WO2007105390A1 - 電子線発生装置 - Google Patents
電子線発生装置 Download PDFInfo
- Publication number
- WO2007105390A1 WO2007105390A1 PCT/JP2007/052207 JP2007052207W WO2007105390A1 WO 2007105390 A1 WO2007105390 A1 WO 2007105390A1 JP 2007052207 W JP2007052207 W JP 2007052207W WO 2007105390 A1 WO2007105390 A1 WO 2007105390A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- electron beam
- window
- electron
- frame member
- beam generator
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
- H01J33/02—Details
- H01J33/04—Windows
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K5/00—Irradiation devices
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K5/00—Irradiation devices
- G21K5/04—Irradiation devices with beam-forming means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/061—Construction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/063—Electron sources
- H01J2237/06308—Thermionic sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/16—Vessels
- H01J2237/164—Particle-permeable windows
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/112—Non-rotating anodes
- H01J35/116—Transmissive anodes
Definitions
- the present invention relates to an electron beam generator.
- Patent Document 1 discloses an irradiation window of an electron beam irradiation apparatus including a window material (window foil).
- Figure 12 shows the configuration of this irradiation window.
- the window foil 101 is sandwiched between a grid window 102 having an opening for allowing electrons e to pass through and a foil pressing plate 103, and is fixed by a bolt 104.
- a gap between the window foil 101 and the grid window 102 is sealed with an O-ring 105.
- the grid window 102 is held by a window holder 106.
- the window holder 106 is attached to the vacuum channel 108 with bolts 107.
- the window holder 106 and the vacuum chamber 108 are sealed with an O-ring 109.
- a space between the foil pressing plate 103 and the window holder 106 is sealed with an elastic packing 110.
- Patent Document 1 Japanese Patent Laid-Open No. 9-203800
- the window foil 101 is sandwiched between the grid window 102 and the foil pressing plate 103 and fixed by bolts 104.
- an O-ring 105 is required for hermetically sealing the gap between the window foil 101 and the grid window 102 (or foil pressing plate 103).
- the O-ring 105 has elastic body force such as grease, and the window foil 101 becomes high temperature when irradiated with an electron beam. Therefore, when the O-ring 105 is disposed so as to contact the window foil 101, the O-ring 105 The deterioration of the ring 105 is accelerated, and it becomes difficult to maintain the vacuum state of the vacuum chamber 108 for a long time.
- the window material provided in the electron beam generator is formed as thin as possible (currently about several ⁇ to 10 / ⁇ m) in order to increase the transmittance of the electron beam. But because of this thinness, When manufacturing the electron beam generator or replacing the window material, it is difficult to attach the window material to the electron beam generator. If the o-ring 105 is disposed so as to contact the window foil 101 as in the case of the irradiation window 100 described above, the window foil 101 may be damaged due to non-uniform stress generated in the window foil 101 due to the pressure for sealing. is there. In particular, when the window foil 101 and the O-ring 105 are pressed by the bolt 104 as in the irradiation window 100, the window foil 101 is likely to be damaged because nonuniform stress is easily generated in the window foil 101.
- the present invention has been made in view of the above problems, and an object of the present invention is to provide an electron beam generator that can maintain a vacuum state for a longer time and can reduce damage to window materials.
- an electron beam generator allows an electron gun having an electron emission member that emits an electron beam, a container that accommodates the electron emission member, and an electron beam to pass therethrough.
- a frame member that is detachably attached to the container, and a window member that is joined to the frame member so as to close the electron passage hole in an airtight manner and transmits an electron beam.
- the window member is joined to the frame member so as to close the electron passage hole in an airtight manner. Therefore, an elastic sealing member such as an O-ring is not required between the frame material and the window material, and the vacuum state inside the container can be maintained for a longer time. Furthermore, since the frame material is detachably attached to the container, the window material and the frame material can be attached without applying stress to the window material when manufacturing the electron beam generator or replacing the window material. it can. Therefore, according to the electron beam generator described above, non-uniform stress on the window material can be almost eliminated, so that damage to the window material can be effectively reduced.
- the electron beam generator further includes a sealing member that is provided in a gap between the frame member and the container and hermetically seals the gap, and a groove for accommodating the sealing member is provided on the container side. May be formed!
- the groove force for accommodating the O-ring 109 for sealing between the window holder 106 and the vacuum chamber 108 is formed on the window holder 106 side.
- the heat generated in the window material during electron beam irradiation is easily transferred to the O-ring, and the O-ring having an elastic material force such as grease easily deteriorates.
- the window material may be brazed to the frame material.
- a window material can be suitably joined with respect to a frame material, and between a window material and a frame material can be made airtight.
- the electron beam generator further includes a fixing member that has an opening for allowing an electron beam to pass therethrough and sandwiches the window material with the frame material, and the fixing member is attached to the window material and the frame material. It may be brazed. Thereby, a window material can be reliably joined with respect to a frame material, and airtightness can be improved.
- the frame member has a concave portion including one end of the electron passage hole on the bottom surface, and the fixing member is disposed on the bottom surface. It is preferable that there is a gap between the side wall and the side surface of the fixing member.
- the position of the fixing member is liable to shift due to melting.
- the clearance fits in the clearance by providing a clearance between the side wall of the recess of the frame material and the side surface of the fixing member. Since the fixing member can be positioned using the shape jig, the center of the opening of the fixing member and the center of the electron passage hole of the frame member can be easily aligned.
- the fixing member is preferably spot welded to the frame member.
- the position of the fixing member is likely to shift due to melting of the brazing material. Therefore, if the fixing member is spot-welded to the frame material and temporarily fixed before brazing, the fixing member can be prevented from being displaced due to melting of the brazing material.
- the center of the opening and the center of the electron passage hole of the frame material can be accurately aligned.
- the frame member may be screwed to the container.
- the electron beam generator may further include a pressing member that is screwed into the container while pressing the frame member.
- the frame member may be screwed into the container.
- the width of the electron passage hole on the container side may be enlarged in a taper shape toward the inside of the container.
- the frame material is joined to the window material, heat from the window material is easily transferred to the frame material.
- the container may have a step portion for positioning the frame member.
- the detachable frame member can be easily attached to the container, and the positional displacement of the window member with respect to the emission axis of the electron beam can be reliably prevented.
- FIG. 1 is a side sectional view showing a configuration of a first embodiment of an electron beam generator according to the present invention.
- FIG. 2 is a side cross-sectional view taken along line II of the electron beam generator shown in FIG.
- FIG. 3 is a side sectional view showing the configuration of the window unit of the first embodiment and its vicinity, and an enlarged sectional view of the main part of the window unit.
- FIG. 4 is a plan view showing the configuration of the window unit.
- FIG. 5 is a cross-sectional view showing a process of joining a frame member, a window member, and a fixing member to each other by melting the brazing material.
- FIG. 6 is a cross-sectional view showing first to second modifications of the first embodiment.
- FIG. 7 is a cross-sectional view showing third to fourth modifications of the first embodiment.
- FIG. 8 is a cross-sectional view showing a configuration of a second embodiment of the electron beam generator according to the present invention.
- FIG. 9 is a plan view of the electron beam generator shown in FIG.
- FIG. 10 is a plan view showing the configuration of the window unit of the second embodiment.
- FIG. 11 is a side sectional view taken along line II-II of the window unit shown in FIG.
- FIG. 12 is a diagram showing a configuration of an irradiation window of a conventional electron beam generator.
- FIG. 1 is a side sectional view showing a configuration of a first embodiment of an electron beam generator according to the present invention.
- FIG. 2 is a side sectional view taken along line II of the electron beam generator shown in FIG.
- the electron beam generator la of the present embodiment includes an electron gun 2 that emits an electron beam EB, a vacuum vessel 3, and a window unit 10a.
- the vacuum container 3 is a container for accommodating a filament 7 (described later) that is an electron emission member of the electron gun 2 and hermetically sealing it.
- the vacuum vessel 3 is formed in a cylindrical shape extending along the emission direction of the electron beam EB, and one end thereof is sealed by the electron gun 2 and the other end is sealed by the window unit 10a.
- the vacuum vessel 3 extends in the emitting direction of the electron beam EB emitted from the electron gun 2 and the accommodating chamber 3a for accommodating the filament 7, the grid portion 8, and the convex portion 4b of the electron gun 2 described later. And an electronic passage 3b.
- the electron passage 3b communicates with the storage chamber 3a, and the electron beam EB emitted from the electron gun 2 passes through the electron passage 3b and reaches the tip of the vacuum vessel 3.
- electromagnetic coils 3c and 3d which function as an electromagnetic deflection lens and are paired with the electron path 3b interposed therebetween.
- the vacuum vessel 3 has a pedestal 31 for fixing the window unit 10a at the end of the electron passage 3b.
- the window unit 10a is a component for emitting the electron beam EB emitted from the electron gun 2 to the outside of the vacuum vessel 3, and the tip of the vacuum vessel 3 in the emission direction (the end of the electron passage 3b). Removably attached to.
- FIG. 3 (a) is a side sectional view showing the configuration of the window unit 10a of the present embodiment and the vicinity thereof.
- FIG. 3 (b) is an enlarged cross-sectional view of the main part of the window unit 10a shown in FIG. 3 (a).
- FIG. 4 shows the configuration of the window unit 10a. It is a top view.
- the window unit 10a has a substantially disk-like appearance, and includes a frame member 11, a window member 13, and a fixing member 14.
- the frame member 11 is a substantially disk-shaped member, and also has a metal force such as stainless steel.
- the frame member 11 is disposed on a plane surrounded by the wall portion of the step portion 31c.
- the step portion 31c is formed on the pedestal 31 for positioning the frame member 11.
- the planar shape of the stepped portion 31c may be formed according to the planar shape of the frame member 11.
- the frame member 11 includes a recess 11a for accommodating the window member 13 and the fixing member 14, an electron passage hole 11c for passing the electron beam EB, and a bolt hole l id for passing the bolt 17 And are formed.
- the electron passage hole 11c penetrates the frame member 11 in the emission direction of the electron beam EB, and is formed in the central portion of the frame member 11.
- the width (inner diameter) of the electron passage hole 11c on the pedestal 31 side (that is, the vacuum vessel 3 side) is increased in a tapered shape toward the inside of the vacuum vessel 3.
- the width (inner diameter) of the electron passage hole 11c opposite to the base 31 is substantially constant along the emission direction of the electron beam EB.
- the electron passage hole 11c has a portion that maintains a substantially constant diameter on the electron emission side and a diameter that tapers from the electron incident side (vacuum container 3 side) toward the electron emission side so as to continue to that portion. It consists of parts to do.
- the recess 11a is formed so that the bottom surface thereof includes one end of the electron passage hole 11c, and is formed in a circular shape when viewed from the thickness direction of the window unit 10a (that is, the emission direction of the electron beam EB). ing. Further, as shown in FIG. 4, the bolt holes l id are formed around the recess 11 a, and a plurality of bolt holes id are formed along the circumferential direction of the frame member 11.
- the frame member 11 is fixed to the pedestal 31 by passing a bolt 17 through the bolt hole id and screwing the bolt 17 into the screw hole of the pedestal 31. The frame member 11 is detached from the pedestal 31 when the bolts 17 are removed.
- the frame member 11 is formed with a screw hole l ie different from the bolt hole l id.
- the screw hole 11 e is used when the bolt 17 is tightened too much and the window unit 10 a is fixed to the base 31 and the base 31 force cannot be easily removed. That is, the pedestal 31 is not formed with a screw hole corresponding to the screw hole lie, and when a screw is screwed into the screw hole lie, the tip of the screw comes into contact with the pedestal 31 and stops. As a result, the force that separates the frame member 11 and the pedestal 31 is applied to the frame member 11, so that the window unit 10a can be easily detached from the pedestal 31.
- the screw hole lie is preferably arranged outside the O-ring 18 to be described later, as viewed from the electron passage hole 11c. Even if minute metal powder is generated by the tip of the screw coming into contact with the pedestal 31, if the screw hole l ie is arranged outside the O-ring 18, the metal powder cannot penetrate into the vacuum vessel 3. Can be prevented. Further, as the position of the screw hole lie is closer to the outer periphery of the frame member 11, the lever principle works more effectively, and the frame member 11 can be removed with a smaller force.
- the window member 13 is a film-like member that transmits the electron beam EB emitted from the electron gun 2 and emits the electron beam EB to the outside of the vacuum vessel 3, and is a material that transmits the electron beam EB (for example, beryllium) , Titanium, aluminum, etc.)
- the window material 13 is formed to a thickness of, for example, several / z m to 10 m, and is extremely thin as compared with, for example, a window material used for an X-ray generator.
- the window member 13 is disposed on the bottom surface of the recess 11a of the frame member 11 so as to cover one end of the electron passage hole 11c of the frame member 11.
- the window member 13 is airtightly joined to the frame member 11 so as to close the electron passage hole 11c by being brazed to the frame member 11 using the brazing member 15.
- the window member 13 may be airtightly joined to the frame member 11 by welding, for example.
- One surface of the window member 13 is located outside the vacuum vessel 3 and is exposed to the atmosphere. The other surface of the window member 13 is located inside the vacuum vessel 3.
- the fixing member 14 is a member for securely fixing the window member 13 to the frame member 11.
- the fixing member 14 is formed in an annular shape having an opening 14a in the center portion, and the opening 14a is connected to the electron passage hole 1 lc of the frame member 11 on the bottom surface of the recess 1 la and on the window member 13.
- the window member 13 is sandwiched between the frame member 11 and the frame member 11.
- the outer diameter of the fixing member 14 is set to be smaller than the inner diameter of the recess 11a, and a gap is provided between the side surface 14b of the fixing member 14 and the side wall l ib of the recess 11a. This gap is a gap that is much larger than a gap that is generally provided due to component tolerances, and is, for example, several percent to several tens of percent of the inner diameter of the recess 11a.
- a brazing material 15 is filled between the fixing member 14 and the frame material 11, and a part of the brazing material 15 is attached to the window material 13. Also touches.
- the fixing member 14 is brazed to the window material 13 and the frame material 11, whereby the window material 13 is firmly joined to the frame material 11, and between the frame material 11 and the window material 13. Airtightness increases.
- the fixing member 14 may have a spot welding mark 14c as shown in FIG. This spot weld mark 14c is fixed When the member for brazing 14 is brazed to the frame member 11, the fixing member 14 is a mark that is spot-welded to the frame member 11 for temporary fixing. Since spot welding is performed avoiding the window material 13, spot welding marks 14 c are scattered around the window material 13.
- the adhesion of the brazing material 15 is enhanced on the surface of the frame material 11 on the side in contact with the brazing material 15 (that is, the bottom surface of the recess 11a of the frame material 11).
- a metal film 16a is formed.
- a metal film 16 b is also formed on the surface of the fixing member 14 on the side in contact with the brazing material 15.
- the metal films 16a and 16b are made of a metal material (for example, copper) having a good compatibility with the brazing material 15, and are formed by vapor deposition or the like.
- the metal film 16a is exposed from the gap between the side surface 14b of the fixing member 14 and the side wall l ib of the recess 11a. Become.
- the electron beam generator la further includes an O-ring 18.
- the O-ring 18 is a sealing member in the present embodiment, and hermetically seals the gap between the frame member 11 and the vacuum vessel 3 (pedestal 31).
- the O-ring 18 is made of an elastic material such as resin, and is provided between the frame member 11 and the base 31 so as to surround the electron passage hole 11c.
- a groove 31b for accommodating and positioning the O-ring 18 is formed on the vacuum container 3 side, and the O-ring 18 is accommodated in the groove 31b.
- the electron gun 2 includes an insulating block 4, a case 5 that accommodates the insulating block 4, a high-voltage connector 6 that is attached to the side surface of the case 5, and a filament that is an electron emitting member for emitting electrons. 7, internal wirings 9 a and 9 b that are high-voltage parts, and a conductive member 16 that covers a part of the insulating block 4.
- the case 5 is made of a conductive material such as metal and houses an insulating block 4 described later.
- the case 5 has an opening 5 a that connects the internal force of the case 5 to the storage chamber 3 a of the vacuum vessel 3 and an opening 5 b that connects the internal force of the case 5 to the outside of the electron beam generator la.
- the opening 5a is a circular opening for passing the internal wirings 9a and 9b.
- the opening 5b is a circular opening for attaching the connector 6.
- the insulating block 4 is made of, for example, epoxy resin and! /, Insulating resin, and the high voltage portion (internal wirings 9a and 9b) of the electron gun 2 and other parts (for example, the case 5) ) I have a relationship.
- the insulating block 4 has a base portion 4a and a convex portion 4b protruding from the base portion 4a.
- the base 4 a is accommodated in the case 5 so as to occupy most of the inside of the case 5.
- the convex portion 4b is exposed from the case 5 by protruding from the base portion 4a through the opening 5a.
- the filament 7 is arrange
- the high withstand voltage type connector 6 is a connector (receptacle) for receiving supply of external force power supply voltage of the electron beam generator la, and is disposed in the opening 5b so as to penetrate the side wall of the case 5 .
- a portion 6 a of the connector 6 located inside the case 5 is embedded and fixed in the base portion 4 a of the insulating block 4.
- an uneven shape is formed on the surface of the portion 6a.
- the insulating block 4 bites into the uneven shape and hardens, so that the insulating block 4 and the connector 6 are firmly fixed.
- a shape in which concave and convex portions are periodically repeated along the central axis direction of the connector 6 as shown in FIG. 1 or a surface of the connector 6 is roughened. Examples include fine unevenness.
- the connector 6 is fixed to the side wall of the case 5, and the insulating block 4 and the case 5 are firmly fixed via the connector 6.
- the connector 6 is inserted with a power plug holding the tip of an external wiring extending from a power supply device (not shown).
- the filament 7 is a member for emitting electrons that become the electron beam EB. Both ends of the filament 7 are connected to internal wirings 9a and 9b extending from the connector 6 to the filament 7, respectively. Therefore, when the power plug is inserted into the connector 6, both ends of the filament 7 are electrically connected to the power supply device via the external wiring.
- the filament 7 is heated to about 2500 ° C. when a current of several amperes is applied, and another power supply device is applied with a high voltage of several tens to several hundreds kV to emit electrons.
- the filament 7 is covered with a grid portion 8 that forms an electric field for extracting electrons. Grid part 8 A predetermined voltage is applied to the via a wiring (not shown).
- the electrons emitted from the filament 7 are emitted as a hole electron beam EB formed in a part of the grid portion 8.
- the internal wiring 9a and 9b are applied with a high voltage as described above from the power supply device, the internal wiring 9a and 9b are embedded in the insulating block 4 having an insulating material force, thereby ensuring insulation from the case 5. Yes.
- the vacuum container 3 is configured to be separable, for example, with a plane intersecting the emission direction as a boundary, and the accommodating chamber 3a is configured to be openable and closable by including a hinge (not shown) in the divided part. It is preferable. By providing the vacuum container 3 with such an open-type configuration, the filament 7 that is a consumable material can be easily replaced.
- the conductive member 16 is a conductive member for covering the surface of the insulating block 4 where there is a gap between the conductive block 16 and the case 5. Specifically, the conductive member 16 is in close contact with the case 5 of the insulating block 4 where a thin member such as a conductive film or a conductive tape is preferable, so that the portion is completely covered. Affixed to the insulating block 4. In addition, the conductive member 16 may be a conductive paint or a conductive film.
- the electron beam generator la preferably further includes a vacuum pump 50 for exhausting the inside of the vacuum vessel 3. Since the window unit 10a of this embodiment can be attached to and detached from the vacuum vessel 3, the vacuum vessel 3 needs to be in a vacuum state when the window unit 10a is replaced. When the vacuum vessel 3 is an open type as described above, the vacuum vessel 3 needs to be in a vacuum state even after the filament 7 is replaced. Since the electron beam generator la includes the vacuum pump 50, the vacuum vessel 3 can be easily evacuated. The vacuum pump 50 is connected to the storage chamber 3a of the vacuum vessel 3 through the exhaust passage 3d.
- the vacuum pump 50 is disposed along the side surface of the case 5 other than the side surface on which the connector 6 is provided. By disposing the vacuum pump 50 in this way, the electron beam generating apparatus la can be reduced in size while avoiding interference between the vacuum pump 50 and the power plug and external wiring inserted into the connector 6.
- the inside of the vacuum vessel 3 is evacuated by the vacuum pump 50 to be in a vacuum state.
- the power supply plug of the power supply prepared outside the electron beam generator la is inserted into the connector 6. Entered.
- the power supply device and the internal wirings 9a and 9b are electrically connected to each other.
- a current of several amperes is applied from the power supply device, and a power supply voltage of several tens to several hundreds kV is applied from another power supply device.
- This power supply voltage is supplied to the filament 7 through the internal wirings 9a and 9b, and electrons are emitted from the filament 7.
- the electrons emitted from the filament 7 are accelerated by the grid portion 8 to become an electron beam EB.
- the electron beam EB passes through the electron path 3b and reaches the window unit 10a.
- the electron beam EB is focused by the electromagnetic coil 3c.
- the electron beam EB may be subjected to axis correction by the electromagnetic coil 3d.
- the electron beam EB passes through the window member 13 of the window unit 10a and is emitted to the outside of the electron beam generator la.
- the window member 13 is joined to the frame member 11 so as to close the electron passage hole 11c of the frame member 11 in an airtight manner. Therefore, an elastic sealing member such as an O-ring is not required between the frame material 11 and the window material 13, and the joint portion (such as the brazing material 15) can sufficiently withstand the heat from the window material 13.
- the vacuum state inside the vacuum vessel 3 can be maintained for a long period of time with almost no deterioration of the sealing state between the frame member 11 and the window member 13.
- the window unit 13 is not stressed when the electron beam generator la is manufactured or when the window unit 10a is replaced. 10a can be attached. Therefore, according to the electron beam generator la of the present embodiment, the non-uniform stress on the window member 13 can be almost eliminated, so that damage to the window member 13 can be effectively reduced.
- the electron beam generator la includes an O-ring 18 that seals a gap between the frame member 11 and the vacuum vessel 3, and a groove 31b for accommodating the O-ring 18 is provided. It is preferably formed on the vacuum vessel 3 side (in this embodiment, on the pedestal 31 side). As a result, compared with the case where the groove for accommodating the O-ring 18 is formed on the window unit 10a side, the heat of the window member 13 is less likely to be transmitted to the O-ring 18, so the life of the O-ring 18 can be extended. it can.
- the width (inner diameter) of the electron passage hole 11c of the frame member 11 on the side of the vacuum vessel 3 is preferably increased in a tapered shape toward the inside of the vacuum vessel 3. .
- the frame member 11 is joined (brazed or the like) to the window member 13, so that heat from the window member 13 is easily transmitted to the frame member 11.
- the frame material 11 It is possible to effectively suppress the temperature rise of the window material 13 by heat radiation. Then, by increasing the heat radiation amount from the electron passage hole 1 lc by increasing the width (inner diameter) of the electron passage hole 1 lc on the vacuum container 3 side in a tapered shape, the temperature rise of the window material 13 is effectively suppressed. be able to.
- the tapered shape of the electron passage hole 11c reaches one end on the side of the window member 13, the edge of the opening of the electron passage hole 11c in contact with the window member 13 has an acute angle, which may damage the window member 13. Produce. Therefore, it is preferable that the width (inner diameter) of the electron passage hole 11c on the window member 13 side is substantially constant along the emission direction.
- the vacuum vessel 3 (base 31) preferably has a step portion 31c for positioning the frame member 11.
- the detachable frame member 11 can be easily attached to the vacuum vessel 3 (base 31), and the positional displacement of the window member 13 with respect to the emission axis of the electron beam EB can be reliably prevented.
- the electron gun 2 preferably includes a conductive member 16 that covers a surface of the insulating block 4 in which a gap is provided between the electron gun 2 and the case 5.
- the surface potential of the insulating block 4 with a gap between the case 5 and the case 5 can be set to the same potential as that of the case 5 (for example, ground potential), so that the shielding effect against the internal wirings 9a and 9b, etc. is suitably exhibited. it can.
- a part 6a of the connector 6 is embedded in the insulating block 4, and the connector 6 has an uneven shape on the surface of the part 6a.
- the insulating block 4 bites into the uneven shape of the connector 6 and hardens, so that the insulating block 4 and the connector 6 can be firmly fixed.
- a part 6 a of the connector 6 is embedded in the insulating block 4 and the connector 6 is fixed to the case 5. Thereby, the insulating block 4 and the case 5 can be firmly fixed via the connector 6.
- the window member 13 a 10 m thick beryllium film having an effective output diameter of 2 mm was used.
- the brazing material 15 a material having a plate thickness of 0.1 mm containing Ag as a main component was used.
- stainless steel was used as the material of the vacuum vessel 3 (including the base 31), the frame member 11, and the fixing member 14.
- the frame material 11 and the fixing member 14 are also cut out by the stainless steel mass force. Further, the beryllium film and the brazing material are cut out with a predetermined outer diameter, and the window material 13 and the brazing material 15 are prepared.
- the outer diameter of the window member 13 is made larger than the opening diameter of the electron passage hole 11c on the window member 13 side.
- the outer diameter of the brazing material 15 is made larger than the outer diameter of the window material 13.
- the outer diameter of the fixing member 14 may be substantially equal to the outer diameter of the brazing material 15.
- the opening diameter of the electron passage hole 11c is 2 mm
- the window material 13 is 6 mm square
- the outer diameter and inner diameter of the fixing member 14 and the brazing material 15 are l3 mm and 4 mm, respectively.
- the outer shape of the window member 13 may be any shape as long as it covers the electron passage hole 11c and does not protrude from the brazing member 15.
- a rectangular force in consideration of the ease of processing for example, it may be circular as with other members.
- each metal member vacuum container 3, frame member 11, and fixing member 14
- heat treatment about 900 ° C.
- brazing material 15 becomes well adapted to each member.
- FIG. 5 is a cross-sectional view showing this process.
- the window member 13, the brazing member 15, and the fixing member 14 are stacked in this order in the recess 11a of the frame member 11.
- the jig A is a jig for preventing displacement of each member when the brazing material 15 is melted.
- the jig A is made of, for example, a stainless steel (SUS304) force, and its dimensions are an outer diameter of 12 mm, an inner diameter of 6 mm, and a height of 20 mm.
- SUS304 stainless steel
- Jig B is an annular jig that fits into the gap between the side wall l ib of the recess 11a and the side surface 14b of the fixing member 14, and by installing the jig B, the fixing member 14 can be positioned.
- the center of the opening 14a of the fixing member 14 and the frame material 11 The center of the electron passage hole l ie can be easily aligned.
- the fixing member 14 may be temporarily fixed to the frame member 11. Good.
- the spot weld mark 14c shown in FIG. 4 is the weld mark at this time.
- each member is placed in an electric furnace of a vacuum heating furnace, and calorie heat treatment is performed.
- the room temperature force is also heated to about 700 ° C, maintained at that temperature for 5 minutes, and then the heating is stopped to cool to about 650 ° C.
- Each part is also taken out of the electric furnace power and cooled to about 300 ° C. Then, it is rapidly cooled to near room temperature by a vacuum leak using dry nitrogen, and the integrated window unit 10a is also taken out of the vacuum heating furnace.
- the sealed state between the frame member 11 and the window member 13 is inspected using a helium leak detector or the like to confirm that there is no leak.
- FIGS. 6 (a) and 6 (b) and FIGS. 7 (a) and 7 (b) are sectional views showing first to fourth modified examples, respectively.
- the electron beam generator of this modification includes a pressing member 23 instead of the bolt 17 of the first embodiment.
- the holding member 23 fixes the window unit 10a to the vacuum container (pedestal 32) by screwing (screwing) with the vacuum container (pedestal 32) while pressing the outer peripheral portion of the frame member 11.
- the pressing member 23 is formed by integrally forming a cylindrical screw portion 23a and a plate-like portion 23b provided at one end of the screw portion 23a.
- the inner diameter of the threaded portion 23a is formed to be substantially the same as the outer diameter of the pedestal 32.
- a screw thread 23d is formed on the inner peripheral surface of the threaded portion 23a, and the screw member 23d is screwed with the screw thread 32b formed on the outer peripheral surface of the pedestal 32, whereby the pressing member 23 is fixed to the pedestal. Screwed onto 32. At this time, the plate-like portion 23b presses the frame member 11 of the window unit 10a against the base 32.
- the pressing member 23 has a circular opening 23c formed in the plate-like portion 23b for allowing the electron beam EB to pass therethrough.
- the inner diameter of the opening 23c is larger than the inner diameter of the recess 11a of the frame 11 Thus, the plate-like portion 23b is prevented from coming into contact with the fixing member 14.
- the electron beam generator may fix the window unit 10 a (frame member 11) with the pressing member 23. Even with such a configuration, the window unit 10a (frame member 11) can be attached to and detached from the vacuum vessel. According to this modification, the window unit 10a can be attached to the vacuum vessel in a shorter time than when the window unit 10a is screwed.
- the frame member 11 may have a bolt hole l id (see FIGS. 3A and 4). In this case, the frame member 11 is fixed to the vacuum vessel by one or both of the pressing member 23 shown in FIG. 6 (a) and the bolt 17 shown in FIG. 3 (a).
- the window unit 10b of this modification has a frame member 12 instead of the frame member 11 of the first embodiment.
- the frame member 12 is fixed to the vacuum container by screwing with the pedestal 33.
- the frame member 12 is formed by integrally forming a cylindrical screwing portion 12a and a plate-like portion 12b provided at one end of the screwing portion 12a.
- the inner diameter of the threaded portion 12a is formed to be substantially the same as the outer diameter of the pedestal 33.
- a screw thread 12d is formed on the inner peripheral surface of the threaded portion 12a, and the screw thread 12d is screwed with a screw thread 33b formed on the outer peripheral surface of the pedestal 33, whereby the window unit 10b. Is screwed onto the vacuum vessel (base 33).
- the frame member 12 communicates with the recess 12c for accommodating the window member 13 and the fixing member 14 and the through hole 33a of the pedestal 33, similarly to the frame member 11 of the first embodiment. And an electron passage hole 12e through which the electron beam EB passes.
- a window member 13 is disposed so as to close the electron passage hole 12e, and the frame member 12, the window member 13, and the fixing member 14 are joined to each other via the brazing member 15.
- the pedestal 33 has a step portion for positioning the window unit 10b, and is different from the pedestal 31 of the first embodiment in that respect.
- the frame member 12 may be configured to be screwed into the vacuum vessel (base 33). Even with such a configuration, the window unit 10b (frame member 12) that can be attached to and detached from the vacuum vessel can be suitably realized.
- the window unit 10c of this modification has a frame member 19 instead of the frame member 11 of the above embodiment.
- the frame member 19 is a substantially disk-shaped member, and includes the window member 13 and the fixing member 14. It has a recess 19a for accommodating, an electron passage hole 19c communicating with the through hole 31a of the pedestal 31 and allowing the electron beam EB to pass therethrough, and a bolt hole 19e for passing the bolt 17.
- the vicinity of the concave portion 19a of the frame member 19 is formed to be thicker than the outer peripheral portion including the bolt hole 19e, and becomes a convex portion 19d.
- the inner diameter of the electron passage hole 19c is constant along the emission direction. However, like the electron passage hole 11c of the first embodiment, the inner diameter of the electron passage hole 19c on the vacuum vessel side is smaller. Expand to taper shape!
- the vicinity of the recess 19a of the frame member 19 is formed thicker than the outer peripheral portion, so that the recess 19a when the window unit 10c is attached to the base 31 with the bolt 17 It is possible to reduce the deformation in the vicinity and prevent the window material 13 from being subjected to uneven stress.
- the outer peripheral portion including the bolt hole 19e is formed relatively thin as in the present modification, the fastening force by the bolt 17 is effectively transmitted to the frame member 19 and the pedestal 31.
- the gap between the frame member 19 and the base 31 can be more reliably sealed.
- the fourth modification shown in Fig. 7 (b) is a modification of the window unit 10c according to the third modification shown in Fig. 7 (a) to the holding unit according to the first modification shown in Fig. 6 (a).
- the structure fixed by the member 23 is provided.
- the electron beam generator according to this modification includes a window unit 10c and a pressing member 23.
- the configuration of the window unit 10c is the same as that of the third modified example.
- the holding member 23 fixes the window unit 10c to the vacuum container (pedestal 32) by pressing the outer peripheral portion of the frame member 19 and screwing (screwing) with the vacuum container (pedestal 32).
- the pressing member 23 is formed by integrally forming a cylindrical screw portion 23a and a plate-like portion 23b provided at one end of the screw portion 23a.
- the inner diameter of the threaded portion 23 a is formed to be approximately the same as the outer diameter of the pedestal 32.
- the screw thread 23d formed on the inner peripheral surface of the threaded portion 23a is screwed to the screw thread 32b formed on the outer peripheral surface of the pedestal 32, thereby being screwed to the pedestal 32.
- the plate-like portion 23b of the pressing member 23 presses the frame member 19 of the window unit 10c to the base 32.
- the pressing member 23 has a circular opening 23c for allowing the electron beam EB to pass therethrough.
- the inner diameter of the opening 23c is formed larger than the outer diameter of the convex portion 19d of the frame member 19, and the convex portion 19d protrudes from the opening 23c.
- the frame member 19 of the window unit 10c has the convex portion 19d, so that the same effect as in the third modification can be obtained. Further, by fixing the window unit 10c (frame member 19) with the pressing member 23, the window unit 10c can be mounted on the vacuum container in a shorter time than in the case of screwing.
- FIG. 8 is a cross-sectional view showing the configuration of the second embodiment of the electron beam generator according to the present invention.
- FIG. 9 is a plan view of the electron beam generator shown in FIG.
- the electron beam generator lb of the present embodiment includes an electron gun 2 that emits an electron beam EB, a vacuum vessel 30, and a plurality of window units 10d. Among these, since the configuration of the electron gun 2 is the same as that of the first embodiment, a detailed description thereof will be omitted.
- the vacuum container 30 is a container for accommodating the filament 7 of the electron gun 2 and hermetically sealing it.
- the vacuum container 30 extends in the emitting direction of the electron beam EB emitted from the electron gun 2 and the accommodating chamber 30a for accommodating the filament 7, the grid part 8, and the convex part 4b of the electron gun 2.
- an electronic passage 30b communicating with the chamber 30a.
- a cylindrical electromagnetic coil 30c that functions as an electromagnetic polarization lens is provided around the electronic passage 30b.
- the electronic passage 30b expands in a fan shape toward the tip of the portion where the electromagnetic coil 30c is disposed. That is, the electron path 30b is gradually enlarged only in one direction intersecting with the emission direction of the electron gun 2 (hereinafter referred to as the scan direction; arrow S in the figure). The width in the direction of is constant. Therefore, the leading end of the electron passage 30b extends in an elongated manner with the scanning direction S as the longitudinal direction.
- a pedestal 34 for fixing the window unit 10d is provided at the tip of the electronic passage 30b.
- Electron beam EB is the tip of vacuum container 30 Reach the window unit lOd provided in.
- the plurality of window units 10d are components for emitting the electron beam EB emitted from the electron gun 2 to the outside of the vacuum vessel 30, and are provided at the tip of the vacuum vessel 30 (the end of the electron passage 30b). In addition, they are arranged along the scanning direction S.
- FIG. 10 is a plan view showing the configuration of the window unit 10d of the present embodiment.
- FIG. 11 is a side sectional view taken along line I I II of the window unit 10d shown in FIG.
- the window unit 10d has a rectangular planar shape, and includes a frame member 20, a window member 21, and a fixing member 22.
- the frame member 20 is made of a metal such as stainless steel and is fixed to the vacuum container 30 by bolts 28.
- the frame member 20 has a recess 20a for accommodating the window member 21 and the fixing member 22, an electron passage hole 20c for allowing the electron beam EB to pass therethrough, and a bolt hole 20d for allowing the bolt 28 to pass therethrough.
- the electron passage hole 20c penetrates the frame member 20 in the emission direction of the electron beam EB, and the planar shape thereof is a rectangular shape having the scanning direction S as a longitudinal direction.
- the recess 20a is formed so as to include one end (opening) of the electron passage hole 20c on the bottom surface, and reaches both ends of the frame member 20 in the scanning direction S. Further, a plurality of bolt holes 20d are formed side by side on both sides of the recess 20a along the scan direction S.
- the frame member 20 is fixed to the pedestal 34 by passing the bolt 28 through the bolt hole 20d and screwing the bolt 28 into the screw hole of the pedestal 34. The frame member 20 is detached from the base 34 when the bolt 28 is removed.
- the window member 21 is a film-like member that transmits the electron beam EB emitted from the electron gun 2 and emits the electron beam EB to the outside of the vacuum vessel 30.
- the window member 21 is disposed on the bottom surface of the recess 20a so as to cover one end of the electron passage hole 20c of the frame member 20. Further, the window material 21 is airtightly joined to the frame material 20 so as to close the electron passage hole 20c by being brazed to the frame material 20 using a brazing material 27.
- the fixing member 22 is a member for securely fixing the window member 21 to the frame member 20.
- the fixing member 22 is formed in a rectangular shape having an opening 22a at the center, and is disposed on the bottom surface of the recess 20a and on the window member 21 so that the opening 22a communicates with the electron passage hole 20c of the frame member 20.
- the window member 21 is sandwiched between the frame member 20 and the frame member 20.
- the outer diameter of the fixing member 22 ( The width in the direction perpendicular to the scanning direction S) is set smaller than the width of the recess 20a, and a gap is provided between the side surface 22b of the fixing member 22 and the side wall 20b of the recess 20a. This gap is a gap for inserting a jig having the same function as the jig B shown in FIG.
- a brazing material 27 is filled between the fixing member 22 and the frame material 20, and a part of the brazing material 27 is also in contact with the window material 21.
- the fixing member 22 is brazed to the frame member 20 and the window member 21, whereby the window member 21 is firmly joined to the frame member 20, and the frame member 20 and the window member 21 are The airtightness between them increases.
- a sealing member (O-ring 29) is provided between the frame member 20 and the vacuum vessel 30 (pedestal 34) as in the first embodiment.
- the O-ring 29 hermetically seals the gap between the frame member 20 and the vacuum container 30 (base 34).
- the point that a groove for accommodating the O-ring 29 is formed on the vacuum container 30 side (the pedestal 34 side) is the same as in the first embodiment.
- the electron beam generator lb further includes a vacuum pump 51 for exhausting the inside of the vacuum vessel 30 (see FIG. 2).
- the vacuum pump 51 is arranged so that the side force of the vacuum vessel 30 on the side where the connector 6 is provided also protrudes. By arranging the vacuum pump 51 in this way, the connector 6 and the vacuum pump 51 are arranged in the same direction with respect to the central axis of the electron beam generator lb. 51 maintenance becomes easy.
- the vacuum pump 51 is connected to the storage chamber 30a of the vacuum vessel 30 through the exhaust passage 30d.
- the electron beam generator according to the present invention may include a rectangular window unit 10d, or may include a plurality of window units 10d.
- the window material 21 is damaged by arranging a plurality of window units 10d along the scanning direction S as in the present embodiment.
- a single window unit extending along the scanning direction S may be arranged instead of the force of juxtaposing the plurality of window units 10d.
- the electron beam generator according to the present invention is not limited to the above-described embodiments and modifications, and can be variously modified.
- a frame material in which the electron passage hole is circular in the first embodiment is shown, and the electron passage hole is rectangular in the second embodiment.
- the force showing the frame material The electron passage hole of the frame material can have various shapes other than these.
- the planar shape of the concave portion of the frame material, the window material, and the fixing member may be appropriately changed.
- an epoxy resin product has been described as an example of the insulating block.
- the insulating block in the present invention is not limited to epoxy resin, and may be composed of other insulating materials such as ceramic and silicone resin.
- the configuration for supplying a high voltage from the connector has been described.
- a booster circuit may be provided inside the insulating block.
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP07713923A EP2006860A4 (en) | 2006-03-10 | 2007-02-08 | ELECTRON PRODUCTION DEVICE |
KR1020087015674A KR101257135B1 (ko) | 2006-03-10 | 2007-02-08 | 전자선 발생 장치 |
US12/281,713 US8110974B2 (en) | 2006-03-10 | 2007-02-08 | Electron beam generating apparatus |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006-066486 | 2006-03-10 | ||
JP2006066486A JP4584851B2 (ja) | 2006-03-10 | 2006-03-10 | 電子線発生装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2007105390A1 true WO2007105390A1 (ja) | 2007-09-20 |
Family
ID=38509228
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2007/052207 WO2007105390A1 (ja) | 2006-03-10 | 2007-02-08 | 電子線発生装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US8110974B2 (ja) |
EP (1) | EP2006860A4 (ja) |
JP (1) | JP4584851B2 (ja) |
KR (1) | KR101257135B1 (ja) |
CN (1) | CN101401168A (ja) |
TW (1) | TWI425527B (ja) |
WO (1) | WO2007105390A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120269997A1 (en) * | 2009-03-11 | 2012-10-25 | Tetra Laval Holdings & Finance S.A. | Method for assembling an electron exit window and an electron exit window assembly |
JP2013024558A (ja) * | 2011-07-14 | 2013-02-04 | Hamamatsu Photonics Kk | 電子線照射装置及び電子線透過ユニット |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5149707B2 (ja) * | 2008-06-13 | 2013-02-20 | 浜松ホトニクス株式会社 | X線発生装置 |
SE534156C2 (sv) * | 2009-03-11 | 2011-05-17 | Tetra Laval Holdings & Finance | Förfarande för montering av ett fönster för utgående elektroner och en fönsterenhet för utgående elektroner |
JP5797037B2 (ja) * | 2011-07-14 | 2015-10-21 | 浜松ホトニクス株式会社 | 電子線照射装置 |
JP5974495B2 (ja) * | 2012-01-19 | 2016-08-23 | Jfeエンジニアリング株式会社 | 粒子線透過窓の製作方法 |
CN102881545B (zh) * | 2012-09-18 | 2016-01-20 | 中国科学院上海应用物理研究所 | 电子射线源产生装置及产生低剂量率电子射线的方法 |
CN103077762B (zh) * | 2012-12-19 | 2016-09-28 | 中国科学院上海应用物理研究所 | 电子射线源产生装置及产生低剂量率电子射线的方法 |
JP6068693B1 (ja) * | 2016-01-08 | 2017-01-25 | 浜松ホトニクス株式会社 | 電子線照射装置 |
US10641907B2 (en) * | 2016-04-14 | 2020-05-05 | Moxtek, Inc. | Mounted x-ray window |
US10991540B2 (en) | 2018-07-06 | 2021-04-27 | Moxtek, Inc. | Liquid crystal polymer for mounting x-ray window |
WO2020027769A1 (en) * | 2018-07-30 | 2020-02-06 | Moxtek, Inc. | Mounted x-ray window |
WO2024053179A1 (ja) * | 2022-09-08 | 2024-03-14 | 浜松ホトニクス株式会社 | 出力窓ユニット |
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- 2007-02-08 EP EP07713923A patent/EP2006860A4/en not_active Withdrawn
- 2007-02-08 WO PCT/JP2007/052207 patent/WO2007105390A1/ja active Application Filing
- 2007-02-08 CN CNA2007800086960A patent/CN101401168A/zh active Pending
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US20120269997A1 (en) * | 2009-03-11 | 2012-10-25 | Tetra Laval Holdings & Finance S.A. | Method for assembling an electron exit window and an electron exit window assembly |
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Also Published As
Publication number | Publication date |
---|---|
US8110974B2 (en) | 2012-02-07 |
EP2006860A2 (en) | 2008-12-24 |
TWI425527B (zh) | 2014-02-01 |
KR101257135B1 (ko) | 2013-04-22 |
KR20080100335A (ko) | 2008-11-17 |
JP2007240454A (ja) | 2007-09-20 |
TW200805400A (en) | 2008-01-16 |
EP2006860A4 (en) | 2010-07-14 |
EP2006860A9 (en) | 2009-07-08 |
JP4584851B2 (ja) | 2010-11-24 |
US20090212681A1 (en) | 2009-08-27 |
CN101401168A (zh) | 2009-04-01 |
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