WO2008078770A1 - 力学量センサおよびその製造方法 - Google Patents

力学量センサおよびその製造方法 Download PDF

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Publication number
WO2008078770A1
WO2008078770A1 PCT/JP2007/074938 JP2007074938W WO2008078770A1 WO 2008078770 A1 WO2008078770 A1 WO 2008078770A1 JP 2007074938 W JP2007074938 W JP 2007074938W WO 2008078770 A1 WO2008078770 A1 WO 2008078770A1
Authority
WO
WIPO (PCT)
Prior art keywords
displacing
quantity sensor
mechanical quantity
manufacturing
same
Prior art date
Application number
PCT/JP2007/074938
Other languages
English (en)
French (fr)
Inventor
Akio Morii
Original Assignee
Dai Nippon Printing Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co., Ltd. filed Critical Dai Nippon Printing Co., Ltd.
Priority to EP07860167.1A priority Critical patent/EP2096407B1/en
Priority to US12/520,343 priority patent/US8216870B2/en
Priority to JP2008551132A priority patent/JP5176965B2/ja
Publication of WO2008078770A1 publication Critical patent/WO2008078770A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5769—Manufacturing; Mounting; Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
    • G01P2015/0842—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass the mass being of clover leaf shape

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Manufacturing & Machinery (AREA)
  • Pressure Sensors (AREA)
  • Gyroscopes (AREA)

Abstract

　力学量センサが、開口を有する固定部と、この開口内に配置され前記固定部に対して変位する変位部と、前記固定部と前記変位部とを接続する接続部とを有する第１の構造体と、前記変位部に接合される重量部と、前記固定部に接合される台座とを有し、前記第１の構造体に積層して配置される第２の構造体と、前記変位部との対向面に配置され、かつＡｌとＮｄとを含む導電性材料で構成される第１の駆動用電極を有し、記固定部に接続されて前記第１の構造体に積層配置される第１の基体と、前記重量部との対向面に配置され、かつ前記導電性材料で構成される第２の駆動用電極を有し、前記台座に接続されて前記第２の構造体に積層配置される第２の基体とを具備する。
PCT/JP2007/074938 2006-12-27 2007-12-26 力学量センサおよびその製造方法 WO2008078770A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP07860167.1A EP2096407B1 (en) 2006-12-27 2007-12-26 Angular velocity and/or acceleration sensor and method for manufacturing the same
US12/520,343 US8216870B2 (en) 2006-12-27 2007-12-26 Mechanical quantity sensor and method of manufacturing the same
JP2008551132A JP5176965B2 (ja) 2006-12-27 2007-12-26 力学量センサの製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006-352488 2006-12-27
JP2006352488 2006-12-27

Publications (1)

Publication Number Publication Date
WO2008078770A1 true WO2008078770A1 (ja) 2008-07-03

Family

ID=39562560

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/074938 WO2008078770A1 (ja) 2006-12-27 2007-12-26 力学量センサおよびその製造方法

Country Status (4)

Country Link
US (1) US8216870B2 (ja)
EP (1) EP2096407B1 (ja)
JP (1) JP5176965B2 (ja)
WO (1) WO2008078770A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010060337A (ja) * 2008-09-02 2010-03-18 Dainippon Printing Co Ltd 力学量センサおよび積層体の製造方法
JP2010141088A (ja) * 2008-12-11 2010-06-24 Dainippon Printing Co Ltd 封止型デバイス、物理量センサ、その製造方法、及びその内部圧力制御方法

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JP5724342B2 (ja) 2009-12-10 2015-05-27 大日本印刷株式会社 パターン配置方法並びにシリコンウェハ及び半導体デバイスの製造方法
WO2016015029A1 (en) * 2014-07-24 2016-01-28 Spec Sensors, Llc Electrochemical sensors and packaging and related methods
US10761046B2 (en) 2010-11-24 2020-09-01 Sensirion Ag Electrochemical sensors and packaging and related methods
JP5541306B2 (ja) 2011-05-27 2014-07-09 株式会社デンソー 力学量センサ装置およびその製造方法
US10108649B2 (en) * 2014-02-25 2018-10-23 Internatonal Business Machines Corporation Early exit from table scans of loosely ordered and/or grouped relations using nearly ordered maps

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US6266862B1 (en) 1997-03-14 2001-07-31 Chicago Bridge & Iron Company Weld seam opening regulator for cylindrical tank building process
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JP2006344573A (ja) * 2005-05-13 2006-12-21 Gunma Prefecture 加速度スイッチ及び電子装置

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010060337A (ja) * 2008-09-02 2010-03-18 Dainippon Printing Co Ltd 力学量センサおよび積層体の製造方法
JP2010141088A (ja) * 2008-12-11 2010-06-24 Dainippon Printing Co Ltd 封止型デバイス、物理量センサ、その製造方法、及びその内部圧力制御方法

Also Published As

Publication number Publication date
EP2096407B1 (en) 2016-11-16
EP2096407A1 (en) 2009-09-02
EP2096407A4 (en) 2012-02-29
US8216870B2 (en) 2012-07-10
JPWO2008078770A1 (ja) 2010-04-30
US20100083755A1 (en) 2010-04-08
JP5176965B2 (ja) 2013-04-03

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