WO2008105197A1 - フローセンサ - Google Patents

フローセンサ Download PDF

Info

Publication number
WO2008105197A1
WO2008105197A1 PCT/JP2008/050801 JP2008050801W WO2008105197A1 WO 2008105197 A1 WO2008105197 A1 WO 2008105197A1 JP 2008050801 W JP2008050801 W JP 2008050801W WO 2008105197 A1 WO2008105197 A1 WO 2008105197A1
Authority
WO
WIPO (PCT)
Prior art keywords
package
flat board
flow sensor
sensor chip
measurement target
Prior art date
Application number
PCT/JP2008/050801
Other languages
English (en)
French (fr)
Inventor
Yasuji Morita
Hiroshi Hatakeyama
Shigeru Aoshima
Isamu Warashina
Original Assignee
Yamatake Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yamatake Corporation filed Critical Yamatake Corporation
Priority to EP08703645A priority Critical patent/EP2128572A1/en
Priority to JP2009501150A priority patent/JPWO2008105197A1/ja
Priority to KR1020097012611A priority patent/KR101114304B1/ko
Priority to US12/529,120 priority patent/US20100089146A1/en
Priority to CN2008800064839A priority patent/CN101641576B/zh
Publication of WO2008105197A1 publication Critical patent/WO2008105197A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

パッケージを、センサチップ５を収納する角穴５ａが形成された平板基板２ａと、センサチップ５へ計測対象の気体を導入するためのパッケージ内流路となる孔部６が形成された平板基板２ｂと、パッケージ内流路と連通すると共に、パッケージの同一端面における計測対象の気体の入口３ａ及び出口３ｂとなる孔部が形成された平板基板２ｃとを積層して構成した。
PCT/JP2008/050801 2007-02-28 2008-01-22 フローセンサ WO2008105197A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
EP08703645A EP2128572A1 (en) 2007-02-28 2008-01-22 Flow sensor
JP2009501150A JPWO2008105197A1 (ja) 2007-02-28 2008-01-22 フローセンサ
KR1020097012611A KR101114304B1 (ko) 2007-02-28 2008-01-22 유량 센서
US12/529,120 US20100089146A1 (en) 2007-02-28 2008-01-22 Flow sensor
CN2008800064839A CN101641576B (zh) 2007-02-28 2008-01-22 流量传感器

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007049431 2007-02-28
JP2007-049431 2007-02-28

Publications (1)

Publication Number Publication Date
WO2008105197A1 true WO2008105197A1 (ja) 2008-09-04

Family

ID=39721037

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/050801 WO2008105197A1 (ja) 2007-02-28 2008-01-22 フローセンサ

Country Status (6)

Country Link
US (1) US20100089146A1 (ja)
EP (1) EP2128572A1 (ja)
JP (1) JPWO2008105197A1 (ja)
KR (1) KR101114304B1 (ja)
CN (1) CN101641576B (ja)
WO (1) WO2008105197A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010249625A (ja) * 2009-04-15 2010-11-04 Denso Corp 空気流量測定装置
JP2012517001A (ja) * 2009-02-04 2012-07-26 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング センサーを遊びなく組み込むための保持体
EP2406587B1 (en) * 2009-03-10 2020-11-18 Sensortechnics GmbH Semiconductor based flow sensing device with packaging

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110252882A1 (en) * 2010-04-19 2011-10-20 Honeywell International Inc. Robust sensor with top cap
US8356514B2 (en) 2011-01-13 2013-01-22 Honeywell International Inc. Sensor with improved thermal stability
JP5915026B2 (ja) * 2011-08-26 2016-05-11 住友大阪セメント株式会社 温度測定用板状体及びそれを備えた温度測定装置
FR3000215B1 (fr) 2012-12-21 2016-02-05 Aneolia Dispositif et procede de test d'un echantillon, en particulier de discrimination d'un gaz d'un echantillon
US10107662B2 (en) * 2015-01-30 2018-10-23 Honeywell International Inc. Sensor assembly
CN109073609B (zh) * 2016-06-30 2020-10-09 株式会社岛津制作所 流量控制器
US10757973B2 (en) * 2016-07-25 2020-09-01 Fontem Holdings 1 B.V. Electronic cigarette with mass air flow sensor
US10908006B2 (en) * 2019-02-19 2021-02-02 Siargo Ltd. Method for forming micromachined liquid flow sensor
CN112345707B (zh) * 2020-11-16 2021-10-29 湖南碧臣环境能源有限公司 气体测量设备
CN115231510B (zh) * 2022-07-21 2023-10-03 微纳感知(合肥)技术有限公司 一种气体流量计的mems芯片封装结构

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60220864A (ja) 1983-12-27 1985-11-05 株式会社山武 流速センサのハウジング
JP2002168669A (ja) 2000-12-04 2002-06-14 Ckd Corp 熱式流量計
JP2002340646A (ja) * 2001-05-11 2002-11-27 Horiba Ltd マスフローコントローラ用フローセンサおよびフローセンサの製造方法
JP2003194599A (ja) * 2001-12-27 2003-07-09 Hitachi Unisia Automotive Ltd 流量計測装置
JP2004340964A (ja) * 2003-05-13 2004-12-02 Berkin Bv 質量流量計
WO2005121718A1 (ja) 2004-06-10 2005-12-22 Yamatake Corporation 流量計
JP2006118929A (ja) 2004-10-20 2006-05-11 Yamatake Corp マイクロフローセンサ
JP2007033056A (ja) * 2005-07-22 2007-02-08 Yokogawa Electric Corp フローセンサ

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JPS63177023A (ja) * 1987-01-19 1988-07-21 Nippon Soken Inc 流量センサ
JPH06160215A (ja) * 1992-11-13 1994-06-07 Watanabe Shoko:Kk 圧力センサおよびその製造方法
US5798556A (en) * 1996-03-25 1998-08-25 Motorola, Inc. Sensor and method of fabrication
US7258003B2 (en) * 1998-12-07 2007-08-21 Honeywell International Inc. Flow sensor with self-aligned flow channel
KR200255999Y1 (ko) * 1999-05-03 2001-12-24 손문탁 적층형 모듈식 초소형 화학 분석기
EP1182432B1 (de) * 2000-08-23 2014-03-19 Sensirion Holding AG Flusssensor mit Gehäuse
JP3825242B2 (ja) * 2000-10-17 2006-09-27 株式会社山武 フローセンサ
US6591674B2 (en) * 2000-12-21 2003-07-15 Honeywell International Inc. System for sensing the motion or pressure of a fluid, the system having dimensions less than 1.5 inches, a metal lead frame with a coefficient of thermal expansion that is less than that of the body, or two rtds and a heat source
DE10111840C2 (de) * 2001-03-13 2003-06-05 Bosch Gmbh Robert Verfahren zur Vermeidung von Verschmutzungen auf einem Sensorchip und Verwendung eines Zusatzheizers auf einem Sensorchip
EP1365216B1 (en) * 2002-05-10 2018-01-17 Azbil Corporation Flow sensor and method of manufacturing the same
US7181963B2 (en) * 2004-06-30 2007-02-27 Codman & Shurtleff, Inc Thermal flow sensor having streamlined packaging
US7036369B2 (en) * 2004-06-30 2006-05-02 Codman & Shurtleff, Inc. Thermal flow sensor having recesses in a substrate
JP4120637B2 (ja) * 2004-11-30 2008-07-16 オムロン株式会社 流速測定装置
JP4636915B2 (ja) * 2005-03-18 2011-02-23 日立オートモティブシステムズ株式会社 空気流量測定装置
DE102005016449A1 (de) * 2005-04-11 2006-10-12 Robert Bosch Gmbh Beheizter Heißfilmluftmassenmesser
DE102005016447A1 (de) * 2005-04-11 2006-10-12 Robert Bosch Gmbh Verfahren zum Betrieb von Heißfilmluftmassenmessern
JP5052275B2 (ja) * 2007-09-20 2012-10-17 アズビル株式会社 フローセンサの取付構造

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60220864A (ja) 1983-12-27 1985-11-05 株式会社山武 流速センサのハウジング
JP2002168669A (ja) 2000-12-04 2002-06-14 Ckd Corp 熱式流量計
JP2002340646A (ja) * 2001-05-11 2002-11-27 Horiba Ltd マスフローコントローラ用フローセンサおよびフローセンサの製造方法
JP2003194599A (ja) * 2001-12-27 2003-07-09 Hitachi Unisia Automotive Ltd 流量計測装置
JP2004340964A (ja) * 2003-05-13 2004-12-02 Berkin Bv 質量流量計
WO2005121718A1 (ja) 2004-06-10 2005-12-22 Yamatake Corporation 流量計
JP2006118929A (ja) 2004-10-20 2006-05-11 Yamatake Corp マイクロフローセンサ
JP2007033056A (ja) * 2005-07-22 2007-02-08 Yokogawa Electric Corp フローセンサ

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012517001A (ja) * 2009-02-04 2012-07-26 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング センサーを遊びなく組み込むための保持体
US8869639B2 (en) 2009-02-04 2014-10-28 Robert Bosch Gmbh Mounting element for installing sensors without play
EP2406587B1 (en) * 2009-03-10 2020-11-18 Sensortechnics GmbH Semiconductor based flow sensing device with packaging
JP2010249625A (ja) * 2009-04-15 2010-11-04 Denso Corp 空気流量測定装置

Also Published As

Publication number Publication date
KR101114304B1 (ko) 2012-03-13
CN101641576B (zh) 2011-11-09
EP2128572A1 (en) 2009-12-02
KR20090086438A (ko) 2009-08-12
JPWO2008105197A1 (ja) 2010-06-03
US20100089146A1 (en) 2010-04-15
CN101641576A (zh) 2010-02-03

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