WO2008087902A1 - 硫酸の電解装置、電解方法及び基板の処理装置 - Google Patents
硫酸の電解装置、電解方法及び基板の処理装置 Download PDFInfo
- Publication number
- WO2008087902A1 WO2008087902A1 PCT/JP2008/050263 JP2008050263W WO2008087902A1 WO 2008087902 A1 WO2008087902 A1 WO 2008087902A1 JP 2008050263 W JP2008050263 W JP 2008050263W WO 2008087902 A1 WO2008087902 A1 WO 2008087902A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- sulfuric acid
- electrolysis
- chamber
- cathode
- anode
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B1/00—Electrolytic production of inorganic compounds or non-metals
- C25B1/01—Products
- C25B1/28—Per-compounds
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B1/00—Electrolytic production of inorganic compounds or non-metals
- C25B1/01—Products
- C25B1/28—Per-compounds
- C25B1/29—Persulfates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
Abstract
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200880000338XA CN101542020B (zh) | 2007-01-15 | 2008-01-11 | 硫酸的电解装置、电解方法和基板的处理装置 |
JP2008533807A JP4734416B2 (ja) | 2007-01-15 | 2008-01-11 | 硫酸の電解装置、電解方法及び基板の処理装置 |
US12/274,681 US8236161B2 (en) | 2007-01-15 | 2008-11-20 | Apparatus for electrolyzing sulfuric acid, method of performing electrolysis, and apparatus for processing a substrate |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007006017 | 2007-01-15 | ||
JP2007-006017 | 2007-01-15 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/274,681 Continuation US8236161B2 (en) | 2007-01-15 | 2008-11-20 | Apparatus for electrolyzing sulfuric acid, method of performing electrolysis, and apparatus for processing a substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008087902A1 true WO2008087902A1 (ja) | 2008-07-24 |
Family
ID=39635906
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/050263 WO2008087902A1 (ja) | 2007-01-15 | 2008-01-11 | 硫酸の電解装置、電解方法及び基板の処理装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8236161B2 (ja) |
JP (1) | JP4734416B2 (ja) |
KR (1) | KR101082812B1 (ja) |
CN (1) | CN101542020B (ja) |
TW (1) | TWI439571B (ja) |
WO (1) | WO2008087902A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011155336A1 (ja) * | 2010-06-07 | 2011-12-15 | 栗田工業株式会社 | 洗浄システムおよび洗浄方法 |
WO2012121270A1 (ja) * | 2011-03-08 | 2012-09-13 | クロリンエンジニアズ株式会社 | 硫酸電解装置及び硫酸電解方法 |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9142424B2 (en) * | 2010-06-07 | 2015-09-22 | Kurita Water Industries Ltd. | Cleaning system and cleaning method |
TW201207155A (en) * | 2010-08-11 | 2012-02-16 | Prometheus Energy Technology Co | Electrolysis device for producing oxyhydrogen gas |
US8992691B2 (en) | 2011-04-05 | 2015-03-31 | International Business Machines Corporation | Partial solution replacement in recyclable persulfuric acid cleaning systems |
US9831016B2 (en) * | 2012-11-29 | 2017-11-28 | Abb Schweiz Ag | Stripping structure and method for removing enamel insulation from lead ends |
JP5667674B1 (ja) * | 2013-08-20 | 2015-02-12 | サーモス株式会社 | 金属容器を洗浄する洗浄装置 |
JP6359925B2 (ja) * | 2014-09-18 | 2018-07-18 | 株式会社Screenホールディングス | 基板処理装置 |
JP6861039B2 (ja) * | 2016-03-30 | 2021-04-21 | 芝浦メカトロニクス株式会社 | 基板処理装置及び基板処理方法 |
EP3680364B1 (en) * | 2017-09-07 | 2022-01-05 | De Nora Permelec Ltd | Electrolytic device |
KR102346529B1 (ko) * | 2019-06-24 | 2021-12-31 | 세메스 주식회사 | 액 공급 유닛, 그리고 이를 가지는 기판 처리 장치 및 방법 |
KR102319966B1 (ko) * | 2019-12-31 | 2021-11-02 | 세메스 주식회사 | 액 공급 유닛, 기판 처리 장치, 그리고 기판 처리 장치를 이용한 기판 처리 방법 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH11269685A (ja) * | 1998-03-18 | 1999-10-05 | Permelec Electrode Ltd | 不溶性金属電極の製造方法及び該電極を使用する電解槽 |
JP2004532352A (ja) * | 2001-04-27 | 2004-10-21 | アイレンブルガー エレクトロリーゼ− ウント ウムヴェルトテヒニク ゲゼルシャフト ミット ベシュレンクテル ハフツング | 亜二チオン酸ナトリウム及びペルオキソ二硫酸ナトリウムを電気化学的に同時に製造する方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
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AT310100B (de) * | 1970-12-07 | 1973-09-10 | Hartkorn Karl Heinz | Verfahren zur Reinigung von wässerigen Flüssigkeiten, die mit störenden Stoffen belastet sind |
CA1059943A (en) * | 1976-07-20 | 1979-08-07 | Pierre L. Claessens | Electrolytically forming peroxosulfuric acid to oxidize organic material in sulfuric acid |
JP3277404B2 (ja) * | 1993-03-31 | 2002-04-22 | ソニー株式会社 | 基板洗浄方法及び基板洗浄装置 |
DE19954299A1 (de) | 1999-11-11 | 2001-05-17 | Eilenburger Elektrolyse & Umwelttechnik Gmbh | Verfahren zur gleichzeitigen elektrochemischen Herstellung von Natriumdithionit und Natriumperoxodisulfat |
JP2001192874A (ja) | 1999-12-28 | 2001-07-17 | Permelec Electrode Ltd | 過硫酸溶解水の製造方法 |
KR100684064B1 (ko) * | 2002-04-02 | 2007-02-16 | 페르메렉덴꾜꾸가부시끼가이샤 | 기능수, 및 이의 제조방법 및 제조장치 |
JP4194027B2 (ja) | 2002-12-05 | 2008-12-10 | 日本化学工業株式会社 | リチウム二次電池正極活物質用コバルト酸リチウムの製造方法 |
-
2008
- 2008-01-09 TW TW097100796A patent/TWI439571B/zh active
- 2008-01-11 JP JP2008533807A patent/JP4734416B2/ja active Active
- 2008-01-11 WO PCT/JP2008/050263 patent/WO2008087902A1/ja active Application Filing
- 2008-01-11 KR KR1020087030156A patent/KR101082812B1/ko active IP Right Grant
- 2008-01-11 CN CN200880000338XA patent/CN101542020B/zh active Active
- 2008-11-20 US US12/274,681 patent/US8236161B2/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11269685A (ja) * | 1998-03-18 | 1999-10-05 | Permelec Electrode Ltd | 不溶性金属電極の製造方法及び該電極を使用する電解槽 |
JP2004532352A (ja) * | 2001-04-27 | 2004-10-21 | アイレンブルガー エレクトロリーゼ− ウント ウムヴェルトテヒニク ゲゼルシャフト ミット ベシュレンクテル ハフツング | 亜二チオン酸ナトリウム及びペルオキソ二硫酸ナトリウムを電気化学的に同時に製造する方法 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011155336A1 (ja) * | 2010-06-07 | 2011-12-15 | 栗田工業株式会社 | 洗浄システムおよび洗浄方法 |
JP5751426B2 (ja) * | 2010-06-07 | 2015-07-22 | 栗田工業株式会社 | 洗浄システムおよび洗浄方法 |
WO2012121270A1 (ja) * | 2011-03-08 | 2012-09-13 | クロリンエンジニアズ株式会社 | 硫酸電解装置及び硫酸電解方法 |
JP5997130B2 (ja) * | 2011-03-08 | 2016-09-28 | デノラ・ペルメレック株式会社 | 硫酸電解装置及び硫酸電解方法 |
Also Published As
Publication number | Publication date |
---|---|
TW200844263A (en) | 2008-11-16 |
US20090078582A1 (en) | 2009-03-26 |
TWI439571B (zh) | 2014-06-01 |
JPWO2008087902A1 (ja) | 2010-05-06 |
KR101082812B1 (ko) | 2011-11-11 |
JP4734416B2 (ja) | 2011-07-27 |
CN101542020A (zh) | 2009-09-23 |
KR20090039676A (ko) | 2009-04-22 |
CN101542020B (zh) | 2011-02-16 |
US8236161B2 (en) | 2012-08-07 |
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