WO2007025485A1 - Detecteur de rayons x et procede de fabrication du detecteur - Google Patents

Detecteur de rayons x et procede de fabrication du detecteur Download PDF

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Publication number
WO2007025485A1
WO2007025485A1 PCT/CN2006/002259 CN2006002259W WO2007025485A1 WO 2007025485 A1 WO2007025485 A1 WO 2007025485A1 CN 2006002259 W CN2006002259 W CN 2006002259W WO 2007025485 A1 WO2007025485 A1 WO 2007025485A1
Authority
WO
WIPO (PCT)
Prior art keywords
layer
ray detector
vapor deposition
fluorescent
wafer
Prior art date
Application number
PCT/CN2006/002259
Other languages
English (en)
Chinese (zh)
Inventor
Dezheng Tang
Original Assignee
Dezheng Tang
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dezheng Tang filed Critical Dezheng Tang
Priority to CN2006800314089A priority Critical patent/CN101253419B/zh
Publication of WO2007025485A1 publication Critical patent/WO2007025485A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2018—Scintillation-photodiode combinations
    • G01T1/20183—Arrangements for preventing or correcting crosstalk, e.g. optical or electrical arrangements for correcting crosstalk
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2018—Scintillation-photodiode combinations
    • G01T1/20185—Coupling means between the photodiode and the scintillator, e.g. optical couplings using adhesives with wavelength-shifting fibres

Abstract

Ce détecteur de rayons X comprend un panneau de scintillement et un panneau de conversion photoélectrique. Le panneau de scintillement comprend une couche de silicium cristalline à rainures; une première couche barrière formée sur la couche de silicium; une couche de masque dure formée sur la première couche barrière; la seconde couche barrière étant déposée sur les parois latérales des rainures; une couche de scintillement remplissant les rainures recouvrant la seconde couche barrière; une couche réfléchissante recouvrant la couche de masque dure et la couche de scintillement; une couche de passivation formée sur la couche de réflexion sélective; une couche de dioxyde de silicium formée sur la couche de silicium cristalline en vue de la liaison du panneau de scintillement et du panneau de conversion photoélectrique; et des microlentilles formées dans la couche de dioxyde de silicium. Le détecteur est construit de manière que les rainures de scintillement puissent correspondre au réseau des photodiodes avec l'enregistrement de chaque pixel. La couche barrière dans les rainures de scintillement évite la superposition des rayons X.
PCT/CN2006/002259 2005-09-01 2006-09-01 Detecteur de rayons x et procede de fabrication du detecteur WO2007025485A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2006800314089A CN101253419B (zh) 2005-09-01 2006-09-01 X射线探测器和x射线探测器制造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US71321505P 2005-09-01 2005-09-01
US60/713,215 2005-09-01

Publications (1)

Publication Number Publication Date
WO2007025485A1 true WO2007025485A1 (fr) 2007-03-08

Family

ID=37808478

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2006/002259 WO2007025485A1 (fr) 2005-09-01 2006-09-01 Detecteur de rayons x et procede de fabrication du detecteur

Country Status (2)

Country Link
CN (1) CN101253419B (fr)
WO (1) WO2007025485A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102881702A (zh) * 2012-09-26 2013-01-16 浙江大学 一种阵列式x射线传感器及其制作方法
WO2013019331A1 (fr) 2011-07-29 2013-02-07 Carestream Health,Inc. Panneaux composites thermoplastiques détecteurs de radiation imprimés
CN104124254A (zh) * 2013-04-24 2014-10-29 佳能株式会社 放射线摄像装置及其制造方法以及放射线检查装置
CN112457794A (zh) * 2020-03-17 2021-03-09 昆山雅锋电子有限公司 一种用于碘化铯平板探测器中的复合膜及其应用

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104900745B (zh) * 2015-05-26 2017-10-27 北京工业大学 一种基于高电子迁移率晶体管的光谱探测器及其制备方法
CN108027448B (zh) * 2015-10-09 2022-02-11 深圳帧观德芯科技有限公司 半导体x射线检测器的封装方法
US11000249B2 (en) 2016-11-10 2021-05-11 Koninklijke Philips N.V. X-ray detector for grating-based phase-contrast imaging
FI127409B (en) * 2017-01-18 2018-05-15 Oxford Instruments Tech Oy radiation Window
CN107978655A (zh) * 2017-11-28 2018-05-01 湖北京邦科技有限公司 一种辐射探测器的制造方法
CN110783431A (zh) * 2019-11-13 2020-02-11 中国电子科技集团公司第四十四研究所 Apd阵列器件的制作方法

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JP2002087366A (ja) * 2000-09-12 2002-03-27 Yamaha Motor Co Ltd 自動二輪車のエンジン懸架構造
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CN2630866Y (zh) * 2003-06-19 2004-08-04 清华大学 一种间接耦合线性阵列闪烁探测器模块
WO2004068168A1 (fr) * 2003-01-28 2004-08-12 Philips Intellectual Property & Standards Gmbh Detecteur de rayons x
WO2005038490A1 (fr) * 2003-10-22 2005-04-28 Canon Kabushiki Kaisha Dispositif detecteur de rayonnements, panneau scintillateur, leur procede de fabrication, appareil de fabrication, et systeme analyseur d'images de rayonnements
CN1654976A (zh) * 2003-11-20 2005-08-17 Ge医疗系统环球技术有限公司 用于辐射探测器的闪烁体阵列及其制造方法

Patent Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5187369A (en) * 1990-10-01 1993-02-16 General Electric Company High sensitivity, high resolution, solid state x-ray imaging device with barrier layer
US5171996A (en) * 1991-07-31 1992-12-15 Regents Of The University Of California Particle detector spatial resolution
US5617463A (en) * 1995-02-20 1997-04-01 Siemens Aktiengesellschaft X-ray diagnostic installation
US6177236B1 (en) * 1997-12-05 2001-01-23 Xerox Corporation Method of making a pixelized scintillation layer and structures incorporating same
US6744052B1 (en) * 1999-01-21 2004-06-01 Sture Petersson X-ray pixel detector device and fabrication method
US6472665B1 (en) * 1999-02-12 2002-10-29 Konica Corporation Radiation image detector and radiation image forming system
US6677616B2 (en) * 1999-08-31 2004-01-13 Lg.Philips Lcd Co., Ltd. Fabrication method of thin film transistor substrate for X-ray detector
US6396046B1 (en) * 1999-11-02 2002-05-28 General Electric Company Imager with reduced FET photoresponse and high integrity contact via
CN1312474A (zh) * 1999-12-15 2001-09-12 模拟技术公司 用于ct的两维x射线探测器阵列
JP2002087366A (ja) * 2000-09-12 2002-03-27 Yamaha Motor Co Ltd 自動二輪車のエンジン懸架構造
JP2004015000A (ja) * 2002-06-11 2004-01-15 Canon Inc 放射線検出装置及び放射線撮像システム
WO2004068168A1 (fr) * 2003-01-28 2004-08-12 Philips Intellectual Property & Standards Gmbh Detecteur de rayons x
CN2630866Y (zh) * 2003-06-19 2004-08-04 清华大学 一种间接耦合线性阵列闪烁探测器模块
WO2005038490A1 (fr) * 2003-10-22 2005-04-28 Canon Kabushiki Kaisha Dispositif detecteur de rayonnements, panneau scintillateur, leur procede de fabrication, appareil de fabrication, et systeme analyseur d'images de rayonnements
CN1654976A (zh) * 2003-11-20 2005-08-17 Ge医疗系统环球技术有限公司 用于辐射探测器的闪烁体阵列及其制造方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013019331A1 (fr) 2011-07-29 2013-02-07 Carestream Health,Inc. Panneaux composites thermoplastiques détecteurs de radiation imprimés
US8502170B2 (en) 2011-07-29 2013-08-06 Carestream Health, Inc. Patterned radiation-sensing thermoplastic composite panels
US9069086B2 (en) 2011-07-29 2015-06-30 Carestream Health, Inc. Patterned radiation-sensing thermoplastic composite panels
CN102881702A (zh) * 2012-09-26 2013-01-16 浙江大学 一种阵列式x射线传感器及其制作方法
CN104124254A (zh) * 2013-04-24 2014-10-29 佳能株式会社 放射线摄像装置及其制造方法以及放射线检查装置
CN112457794A (zh) * 2020-03-17 2021-03-09 昆山雅锋电子有限公司 一种用于碘化铯平板探测器中的复合膜及其应用

Also Published As

Publication number Publication date
CN101253419B (zh) 2011-07-27
CN101253419A (zh) 2008-08-27

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