WO2008133178A1 - 波長変換素子、波長変換方法、位相整合方法、及び光源装置 - Google Patents

波長変換素子、波長変換方法、位相整合方法、及び光源装置 Download PDF

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Publication number
WO2008133178A1
WO2008133178A1 PCT/JP2008/057512 JP2008057512W WO2008133178A1 WO 2008133178 A1 WO2008133178 A1 WO 2008133178A1 JP 2008057512 W JP2008057512 W JP 2008057512W WO 2008133178 A1 WO2008133178 A1 WO 2008133178A1
Authority
WO
WIPO (PCT)
Prior art keywords
wavelength conversion
light source
conversion element
source device
regions
Prior art date
Application number
PCT/JP2008/057512
Other languages
English (en)
French (fr)
Inventor
Kenichi Muramatsu
Sunao Kurimura
Original Assignee
Nikon Corporation
National Institute For Materials Science
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corporation, National Institute For Materials Science filed Critical Nikon Corporation
Priority to JP2009511845A priority Critical patent/JP5354501B2/ja
Priority to CN2008800121028A priority patent/CN101689006B/zh
Priority to KR1020097024003A priority patent/KR101180505B1/ko
Priority to EP08740582A priority patent/EP2148241A4/en
Priority to KR1020127015459A priority patent/KR101299877B1/ko
Publication of WO2008133178A1 publication Critical patent/WO2008133178A1/ja
Priority to US12/588,501 priority patent/US8264766B2/en
Priority to US13/571,696 priority patent/US8422120B2/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/37—Non-linear optics for second-harmonic generation
    • G02F1/377—Non-linear optics for second-harmonic generation in an optical waveguide structure
    • G02F1/3775—Non-linear optics for second-harmonic generation in an optical waveguide structure with a periodic structure, e.g. domain inversion, for quasi-phase-matching [QPM]
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/37—Non-linear optics for second-harmonic generation
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/355—Non-linear optics characterised by the materials used
    • G02F1/3558—Poled materials, e.g. with periodic poling; Fabrication of domain inverted structures, e.g. for quasi-phase-matching [QPM]

Abstract

　単結晶の非線形光学結晶を備える波長変換素子である。非線形光学結晶は、所定の方向に極性方向を有する複数の第１の領域と、所定の方向とは反対の方向に極性方向を有する複数の第２の領域と、波長λ且つ周波数ωの基本入射波が所定の方向に対して実質的に垂直な方向で入射する入射面と、結晶内で発生した周波数２ωの第二高調波が出射する出射面と、を有する。複数の第１及び第２の領域は、入射面と出射面との間で、所定の式で表されるｄと実質的に等しい周期で交互に配置されるよう形成されている。
PCT/JP2008/057512 2007-04-18 2008-04-17 波長変換素子、波長変換方法、位相整合方法、及び光源装置 WO2008133178A1 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2009511845A JP5354501B2 (ja) 2007-04-18 2008-04-17 波長変換素子、波長変換方法、位相整合方法、及び光源装置
CN2008800121028A CN101689006B (zh) 2007-04-18 2008-04-17 波长转换元件、波长转换方法、相位匹配方法及光源装置
KR1020097024003A KR101180505B1 (ko) 2007-04-18 2008-04-17 파장 변환 소자, 파장 변환 방법, 위상 정합 방법, 및 광원 장치
EP08740582A EP2148241A4 (en) 2007-04-18 2008-04-17 WAVE LENGTH CONVERTING ELEMENT, WAVE LENGTH CONVERTING METHOD, PHASE SYNCHRONIZATION METHOD, AND LIGHT SOURCE DEVICE
KR1020127015459A KR101299877B1 (ko) 2007-04-18 2008-04-17 위상 정합 방법 및 광원 장치
US12/588,501 US8264766B2 (en) 2007-04-18 2009-10-16 Wavelength conversion element, wavelength conversion method, phase matching method, and light source device
US13/571,696 US8422120B2 (en) 2007-04-18 2012-08-10 Wavelength conversion element, wavelength conversion method, phase matching method, and light source device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007109127 2007-04-18
JP2007-109127 2007-04-18

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/588,501 Continuation-In-Part US8264766B2 (en) 2007-04-18 2009-10-16 Wavelength conversion element, wavelength conversion method, phase matching method, and light source device

Publications (1)

Publication Number Publication Date
WO2008133178A1 true WO2008133178A1 (ja) 2008-11-06

Family

ID=39925634

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/057512 WO2008133178A1 (ja) 2007-04-18 2008-04-17 波長変換素子、波長変換方法、位相整合方法、及び光源装置

Country Status (6)

Country Link
US (2) US8264766B2 (ja)
EP (3) EP2634625A1 (ja)
JP (2) JP5354501B2 (ja)
KR (2) KR101299877B1 (ja)
CN (1) CN101689006B (ja)
WO (1) WO2008133178A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7385209B2 (ja) 2019-08-21 2023-11-22 国立大学法人 東京大学 真空紫外光の発生方法及びそれに用いる装置

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2634625A1 (en) * 2007-04-18 2013-09-04 Nikon Corporation Wavelength conversion element, wavelength conversion method, phase matching method, and light source device
JP5232884B2 (ja) * 2011-02-25 2013-07-10 昭和オプトロニクス株式会社 紫外レーザ装置
GB2502142A (en) 2012-05-18 2013-11-20 Isis Innovation High harmonic optical generator which rotates polarization
EP3088858A4 (en) * 2013-12-27 2017-08-23 Nikon Corporation Temperature measurement method for ultraviolet transmittance member, temperature measurement device for ultraviolet transmittance member, and light source device
CN111989615A (zh) * 2018-04-26 2020-11-24 住友电气工业株式会社 波长转换光学器件和用于制造波长转换光学器件的方法
DE102019204019B4 (de) * 2019-03-25 2022-07-07 Robert Bosch Gmbh Lichtaussendevorrichtung und Verfahren zum Aussenden von Licht
JP7228792B2 (ja) * 2019-06-07 2023-02-27 パナソニックＩｐマネジメント株式会社 波長変換装置
US11101614B1 (en) * 2020-02-26 2021-08-24 Coherent Lasersystems Gmbh & Co. Kg Second-harmonic generation crystal

Citations (2)

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JP2004279613A (ja) * 2003-03-14 2004-10-07 Nidek Co Ltd 擬似位相整合波長変換素子及びその製造方法並びにこれを用いた医療レーザ装置
JP2005017410A (ja) * 2003-06-24 2005-01-20 Shimadzu Corp 波長変換レーザ装置

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US5412502A (en) * 1992-01-24 1995-05-02 Hitachi Metals, Ltd. Second harmonic generating element and the production method thereof
JP4097763B2 (ja) 1997-03-27 2008-06-11 松下電器産業株式会社 ２次の非線形光学部材、及びその製造方法、並びに光変調素子
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JP2004109915A (ja) * 2002-09-20 2004-04-08 Nikon Corp 波長変換素子
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US7329316B2 (en) 2003-03-14 2008-02-12 National Institute For Materials Science Manufacturing method for QPM wavelength converter elements, QPM wavelength converter element, and medical laser apparatus using it
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JP2005275095A (ja) * 2004-03-25 2005-10-06 Nikon Corp 光源装置、半導体露光装置、レーザー治療装置、レーザー干渉計装置およびレーザー顕微鏡装置
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JP2004279613A (ja) * 2003-03-14 2004-10-07 Nidek Co Ltd 擬似位相整合波長変換素子及びその製造方法並びにこれを用いた医療レーザ装置
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7385209B2 (ja) 2019-08-21 2023-11-22 国立大学法人 東京大学 真空紫外光の発生方法及びそれに用いる装置

Also Published As

Publication number Publication date
JP5729618B2 (ja) 2015-06-03
EP2634625A1 (en) 2013-09-04
US8422120B2 (en) 2013-04-16
EP2634624A1 (en) 2013-09-04
JP5354501B2 (ja) 2013-11-27
US20100110534A1 (en) 2010-05-06
US20120307350A1 (en) 2012-12-06
EP2148241A4 (en) 2010-11-03
CN101689006A (zh) 2010-03-31
US8264766B2 (en) 2012-09-11
CN101689006B (zh) 2012-01-18
KR20120083528A (ko) 2012-07-25
EP2148241A1 (en) 2010-01-27
KR20100017108A (ko) 2010-02-16
KR101299877B1 (ko) 2013-08-23
JP2013231988A (ja) 2013-11-14
JPWO2008133178A1 (ja) 2010-07-22
KR101180505B1 (ko) 2012-09-06

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