WO2008044493A1 - Capteur d'hydrogène - Google Patents

Capteur d'hydrogène Download PDF

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Publication number
WO2008044493A1
WO2008044493A1 PCT/JP2007/068979 JP2007068979W WO2008044493A1 WO 2008044493 A1 WO2008044493 A1 WO 2008044493A1 JP 2007068979 W JP2007068979 W JP 2007068979W WO 2008044493 A1 WO2008044493 A1 WO 2008044493A1
Authority
WO
WIPO (PCT)
Prior art keywords
hydrogen
hydrogen sensor
detection
protective film
film
Prior art date
Application number
PCT/JP2007/068979
Other languages
English (en)
Japanese (ja)
Inventor
Katsuhiko Fukui
Toshinori Hirayama
Original Assignee
Mikuni Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mikuni Corporation filed Critical Mikuni Corporation
Publication of WO2008044493A1 publication Critical patent/WO2008044493A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
    • C01B3/50—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification
    • C01B3/501—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by diffusion
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
    • C01B2203/04—Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
    • C01B2203/0405—Purification by membrane separation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/04—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids
    • H01M8/04082—Arrangements for control of reactant parameters, e.g. pressure or concentration
    • H01M8/04089—Arrangements for control of reactant parameters, e.g. pressure or concentration of gaseous reactants
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T90/00—Enabling technologies or technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02T90/40—Application of hydrogen technology to transportation, e.g. using fuel cells

Definitions

  • the present invention relates to a hydrogen sensor that detects hydrogen gas, a hydrogen gas detection device that includes the hydrogen sensor, a hydrogen gas detection system that includes the hydrogen sensor, and a reformer that includes the hydrogen sensor.
  • This hydrogen sensor is used to detect leaks of hydrogen gas used in fuel cells for fuel vehicles, to detect leaks of hydrogen gas used in fuel cells for home or business use, and to control hydrogen concentration. Suitable for applications such as detection of hydrogen concentration. Background art
  • hydrogen gas is used as fuel.
  • the hydrogen gas concentration is monitored and controlled by installing a hydrogen sensor in the pipe.
  • Hydrogen sensors are used in fuel cell systems used in fuel cell vehicles to control the hydrogen gas concentration. Examples of fuel cell systems for automobiles equipped with a hydrogen sensor are described in Patent Documents 1 and 2, for example.
  • hydrocarbon gas such as methane (CH) and propane (C H)
  • a hydrogen sensor is arranged in a pipe near the reformer for the purpose of controlling the hydrogen gas concentration (Patent Document 3).
  • the hydrogen sensor disclosed in Patent Documents ! to 3 uses a solid electrolyte for the element.
  • the hydrogen sensors disclosed in Patent Documents 1 to 3 satisfy the required level with respect to the heat resistance required for household or commercial hydrogen sensors.
  • this hydrogen sensor shows a certain level of sensitivity even with other gases other than hydrogen gas. Therefore, there is a problem in the detection selectivity of hydrogen gas!
  • Patent Document 4 in a hydrogen sensor used in an atmosphere containing miscellaneous gases other than hydrogen, hydrogen gas detection selectivity is provided by providing a predetermined metal oxide on the surface of the solid electrolyte. It is described that it will be higher. However, Patent Document 4 does not disclose the detailed structure of a hydrogen sensor that requires high airtightness! /.
  • Patent Document 1 Japanese Patent No. 3705994 (Claims, Fig. 1)
  • Patent Document 2 Japanese Patent Laid-Open No. 2003-192309 (Claims)
  • Patent Document 3 Japanese Patent Application Laid-Open No. 2004-327145 (Claims)
  • Patent Document 4 JP-A-10-123093 (Claims)
  • the present invention has been made in view of the above circumstances, and an object of the present invention is to be used in an apparatus or a pipe that handles high-concentration hydrogen gas such as a fuel cell system, and a low-concentration gas. It is an object of the present invention to provide a hydrogen sensor that can detect leakage and the like and can be easily attached to each device, a hydrogen gas detection device equipped with the hydrogen sensor, a hydrogen gas detection system, or a reformer. Means for solving the problem
  • a cylindrical protective cap that is attached to a peripheral edge on one end side of the sensor main body, and the protective cap has a detection gas introduction hole at a head thereof and a filter is attached to the detection gas introduction hole. And a protective cap
  • a hydrogen sensor provided with an airtight member on the outer periphery of the closing plug that prevents the detection gas entering the protective cap from the detection gas introduction hole from leaking to the outside from the other end side of the sensor main body.
  • a hydrogen sensor that is mounted and airtightly fixed to a connecting member that holds the hydrogen sensor element substrate on the closing plug.
  • the hydrogen sensor element substrate has a hydrogen detection part formed on one end side of the substrate and an electrode part connected to the connection member on the other end side.
  • the hydrogen sensor element substrate includes a detection film made of a rare earth metal formed on one end of one surface of the insulating substrate, and conduction means for electrically connecting both edges of the detection film and the conductive clip.
  • a hydrogen sensor element substrate is an insulating substrate, a rare earth metal force detection film formed on the insulating substrate, and a protective film formed on the detection film, wherein the hydrogen is contained in the ceramic material.
  • a protective film in which permeable metal particles are dispersed, and the protective film formed separately on the protective film The hydrogen sensor according to [1], further comprising: a pair of electrodes electrically connected to the detection film via the electrode.
  • a hydrogen sensor element substrate is embedded between a ceramic substrate, a lower protective film and an upper protective film that are sequentially formed on the ceramic substrate, and the upper protective film and the lower protective film. And a pair of electrodes formed on the surface of the upper protective film and in the vicinity of both edges of the hydrogen detecting film, wherein at least the upper protective film is in a ceramic material.
  • the connecting member S comprising a cylindrical pin fixed to the closing plug with an airtight sealing glass, and a conductive clip joined by inserting into the cylindrical pin and force squeezing
  • a hydrogen gas detector comprising the hydrogen sensor according to any one of [1] to [11].
  • a hydrogen gas detection system comprising the hydrogen sensor according to any one of [1] to [11]
  • a reformer comprising the hydrogen sensor according to any one of [1] to [11].
  • the hydrogen sensor of the present invention has high airtightness, it can be easily attached to a device or piping that handles high-concentration hydrogen gas, such as a fuel cell system, and can be used safely.
  • the hydrogen sensor When a hydrogen sensor element having a protective film in which hydrogen permeable metal particles are dispersed in a ceramic material is used as the hydrogen sensor element, the hydrogen sensor has high hydrogen selectivity and high durability. .
  • FIG. 1 is a side sectional view showing an example of a hydrogen sensor of the present invention.
  • FIG. 2 is a plan view showing an example of a hydrogen detection unit incorporated in the hydrogen sensor of the present invention, (A) is a front side plan view, and (B) is a back side plan view.
  • FIG. 3 is a front cross-sectional view of the hydrogen detector in FIG. 2.
  • FIG. 4 is an explanatory view showing an example of a state in which the hydrogen sensor of the present invention is attached to a pipe for measuring hydrogen concentration.
  • FIG. 5 is a configuration diagram showing an example of a fuel cell system incorporating the hydrogen sensor of the present invention.
  • FIG. 1 is a side sectional view showing an example of the hydrogen sensor of the present invention.
  • 2 is a hydrogen sensor.
  • 4 is a sensor main body and is formed in a cylindrical shape having an internal hole 3.
  • the sensor main body 4 is made of a metal such as stainless steel.
  • a screw 8 is formed on the outer periphery of one end side 6 of the sensor main body 4.
  • the hydrogen sensor 2 is attached to a pipe or the like using the screw 8.
  • the inner diameter of the inner hole 3 on the other end side 10 of the sensor main body 4 is formed larger than the inner diameter of the inner hole 3 on the one end side 6.
  • a headed cylindrical protective cap 12 is attached to the outer edge of the one end side 6 of the sensor main body 4.
  • the head 14 of the protective cap 12 is provided with a detection gas introduction hole 16, and a filter 18 is attached to the detection gas introduction hole 16.
  • a retainer 24 having a hydrogen sensor element substrate insertion groove 22 formed at the center thereof is fixed to the opening 20 on one end side 6 of the sensor main body 4.
  • a bottomed cylindrical plug 26 is inserted in the inner hole 3 on the other end side 10 of the sensor main body 4.
  • An airtight member insertion groove 28 is formed on the outer periphery of the closing plug 26 along the circumferential direction, and an airtight member 30 having elasticity is inserted into the airtight member insertion groove 28.
  • the hermetic member 30 is preferably an O-ring, an X-ring, or a fluoro rubber packing with a deformed cross section whose cross section is not intended.
  • a plurality (four in this example) of connecting members 32 and 33 are attached to the closing plug 26 so as to penetrate the bottom 34 of the closing plug 26.
  • the two connecting members 32 and 33 are shown, and the other two connecting members are behind them (the same applies hereinafter).
  • the connecting members 32 and 33 are made of metal conductive clips 36 and 37 formed in a hook shape and cylindrical pins 38 and 39 and force.
  • the base of the conductive clips 36, 37 is inserted from one end side of the cylindrical pins 38, 39 (the upper end side in the figure), and the tip of the base is the base insertion side of the cylindrical pins 38, 39 To the other end (in this figure, the bottom end)!
  • the conductive clips 36 and 37 are fixed to the cylindrical pins 38 and 39 by force-squeezing the lower portions of the cylindrical pins 38 and 39 to form force-squeezing portions 40 and 41.
  • connection members 32 and 33 are fixed to the bottom 34 of the closing plug 26 in an airtight manner.
  • the connecting members 32 and 33 (the cylindrical pins 38 and 39 are fixed by attaching the airtight sealing glasses 44 and 45 and attaching them to the bottom.
  • the lower ends of the cylindrical pins 38, 39 are formed in a closed structure in order to prevent the detection gas from leaking.
  • Lead wires 42 and 43 are connected to the vicinity of the other ends of the cylindrical pins 38 and 39 by a technique such as welding.
  • [0039] 46 is a ceramic insulator filled in the closing plug 26.
  • Reference numeral 48 denotes a hydrogen sensor element substrate inserted into the sensor main body 4, which is inserted into the conductive clip 36 and fixed through the hydrogen sensor element substrate insertion groove 22 of the retainer 24.
  • Reference numeral 56 denotes a support for the hydrogen sensor element substrate 48 formed in the lower part of the retainer 24.
  • Reference numeral 50 denotes a protective metal fitting, which is formed in a cylindrical shape having the same outer diameter as the outer diameter of the other end side 10 of the sensor main body 4.
  • the protective metal fitting 50 is fixed to the other end side 10 of the sensor main body 4 by force squeezing the metal outer cylinder 52.
  • 54 is a grommet inserted inside the protective metal fitting 50.
  • a hydrogen detector 58 is formed on one surface of the hydrogen sensor element substrate 48 that protrudes outward (upward in the figure) from the sensor main body 4 through the retainer 24 on the front side in the protruding direction.
  • an electrode part 60 is formed on the other end side (the lower end side in the figure) of the hydrogen sensor element substrate 48. The electrode portion 60 and the conductive clip 36 are electrically connected.
  • FIG. 2 is a schematic plan view showing an example of the hydrogen detector 58 formed on the front end side (upper side in FIG. 1) of the hydrogen sensor element substrate 48 incorporated in the hydrogen sensor of the present invention.
  • ( ⁇ ) is a front plan view
  • ( ⁇ ) is a back plan view.
  • FIG. 3 is a schematic front sectional view of the hydrogen detector shown in FIG.
  • reference numeral 64 denotes a hydrogen gas detection film made of a rare earth metal, which is formed on the surface on the front side of the insulating substrate 62.
  • Conductive means 66 and 67 for connecting the detection film 64 and the conductive clip are formed on both edge portions of the detection film 64.
  • the conductive means 66 and 67 can be formed of a metal thin film or the like.
  • the electric resistance value of the detection film 64 changes.
  • the change in the resistance value of the detection film 64 is taken out of the hydrogen sensor as an electric signal through the conductive means 66, 67, the two electrode portions 60, the two conductive clips 36, and the two lead wires 42, respectively. After that, it is converted to a hydrogen concentration and displayed on a display unit (not shown).
  • a heater 68 formed of a conductive metal in a zigzag manner, and conductive means 70 and 71 for connecting the heater 68 and the conductive clip 37. It is formed.
  • the electric power supplied to the heater 68 is supplied via the two lead wires 43, the two conductive clips 37, and the conduction means 70 and 71.
  • the heater 68 heats the hydrogen detector 58. By heating the hydrogen detector 58 to an arbitrary temperature by the heater 68, it is possible to detect hydrogen gas stably without being affected by the ambient temperature.
  • FIG. 3 The configuration shown in FIG. 3 is preferable as the hydrogen detection unit.
  • 58 is a hydrogen detector.
  • a lower protective film 78 made of insulating ceramics is formed on one surface (the upper surface in the figure) of the insulating substrate 62.
  • a detection film 64 made of a rare earth metal is formed on the upper surface of the lower protective film 78.
  • An upper protective film 72 made of insulating ceramic is laminated on the upper surface of the detection film 64 so as to cover the entire surface of the detection film 64.
  • the upper protective film 72 is formed by dispersing hydrogen permeable metal particles 76 in an insulating ceramic material 74.
  • a pair of conduction means 66, 67 formed apart from each other is formed on the upper protective film 72. These conduction means 66 and 67 are electrically connected to the detection film 64 through the upper protective film 72.
  • 68 is a heater.
  • the heater portion 82 is formed by the heater 68 and a glass overcoat 80 (for insulation) laminated on the heater 68.
  • the glass overcoat 80 is also preferably formed on the upper surfaces of the conduction means 70 and 71 for connecting the heater 68 and the conductive clip.
  • an insulating substrate used for the hydrogen detection unit a glass plate, a ceramic plate, or a single unit is used. A crystal plate is preferred.
  • Ceramic materials constituting the upper protective film 72 and the lower protective film 62 are AlNx ⁇ AIO X, SiNx and SiOx (however, 0.5 ⁇ x ⁇ 1, 0.8.8 ⁇ x ⁇ 1.5, 0 7 ⁇ x ⁇ 1. 3, 1
  • the hydrogen permeable metal particles dispersed in the upper protective film 72 are preferably palladium (Pd), platinum (Pt), niobium (Nb), vanadium (V), tantalum (Ta), or the like.
  • the hydrogen-permeable metal particles dispersed in the protective film preferably have a particle size of 1 to 10 m, preferably 2 to 6 111 forces.
  • the content of the hydrogen permeable metal particles in the upper protective film 72 is preferably 20 to 70% by mass.
  • the resistance value between the electrodes of this protective film is preferably 10 to 100000 ⁇ .
  • the thickness of the protective film is preferably 5 to;! OOnm.
  • the detection film 64 yttrium, cerium or lanthanum is preferred, and the thickness is preferably 5 to 10 OOnm.
  • the resistance value between the electrodes of this detection film is preferably 0.
  • the conducting means 66, 67, 70, 71 are preferably made of a material such as gold, platinum, palladium, titanium, aluminum, copper, or silver.
  • the hydrogen detector can be manufactured using a sputtering method, a gas phase growth method, or the like.
  • the protective film 78 is provided between the insulating substrate 62 and the detection film 64.
  • the hydrogen detection unit is not limited to the above configuration, and may be a configuration in which the protective layer 78 is omitted.
  • the detection film 64 is isolated from the external environment by the protective film (and the insulating substrate), so that it does not come into direct contact with the outside air. Therefore, the sensor element has less harmful effects due to non-hydrogen components such as reducing gas and water vapor and deterioration of the detection film due to hydrogen, resulting in high durability of the hydrogen sensor element substrate.
  • the detection film formed on the upper surface has a large surface area.
  • hydrogen gas can be detected with high sensitivity. That is, against hydrogen gas Responsiveness can be improved.
  • the method for measuring the surface roughness Ra is defined in JIS B0601-2001.
  • FIG. 4 is a conceptual diagram showing a case where the hydrogen sensor of the present invention is attached to a pipe and the hydrogen concentration in the pipe is measured.
  • 2 is a hydrogen sensor.
  • the metal gasket 86 is arranged on the seat surface 84 of 4 and fixed by screwing the threaded portion 8 of the sensor main body 4 into the screw hole 90 of the piping wall 88.
  • the upper part of the pipe wall 88 shows the inside of the pipe.
  • a detection gas containing hydrogen gas flows inside the pipe.
  • the lower side of the pipe wall 88 indicates the atmosphere side.
  • FIG. 5 is a schematic configuration diagram showing an example of a fuel cell system incorporating the hydrogen sensor of the present invention.
  • a hydrogen sensor 98 is installed between the hydrogen supply line 96 connecting the reformer 92 and the fuel cell 94.
  • the hydrogen concentration in the fuel cell system is preferably managed including the surplus hydrogen remaining in the fuel cell 94.
  • 100 is a fuel supply source
  • 102 is a water supply source
  • 104 is an air supply source
  • 106 is an exhaust gas exhaust line
  • 108 is a surplus hydrogen return line
  • 110 is output power.
  • a high-frequency magnetron sputtering apparatus was used to fabricate the hydrogen detector shown in FIG. 2 on a ceramic substrate made of an alumina material having a length of 50.8 mm, a width of 50.8 mm, and a thickness of 0.38 mm.
  • a ceramic substrate, an yttrium target, and an aluminum target with a palladium chip placed on the upper surface thereof were placed in a high-frequency magnetron sputtering apparatus.
  • the inside of the apparatus to 4 X 10_ 5 Pa was vacuum.
  • argon gas was introduced into the apparatus (9.3 ⁇ 10— ⁇ a), and sputtering was performed for 1 minute using an yttrium target at room temperature.
  • a thin film (detection film) 3 mm long and 4.2 mm wide and 30 nm thick was formed on the ceramic substrate.
  • argon gas and nitrogen gas (volume ratio 85:15 Pa) were introduced into the apparatus, and the pressure was 9 ⁇ 3 X Sputtering was performed for 1.5 minutes using an aluminum target with a palladium chip mounted at 10 _ 1 Pa at room temperature.
  • a protective film having a thickness of lOnm was formed on the detection film.
  • the Pd content in the protective film was 40% by mass.
  • a mask having a pattern of element electrodes was placed on the protective film, and argon gas was introduced into the apparatus.
  • a pair of conduction means having a gold thin film force was formed on the protective film by performing sputtering for 3 minutes using a gold target at a pressure of 9 ⁇ 3 ⁇ 10 — 1 Pa at room temperature.
  • the formed conduction means had a thickness of 200 nm.
  • the distance between the two conducting means formed on the protective film was 3.4 mm.
  • the resistance value of the Y thin film was 320 ⁇
  • the resistance value of the protective film was 1000 ⁇ .
  • a heater shown in Fig. 2 (B) was formed on the back surface of the ceramic substrate using a conductive conductive paint of platinum. In addition, two conduction means were connected to the heater.
  • the obtained hydrogen sensor element substrate was inserted into the sensor main body, and the lower part of the sensor main body was sandwiched between the conductive clips. As a result, the heater and the detection film were electrically connected to the conductive clip through the conduction means.

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

L'invention porte sur un capteur d'hydrogène (2) qui comprend : un corps principal de capteur tubulaire (4); un capuchon de protection (12) appliqué sur le bord circonférentiel du corps principal de capteur sur un côté d'extrémité de ce dernier, lequel capuchon est percé d'un trou (16) permettant d'introduire un gaz de détection auquel est attaché un filtre (18); un bouchon de fermeture (26) à fond tubulaire inséré dans un trou (10) formé dans le corps principal de capteur de l'autre côté d'extrémité de ce dernier; et un substrat d'élément capteur d'hydrogène (48) soutenu par le bouchon de fermeture; un élément étanche aux gaz (30) étant attaché à la circonférence extérieure du bouchon de fermeture et le bouchon de fermeture étant équipé d'un élément de raccordement (32) qui permet de fixer de façon hermétique le substrat d'élément de capteur d'hydrogène.
PCT/JP2007/068979 2006-10-10 2007-09-28 Capteur d'hydrogène WO2008044493A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006-276973 2006-10-10
JP2006276973 2006-10-10

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WO2008044493A1 true WO2008044493A1 (fr) 2008-04-17

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115064723A (zh) * 2022-06-30 2022-09-16 北京朔景新能源科技有限公司 用于燃料电池的密封件及密封结构
WO2022207176A1 (fr) * 2021-03-30 2022-10-06 Robert Bosch Gmbh Module de diagnostic, système de pile à combustible doté de module de diagnostic et utilisation du module de diagnostic dans un système de pile à combustible

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5461594A (en) * 1977-10-25 1979-05-17 Nippon Soken Gas constituent detector
JPS58156845A (ja) * 1982-02-26 1983-09-17 ロ−ベルト・ボツシユ・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング ガスセンサ−
JPS6031656U (ja) * 1983-08-10 1985-03-04 株式会社富士通ゼネラル 湿度センサー
JPH02146363U (fr) * 1989-05-15 1990-12-12
JPH08254515A (ja) * 1995-03-16 1996-10-01 Figaro Eng Inc ガスセンサ
JPH11326257A (ja) * 1998-05-21 1999-11-26 Kobe Steel Ltd 薄膜ガスセンサ
JP2000065783A (ja) * 1998-06-11 2000-03-03 Nippon Soken Inc 防爆型ガスセンサ
JP2003279522A (ja) * 2002-03-20 2003-10-02 Mitsubishi Heavy Ind Ltd 水素ガス検出装置及びその製造方法
JP2005274559A (ja) * 2004-02-27 2005-10-06 Mikuni Corp 水素センサー及びその製造方法

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5461594A (en) * 1977-10-25 1979-05-17 Nippon Soken Gas constituent detector
JPS58156845A (ja) * 1982-02-26 1983-09-17 ロ−ベルト・ボツシユ・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング ガスセンサ−
JPS6031656U (ja) * 1983-08-10 1985-03-04 株式会社富士通ゼネラル 湿度センサー
JPH02146363U (fr) * 1989-05-15 1990-12-12
JPH08254515A (ja) * 1995-03-16 1996-10-01 Figaro Eng Inc ガスセンサ
JPH11326257A (ja) * 1998-05-21 1999-11-26 Kobe Steel Ltd 薄膜ガスセンサ
JP2000065783A (ja) * 1998-06-11 2000-03-03 Nippon Soken Inc 防爆型ガスセンサ
JP2003279522A (ja) * 2002-03-20 2003-10-02 Mitsubishi Heavy Ind Ltd 水素ガス検出装置及びその製造方法
JP2005274559A (ja) * 2004-02-27 2005-10-06 Mikuni Corp 水素センサー及びその製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022207176A1 (fr) * 2021-03-30 2022-10-06 Robert Bosch Gmbh Module de diagnostic, système de pile à combustible doté de module de diagnostic et utilisation du module de diagnostic dans un système de pile à combustible
CN115064723A (zh) * 2022-06-30 2022-09-16 北京朔景新能源科技有限公司 用于燃料电池的密封件及密封结构
CN115064723B (zh) * 2022-06-30 2023-12-26 北京朔景新能源科技有限公司 用于燃料电池的密封件及密封结构

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