WO2009084346A1 - Codeur magnétique - Google Patents

Codeur magnétique Download PDF

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Publication number
WO2009084346A1
WO2009084346A1 PCT/JP2008/071440 JP2008071440W WO2009084346A1 WO 2009084346 A1 WO2009084346 A1 WO 2009084346A1 JP 2008071440 W JP2008071440 W JP 2008071440W WO 2009084346 A1 WO2009084346 A1 WO 2009084346A1
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WO
WIPO (PCT)
Prior art keywords
phase
hall sensor
hall sensors
hall
angle
Prior art date
Application number
PCT/JP2008/071440
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English (en)
Japanese (ja)
Inventor
Yasushi Yoshida
Yuji Arinaga
Original Assignee
Kabushiki Kaisha Yaskawa Denki
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kabushiki Kaisha Yaskawa Denki filed Critical Kabushiki Kaisha Yaskawa Denki
Priority to JP2009547960A priority Critical patent/JPWO2009084346A1/ja
Publication of WO2009084346A1 publication Critical patent/WO2009084346A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields

Definitions

  • the present invention relates to a magnetic encoder device that detects the rotational position of a servo motor used in a robot, a machine tool, or the like.
  • FIG. 8 is a configuration diagram of a magnetic encoder showing the first prior art.
  • a concentric cylindrical magnetic body 3 on the outer circle of a disk-like permanent magnet 2 attached to a shaft 11. That is, the magnet 2 and the magnetic body 3 are opposed to each other with a gap.
  • Hall sensors 47 and 48 are mounted 90 ° apart in this gap, and a change in the magnetic flux density of the gap due to the rotation of the permanent magnet 2 is detected to detect the rotational position.
  • the magnetic encoder disclosed in the first prior art is magnetized on the outer periphery of a circular magnet and the Hall elements are arranged with a gap therebetween. There is a problem that the detection angle accuracy is deteriorated because the detection signal includes a harmonic component.
  • FIG. 9 is a configuration diagram of a magnetic encoder showing the second prior art.
  • reference numerals 41 to 46 denote six magnetic field detecting elements arranged on the inner side of the fixed body 30 at positions shifted from each other by a mechanical angle of 60 °.
  • the magnetic field detection elements 41 to 46 are a total of three pairs of two magnetic field detection elements 41 and 42, magnetic field detection elements 43 and 44, and magnetic field detection elements 45 and 46 provided at positions where the mechanical angle is 180 ° out of phase. It is composed of things.
  • FIG. 10 is a block diagram of a signal processing circuit according to the second prior art.
  • reference numerals 51 to 53 denote first differential amplifiers.
  • the first differential amplifier 51 calculates a differential signal between the output signal V41 of the magnetic field detection element 41 and the output signal V42 of the magnetic field detection element 42, and the first differential amplifier 51
  • the amplifier 52 calculates the differential signal between the output signal V43 of the magnetic field detection element 43 and the output signal V44 of the magnetic field detection element 44, and the first differential amplifier 53 outputs the output signal V45 of the magnetic field detection element 45 and the output of the magnetic field detection element 46.
  • the differential signal of the signal V46 is calculated.
  • the first differential amplifiers 51 to 53 remove the even-order harmonic components by taking the difference between the output signals of the pair of magnetic field detection elements located at 180 ° facing positions.
  • Reference numerals 54 and 55 denote second differential amplifiers for calculating differential signals of the first differential amplifiers 51 and 52 and the first differential amplifiers 52 and 53, respectively.
  • the second differential amplifiers 54 and 55 combine the two differential output signals after removing the harmonic components at the time of even numbers, and take the sum to obtain the remaining third-order harmonics included in the differential output signal. Remove ingredients.
  • the output signals Va and Vb of the second differential amplifiers 54 and 55 have a relationship of sine wave and cosine wave, and the angle calculation circuit 56 calculates tan ⁇ 1 (Va / Vb) of both signals to obtain the rotation angle ⁇ . Is calculated.
  • the number of magnetic field detection elements is increased from four to six, and the number of leads connected from the magnetic field detection elements to the signal processing circuit is increased, resulting in a problem that reliability is deteriorated and workability is deteriorated. .
  • the number of magnetic field detection elements is increased from four to six, and the number of leads connected from the magnetic field detection elements to the signal processing circuit is increased, resulting in a problem that reliability is deteriorated and workability is deteriorated.
  • it is impossible to remove odd-order harmonic components exceeding the third order there is a limit to high accuracy. Therefore, as another conventional technique, there are six magnetic fields at positions that are 60 ° out of phase with each other in the circumferential direction through a gap in a disk-shaped permanent magnet magnetized in one direction perpendicular to the rotation axis.
  • FIG. 11 is a block diagram of the position signal detector of the third prior art.
  • reference numeral 2 denotes a permanent magnet attached to a rotating body (not shown), which is magnetized in one direction perpendicular to the axial direction of the rotating body as indicated by an arrow M in the figure.
  • Arrow R indicates the direction of rotation.
  • a Hall sensor 4 detects the magnetic field of the permanent magnet 2 and converts it into a voltage.
  • FIG. 12 is a connection diagram of the Hall sensor of the magnetic encoder device according to the third prior art.
  • reference numeral 70 denotes a position signal detection unit comprising eight hall sensors.
  • a is a positive input terminal of the hall sensor 4
  • b is a negative input terminal
  • c is a positive output terminal
  • d is a negative output terminal.
  • the input sides of the eight hall sensors are connected in series and are driven by a power source 9 disposed in the signal processing circuit 80.
  • the output side is a parallel connection in which positive output terminals are connected to each other and negative output terminals are connected to each other as a set of Hall sensors at a mechanical angle of 60 °. That is, for the A 1- phase Hall sensor and the C 1- phase Hall sensor, the A 1- phase Hall sensor positive output terminal c and the C 1- phase Hall sensor positive output terminal c are connected, and the A 1- phase Hall sensor negative output terminal d and C A one- phase Hall sensor negative output terminal d is connected.
  • the B 1- phase Hall sensor and the D 1- phase Hall sensor, the A 2- phase Hall sensor and the C 2- phase Hall sensor, and the B 2- phase Hall sensor and the D 2- phase Hall sensor are connected in the same manner.
  • C 1 , D 1 , C are located at a mechanical angle of 60 ° with respect to A 1 , B 1 , A 2 and B 2 phase Hall sensors arranged in order every 90 °. 2 and D 2 phase hall sensors are arranged, and the outputs of the A 1 , B 1 , A 2 and B 2 phase hall sensors and the outputs of the C 1 , D 1 , C 2 and D 2 phase hall sensors are respectively connected in parallel. Is a point.
  • This connection is made by the position signal detection unit 70 shown in FIG. 12, and the number of lead wires from the position signal detection unit to the signal processing circuit 80 is usually the number of sensors ⁇ 2 as the signal line and the power line.
  • each Hall sensor 4 detects a change in the magnetic field and outputs a sinusoidal signal having one cycle per rotation.
  • the output signal from each Hall sensor includes even-order and odd-order harmonic components in addition to the fundamental signal of one cycle per rotation. It will be described that the third-order and even-order harmonic components can be suppressed in this embodiment.
  • FIG. 13 is a graph showing the detection principle in this prior art.
  • Va1 is the fundamental wave output signal obtained from the A 1- phase Hall sensor
  • Vc1 is the fundamental wave output signal obtained from the C 1- phase Hall sensor
  • Va3 is the third harmonic of the output signal of the A 1- phase Hall sensor.
  • signal, Vc3 is the third harmonic signal with the output signal of the C 1-phase Hall sensor.
  • Vac1 is an output signal when the outputs of the A 1- phase Hall sensor and the C 1- phase Hall sensor are connected in parallel.
  • a 1-phase and C 1 phase Hall sensor is arranged in 60 ° position in mechanical angle from each other, since the connecting both Hall sensors in parallel, A 1-phase And the third harmonic component contained in the output signal of the C 1- phase Hall sensor have a phase difference of 180 ° in electrical angle with each other, and the third harmonic component is cancelled. That is, a signal in which the third harmonic component is canceled is obtained between the output terminals of the Hall elements connected in parallel (between the terminals cd).
  • the third harmonic components are canceled between the output terminals connected in parallel. Signal.
  • Output signals from the four sets of Hall sensors connected in parallel are amplified by the differential amplifiers 81 to 84 in the signal processing circuit 80 shown in FIG. 12, and then output signals from the differential amplifiers 81 and 83, respectively.
  • Is differentially amplified by a differential amplifier 85, and output signals from the differential amplifiers 82 and 84 are differentially amplified by a differential amplifier 86.
  • the output signals from the differential amplifiers 81 and 83 and the output signals from the differential amplifiers 82 and 84 are output signals from the Hall sensor set that are 180 ° opposite to each other. Harmonic components are removed.
  • the output signal Va from the differential amplifier 85 and the output signal Vb from the differential amplifier 86 are input to the angle conversion circuit 87.
  • Va and Vb are sinusoidal signals having a phase difference of 90 ° from each other, and are converted into an angle signal ⁇ by calculation of tan ⁇ 1 (Va / Vb).
  • the magnetic encoder disclosed in the first prior art is magnetized on the outer periphery of a circular magnet and has Hall elements arranged with a gap, but the magnetic flux density distribution is distorted. There is a problem that the detection angle accuracy is deteriorated because the detection signal of the Hall element includes a harmonic component.
  • the magnetic encoder disclosed in the second prior art has six magnetic field detecting elements whose mechanical angles are shifted by 60 ° in the circumferential direction and are positioned 180 ° opposite to each other. By detecting a differential signal between certain magnetic field detection elements, even-order harmonic components are canceled, and the differential output signals are combined to remove third-order harmonic components.
  • the magnetic encoder disclosed in the third prior art is: Since the Hall elements arranged at 360 / N or 180 / N are arranged for the four Hall elements arranged in order every 90 ° and connected in parallel, the N-order harmonic components can be suppressed. . Further, since the outputs of the Hall elements are connected in parallel, a highly accurate magnetic encoder device can be provided without increasing the number of output signal leads.
  • the number of output signal leads is at least eight, and further wiring saving is necessary in terms of reliability and workability.
  • a differential amplifier is required to make the eight output signals from the Hall elements connected in parallel to four, and there is a problem that the circuit configuration is complicated and hinders downsizing of the signal processing unit. .
  • the present invention has been made in view of such problems, and provides a high-precision magnetic encoder device that reduces the number of lead wires from a magnetic field detection element to a signal processing circuit and has a simple circuit configuration. Objective.
  • the invention according to claim 1 is a disk-shaped or ring-shaped permanent magnet attached to the rotating body and magnetized in one direction perpendicular to the axial direction of the rotating body, and is opposed to the permanent magnet through a gap.
  • a magnetic encoder comprising a magnetic field detection element attached to a fixed body and a signal processing circuit for processing a signal from the magnetic field detection element
  • the magnetic field detection elements are sequentially arranged at 90 ° mechanical angles.
  • N 180 / N (where N is an odd number of 3 or more) C 1 , D 1 , C 2 and D 2 phase Hall sensors, and positive outputs of two Hall elements adjacent at an angle ⁇ Connect the terminals and negative output terminals respectively.
  • the invention described in claim 2 is characterized in that the N is 3.
  • the invention described in claim 3 is characterized in that the N is 5.
  • a disk-shaped or ring-shaped permanent magnet that is attached to a rotating body and is magnetized in one direction perpendicular to the axial direction of the rotating body, and a gap is provided in the permanent magnet.
  • a signal processing circuit for processing a signal from the magnetic field detection element, the magnetic field detection elements are arranged at 90 ° mechanical angles.
  • Angle A 1 360 / N with respect to the A 1 , B 1 , A 2 and B 2 phase Hall sensors arranged in order, and the A 1 , B 1 , A 2 and B 2 phase Hall sensors.
  • the invention described in claim 5 is characterized in that the N 1 is 3 and the N 2 is 5.
  • the Hall sensors arranged at 360 / N or 180 / N at the mechanical angle are arranged for the four Hall sensors arranged at intervals of 90 ° at the mechanical angle, respectively.
  • N-order harmonic components can be suppressed.
  • the output of the Hall sensor at a position that is 360 / N or 180 / N different in mechanical angle is connected in parallel, and the output of the Hall sensor that is at a position opposite to the mechanical angle by 180 ° is connected in reverse parallel.
  • the number of output signal leads can be reduced. Accordingly, the number of leads to the signal processing circuit is reduced, and a differential amplifier for converting the eight output signals from the Hall sensor to four becomes unnecessary, and a highly accurate magnetic encoder device having a simple circuit configuration. Can be provided.
  • an arrangement of 360 / N 1 or 180 / N 1 in mechanical angle and 360 / N respectively Since the Hall sensors are arranged at 2 or 180 / N 2 and are connected in parallel, the harmonic components of a plurality of orders of N 1st order and N 2nd order can be removed.
  • the arrangement of 360 / N 1 or 180 / N 1 and the output of the Hall sensor at different positions of 360 / N 2 or 180 / N 2 are connected in parallel, and the Hall sensor at a position facing 180 ° is connected. Since the outputs are connected in antiparallel, the number of output signal leads can be reduced. Accordingly, the number of leads to the signal processing circuit is reduced, and a differential amplifier for reducing the 16 output signals from the Hall sensor to 8 is unnecessary, and a high-precision magnetic encoder with a simple circuit configuration is provided.
  • An apparatus can be provided.
  • the block diagram of the position signal detection part of the magnetic-type encoder apparatus which shows 1st Example of this invention.
  • Connection diagram of hall sensor of magnetic encoder device of first embodiment of the present invention Connection diagram showing another Hall sensor driving method of the magnetic encoder device according to the first embodiment of the present invention.
  • the block diagram of the position signal detection part of the magnetic-type encoder apparatus which shows 2nd Example of this invention.
  • the block diagram of the position signal detection part of the magnetic-type encoder apparatus which shows 3rd Example of this invention.
  • Connection diagram of Hall sensor of magnetic encoder device of third embodiment of the present invention The block diagram of the position signal detection part of the magnetic-type encoder apparatus which shows 4th Example of this invention.
  • Configuration diagram of magnetic encoder showing first prior art Configuration diagram of magnetic encoder showing second prior art Block diagram of signal processing circuit of magnetic encoder in second prior art Configuration diagram of position signal detector of magnetic encoder device showing third prior art Connection diagram of Hall sensor of magnetic encoder device in third prior art Graph showing the detection principle of the magnetic encoder device in the third prior art
  • Rotating body 11 Shaft (Rotating shaft) 2 Permanent magnet 21 Ring-type permanent magnet 3 Magnetic body 30 Fixed body 4, 47, 48 Hall sensor 40 Position signal detection unit 41-46 Magnetic field detection element 50, 80 Signal processing circuit 51-53 First differential amplifier 54, 55 First 2 differential amplifiers 56 and 87 angle calculation circuit 70 position signal detectors 81 to 86 differential amplifier 9 power supply
  • FIG. 1 is a configuration diagram of a position signal detector of a magnetic encoder device showing a first embodiment of the present invention.
  • reference numeral 2 denotes a permanent magnet attached to a rotating body (not shown), which is magnetized in one direction perpendicular to the axial direction of the rotating body as indicated by an arrow M in the figure.
  • Arrow R indicates the direction of rotation.
  • a Hall sensor 4 detects the magnetic field of the permanent magnet 2 and converts it into a voltage.
  • FIG. 2 is a connection diagram of the Hall sensor of the magnetic encoder device according to the present embodiment.
  • reference numeral 70 denotes a position signal detection unit comprising eight hall sensors.
  • a is a positive input terminal of the hall sensor 4
  • b is a negative input terminal
  • c is a positive output terminal
  • d is a negative output terminal.
  • the input sides of the eight hall sensors are connected in series and are driven by a power source 9 disposed in the signal processing circuit 80.
  • a terminal that outputs a positive voltage is a terminal that outputs a negative voltage relative to the negative output terminal d.
  • the output side is a parallel connection in which positive output terminals are connected to each other and negative output terminals are connected to each other as a set of Hall sensors at a mechanical angle of 60 °. That is, for the A 1- phase Hall sensor and the C 1- phase Hall sensor, the A 1- phase Hall sensor positive output terminal c and the C 1- phase Hall sensor positive output terminal c are connected, and the A 1- phase Hall sensor negative output terminal d and C A one- phase Hall sensor negative output terminal d is connected.
  • the B 1- phase Hall sensor and the D 1- phase Hall sensor, the A 2- phase Hall sensor and the C 2- phase Hall sensor, and the B 2- phase Hall sensor and the D 2- phase Hall sensor are connected in the same manner.
  • each Hall sensor 4 detects a change in the magnetic field and outputs a sinusoidal signal having one cycle per rotation.
  • the output signal from each Hall sensor 4 includes even-order and odd-order harmonic components in addition to the fundamental wave signal of one cycle per rotation.
  • the third and even harmonic components can be suppressed by connecting the output signals of the Hall sensor 4 arranged at a mechanical angle of 60 ° in parallel as in the third prior art. is there.
  • the output signals from the Hall sensor groups that are 180 ° opposite to each other are differentiated. It can be obtained as a motion signal.
  • the differential signal obtained from the A 1 , C 1 , A 2 , C 2 phase Hall sensor and the differential signal obtained from the B 1 , D 1 , B 2 , D 2 phase Hall sensor are differentially amplified by differential amplifiers 85 and 86, respectively.
  • the output signal Va from the differential amplifier 85 and the output signal Vb from the differential amplifier 86 are input to the angle conversion circuit 87.
  • Va and Vb are sinusoidal signals having a phase difference of 90 ° from each other, and are converted into an angle signal ⁇ by calculation of tan ⁇ 1 (Va / Vb).
  • the output signals from the hall sensor sets at the position opposite to the 180 ° position in the signal processing circuit are obtained by connecting in parallel the output terminals of the hall sensors at the mechanical angle of 60 ° in the position signal detection unit. Therefore, the third-order and even-order harmonic components are suppressed, and an accurate angle signal can be obtained with a small number of lead wires.
  • a differential amplifier for converting the eight output signals from the Hall sensor to four becomes unnecessary, the circuit configuration can be simplified, and the signal processing unit can be downsized.
  • the driving power source of the Hall sensor can be a constant voltage power source.
  • FIG. 4 is a configuration diagram of a position signal detector of a magnetic encoder device showing a second embodiment of the present invention.
  • reference numeral 2 denotes a permanent magnet attached to a rotating body (not shown), which is magnetized in one direction perpendicular to the axial direction of the rotating body as indicated by an arrow M in the figure.
  • a Hall sensor 4 detects the magnetic field of the permanent magnet 2 and converts it into a voltage.
  • This embodiment differs from the first embodiment, C 1 phase, D 1 phase, C 2 phase, D 2 phase Hall sensors A 1-phase, B 1 phase, A 2-phase, with respect to B 2 phase Hall sensors Each point is arranged at a position of 36 °.
  • connection of the Hall sensor and the connection to the signal processing circuit in the position signal detection unit are the same as in FIG.
  • the hall sensors forming a pair are arranged at a mechanical angle of 36 °, and the outputs of both hall sensors are connected in parallel.
  • the fifth harmonic components included in the output signals of the Hall sensors that form a pair have a phase difference of 180 ° in electrical angle with each other, and the fifth harmonic components are cancelled. That is, a signal in which the fifth harmonic component is canceled is obtained between the output terminals of the Hall elements connected in parallel (between the terminals cd).
  • FIG. 5 is a block diagram of a position signal detector of a magnetic encoder device showing a third embodiment of the present invention.
  • FIG. 6 is a connection diagram of the Hall sensor of the magnetic encoder device according to this embodiment.
  • the outputs of the three hall sensors are connected in parallel by connecting the positive outputs and the negative outputs of the three hall sensors of A 1- phase, C 1- phase and E 1- phase hall sensors. ing.
  • the Hall sensors that are 180 ° opposite to each other are connected in reverse parallel with the positive output terminal and the negative output terminal connected to each other.
  • the A 1- phase Hall sensor positive output terminal c and the A 2- phase Hall sensor negative output terminal d are connected, and the A 1- phase Hall sensor negative output terminal d and A A two- phase Hall sensor positive output terminal c is connected.
  • B 1 phase hall sensor and B 2 phase hall sensor, C 1 phase hall sensor and C 2 phase hall sensor, D 1 phase hall sensor and D 2 phase hall sensor, E 1 phase hall sensor and E 2 phase hall sensor, F 1 are connected in the same for the phase Hall sensor and F 2 phase Hall sensor.
  • the mechanical angle canceling the third harmonic component with respect to the A 1 phase, the B 1 phase, the A 2 phase, and the B 2 phase Hall sensor, and the fifth harmonic component are at a mechanical angle. Since the Hall sensors are respectively arranged at 36 ° mechanical angles for canceling and the signals connected in parallel are taken out, the third harmonic component and the fifth harmonic component can be removed. Further, the number of lead wires from the position signal detection unit 70 to the signal processing circuit 80 may be six as in the first and second embodiments, and reliability and workability decrease due to the increase in Hall sensors. Can be prevented. In addition, a differential amplifier for converting the eight output signals from the Hall sensor to four is unnecessary, the circuit configuration can be simplified, and the signal processing unit can be downsized.
  • FIG. 7 is a block diagram of a position signal detector of a magnetic encoder device showing a fourth embodiment of the present invention.
  • 21 is a ring-type permanent magnet attached to a rotating body (not shown) and is magnetized in one direction perpendicular to the axial direction of the rotating body as indicated by an arrow M in the figure.
  • Reference numeral 4 denotes a hall sensor disposed inside the ring-type permanent magnet 21 via a gap.
  • This embodiment is different from the third embodiment in that the permanent magnet 2 is a ring-shaped permanent magnet 21. Accordingly, the present invention can be applied to an outer rotor type motor having a hollow shaft that does not rotate.
  • the present invention can be used as a magnetic encoder device that detects the rotational position of a servo motor used in a robot or a machine tool.

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  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

L'invention vise à procurer un codeur magnétique de haute précision doté d'un circuit de configuration simple, réduisant le nombre de fils de connexion d'un élément de détection de champ magnétique à un circuit de traitement de signal. Des capteurs à effet Hall des phases A1, B1, A2 et B2 sont disposés de façon séquentielle autour d'un aimant permanent (2) à un intervalle de 90 degrés d'angle mécanique, à travers des entrefers. Des capteurs à effet Hall des phases C1, D1, C2 et D2 sont disposés dans des positions situées respectivement à 60 degrés d'angle mécanique, à l'écart des capteurs à effet Hall des phases A1, B1, A2 et B2. Des connexions sont établies respectivement entre les bornes positives de sortie, et entre les bornes négatives de sortie, de paires correspondantes de capteurs à effet Hall situés à des positions écartées les unes des autres de 60 degrés d'angle mécanique. En outre, des connexions parallèles inversées sont établies entre les bornes de sortie de paires correspondantes de capteurs à effet Hall diamétralement opposées.
PCT/JP2008/071440 2007-12-27 2008-11-26 Codeur magnétique WO2009084346A1 (fr)

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JP2009547960A JPWO2009084346A1 (ja) 2007-12-27 2008-11-26 磁気式エンコーダ装置

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JP2007-335659 2007-12-27

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WO2009084346A1 true WO2009084346A1 (fr) 2009-07-09

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102744724A (zh) * 2011-04-18 2012-10-24 库卡罗伯特有限公司 具有可彼此相对转动的节肢的机器
JPWO2017090146A1 (ja) * 2015-11-26 2018-03-15 三菱電機株式会社 角度検出装置及び電動パワーステアリング装置
KR20190122144A (ko) 2018-04-19 2019-10-29 니혼 덴산 산쿄 가부시키가이샤 인코더
KR20190122141A (ko) 2018-04-19 2019-10-29 니혼 덴산 산쿄 가부시키가이샤 인코더
CN112189127A (zh) * 2018-06-01 2021-01-05 美蓓亚三美株式会社 磁性检测单元、角度检测装置、位置检测装置、电机控制装置、电机机构以及电机控制方法

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JPS5138448U (fr) * 1974-09-17 1976-03-23
JPH09133550A (ja) * 1995-09-30 1997-05-20 Dr Johannes Heidenhain Gmbh 磁気位置測定装置およびその使用方法
WO2007132603A1 (fr) * 2006-05-12 2007-11-22 Kabushiki Kaisha Yaskawa Denki Codeur magnétique

Patent Citations (3)

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Publication number Priority date Publication date Assignee Title
JPS5138448U (fr) * 1974-09-17 1976-03-23
JPH09133550A (ja) * 1995-09-30 1997-05-20 Dr Johannes Heidenhain Gmbh 磁気位置測定装置およびその使用方法
WO2007132603A1 (fr) * 2006-05-12 2007-11-22 Kabushiki Kaisha Yaskawa Denki Codeur magnétique

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102744724A (zh) * 2011-04-18 2012-10-24 库卡罗伯特有限公司 具有可彼此相对转动的节肢的机器
CN102744724B (zh) * 2011-04-18 2016-01-06 库卡罗伯特有限公司 具有可彼此相对转动的节肢的机器
JPWO2017090146A1 (ja) * 2015-11-26 2018-03-15 三菱電機株式会社 角度検出装置及び電動パワーステアリング装置
US10584953B2 (en) 2015-11-26 2020-03-10 Mitsubishi Electric Corporation Angle detection device and electric power steering device
KR20190122144A (ko) 2018-04-19 2019-10-29 니혼 덴산 산쿄 가부시키가이샤 인코더
KR20190122141A (ko) 2018-04-19 2019-10-29 니혼 덴산 산쿄 가부시키가이샤 인코더
CN112189127A (zh) * 2018-06-01 2021-01-05 美蓓亚三美株式会社 磁性检测单元、角度检测装置、位置检测装置、电机控制装置、电机机构以及电机控制方法
US20210199470A1 (en) * 2018-06-01 2021-07-01 Minebea Mitsumi Inc. Magnetic detection unit, angle detection device, position detection device, motor control device, motor unit, and motor control method

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