WO2007055135A1 - Dispositif encodeur magnetique - Google Patents

Dispositif encodeur magnetique Download PDF

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Publication number
WO2007055135A1
WO2007055135A1 PCT/JP2006/321870 JP2006321870W WO2007055135A1 WO 2007055135 A1 WO2007055135 A1 WO 2007055135A1 JP 2006321870 W JP2006321870 W JP 2006321870W WO 2007055135 A1 WO2007055135 A1 WO 2007055135A1
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WO
WIPO (PCT)
Prior art keywords
magnetic field
field detection
permanent magnet
magnetic
detection element
Prior art date
Application number
PCT/JP2006/321870
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English (en)
Japanese (ja)
Inventor
Takefumi Kabashima
Ikuma Murokita
Katsumasa Yoshida
Yasushi Yoshida
Original Assignee
Kabushiki Kaisha Yaskawa Denki
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Kabushiki Kaisha Yaskawa Denki filed Critical Kabushiki Kaisha Yaskawa Denki
Priority to JP2007544107A priority Critical patent/JPWO2007055135A1/ja
Publication of WO2007055135A1 publication Critical patent/WO2007055135A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D2205/00—Indexing scheme relating to details of means for transferring or converting the output of a sensing member
    • G01D2205/80—Manufacturing details of magnetic targets for magnetic encoders

Definitions

  • the present invention relates to a magnetic encoder device that detects a rotational position of a rotating body.
  • FIG. 22 is a perspective view showing the configuration of the magnetic encoder in the first prior art.
  • 1 is a rotating body
  • 2 is a permanent magnet fixed to the rotating body 1 via a rotating shaft 11, and is magnetized in one direction perpendicular to the rotating shaft 11.
  • Reference numerals 611 to 614 denote magnetic field detection elements, which are arranged on the permanent magnet 2 via a gap in the axial direction and fixed on the fixed body 7.
  • the magnetic field detection elements 611 to 614 are arranged in the circumferential direction with a mechanical angle shifted by 90 degrees from each other, and detect a change in the magnetic field generated by the permanent magnet 2 according to the rotation of the rotating body 1. This detection signal is converted into a rotation angle by the signal processing circuit 5, and the absolute value position of the rotating body 1 is detected.
  • a magnetic field generated by a permanent magnet magnetized in parallel with two poles in a plane attached to the rotating body is detected by six magnetic field detecting elements arranged at equal intervals in the axial direction via gaps.
  • a device that detects the absolute value of the position of a rotating body is disclosed (for example, see Patent Document 2).
  • FIG. 23 is a perspective view showing a configuration of a magnetic encoder in the second prior art.
  • 1 is a rotating body
  • 2 is a permanent magnet fixed to the rotating body 1 via a rotating shaft 11.
  • the rotating shaft 11 is magnetized in one direction perpendicularly.
  • a pair of A1 phase detection elements 621 and A2 phase detection elements 622, B1 Phase detection element 623 and B2 phase detection element 624, and C1 phase detection element 625 and C2 phase detection element 626, consisting of a total of three pairs, are arranged on fixed body 7.
  • FIG. 24 is a block diagram of a signal processing circuit.
  • the signal processing circuit includes a first detector for A1 phase detector 621 and A2 detector 622, B1 detector 623 and B2 detector 624, and C1 detector 625 and C2 detector 626, respectively.
  • Differential amplifiers 81, 82, and 83 are provided.
  • the first differential amplifiers 81 to 83 remove even-order harmonic components by taking the difference between the output signals of the pair of magnetic field detection elements.
  • second differential amplifiers 84 and 85 are provided at the subsequent stage of the first differential amplifiers 81 and 82 and the first differential amplifiers 82 and 83, respectively.
  • the second differential amplifiers 84 and 85 combine two differential output signals after removing even-order harmonic components by the first differential amplifiers 81 and 82 and the first differential amplifiers 82 and 83, respectively. By taking the sum, the third-order harmonic component contained in the differential output signal was removed, and the encoder was highly accurate.
  • an N pole is formed at one end of the circumference of the disk-shaped permanent magnet fixed to the rotating shaft, and an S pole is formed at the other end, with a fixed gap and a magnetoresistive element on the axis.
  • An angle sensor in which the above is arranged is disclosed (for example, see Patent Document 3).
  • FIG. 25 is a perspective view of the angle sensor in the third conventional example
  • FIG. 26 is a graph showing the relationship between the rotation angle of the angle sensor and the output voltage.
  • a magnet is mounted on the rotating shaft of the rotating body, and a magnetic sensor having a plurality of magnetoresistive elements arranged in different detection directions is installed perpendicular to the direction in which the magnet rotates to detect the rotation of the object.
  • a rotation detector is disclosed (for example, see Patent Document 4).
  • FIG. 27 is a perspective view showing a configuration of a rotation detector in the fourth prior art.
  • 22 is a cylindrical outer shape, and a permanent magnet with two poles, N pole and S pole, on the top surface.
  • the magnetic sensor 37 detects the rotation of the magnetic field and outputs a signal of one waveform per rotation.
  • the rotation of the rotating body is detected from the change in output.
  • the direction of rotation can also be detected.
  • Patent Document 1 Japanese Unexamined Patent Publication No. 2000-65596
  • Patent Document 2 JP 2001-33277 A
  • Patent Document 3 Japanese Patent Publication No. 7-119619
  • Patent Document 4 Japanese Patent Laid-Open No. 7-27776
  • the magnetic field generated by the permanent magnet attached to the rotating body is a sine wave with a small distortion, so that a highly accurate encoder can be obtained.
  • the number of power lines and output signal lines for driving the magnetic field detection elements increases. Therefore, there is a problem that the installation of wiring and magnetic field detection elements becomes complicated and the cost increases.
  • it is necessary to install the magnetic field detection elements at equal intervals but there is a problem that the installation accuracy greatly affects the encoder accuracy.
  • since there are many wires noise is easily picked up and reliability is low!
  • the magnetic encoder device disclosed in the second prior art since the magnetic encoder device disclosed in the second prior art has a large size of the magnetic field detection element, it is necessary to install each magnetic field detection element away from the center of the rotation axis. There was a problem that the size becomes large. In addition, since it is difficult to arrange them at regular intervals with high accuracy, the detection accuracy deteriorates due to the eccentricity of the permanent magnet and the shake of the rotating shaft. was there. Furthermore, there was a variation in the characteristics of each magnetic field detection element, and there was a problem that it was not possible to completely remove the second and third order harmonic components.
  • the magnetic field detection element is mounted near the permanent magnet, and the drive circuit and signal amplification circuit that drive the magnetic field detection element are installed away from the permanent magnet, so the number of power lines and output signal lines increases. There was a problem and noise resistance was lowered.
  • the magnetic encoder disclosed in the third prior art is limited to a range in which the angle detection range has linearity of the output voltage, and the force is low in accuracy. Therefore, there was a problem that could not be applied to servo motors that are required to detect the rotation angle with high accuracy over the entire 360 ° range.
  • the rotation detection device disclosed in the fourth prior art can detect a rough position, but cannot be applied to a servo motor or the like that is required to detect a rotation angle with high accuracy. there were.
  • the present invention has been made in view of such problems, and has a simple configuration and can be miniaturized.
  • Another object of the present invention is to provide a highly reliable magnetic encoder device that is low in cost and highly reliable against eccentricity of a permanent magnet and shake of a rotating shaft.
  • the present invention is configured as follows.
  • the invention according to claim 1 is a disk-shaped or ring-shaped permanent magnet fixed to a rotating body and magnetized in two poles, a magnetic field detector for detecting a magnetic field generated by the permanent magnet, and the magnetic And a signal processing circuit for processing a signal from a field detection unit, wherein the magnetic field detection unit detects the absolute position of the rotating body in the direction of the rotation axis of the rotating body.
  • a magnetic field detecting element unit is provided, which is arranged through a magnet and a gap, and detects a magnetic field in a plurality of axial directions in a plane perpendicular to the rotation axis on an extension of a rotation center axis of the permanent magnet.
  • the invention according to claim 2 is characterized in that the plurality of axial directions are biaxial directions.
  • the invention according to claim 3 is characterized in that the plurality of axial directions are three axial directions.
  • the invention described in claim 4 is characterized in that the magnetic field detection element section is formed by forming magnetic field detection elements for detecting magnetic fields in the respective axial directions close to each other by a semiconductor technology.
  • the invention described in claim 5 is characterized in that the magnetic field detection element portion is arranged close to a magnetic field detection element package for detecting a magnetic field in each axial direction.
  • the magnetic field detection unit includes the magnetic field detection element unit, a drive circuit that drives the magnetic field detection element unit, and a signal processing that processes an output signal of the magnetic field detection element unit.
  • the feature is that the parts are integrated in one package.
  • the invention according to claim 7 is characterized in that the permanent magnet is magnetized in parallel in a plane perpendicular to the rotation axis.
  • the invention according to claim 8 is characterized in that the permanent magnet has a permanent magnet force having parallel anisotropy.
  • the magnetic field detection unit includes the magnetic field detection element unit that detects magnetic fields in a plurality of axial directions in a plane perpendicular to the rotation axis, one simple magnetic field detection unit is provided.
  • the rotation angle can be detected with a simple configuration. Therefore, the number of leads can be reduced, and manufacturing and assembly costs can be reduced.
  • the magnetic field detector is arranged on the extension of the rotation center axis of the permanent magnet, the fluctuation of the detected magnetic field due to the eccentricity or shake of the rotation axis is reduced, and a highly accurate encoder can be realized.
  • the permanent magnet has a hollow ring shape, the permanent magnet can be mounted on a rotating shaft to be detected such as a motor. Therefore, the encoder and the detection target can be integrated, the configuration is simple, the vibration resistance is improved, and the size can be reduced.
  • the magnetic field detection unit includes a magnetic field detection element unit that detects a magnetic field in two axial directions in a plane perpendicular to the rotation axis, the size of the magnetic field detection unit Can be reduced
  • the rotation angle can be detected with a simple configuration.
  • the magnetic field detection unit includes a magnetic field detection element unit that detects a magnetic field in three axial directions in a plane perpendicular to the rotation axis
  • the size of the magnetic field detection unit Can be reduced
  • the waveform distortion is canceled out by canceling the harmonic components of the second and third order multiples.
  • V signal can be output.
  • the magnetic field detection elements of the magnetic field detection element portion are formed closer to each other by semiconductor technology, the fluctuation in characteristics between the elements can be reduced and the accuracy can be reduced. A good detection signal is obtained.
  • the magnetic field detection element unit is configured in the vicinity of the magnetic field detection element package, the detection magnetic field variation due to eccentricity or shake of the rotating shaft is small with a simple configuration. A highly accurate encoder can be realized.
  • the magnetic field detection element unit, the drive circuit, and the signal processing unit are provided.
  • the magnetic field detector is configured by integrating in one package, a small size can be realized, the number of leads can be reduced, and manufacturing and assembly costs can be reduced.
  • the angle information can be communicated to the host controller using digital signals, improving noise resistance and lengthening the output signal line.
  • the permanent magnet is magnetized in parallel in a plane perpendicular to the rotation axis, the magnetic field generated by the permanent magnet becomes a sine wave with a small distortion, and a highly accurate error is obtained. Can be provided.
  • the permanent magnet if the permanent magnet has parallel anisotropy, the permanent magnet can be easily magnetized in parallel in the plane without requiring a special magnetizing device. You can do it.
  • FIG. 1 is a perspective view of a magnetic encoder showing a first embodiment of the present invention.
  • FIG. 2 is an enlarged view of a magnetic field detector in the first embodiment of the present invention.
  • FIG. 3 is a block diagram of a signal processing circuit in the first embodiment of the present invention.
  • FIG. 4 is a circuit diagram of a waveform shaping circuit according to the first embodiment of the present invention.
  • FIG. 5 is an output waveform diagram of the magnetic field detector in the first embodiment of the present invention.
  • FIG. 6 is a perspective view of a magnetic encoder showing a second embodiment of the present invention.
  • FIG. 7 is a configuration diagram of a magnetic field detector showing a third embodiment of the present invention.
  • FIG. 8 is a block diagram of a signal processing circuit according to a third embodiment of the present invention.
  • FIG. 9 is a configuration diagram of a magnetic field detector showing a fourth embodiment of the present invention.
  • FIG. 10 is a configuration diagram of a magnetic field detector according to a fifth embodiment of the present invention.
  • FIG. 11 is an enlarged view of a magnetic field detector in a fifth embodiment of the present invention.
  • FIG. 12 is a graph showing changes in the magnetic field of the magnetic field detection element unit in the fifth example of the present invention.
  • FIG. 13 is a graph showing the signal output of the magnetic field detection element portion in the fifth embodiment of the present invention.
  • FIG. 14 is a graph showing the relationship between the detected magnetic flux density of the Hall element and the Hall output voltage.
  • FIG. 15 is a circuit diagram of a sensor signal processing unit in a fifth embodiment of the present invention.
  • FIG. 16 is a graph showing the relationship between the second harmonic component and the amount of eccentricity.
  • FIG. 17 is a graph showing a waveform of an output signal of a differential operation unit in the fifth example of the present invention.
  • FIG. 18 is a graph obtained by performing FFT analysis on the output signal of the differential operation unit in the fifth example of the present invention.
  • FIG. 19 is a graph showing a waveform of an output signal of a three-phase / two-phase converter in the fifth embodiment of the present invention.
  • FIG. 20 is a diagram obtained by FFT analysis of the output signal of the three-phase / two-phase converter in the fifth embodiment of the present invention.
  • FIG. 21 is a block diagram of a signal processing circuit in a fifth example of the present invention.
  • FIG. 22 is a perspective view showing a configuration of a magnetic encoder in the first prior art.
  • FIG. 23 is a perspective view showing a configuration of a magnetic encoder in the second conventional technique.
  • FIG. 24 is a block diagram of a signal processing circuit in the second prior art.
  • FIG. 25 is a perspective view of an angle sensor in a third conventional example.
  • FIG. 26 is a graph showing the relationship between the rotation angle of the angle sensor and the output voltage in the third conventional example.
  • FIG. 27 is a perspective view showing a configuration of a rotation detector in the fourth prior art.
  • Rotation center axis 1 Rotation axis
  • Magnetic field detection element 621 to 626 Magnetic field detection element
  • FIG. 1 is a perspective view of a magnetic encoder showing a first embodiment of the present invention.
  • 1 is a rotating body
  • 2 is a permanent magnet constituting a magnet generator fixed to the rotating body 1 via a rotating shaft 11, and is perpendicular to the rotating shaft 11 as indicated by an arrow in the figure.
  • 3 is a magnetic field detector, and the magnetic field detector 3 is installed on the processing circuit board 4 together with the signal processing circuit 5.
  • the magnetic field detection unit 3 includes a magnetic field detection element unit 31 installed on the rotation center axis 10 of the rotating body 1.
  • the magnetic field detection element unit 31 detects a magnetic field in the biaxial direction on the XY plane perpendicular to the rotation axis 11, and the detection direction of the magnetic field is mutually different by 90 degrees in mechanical angle.
  • a permanent magnet 2 in which a samarium cobalt magnet having a diameter of 10 mm and a thickness of 2 mm was magnetized in parallel in one direction was used.
  • the magnetic field detector 3 was arranged on the rotation center axis 10 through a gap of 2 mm with the permanent magnet 2.
  • two pairs of magnetic field detecting elements are arranged on a concentric circle with respect to the rotational center of the rotating body, and are 90 degrees out of phase with each other in the circumferential direction of the permanent magnet. Two pairs are provided at different positions.
  • the magnetic field detecting element portion for detecting the magnetic field in the biaxial direction is arranged on the rotation center axis.
  • FIG. 2 is an enlarged view of the magnetic field detector in the present embodiment.
  • reference numeral 3 denotes an embodiment of the magnetic field detection unit.
  • the magnetic field detection element unit 31 of the magnetic field detection unit 3 is a magnetic field detection element in which the detection directions of the magnetic field are different from each other by about 90 degrees in the plane.
  • Certain Hall elements 311 and 312 are formed using semiconductor technology. Hall element 311 detects a magnetic field Bx in the X-axis direction, and Hall element 312 detects a magnetic field By in the Y-axis direction.
  • Drive terminal A and drive terminal B are connected to a drive circuit (not shown) of Hall elements 311 and 312, and a drive current is passed through Hall elements 311 and 312.
  • the Hall elements 311 and 312 receive magnetic fields Bx and By corresponding to the rotation angle and output sine wave and cosine wave Hall voltages va and vb from the terminal va and the terminal vb, respectively.
  • the diameter of the magnetic field detecting element 31 is 200 m, and the distance between the Honore elements 311 and 312 is 20 / zm or less. Therefore, when viewed from the permanent magnet 2, the Hall elements 311 and 312 can be regarded as being substantially in the same position.
  • FIG. 3 is a block diagram of the signal processing circuit in the present embodiment.
  • the signal processing circuit 5 calculates an angle of rotation by an amplifier 51 that amplifies the Hall voltage va that is an output signal of the Hall element 311, an amplifier 52 that amplifies the Hall voltage vb of the Hall element 312, and a waveform shaping circuit 53.
  • An angle calculation circuit 54 is provided.
  • the waveform shaping circuit 53 is provided with an amplitude adjustment circuit for making the amplitude the same. Furthermore, an offset compensation circuit that cancels the offset of the output signal and a phase adjustment circuit that makes the phase difference of the output signal exactly 90 degrees in electrical angle are provided.
  • Figure 4 is a circuit diagram of the waveform shaping circuit.
  • 531 and 532 are operational amplifiers constituting an offset compensation circuit
  • 533 and 534 are an adder 533 and subtractor 534 constituting a phase adjustment circuit
  • 535 and 5 36 are phase-adjusted signals.
  • This is an operational amplifier (amplitude adjustment circuit) that adjusts the amplitude of.
  • the outputs VA and VB of the operational amplifiers 535 and 536 are input to the angle calculation circuit 54.
  • the magnetic field detector 3 detects the magnetic flux density of the sine wave and cosine wave according to the rotation angle position, and outputs the Hall voltages va and vb as shown in FIG.
  • the Hall voltages va and vb are amplified by the amplifiers 51 and 52 of the signal processing circuit 5 and then input to the waveform shaping circuit 53.
  • the waveform shaping circuit 53 the offset, phase, and amplitude are adjusted.
  • the two-phase signals Va and Vb amplified by the amplifiers 51 and 52 are offset from the amplifiers 531 and 532 of the waveform shaping circuit shown in FIG. 4 and input to the adder 533 and subtracter 534; the phase difference is 90 The phase is adjusted to a degree. Further, the amplitude of the signals output from the adder 533 and the subtracter 534 is adjusted by the amplifiers 535 and 536. This amplitude adjusted The two-phase output signals VA and VB from the waveform shaping circuit 53 are input to the angle calculation circuit 54, and an angle signal is generated by tangent calculation.
  • the detected magnetic flux density waveform is displaced according to the amount of eccentricity.
  • the output signals of the opposing magnetic field detection elements are differentiated to eliminate the influence of eccentricity.
  • the magnetic field detection element portions for detecting the magnetic fields Bx and By in the two-axis directions are substantially at the same position, the rate of change in the amplitude values of the Hall voltages va and vb due to the influence of eccentricity is the same.
  • the processing functions of the waveform shaping circuit 53 and the angle calculation circuit 54 may be performed by software processing.
  • This encoder was evaluated using an encoder with 1 million rotations per rotation as a reference encoder, but an absolute position signal with extremely high resolution was obtained with 32000 rotations per rotation.
  • a permanent magnet a force using a samarium-cobalt-based magnet whose characteristic change due to temperature is small.
  • the permanent magnet other rare earth magnets, ferrite-based magnets, bonded magnets are used.
  • the same effect can be obtained even if the force magnetoresistive element described in the case where the Hall element is used as the magnetic field detecting element.
  • a method of calculating the absolute angle a method of digital calculation processing of a sine wave and cosine wave force is adopted, but the angle is obtained by a phase tracking method, a multiplication method, a phase modulation method, or the like. Also good.
  • FIG. 6 is a perspective view of a magnetic encoder showing a second embodiment of the present invention.
  • 2 ' is a ring-shaped permanent magnet.
  • a neodymium bonded magnet having an inner diameter of 3 mm, an outer diameter of 10 mm, and a thickness of 2 mm was magnetized in parallel in one direction.
  • the magnetic field detector 3 is a magnetic field installed on the rotation center axis 10 of the rotating body 1.
  • a field detection element unit 31 is provided to detect magnetic fields in the X and Y axes on the XY plane perpendicular to the rotation axis 11.
  • This embodiment differs from the first embodiment in that a ring-shaped permanent magnet is used as the permanent magnet. Since other configurations are the same as those of the first embodiment, the description thereof is omitted.
  • the permanent magnet can be mounted on the rotation shaft to be detected such as a motor. Therefore, the encoder and the detection target can be integrated, the configuration is simple, the vibration resistance is improved, and the size can be reduced.
  • FIG. 7 is a configuration diagram of a magnetic field detector showing a third embodiment of the present invention.
  • 3 shows an embodiment of the magnetic field detector.
  • Reference numerals 321 and 322 denote Hall element packages that detect a magnetic field in one direction.
  • the Hall element package is 2mm square and 0.5mm thick. It has two drive terminals (not shown) that supply drive current to the Hall element package and two output terminals that output Hall voltage.
  • a magnetic field detection element (not shown) having an outer diameter of 50 m is disposed at the center, and is connected to the drive terminal and the signal output terminal and molded with resin.
  • a magnetic field detection element (not shown) of the Hall element package is formed so as to detect a magnetic field parallel to the package surface.
  • the Hall element packages 321 and 322 are arranged on the rotation center axis 10 so that the magnetic field detection directions are approximately 90 degrees with respect to each other via the permanent magnet 3 and the lmm gap. Yes. Since it is difficult to install the two Hall element packages 321 and 322 so that the magnetic field detection direction is exactly 90 degrees in terms of mechanical angle, adjust the waveform shaping circuit so that the phase is 90 degrees.
  • FIG. 8 is a block diagram of a signal processing circuit in the present embodiment.
  • the Hall voltages Va + and Va ⁇ output from the Hall element package 321 and the Hall voltages Vb + and Vb ⁇ output from the Hall element package 322 are differentially input to the amplifiers 51 and 52 of the signal processing circuit 5, respectively. Since the subsequent processing of the waveform shaping circuit 53 and the angle calculation circuit 54 is the same as that of the first embodiment, the description thereof is omitted. As in the first example, this encoder was evaluated using an encoder with 1 million rotations per rotation as a reference encoder, but an absolute position signal with 16000 divisions was obtained.
  • FIG. 9 is a configuration diagram of a magnetic field detector showing a fourth embodiment of the present invention.
  • 3 shows an embodiment of the magnetic field detector.
  • the magnetic field detection element unit 31 in which two Hall elements 311 and 312 are arranged, the Hall element drive circuit 34 for driving the Hall element, and the amplification circuit for the Hall element output signal are integrated in one package.
  • the number of parts was reduced by using one package, the number of assembling steps was reduced, and the cost was reduced.
  • the signal is amplified and output, the S / N ratio is increased and noise resistance is improved.
  • the signal output is increased, the length of the signal line can be increased to 20m or more.
  • the Hall element drive circuit 34 was built in, the number of wires could be reduced.
  • FIG. 10 is a configuration diagram of the magnetic field detector in the magnetic encoder showing the fifth embodiment of the invention.
  • the magnetic field detection unit 3 receives the output signal from the magnetic field detection element unit 33, the magnetic field detection element unit 33 in which six Hall elements are integrated and arranged, the drive circuit 34 that supplies power to the magnetic field detection element, and the magnetic field detection element unit 33.
  • the sensor signal processing unit 36 for processing is configured.
  • the magnetic field detection element unit 33 is arranged on the rotation center axis of the rotating body 1 and detects a magnetic field in three axial directions on the XY plane perpendicular to the rotation axis.
  • FIG. 11 is an enlarged view of the magnetic field detection element unit.
  • the magnetic field detection element unit 33 includes a Hall element 331, 332, 333, 334, 335 with a plane perpendicular to the rotation axis and a magnetic field detection direction of 90, 150, 210, 270, 330, and 30 degrees, respectively. , 336 are formed using semiconductor technology.
  • the size of the magnetic field detection element unit 33 is 0.5 mm ⁇ , and the size of the magnetic field detection unit 3 is a square having a side of 5 mm.
  • This embodiment is different from the first embodiment in that the magnetic field detection element unit 33 is The point is that it detects a magnetic field in the three-axis direction on the vertical XY plane, and it has a three-phase to two-phase conversion circuit.
  • the magnetic field detecting element is a force in which two pairs of magnetic field detecting elements are provided at positions that are 180 degrees out of phase with each other.
  • Six magnetic field detection elements that detect magnetic fields in six directions including the opposite directions of 180 degrees are integrated and arranged, and the three-phase output signal from the magnetic field detection element unit 33 is also arranged in the magnetic field detection unit 3.
  • a sensor signal processing unit with a three-phase, two-phase conversion circuit that converts the signal into two phases is provided.
  • FIG. 12 is a graph showing the change in the magnetic field of the magnetic field detection element 33 when the permanent magnet rotates.
  • the disk-shaped permanent magnet 2 having parallel anisotropy magnetized parallel to the radial direction rotates.
  • the magnetic field change in the vicinity of the center of the magnetic field detection element unit 33 is shown.
  • the peak value of the magnetic field received by the Hall element is 0.25 ( ⁇ ), and the third harmonic component is 1.0e " 4 (T), so it is about 0.004% of the fundamental wave. It shows that a disk-like permanent magnet with parallel anisotropy generates a sinusoidal magnetic field with very little harmonic distortion.
  • the change in the magnetic field is converted into an electric signal by the magnetic field detection element unit 33.
  • FIG. 13 is a graph showing the signal output of the magnetic field detection element section.
  • the output waveform is a sinusoidal signal containing the second and third harmonic components, although not shown for the second harmonic.
  • the second harmonic component is generated because the center of the permanent magnet does not completely coincide with the center of the rotation axis and the center of the magnetic field detection element unit 33 due to an assembly error or the like. In other words, this occurs because the relative distance between the Hall elements 331 to 336 and the permanent magnet 2 varies slightly, depending on the rotation angle of the permanent magnet 2.
  • the Hall output voltage of the Hall element is not completely proportional to the detected magnetic field, and has a nonlinearity of about 1% of the ideal characteristics, so the third harmonic component is generated in the Hall element signal output.
  • Figure 14 shows the relationship between the detected magnetic flux density of the Hall element and the Hall output voltage. FFT analysis of the output voltage waveform of the Hall element was performed by applying a sinusoidal magnetic field without distortion, and the third harmonic component was included by 0.6%. This is due to the nonlinearity of the detected magnetic field and output voltage of the Hall element.
  • FIG. 15 is a circuit diagram of the sensor signal processing unit.
  • the sensor signal processing unit is composed of an input adjustment unit 360, a differential operation unit 370, and a three-phase to two-phase conversion unit 380.
  • the differential amplifiers 361 to 366 cancel the offset of the input signal and adjust the amplitude of each output signal to be constant.
  • Honore elements facing the differential operation unit 370! /, And each other! / That is, outputs of 331 and 334, 332 and 335, and 3 33 and 336 are input to differential amplification 371, 372, and 373.
  • outputs Val, Vbl, and Vcl with the harmonic components of the second multiple canceled are obtained.
  • the obtained Val, Vbl, and Vcl are input to the differential amplifiers 381 and 382, and Va and Vb in which the third-order multiple harmonic components are canceled are obtained.
  • the sensor signal processing section can reduce these harmonic components.
  • FIG. 16 is a graph showing the relationship between the second harmonic component and the amount of eccentricity.
  • the second harmonic component increases with the deviation (decentration) between the rotation center of the permanent magnet 2 and the center axis of the magnetic field detection element 33, but it is canceled by taking the differential of the Hall element outputs facing each other. Show you what you can do.
  • Fig. 17 is a graph showing the waveform of the output signal of the differential operation unit 370 of the sensor signal processing unit 36.
  • the output signals Val, Vbl, Vcl of the differential amplifiers 371, 372, 373 when the permanent magnet 2 is rotated at 6000 rpm Shows the development of
  • FIG. 18 is a graph obtained by performing FFT analysis on the output signal of the differential operation unit 370.
  • the output signal Val of the differential amplifier 371 is subjected to FFT analysis. It can be seen that the output signal Val ⁇ of the differential amplifier 371 contains 0.7% of the 3rd harmonic component due to the nonlinearity of the Hall output voltage of the Hall element.
  • FIG. 19 is a graph showing the waveform of the output signal of the sensor signal processing unit 36
  • FIG. 20 is a graph of the FFT analysis of the output signal of the three-phase / two-phase conversion unit.
  • the third-order harmonic component is reduced to 0.01% or less by the three-phase to two-phase converter 380.
  • FIG. 21 is a block diagram of the signal processing circuit 5.
  • 53 is a waveform shaping circuit for adjusting the amplitude and phase of a two-phase signal
  • 54 is an angle calculation circuit. Since the configuration of the waveform shaping circuit 53 is the same as that of the first embodiment, its description is omitted.
  • the waveform shaping circuit power output signals VA and VB are input to the angle calculation circuit 54, and an angle signal is generated by tangent calculation. This angle signal is transmitted to the host controller through communication circuit means (not shown).
  • the magnetic field detection element unit in which six magnetic field detection elements are integrated is arranged on the center of the rotation axis, and the rotation of the disk-shaped permanent magnet magnetized in one direction. Since the magnetic field on the axis is detected, a signal can be obtained with very little distortion.
  • the magnetic field detection element unit, the drive circuit, and the sensor signal processing unit are integrated and packaged in the magnetic field detection unit, a signal of higher harmonic components can be obtained, and electrostatic noise is noise resistance against electromagnetic noise. Performance has improved significantly.
  • the magnetic field detection element unit may be configured by three magnetic field detection elements.
  • Permanent magnets include other rare earth magnets, ferrite magnets, bonded magnets,
  • the Hall element is used as the magnetic field detection element.
  • the same effect can be obtained even when the magnetoresistive element is used.
  • the angle is obtained by digital calculation of a sine wave and cosine wave force, but the angle may be obtained by a phase tracking method, a multiplication method, a phase modulation method, or the like.
  • the third harmonic can be reduced by detecting a magnetic field in three axial directions using six magnetic field detecting elements.
  • five or ten magnetic field detecting elements are used. It is clear that the 5th-order harmonic component can be reduced by detecting the magnetic field in the 5-axis direction using.
  • the present invention can be applied to a magnetic encoder device that detects the rotation angle of a servo motor used as an actuator for a machine tool, a robot, or the like.

Abstract

La présente invention concerne un dispositif encodeur magnétique comprenant un nombre réduit de câbles d’alimentation électrique pour activer un élément de champ magnétique et de câbles signalétiques de sortie, économique et présentant un degré élevé de liberté d’installation. Un aimant permanent circulaire semblable à un disque (2) formant un corps de génération magnétique est magnétisé verticalement et en parallèle à un sens relatif à l’arbre rotatif (11) d’un corps rotatif (1). Une section de détection de champ magnétique (6) est placée sur un substrat de circuit de traitement (4), sur l’axe central (10) de rotation du corps de rotation (1). La section de détection de champ magnétique (6) comporte deux éléments de détection de champ magnétique (pas représentés), placés près l’un de l’autre, et ces éléments sont arrangés pour détecter des champs magnétiques se trouvant sur des plans verticaux à l’arbre rotatif, dans des sens différents l’un de l’autre. La section de détection de champ magnétique (6) détecte ces champs dans le sens de deux axes de X et Y et sur un plan vertical X-Y à l’arbre de rotation (11).
PCT/JP2006/321870 2005-11-14 2006-11-01 Dispositif encodeur magnetique WO2007055135A1 (fr)

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JP2014199184A (ja) * 2013-03-29 2014-10-23 Tdk株式会社 磁気センサシステム
JP2017161553A (ja) * 2017-06-22 2017-09-14 株式会社リコー 回転角度検出装置、モータシステム、画像処理装置及び回転角度検出方法
KR101798919B1 (ko) * 2016-01-25 2017-11-17 엘지전자 주식회사 회전전기기계
JP2019002942A (ja) * 2013-10-25 2019-01-10 株式会社リコー 回転検知装置及び回転検知方法
CN111750903A (zh) * 2020-07-07 2020-10-09 哈尔滨理工大学 一种绕组集成磁电编码器及其独立标定方法
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CN102472637A (zh) * 2009-09-08 2012-05-23 Ntn株式会社 旋转角度检测传感器
JP2011058870A (ja) * 2009-09-08 2011-03-24 Ntn Corp 回転角度検出センサ
US8896297B2 (en) 2009-09-08 2014-11-25 Ntn Corporation Rotating angle detecting sensor
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WO2011080935A1 (fr) * 2009-12-28 2011-07-07 株式会社ショーワ Dispositif de détection d'angle relatif, dispositif de détection d'angle de rotation, procédé de détection d'angle relatif et procédé de détection d'angle de rotation
GB2489350A (en) * 2009-12-28 2012-09-26 Showa Corp Relative angle detection device,rotation angle detection device, relative angle detection method and rotation angle detection method
CN102667412A (zh) * 2009-12-28 2012-09-12 株式会社昭和 相对角度检测装置、旋转角度检测装置、相对角度检测方法以及旋转角度检测方法
JP5611238B2 (ja) * 2009-12-28 2014-10-22 株式会社ショーワ 相対角度検出装置、回転角度検出装置、相対角度検出方法および回転角度検出方法
GB2489350B (en) * 2009-12-28 2016-10-05 Showa Corp Relative angle detection device, rotation angle detection device, relative angle detection method and rotation angle detection method
JP2012215415A (ja) * 2011-03-31 2012-11-08 Oriental Motor Co Ltd アブソリュートエンコーダ装置及びモータ
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JP2019002942A (ja) * 2013-10-25 2019-01-10 株式会社リコー 回転検知装置及び回転検知方法
KR101798919B1 (ko) * 2016-01-25 2017-11-17 엘지전자 주식회사 회전전기기계
JP2017161553A (ja) * 2017-06-22 2017-09-14 株式会社リコー 回転角度検出装置、モータシステム、画像処理装置及び回転角度検出方法
JP2020176933A (ja) * 2019-04-19 2020-10-29 三菱電機株式会社 角度検出装置
CN111750903A (zh) * 2020-07-07 2020-10-09 哈尔滨理工大学 一种绕组集成磁电编码器及其独立标定方法

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