WO2007026872A1 - Unité de vibration ultrasonique et pulvérisateur ultrasonique - Google Patents

Unité de vibration ultrasonique et pulvérisateur ultrasonique Download PDF

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Publication number
WO2007026872A1
WO2007026872A1 PCT/JP2006/317328 JP2006317328W WO2007026872A1 WO 2007026872 A1 WO2007026872 A1 WO 2007026872A1 JP 2006317328 W JP2006317328 W JP 2006317328W WO 2007026872 A1 WO2007026872 A1 WO 2007026872A1
Authority
WO
WIPO (PCT)
Prior art keywords
vibration
ultrasonic
plate
piezoelectric ceramic
ultrasonic vibration
Prior art date
Application number
PCT/JP2006/317328
Other languages
English (en)
Japanese (ja)
Inventor
Seichin Kinuta
Daisuke Takahata
Original Assignee
Optnics Precision Co., Ltd.
Fukoku Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Optnics Precision Co., Ltd., Fukoku Co., Ltd. filed Critical Optnics Precision Co., Ltd.
Priority to JP2007533355A priority Critical patent/JP4906728B2/ja
Publication of WO2007026872A1 publication Critical patent/WO2007026872A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0638—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers spray being produced by discharging the liquid or other fluent material through a plate comprising a plurality of orifices
    • B05B17/0646—Vibrating plates, i.e. plates being directly subjected to the vibrations, e.g. having a piezoelectric transducer attached thereto

Definitions

  • the present invention relates to an ultrasonic vibration unit and an ultrasonic atomizer, and more particularly to an ultrasonic vibration unit suitable for atomizing a liquid such as water or a chemical solution and an ultrasonic atomizer using the ultrasonic vibration unit.
  • FIG. 10 Conventionally, for example, a configuration shown in FIG. 10 is known as an atomizing device for atomizing a liquid such as water or a chemical solution.
  • the ultrasonic vibration unit 7 includes a ring-plate-shaped piezoelectric ceramic 13 in which electrodes l la and l ib are formed on the first and second surfaces dl and d2 facing each other.
  • the outer surface of the disc-shaped vibrating plate 15 is overlapped with the second surface (bottom surface) d2 of the piezoelectric ceramic 13 to close the through-hole, and the vibrating plate 15 has a number of small holes 17 in the thickness direction.
  • the ultrasonic atomizer shown in FIG. 10 applies a predetermined AC drive voltage to the electrodes l la and l ib of the ultrasonic vibration unit 7 and spreads (lengths) vibrations to the piezoelectric ceramic 13.
  • the vibration plate 15 is ultrasonically vibrated based on this vibration, and the water 3 supplied from the lower part of the liquid storage unit 1 to the vibration plate 15 by the supply unit 9 is atomized from a large number of small holes 17 to the outside.
  • Reference numeral 19 in FIG. 10 is a stopper plugging the water 3 entrance.
  • Patent Document 1 Japanese Patent No. 2698488
  • the outer peripheral portion of the disk-shaped vibrating plate 15 is overlaid on the second surface d2 so as to close the through hole of the ring-shaped piezoelectric ceramic 13.
  • the entire circumference of the outer periphery of the disc-shaped vibrating plate 15 is fixed to the second surface d 2 of the piezoelectric ceramic 13. For this reason, stress is applied from the entire circumference to the center of the vibration plate 15 which is ultrasonically vibrated by expansion vibration (radial expansion and contraction) of the piezoelectric ceramic 13, so that the vibration plate 15 is sufficiently There is a difficulty that vibration deformation (deflection deformation) is difficult.
  • the present invention has been made to solve such a problem, and an ultrasonic vibration unit capable of improving the vibration efficiency of a vibration plate fixed to piezoelectric ceramics and a superfine atomization efficiency.
  • An object is to provide a sonic atomizer.
  • the ultrasonic vibration unit has first and second electrodes on the first and second surfaces facing each other in the thickness direction, and spread vibration. And a vibrating plate having a large number of small holes and fixed at opposite ends of the piezoelectric ceramic. The vibrating plate is mounted on the basis of the vibration of the piezoelectric ceramic. It is to vibrate ultrasonically.
  • a frame-type piezoelectric ceramic means a piezoelectric ceramic having a through hole in its thickness direction (polarization direction) and having an overall shape of a rectangular shape or a ring shape. Also, the width and thickness dimensions of the frame portion are arbitrary. In addition, a piezoelectric ceramic having a shape having a notch in a part of the frame portion is also included in the frame-type piezoelectric ceramic.
  • a gap may be formed between a width direction end portion orthogonal to the both end direction of the vibration plate and the piezoelectric ceramic.
  • the ultrasonic vibration unit according to the present invention may have a configuration in which a plurality of the plates to be vibrated are arranged side by side on the piezoelectric ceramics at intervals.
  • a single notch is formed in the piezoelectric ceramic on one end side of the plurality of vibrating plates, and the notch is avoided. It is also possible to arrange these vibrating plates.
  • the ultrasonic vibration unit it is also possible to adopt a configuration in which the slope of the protrusion is a drainage gradient of the liquid adhering to the vibration plate.
  • ultrasonic atomizer which concerns on this invention is comprised using one of the ultrasonic vibration units mentioned above.
  • the ultrasonic vibration unit of the present invention having such means has first and second electrodes facing each other in the thickness direction, and has a large number of small holes at the opposing portion of the piezoelectric ceramic. Both ends of the driven plate are fixed to a frame-type piezoelectric ceramic. Therefore, no stress is applied from the entire circumference to the central portion of the vibration plate 15 that is ultrasonically vibrated by the expansion vibration (radial expansion and contraction) of the piezoelectric ceramic 13. Therefore, based on the vibration of the piezoelectric ceramic, Since the vibration plate is easily deformed by vibration (flexure deformation), the vibration efficiency of the vibration plate can be improved.
  • the width direction end portion of the vibration plate is the piezoelectric ceramic and the machine. Therefore, it is possible to further improve the efficiency of ultrasonic vibration of the vibration plate.
  • the vibration plate is provided with a protrusion, a portion having a different rigidity is formed on the vibration plate, and thus when the ultrasonic atomizer is configured using the vibration plate, the atomization efficiency is improved. There is an advantage to improve.
  • the liquid atom adhering to the vibration plate is formed when the ultrasonic atomizer is configured using the slope. Is easy to flow into the air gap, which has the advantage of further improving the atomization efficiency.
  • 1 and 2 are a plan view and a cross-sectional view showing an ultrasonic vibration unit according to the present invention.
  • the ultrasonic vibration unit 21 is a ring plate-shaped piezoelectric ceramic 2
  • the ultrasonic vibration unit 21 is supported by the apparatus by the support member 5 as shown in FIG. 10 described above, the support member is not shown because it is not a main part of the present invention.
  • the piezoelectric ceramic 23 is formed into a thin plate shape from a conventionally known ultrasonic piezoelectric material, for example, lead zirconate titanate or a material in which this lead is replaced by molybdenum, and is provided with polarization in the thickness direction. .
  • the piezoelectric ceramic 23 has a first surface 29a made of a conductive material such as gold on the first surface (upper surface in the drawing) d3 facing in the thickness direction.
  • a similar second electrode 29b is formed in a ring band shape slightly smaller than the outer shape of the piezoelectric ceramic 23, and lead wires (not shown) are connected to each other.
  • the vibration plate 27 is made of a thin conductive material plate such as a nickel material, for example, and its both end portions are overlapped with the opposite portion of the second surface d4 of the piezoelectric ceramic 23, and a conventionally known method such as an adhesive is used. It is fixed.
  • the vibrating plate 27 is formed with a plurality of (numerous) fine holes 33 penetrating in the thickness direction. These small holes 33 are tapered such that the diameter on the contact surface (upper surface) side with the piezoelectric ceramic 23 is smaller than the diameter on the opposing surface (lower surface) side. In FIG. 1, the illustration of the small hole 33 is omitted, and in FIG. 2, it is exaggerated.
  • a liquid supply unit 35 such as a sponge is applied to the lower surface of the vibration plate 27, and from the lower part of the liquid storage unit as in the ultrasonic atomizer shown in FIG.
  • the supply unit 35 When water is supplied by the supply unit 35, the water 3 is atomized and sent out through a large number of small holes 33.
  • the ultrasonic vibration unit 21 of the present invention has the first and second electrodes 29a on the first and second surfaces d3 and d4, which are opposite surfaces in the thickness direction of the piezoelectric ceramic 23,
  • a rectangular vibrating plate 27 having a large number of small holes 33 formed by forming 29b is arranged so as to cross the hollow portion 25 of the piezoelectric ceramic 23, and both end portions thereof are overlapped and fixed. .
  • the vibration plate 27 whose both ends are fixed to the opposing portion of the piezoelectric ceramic 23 is mainly long in the longitudinal direction. Stress is applied in the direction T, that is, mainly in a single direction. Therefore, the vibration plate 27 is easily subjected to vibration deformation (bending deformation) due to the vibration of the piezoelectric ceramic 23, and large ultrasonic vibration is easily generated. The vibration efficiency of the vibration plate 27 can be improved.
  • FIG. 3 shows the amount of atomization when the width W of the vibration plate 27 is changed without changing the shape of the piezoelectric ceramic 23 and the length direction ⁇ of the vibration plate 27.
  • the vibration plate 27 in the present invention is not limited to a rectangular shape as shown in FIG.
  • the vibration plate 27 is oblong as shown in Fig. 4A, rectangular as shown in Fig. B, with four corners cut diagonally in a straight line, and cut out into four curves as shown in Fig. C. Rectified rectangle, rectangle with four corners cut out in an L shape as shown in Fig. D, rough rectangle with the center in the longitudinal direction bulged as shown in Fig. E, both ends as shown in Fig. F It can be implemented in various shapes such as a substantially rectangular shape that is narrowed by cutting into a concave shape near the portion, and a somewhat elongated shape formed in the direction of both ends overlapping the piezoelectric ceramic 23 is preferable. In addition, it is preferable that the vibrating plate 27 has a large area at the central portion with which the supply unit 35 contacts in terms of atomization efficiency.
  • the vibration plate 27 according to the present invention has a protrusion 37 at the center in the longitudinal direction.
  • a protrusion 37 By providing a portion with different rigidity on the vibration plate 27, there is an advantage of improving the atomization efficiency.
  • the slope of the protrusion 37 functions as a drainage gradient of the liquid adhering to the vibration plate 27, it is easier to improve the atomization efficiency than the liquid adhering to the vibration plate 27 easily flows down.
  • the plate 27 By forming one side of the plate 27 into a semicircular shape, it is possible to close one of the gaps 31.
  • each of the vibration plates 27 can be formed in a disk shape, so that each of the gaps 31 can be closed.
  • only the both ends of the vibration plate 27 are fixed to the facing portion of the piezoelectric ceramic 23.
  • the configuration shown in Fig. 6 includes a first or second electrode 41a, 41b (second electrode 41b) on the opposing surfaces of a pair of opposing sides 39a, 39b of a rectangular or quadrangular frame-type piezoelectric ceramic 39. Can't see .
  • the first and second electrodes 41a, 41b are not formed, and the other ends of the pair of opposing sides 39c, 39d are overlapped and fixed to the center of the above-mentioned rectangular vibration plate 27.
  • the ultrasonic vibration unit 43 having such a configuration, when the same AC drive voltage is applied between the first and second electrodes 41a and 41b, the distance between the opposing sides 39c and 39d of the frame-type piezoelectric ceramic 39 increases. In other words, the vibrating plate 27 vibrates so as to narrow, and stress is applied to the vibrating plate 27 in a single longitudinal direction. Therefore, the vibration plate 27 is easily subjected to vibration deformation (flexure deformation), and the above-described effect can be obtained in which large ultrasonic vibration is easily generated.
  • FIG. 7 is the same as that of the frame-type piezoelectric ceramic 39 shown in FIG. 6, except that the first and second electrodes 41a and 41b (not shown) are not formed on the pair of opposing sides 39c and 39d.
  • the first and second electrodes 41a and 41b are not shown (the same applies to FIG. 9).
  • a notch 47 is formed on one of the opposing sides 39c and 39d.
  • the frame-shaped piezoelectric ceramic includes a ring plate shape, and in addition to the closed frame shape, a cutout portion 47 is provided. Includes C-shapes.
  • the ultrasonic vibration units 21, 43, 45, and 49 according to the present invention can be used as vibration sources for various devices and applications, such as when powder is scattered.
  • the ultrasonic atomization apparatus of the present invention using the above-described ultrasonic vibration units 21, 43, 45, and 49 includes a supply unit 35 that supplies a stored liquid in a desired direction, and a thickness direction.
  • the first and second surfaces d3 and d4 that face each other at the first and second electrodes 29a, 29b, 41a, and 41b, respectively, and the frame-type piezoelectric ceramics 23 and 39 that spread and vibrate, and a number of small holes
  • the liquid force supplied by the supply unit 35 has a configuration that is atomized by the ultrasonic vibration of the vibration plate 27 based on the vibration of the piezoelectric ceramics 23 and 39.
  • the present invention is suitable for atomizing a liquid such as water or a chemical solution.
  • FIG. 1 is a plan view showing an embodiment of an ultrasonic vibration unit according to the present invention.
  • FIG. 2 is a cross-sectional view of the ultrasonic vibration unit shown in FIG.
  • FIG. 3 is a diagram showing the atomization characteristics when the ultrasonic vibration unit shown in FIG. 1 is used in an ultrasonic atomizer.
  • FIG. 4 is a view showing still another example of a vibration plate used in the ultrasonic vibration unit of FIG.
  • FIG. 5 is a perspective view A and a sectional view B (a cross section between bb in FIG. 5A) showing another example of a vibration plate used in the ultrasonic vibration unit of FIG.
  • FIG. 6 is a plan view showing another embodiment of the ultrasonic atomizer according to the present invention.
  • FIG. 7 is a plan view showing another embodiment of the ultrasonic atomizer according to the present invention.
  • FIG. 8 is a cross-sectional view showing an example of use of the ultrasonic vibration unit shown in FIG.
  • FIG. 9 is a plan view showing still another embodiment of the ultrasonic atomizer according to the present invention.
  • FIG. 10 is a schematic cross-sectional view showing an atomizing apparatus that serves as a reference for the present invention.
  • FIG. 11 is a plan view A and a sectional view B showing a conventional ultrasonic vibration unit.

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  • Special Spraying Apparatus (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)

Abstract

La présente invention concerne une unité de vibration ultrasonique comportant une céramique piézoélectrique et utilisée dans un pulvérisateur, l’efficacité de vibration d’une plaque devant vibrer fixée à la céramique piézoélectrique étant améliorée. L’unité de vibration ultrasonique selon l’invention (21) comprend une céramique piézoélectrique en forme de plaque annulaire (23) et une plaque oblongue devant vibrer (27) fixée à cette céramique. La céramique piézoélectrique (23) comporte une première et une seconde électrodes (29a, 29b) sur une première et une seconde surfaces opposées (d3, d4). La plaque devant vibrer (27) comporte de nombreux pores fins (33), est disposée de façon à traverser la portion creuse (25) de la céramique piézoélectrique (23) et est fixée avec ses extrémités opposées superposées sur la céramique piézoélectrique (23).
PCT/JP2006/317328 2005-09-02 2006-09-01 Unité de vibration ultrasonique et pulvérisateur ultrasonique WO2007026872A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007533355A JP4906728B2 (ja) 2005-09-02 2006-09-01 超音波振動ユニットおよび超音波霧化装置

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JP2005254509 2005-09-02
JP2005-254509 2005-09-02

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WO2007026872A1 true WO2007026872A1 (fr) 2007-03-08

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016147248A (ja) * 2015-02-13 2016-08-18 学校法人日本大学 霧化装置
CN110918358A (zh) * 2019-12-06 2020-03-27 湖南嘉业达电子有限公司 一种可解决正压渗水的微孔雾化元件及其制备方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015232405A (ja) * 2014-06-09 2015-12-24 東京理化器械株式会社 スプレードライヤ
KR101685525B1 (ko) * 2014-12-19 2016-12-12 (주)코윈 초음파 발생장치

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Publication number Priority date Publication date Assignee Title
JPS4928714U (fr) * 1972-06-15 1974-03-12
JPS6239870U (fr) * 1985-08-23 1987-03-10
JP2003535692A (ja) * 2000-06-19 2003-12-02 エス．シー． ジョンソン アンド サン、インコーポレイテッド 振動式噴霧装置の液流制御を維持するための方法及び装置
JP2004223380A (ja) * 2003-01-22 2004-08-12 Koji Toda 架橋型超音波霧化装置

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JP2890263B2 (ja) * 1989-12-26 1999-05-10 ノードソン株式会社 洗浄方法
JP3042333B2 (ja) * 1994-10-18 2000-05-15 オムロン株式会社 電気信号変位変換装置、当該変換装置を用いた機器、および当該変換装置を用いた流体搬送装置の駆動方法
JP2002016626A (ja) * 2000-06-29 2002-01-18 Nippon Telegraph & Telephone West Corp データ伝送方法およびシステム
JP3754892B2 (ja) * 2000-11-30 2006-03-15 京セラ株式会社 霧化装置用圧電共振器

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4928714U (fr) * 1972-06-15 1974-03-12
JPS6239870U (fr) * 1985-08-23 1987-03-10
JP2003535692A (ja) * 2000-06-19 2003-12-02 エス．シー． ジョンソン アンド サン、インコーポレイテッド 振動式噴霧装置の液流制御を維持するための方法及び装置
JP2004223380A (ja) * 2003-01-22 2004-08-12 Koji Toda 架橋型超音波霧化装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016147248A (ja) * 2015-02-13 2016-08-18 学校法人日本大学 霧化装置
CN110918358A (zh) * 2019-12-06 2020-03-27 湖南嘉业达电子有限公司 一种可解决正压渗水的微孔雾化元件及其制备方法

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JPWO2007026872A1 (ja) 2009-03-12
JP4906728B2 (ja) 2012-03-28

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