JPS6426821A - Production of electrode plate for color display device - Google Patents
Production of electrode plate for color display deviceInfo
- Publication number
- JPS6426821A JPS6426821A JP62058325A JP5832587A JPS6426821A JP S6426821 A JPS6426821 A JP S6426821A JP 62058325 A JP62058325 A JP 62058325A JP 5832587 A JP5832587 A JP 5832587A JP S6426821 A JPS6426821 A JP S6426821A
- Authority
- JP
- Japan
- Prior art keywords
- inorg
- oxide layer
- layer
- reverse sputtering
- subjecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To improve the chemical resistance of an inorg. oxide layer, the film quality of transparent electrodes and workability such as etching by subjecting an overcoating layer to a reverse sputtering treatment, then laminating the inorg. oxide layer thereon and subjecting the inorg. oxide layer to the reverse sputtering treatment as well to form the transparent electrodes. CONSTITUTION:Filters of red R, green G and blue B are provided on a transparent substrate 11 consisting of glass, etc., by using gelatin as a coating material to form color filters 12; thereafter the overcoating layer 13 is formed of the same gelatin material thereof. Said layer is then subjected to the reverse sputtering in an atmosphere of gaseous argon contg. oxygen and thereafter, an SiO2 film is deposited by forward sputtering thereon to form the inorg. oxide layer 14. The surface of this layer is subjected to the reverse sputtering as well. Processing to the smaller sizes is thereby enabled at the time of etching and the oxidation resistance of the inorg. oxide layer 14 is improved. Damaging of the color filters is obviated even under the conditions of slight overetching.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62058325A JPS6426821A (en) | 1987-03-13 | 1987-03-13 | Production of electrode plate for color display device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62058325A JPS6426821A (en) | 1987-03-13 | 1987-03-13 | Production of electrode plate for color display device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6426821A true JPS6426821A (en) | 1989-01-30 |
Family
ID=13081139
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62058325A Pending JPS6426821A (en) | 1987-03-13 | 1987-03-13 | Production of electrode plate for color display device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6426821A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5488497A (en) * | 1992-11-02 | 1996-01-30 | Sharp Kabushiki Kaisha | Color liquid crystal device with organic smoothing layer over ITO separated by an oxide layer and a nitride layer |
| WO1998040782A1 (en) * | 1997-03-13 | 1998-09-17 | Robert Bosch Gmbh | Method for producing liquid crystal cells |
| WO2009025285A1 (en) * | 2007-08-22 | 2009-02-26 | Ulvac, Inc. | Color filter manufacturing method, color filter, liquid crystal display device and manufacturing apparatus |
-
1987
- 1987-03-13 JP JP62058325A patent/JPS6426821A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5488497A (en) * | 1992-11-02 | 1996-01-30 | Sharp Kabushiki Kaisha | Color liquid crystal device with organic smoothing layer over ITO separated by an oxide layer and a nitride layer |
| WO1998040782A1 (en) * | 1997-03-13 | 1998-09-17 | Robert Bosch Gmbh | Method for producing liquid crystal cells |
| US6143189A (en) * | 1997-03-13 | 2000-11-07 | Robert Bosch Gmbh | Method for producing liquid crystal cells |
| WO2009025285A1 (en) * | 2007-08-22 | 2009-02-26 | Ulvac, Inc. | Color filter manufacturing method, color filter, liquid crystal display device and manufacturing apparatus |
| US7999907B2 (en) | 2007-08-22 | 2011-08-16 | Ulvac, Inc. | Method for producing color filter, color filter, liquid crystal display device and producing apparatus |
| JP5232787B2 (en) * | 2007-08-22 | 2013-07-10 | 株式会社アルバック | Manufacturing method of color filter |
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