WO2009013807A1 - クライオポンプ - Google Patents

クライオポンプ Download PDF

Info

Publication number
WO2009013807A1
WO2009013807A1 PCT/JP2007/064461 JP2007064461W WO2009013807A1 WO 2009013807 A1 WO2009013807 A1 WO 2009013807A1 JP 2007064461 W JP2007064461 W JP 2007064461W WO 2009013807 A1 WO2009013807 A1 WO 2009013807A1
Authority
WO
WIPO (PCT)
Prior art keywords
shield
cryopanel
water molecules
regeneration
cryopump
Prior art date
Application number
PCT/JP2007/064461
Other languages
English (en)
French (fr)
Inventor
Ryosuke Tsuyuki
Original Assignee
Sumitomo Heavy Industries, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries, Ltd. filed Critical Sumitomo Heavy Industries, Ltd.
Priority to JP2009524334A priority Critical patent/JP4932911B2/ja
Priority to PCT/JP2007/064461 priority patent/WO2009013807A1/ja
Priority to KR1020107000823A priority patent/KR101104171B1/ko
Priority to US12/452,532 priority patent/US20100115971A1/en
Publication of WO2009013807A1 publication Critical patent/WO2009013807A1/ja

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

【課題】本発明は再生効率の向上を図りうるクライオポンプに関し、真空生成時に水以外の分子と共に水分子を凝固又は吸着するものであっても再生時間の短縮を図ることを課題とする。 【解決手段】シリンダ１４、１５内でディスプレーサ１４Ａ、１５Ａが往復動することにより膨張室で寒冷を発生させる冷凍機５と、前記膨張室で発生した寒冷により冷却されるシールド９及びクライオパネル１０と、シールド９及びクライオパネル１０等を内部に収納する真空容器４とを有し、シールド９及びクライオパネル１０を逆転昇温可能なクライオパネルにおいて、シールド９に、液化した水以外の分子をシールド９から真空容器４に流出させる流出孔１８と、再生により発生した水分子２３を貯留可能な貯留容量を有する水溜部２０とを設ける。
PCT/JP2007/064461 2007-07-23 2007-07-23 クライオポンプ WO2009013807A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2009524334A JP4932911B2 (ja) 2007-07-23 2007-07-23 クライオポンプ
PCT/JP2007/064461 WO2009013807A1 (ja) 2007-07-23 2007-07-23 クライオポンプ
KR1020107000823A KR101104171B1 (ko) 2007-07-23 2007-07-23 크라이오 펌프
US12/452,532 US20100115971A1 (en) 2007-07-23 2007-07-23 Cryopump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/064461 WO2009013807A1 (ja) 2007-07-23 2007-07-23 クライオポンプ

Publications (1)

Publication Number Publication Date
WO2009013807A1 true WO2009013807A1 (ja) 2009-01-29

Family

ID=40281070

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/064461 WO2009013807A1 (ja) 2007-07-23 2007-07-23 クライオポンプ

Country Status (4)

Country Link
US (1) US20100115971A1 (ja)
JP (1) JP4932911B2 (ja)
KR (1) KR101104171B1 (ja)
WO (1) WO2009013807A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8896227B2 (en) 2010-09-10 2014-11-25 Osram Sylvania Inc. Directly driven high efficiency LED circuit
US8896220B2 (en) 2011-03-07 2014-11-25 Osram Sylvania Inc. High efficiency, low energy storage driver circuit for solid state light sources
US10550830B2 (en) 2016-01-08 2020-02-04 Sumitomo Heavy Industries, Ltd. Cryopump

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2489975A (en) * 2011-04-14 2012-10-17 Edwards Ltd Vacuum pumping system
CN102230461B (zh) * 2011-06-09 2014-01-01 刘庆明 一种真空抽取方法及装置
JP5744692B2 (ja) 2011-10-05 2015-07-08 住友重機械工業株式会社 極低温冷凍機及びクライオポンプ及びディスプレーサ
US9926922B2 (en) 2015-01-30 2018-03-27 Caterpillar Inc. Barrel assembly for a fluid pump having separate plunger bore and outlet passage
US9828987B2 (en) 2015-01-30 2017-11-28 Caterpillar Inc. System and method for priming a pump
US9909582B2 (en) 2015-01-30 2018-03-06 Caterpillar Inc. Pump with plunger having tribological coating
US10041447B2 (en) 2015-01-30 2018-08-07 Caterpillar Inc. Pump manifold
US10041484B2 (en) 2015-01-30 2018-08-07 Caterpillar Inc. Pump having inlet reservoir with vapor-layer standpipe
US9828976B2 (en) 2015-01-30 2017-11-28 Caterpillar Inc. Pump for cryogenic liquids having temperature managed pumping mechanism
KR101885761B1 (ko) 2016-11-07 2018-09-10 주식회사코아티앤티 크라이오 펌프의 디스플레이서 세정장치 및 그의 방법
KR102536330B1 (ko) * 2022-09-08 2023-05-26 크라이오에이치앤아이(주) 크라이오 펌프의 재생 방법
KR102580537B1 (ko) * 2022-09-08 2023-09-21 크라이오에이치앤아이(주) 크라이오 펌프의 재생 방법

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5981784U (ja) * 1982-11-24 1984-06-02 株式会社徳田製作所 クライオポンプ
JPS59174379U (ja) * 1983-05-09 1984-11-21 アルバツク・クライオ株式会社 クライオポンプの水除去装置
JPH05223057A (ja) * 1992-02-10 1993-08-31 Fujitsu Ltd クライオポンプ
JPH08135570A (ja) * 1994-11-11 1996-05-28 Ebara Corp クライオポンプ及びコールドトラップ

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4438632A (en) * 1982-07-06 1984-03-27 Helix Technology Corporation Means for periodic desorption of a cryopump
JPS5981784A (ja) * 1982-10-30 1984-05-11 角野　博光 ホツパ−型コイン類払出し装置
JPS59174379A (ja) * 1983-03-24 1984-10-02 Tokyo Juki Ind Co Ltd 印字体の動作制御方法
US4530213A (en) * 1983-06-28 1985-07-23 Air Products And Chemicals, Inc. Economical and thermally efficient cryopump panel and panel array
US4520630A (en) * 1984-03-06 1985-06-04 Cvi Incorporated Cryogenic refrigerator and heat source
CA2096419A1 (en) * 1990-11-19 1992-05-20 Gerd Flick Process for regenerating a cryopump and suitable cryopump for implementing this process
US5361580A (en) * 1993-06-18 1994-11-08 General Electric Company Gas turbine engine rotor support system
EP0921311B1 (en) * 1994-04-28 2002-10-16 Ebara Corporation Cryopump
JP4967594B2 (ja) * 2006-10-20 2012-07-04 凸版印刷株式会社 クライオポンプ及びそれを用いた真空装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5981784U (ja) * 1982-11-24 1984-06-02 株式会社徳田製作所 クライオポンプ
JPS59174379U (ja) * 1983-05-09 1984-11-21 アルバツク・クライオ株式会社 クライオポンプの水除去装置
JPH05223057A (ja) * 1992-02-10 1993-08-31 Fujitsu Ltd クライオポンプ
JPH08135570A (ja) * 1994-11-11 1996-05-28 Ebara Corp クライオポンプ及びコールドトラップ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8896227B2 (en) 2010-09-10 2014-11-25 Osram Sylvania Inc. Directly driven high efficiency LED circuit
US8896220B2 (en) 2011-03-07 2014-11-25 Osram Sylvania Inc. High efficiency, low energy storage driver circuit for solid state light sources
US10550830B2 (en) 2016-01-08 2020-02-04 Sumitomo Heavy Industries, Ltd. Cryopump

Also Published As

Publication number Publication date
JP4932911B2 (ja) 2012-05-16
KR101104171B1 (ko) 2012-01-12
KR20100020038A (ko) 2010-02-19
JPWO2009013807A1 (ja) 2010-09-24
US20100115971A1 (en) 2010-05-13

Similar Documents

Publication Publication Date Title
WO2009013807A1 (ja) クライオポンプ
RU2003102330A (ru) Бытовой компрессионный холодильник
CN101233361B (zh) 低温贮罐系统
OA13211A (en) Method for cooling a product, for liquefying a gas, and device for implementing this method.
Li et al. Experimental study of a novel CaCl2/expanded graphite-NH3 adsorption refrigerator
RU2468313C2 (ru) Холодильник с льдогенератором
KR100981398B1 (ko) 엘엔지 액화가스 기화열을 이용한 물류창고 냉각 시스템
WO2010128222A3 (fr) Procédé et équipement de stockage d'énergie mécanique par compression et détente quasi-isotherme d'un gaz
CN203743823U (zh) 低蒸发率恒温低温液体贮罐
TW200517628A (en) Air separator and operating method thereof
JP4210568B2 (ja) 冷凍方法及びシステム
RU175179U1 (ru) Криогенная энергетическая установка
WO2008011129A3 (en) Cooling systems and related methods
ATE542092T1 (de) Haushaltskältegerät mit evakuierbarem lagerfach
CN105569754A (zh) 利用环境热能对外做功的方法及环境热能做功系统
RU2010144018A (ru) Холодильный аппарат, в особенности бытовой холодильный аппарат, с конденсатором, оборудованным тепловыми аккумуляторами
JP2006153208A (ja) 低温流体用貯蔵タンク
JP2013217512A (ja) エンジン駆動式ヒートポンプエアコン
CN203837317U (zh) 远洋金枪鱼渔船余热吸收制冷装置
KR20130011276A (ko) 열사이펀을 구비한 냉장고
CN2687584Y (zh) 一种利用溶质溶解降温的循环制冷装置
RU2626525C1 (ru) Устройство для реализации адсорбционного цикла повышения температурного потенциала источника теплоты
CN201653035U (zh) 一种对开门冰箱
CN205119624U (zh) 一种冰柜用防滑装置
RU2748407C2 (ru) Автономная установка для регазификации криопродукта

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 07791193

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 2009524334

Country of ref document: JP

WWE Wipo information: entry into national phase

Ref document number: 12452532

Country of ref document: US

ENP Entry into the national phase

Ref document number: 20107000823

Country of ref document: KR

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

32PN Ep: public notification in the ep bulletin as address of the adressee cannot be established

Free format text: NOTING OF LOSS OF RIGHTS PURSUANT TO RULE 112(1) EPC (EPO FORM 1205A DATED 07/05/2010)

122 Ep: pct application non-entry in european phase

Ref document number: 07791193

Country of ref document: EP

Kind code of ref document: A1