WO2009025285A1 - カラーフィルタの製造方法、カラーフィルタ、液晶表示装置、製造装置 - Google Patents

カラーフィルタの製造方法、カラーフィルタ、液晶表示装置、製造装置 Download PDF

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Publication number
WO2009025285A1
WO2009025285A1 PCT/JP2008/064802 JP2008064802W WO2009025285A1 WO 2009025285 A1 WO2009025285 A1 WO 2009025285A1 JP 2008064802 W JP2008064802 W JP 2008064802W WO 2009025285 A1 WO2009025285 A1 WO 2009025285A1
Authority
WO
WIPO (PCT)
Prior art keywords
color filter
protection film
manufacturing
inorganic protection
transparent electrode
Prior art date
Application number
PCT/JP2008/064802
Other languages
English (en)
French (fr)
Inventor
Hirohisa Takahashi
Isao Sugiura
Atsushi Ohta
Satoru Ishibashi
Original Assignee
Ulvac, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac, Inc. filed Critical Ulvac, Inc.
Priority to CN200880103952.9A priority Critical patent/CN101784921B/zh
Priority to KR1020107003700A priority patent/KR101114810B1/ko
Priority to JP2009529040A priority patent/JP5232787B2/ja
Priority to DE112008002276T priority patent/DE112008002276T5/de
Publication of WO2009025285A1 publication Critical patent/WO2009025285A1/ja
Priority to US12/705,049 priority patent/US7999907B2/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/201—Filters in the form of arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509—Filters, e.g. light shielding masks
    • G02F1/133514—Colour filters
    • G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • G02F1/134309—Electrodes characterised by their geometrical arrangement
    • G02F1/134336—Matrix
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00—Materials and properties
    • G02F2202/28—Adhesive materials or arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mathematical Physics (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Electric Cables (AREA)
  • Liquid Crystal (AREA)
  • Optical Filters (AREA)

Abstract

　エッチングストッパの剥離を防止する。本発明のカラーフィルタ１０は、ＳｎＯ2を主成分とする無機保護膜２１（エッチングストッパ）を有する。そのような無機保護膜２１は比抵抗が高い上、線膨張係数が透明電極２３の線膨張係数に近いので、処理対象物１９が加熱されても、無機保護膜２１が透明電極２３や樹脂層２２から剥離しない。無機保膜２１と透明電極２３は同一の成膜室５の内部で連続して成膜可能なので、従来よりもカラーフィルタの製造に要する時間が短縮される。
PCT/JP2008/064802 2007-08-22 2008-08-20 カラーフィルタの製造方法、カラーフィルタ、液晶表示装置、製造装置 WO2009025285A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CN200880103952.9A CN101784921B (zh) 2007-08-22 2008-08-20 滤色片的制造方法、滤色片、液晶显示装置、制造装置
KR1020107003700A KR101114810B1 (ko) 2007-08-22 2008-08-20 컬러 필터의 제조 방법, 컬러 필터, 액정 표시 장치, 제조 장치
JP2009529040A JP5232787B2 (ja) 2007-08-22 2008-08-20 カラーフィルタの製造方法
DE112008002276T DE112008002276T5 (de) 2007-08-22 2008-08-20 Farbfilterherstellungsverfahren, Farbfilter, Flüssigkristallanzeigevorrichtung und Herstellungsvorrichtung
US12/705,049 US7999907B2 (en) 2007-08-22 2010-02-12 Method for producing color filter, color filter, liquid crystal display device and producing apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007215996 2007-08-22
JP2007-215996 2007-08-22

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/705,049 Continuation US7999907B2 (en) 2007-08-22 2010-02-12 Method for producing color filter, color filter, liquid crystal display device and producing apparatus

Publications (1)

Publication Number Publication Date
WO2009025285A1 true WO2009025285A1 (ja) 2009-02-26

Family

ID=40378185

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/064802 WO2009025285A1 (ja) 2007-08-22 2008-08-20 カラーフィルタの製造方法、カラーフィルタ、液晶表示装置、製造装置

Country Status (7)

Country Link
US (1) US7999907B2 (ja)
JP (1) JP5232787B2 (ja)
KR (1) KR101114810B1 (ja)
CN (1) CN101784921B (ja)
DE (1) DE112008002276T5 (ja)
TW (1) TW200925668A (ja)
WO (1) WO2009025285A1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI400529B (zh) * 2010-04-19 2013-07-01 Chunghwa Picture Tubes Ltd 彩色濾光基板的製造方法
JP6609351B1 (ja) 2018-06-18 2019-11-20 デクセリアルズ株式会社 偏光板およびその製造方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60112001A (ja) * 1983-11-22 1985-06-18 Seiko Epson Corp カラ−フイルタ−
JPS6426821A (en) * 1987-03-13 1989-01-30 Toppan Printing Co Ltd Production of electrode plate for color display device
JPH02284118A (ja) * 1989-04-26 1990-11-21 Seiko Epson Corp カラー液晶表示装置用電極板
JPH04303824A (ja) * 1991-04-01 1992-10-27 Dainippon Printing Co Ltd カラーフィルターの製造方法
JP2003066217A (ja) * 2001-08-24 2003-03-05 Fuji Photo Film Co Ltd カラーフィルター及びカラーフィルターの製造方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3094421B2 (ja) * 1990-03-09 2000-10-03 富士通株式会社 透明導電膜の形成方法
JPH05132770A (ja) * 1991-11-11 1993-05-28 Canon Inc スパツタ装置
JPH07318713A (ja) 1994-05-20 1995-12-08 Toppan Printing Co Ltd 透明電極膜付きカラーフィルタ
TWI224221B (en) * 1998-01-30 2004-11-21 Seiko Epson Corp Electro-optic apparatus, electronic apparatus using the same, and its manufacturing method
JPH11335815A (ja) * 1998-05-20 1999-12-07 Nippon Sheet Glass Co Ltd 透明導電膜付き基板および成膜装置
JP4303824B2 (ja) 1999-03-31 2009-07-29 株式会社ダスキン マットの製造方法
JP2001174838A (ja) 1999-12-17 2001-06-29 Sharp Corp カラー液晶表示素子用基板の製造方法およびカラー液晶表示素子の製造方法
JP2001194676A (ja) * 2000-01-07 2001-07-19 Hitachi Ltd 液晶表示装置
KR100831232B1 (ko) 2002-01-18 2008-05-22 삼성전자주식회사 액정표시장치용 컬러필터 및 이를 이용한 액정표시장치

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60112001A (ja) * 1983-11-22 1985-06-18 Seiko Epson Corp カラ−フイルタ−
JPS6426821A (en) * 1987-03-13 1989-01-30 Toppan Printing Co Ltd Production of electrode plate for color display device
JPH02284118A (ja) * 1989-04-26 1990-11-21 Seiko Epson Corp カラー液晶表示装置用電極板
JPH04303824A (ja) * 1991-04-01 1992-10-27 Dainippon Printing Co Ltd カラーフィルターの製造方法
JP2003066217A (ja) * 2001-08-24 2003-03-05 Fuji Photo Film Co Ltd カラーフィルター及びカラーフィルターの製造方法

Also Published As

Publication number Publication date
CN101784921A (zh) 2010-07-21
KR20100033434A (ko) 2010-03-29
KR101114810B1 (ko) 2012-03-13
CN101784921B (zh) 2013-06-19
US20100141878A1 (en) 2010-06-10
DE112008002276T5 (de) 2010-09-02
TW200925668A (en) 2009-06-16
JP5232787B2 (ja) 2013-07-10
US7999907B2 (en) 2011-08-16
JPWO2009025285A1 (ja) 2010-11-25

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