WO2008111499A1 - コバルト含有膜形成材料、および該材料を用いたコバルトシリサイド膜の製造方法 - Google Patents

コバルト含有膜形成材料、および該材料を用いたコバルトシリサイド膜の製造方法 Download PDF

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Publication number
WO2008111499A1
WO2008111499A1 PCT/JP2008/054121 JP2008054121W WO2008111499A1 WO 2008111499 A1 WO2008111499 A1 WO 2008111499A1 JP 2008054121 W JP2008054121 W JP 2008054121W WO 2008111499 A1 WO2008111499 A1 WO 2008111499A1
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WO
WIPO (PCT)
Prior art keywords
cobalt
containing film
forming
film
forming material
Prior art date
Application number
PCT/JP2008/054121
Other languages
English (en)
French (fr)
Inventor
Syoichiro Wakabayashi
Takamitsu Kobayashi
Original Assignee
Showa Denko K.K.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko K.K. filed Critical Showa Denko K.K.
Priority to JP2009504017A priority Critical patent/JPWO2008111499A1/ja
Publication of WO2008111499A1 publication Critical patent/WO2008111499A1/ja

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/42—Silicides
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F17/00—Metallocenes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

　融点が低く液体としての取扱いが可能であり、かつ高い蒸気圧を有し、さらには工業的に合成容易で安定な、ＣＶＤ（化学気相吸着）法によるコバルト含有膜形成に、好適にはコバルトシリサイド膜形成において、容易に良好な膜を形成することが出来るコバルト含有膜形成材料を提供することを目的としている。 　本発明のコバルト膜含有形成材料は、下記式１の構造で示されることを特徴とする。 　Co(R1 aC5H(5-a))（R2 bC5H(5-b)）　・・・（１）
PCT/JP2008/054121 2007-03-12 2008-03-07 コバルト含有膜形成材料、および該材料を用いたコバルトシリサイド膜の製造方法 WO2008111499A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009504017A JPWO2008111499A1 (ja) 2007-03-12 2008-03-07 コバルト含有膜形成材料、および該材料を用いたコバルトシリサイド膜の製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007062146 2007-03-12
JP2007-062146 2007-03-12

Publications (1)

Publication Number Publication Date
WO2008111499A1 true WO2008111499A1 (ja) 2008-09-18

Family

ID=39759438

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/054121 WO2008111499A1 (ja) 2007-03-12 2008-03-07 コバルト含有膜形成材料、および該材料を用いたコバルトシリサイド膜の製造方法

Country Status (5)

Country Link
JP (1) JPWO2008111499A1 (ja)
KR (1) KR20090115197A (ja)
CN (1) CN101578390A (ja)
TW (1) TW200902748A (ja)
WO (1) WO2008111499A1 (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012060428A1 (ja) 2010-11-02 2012-05-10 宇部興産株式会社 （アミドアミノアルカン）金属化合物、及び当該金属化合物を用いた金属含有薄膜の製造方法
WO2013150903A1 (ja) * 2012-04-04 2013-10-10 東京エレクトロン株式会社 成膜方法及び記憶媒体
WO2015190420A1 (ja) * 2014-06-09 2015-12-17 東ソー株式会社 コバルト錯体及びその製造方法、コバルト含有薄膜及びその作製方法
JP2016166166A (ja) * 2014-06-09 2016-09-15 東ソー株式会社 コバルト錯体及びその製造方法、コバルト含有薄膜及びその作製方法
JP2016183114A (ja) * 2015-03-25 2016-10-20 東ソー株式会社 コバルト錯体及びその製造方法、コバルト含有薄膜及びその作製方法
JP2017007975A (ja) * 2015-06-22 2017-01-12 東ソー株式会社 置換シクロペンタジエニルコバルト錯体及びその製造方法、コバルト含有薄膜及びその作製方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011078399A1 (ja) * 2009-12-25 2011-06-30 独立行政法人科学技術振興機構 結晶性コバルトシリサイド膜の形成方法
JP6808281B2 (ja) * 2015-12-16 2021-01-06 東ソー株式会社 置換シクロペンタジエニルコバルト錯体及びその製造方法、コバルト含有薄膜及びその作製方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04232270A (ja) * 1990-07-27 1992-08-20 Kali Chem Ag 銅を含有する層の基板上への析出方法、並びに新規の銅化合物
JP2004059544A (ja) * 2002-07-31 2004-02-26 Tosoh Corp 置換シクロペンタジエニル銅錯体及びその製造方法
JP2005060814A (ja) * 2002-12-03 2005-03-10 Jsr Corp ルテニウム化合物および金属ルテニウム膜の製造法
JP2005079468A (ja) * 2003-09-02 2005-03-24 Jsr Corp ルテニウム−シリコン混合膜を形成する方法
JP2006037123A (ja) * 2004-07-22 2006-02-09 Toyoshima Seisakusho:Kk 薄膜用ｃｖｄ原料及びそれを用いて得られる薄膜
JP2006516031A (ja) * 2003-01-16 2006-06-15 アドバンスド テクノロジー マテリアルズ，インコーポレイテッド タンタル系材料の蒸着のための化学蒸着前駆体

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04232270A (ja) * 1990-07-27 1992-08-20 Kali Chem Ag 銅を含有する層の基板上への析出方法、並びに新規の銅化合物
JP2004059544A (ja) * 2002-07-31 2004-02-26 Tosoh Corp 置換シクロペンタジエニル銅錯体及びその製造方法
JP2005060814A (ja) * 2002-12-03 2005-03-10 Jsr Corp ルテニウム化合物および金属ルテニウム膜の製造法
JP2006516031A (ja) * 2003-01-16 2006-06-15 アドバンスド テクノロジー マテリアルズ，インコーポレイテッド タンタル系材料の蒸着のための化学蒸着前駆体
JP2005079468A (ja) * 2003-09-02 2005-03-24 Jsr Corp ルテニウム−シリコン混合膜を形成する方法
JP2006037123A (ja) * 2004-07-22 2006-02-09 Toyoshima Seisakusho:Kk 薄膜用ｃｖｄ原料及びそれを用いて得られる薄膜

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012060428A1 (ja) 2010-11-02 2012-05-10 宇部興産株式会社 （アミドアミノアルカン）金属化合物、及び当該金属化合物を用いた金属含有薄膜の製造方法
US8871304B2 (en) 2010-11-02 2014-10-28 Ube Industries, Ltd. (Amide amino alkane) metal compound, method of manufacturing metal-containing thin film using said metal compound
WO2013150903A1 (ja) * 2012-04-04 2013-10-10 東京エレクトロン株式会社 成膜方法及び記憶媒体
WO2015190420A1 (ja) * 2014-06-09 2015-12-17 東ソー株式会社 コバルト錯体及びその製造方法、コバルト含有薄膜及びその作製方法
JP2016166166A (ja) * 2014-06-09 2016-09-15 東ソー株式会社 コバルト錯体及びその製造方法、コバルト含有薄膜及びその作製方法
JP2016183114A (ja) * 2015-03-25 2016-10-20 東ソー株式会社 コバルト錯体及びその製造方法、コバルト含有薄膜及びその作製方法
JP2017007975A (ja) * 2015-06-22 2017-01-12 東ソー株式会社 置換シクロペンタジエニルコバルト錯体及びその製造方法、コバルト含有薄膜及びその作製方法

Also Published As

Publication number Publication date
KR20090115197A (ko) 2009-11-04
CN101578390A (zh) 2009-11-11
JPWO2008111499A1 (ja) 2010-06-24
TW200902748A (en) 2009-01-16

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