) * 1996-07-24 1998-02-13 Matsushita Electric Ind Co Ltd 振動子の製造方法とその製造装置
JP2000022487A (ja) * 1998-07-01 2000-01-21 Seiko Epson Corp 圧電素子およびその製造方法
JP2001119264A (ja) * 1999-10-15 2001-04-27 Nippon Dempa Kogyo Co Ltd 水晶振動子
JP2003017965A (ja) * 2001-07-04 2003-01-17 Nippon Dempa Kogyo Co Ltd 水晶振動子の製造方法
JP2006311393A (ja) * 2005-04-28 2006-11-09 Seiko Epson Corp 水晶振動子の製造方法

Family Cites Families (10)

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Publication number Priority date Publication date Assignee Title
FR2464595A1 (fr) * 1979-08-31 1981-03-06 Ebauches Sa Procede de detection d'asymetrie de resonateurs a cristal piezoelectrique en forme de diapason et resonateurs pour sa mise en oeuvre
JPH06350376A (ja) * 1993-01-25 1994-12-22 Matsushita Electric Ind Co Ltd 気密封止された圧電デバイスおよび気密封止パッケージ
JPH09326663A (ja) * 1996-06-07 1997-12-16 Matsushita Electric Ind Co Ltd 振動子とその製造方法
JP3646258B2 (ja) * 2001-10-31 2005-05-11 有限会社ピエデック技術研究所 水晶ユニットとその製造方法
US6915548B2 (en) * 2002-03-06 2005-07-12 Piedek Technical Laboratory Method for manufacturing quartz crystal tuning fork resonator, quartz crystal unit having quartz crystal tuning fork resonator, and quartz crystal oscillator having quartz crystal unit
JP2003318699A (ja) * 2002-04-23 2003-11-07 Piedekku Gijutsu Kenkyusho:Kk 水晶ユニットとその製造方法
JP3980943B2 (ja) * 2002-06-06 2007-09-26 日本電波工業株式会社 Ｐｌｌ制御発振器
JP4690146B2 (ja) * 2005-08-26 2011-06-01 セイコーインスツル株式会社 水晶振動子、発振器及び電子機器
JP5085240B2 (ja) 2007-09-03 2012-11-28 日本電波工業株式会社 水晶デバイス及び水晶デバイスの製造方法
JP4647671B2 (ja) * 2008-01-15 2011-03-09 日本電波工業株式会社 水晶デバイス及び水晶デバイスの製造方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06343017A (ja) 1993-04-09 1994-12-13 Citizen Watch Co Ltd 圧電振動子およびその製造方法
JPH1022773A (ja) * 1996-07-03 1998-01-23 Matsushita Electric Ind Co Ltd 振動子とその製造方法
JPH1032293A (ja) * 1996-07-17 1998-02-03 Matsushita Electric Ind Co Ltd 電子部品の製造方法
JPH1041771A (ja) * 1996-07-24 1998-02-13 Matsushita Electric Ind Co Ltd 振動子の製造方法とその製造装置
JP2000022487A (ja) * 1998-07-01 2000-01-21 Seiko Epson Corp 圧電素子およびその製造方法
JP2001119264A (ja) * 1999-10-15 2001-04-27 Nippon Dempa Kogyo Co Ltd 水晶振動子
JP2003017965A (ja) * 2001-07-04 2003-01-17 Nippon Dempa Kogyo Co Ltd 水晶振動子の製造方法
JP2006311393A (ja) * 2005-04-28 2006-11-09 Seiko Epson Corp 水晶振動子の製造方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2187519A4

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8261427B2 (en) 2007-09-03 2012-09-11 Nihon Dempa Kogyo Co., Ltd. Methods for manufacturing crystal devices
US10172955B2 (en) 2010-11-12 2019-01-08 Uti Limited Partnership Compositions and methods for the prevention and treatment of cancer
US11000596B2 (en) 2010-11-12 2021-05-11 UTI Limited Parttiership Compositions and methods for the prevention and treatment of cancer
US10988516B2 (en) 2012-03-26 2021-04-27 Uti Limited Partnership Methods and compositions for treating inflammation
US10080808B2 (en) 2012-10-11 2018-09-25 Uti Limited Partnership Methods and compositions for treating multiple sclerosis and related disorders
US10905773B2 (en) 2012-10-11 2021-02-02 Uti Limited Partnership Methods and compositions for treating multiple sclerosis and related disorders
US10124045B2 (en) 2013-11-04 2018-11-13 Uti Limited Partnership Methods and compositions for sustained immunotherapy
US11338024B2 (en) 2013-11-04 2022-05-24 Uti Limited Partnership Methods and compositions for sustained immunotherapy
US10485882B2 (en) 2015-05-06 2019-11-26 Uti Limited Partnership Nanoparticle compositions for sustained therapy
US12011480B2 (en) 2015-05-06 2024-06-18 Uti Limited Partnership Nanoparticle compositions for sustained therapy

Also Published As

Publication number Publication date
EP2187519A4 (en) 2012-11-14
JP5085240B2 (ja) 2012-11-28
CN101816125B (zh) 2013-05-22
US8261427B2 (en) 2012-09-11
CN101816125A (zh) 2010-08-25
EP2187519A1 (en) 2010-05-19
JP2009060479A (ja) 2009-03-19
US20100162545A1 (en) 2010-07-01

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