WO2007004551A1 - コンテナ搬送装置及びコンテナ搬送システム - Google Patents

コンテナ搬送装置及びコンテナ搬送システム Download PDF

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Publication number
WO2007004551A1
WO2007004551A1 PCT/JP2006/313084 JP2006313084W WO2007004551A1 WO 2007004551 A1 WO2007004551 A1 WO 2007004551A1 JP 2006313084 W JP2006313084 W JP 2006313084W WO 2007004551 A1 WO2007004551 A1 WO 2007004551A1
Authority
WO
WIPO (PCT)
Prior art keywords
container
transport device
container transport
rotating
transfer
Prior art date
Application number
PCT/JP2006/313084
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
Fumio Sakiya
Original Assignee
Rorze Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rorze Corporation filed Critical Rorze Corporation
Priority to JP2007524021A priority Critical patent/JP4615015B2/ja
Publication of WO2007004551A1 publication Critical patent/WO2007004551A1/ja

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/0093—Programme-controlled manipulators co-operating with conveyor means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0235—Containers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Warehouses Or Storage Devices (AREA)
PCT/JP2006/313084 2005-07-01 2006-06-30 コンテナ搬送装置及びコンテナ搬送システム WO2007004551A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007524021A JP4615015B2 (ja) 2005-07-01 2006-06-30 コンテナ搬送システム

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005-193804 2005-07-01
JP2005193804 2005-07-01

Publications (1)

Publication Number Publication Date
WO2007004551A1 true WO2007004551A1 (ja) 2007-01-11

Family

ID=37604416

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2006/313084 WO2007004551A1 (ja) 2005-07-01 2006-06-30 コンテナ搬送装置及びコンテナ搬送システム

Country Status (4)

Country Link
JP (1) JP4615015B2 (ko)
KR (1) KR100991609B1 (ko)
CN (1) CN100578750C (ko)
WO (1) WO2007004551A1 (ko)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8676425B2 (en) 2011-11-02 2014-03-18 Harvest Automation, Inc. Methods and systems for maintenance and other processing of container-grown plants using autonomous mobile robots
US8915692B2 (en) 2008-02-21 2014-12-23 Harvest Automation, Inc. Adaptable container handling system
US8937410B2 (en) 2012-01-17 2015-01-20 Harvest Automation, Inc. Emergency stop method and system for autonomous mobile robots
US9147173B2 (en) 2011-10-31 2015-09-29 Harvest Automation, Inc. Methods and systems for automated transportation of items between variable endpoints
EP3032334A1 (en) 2014-12-08 2016-06-15 Agfa Graphics Nv A system for reducing ablation debris
WO2017157578A1 (en) 2016-03-16 2017-09-21 Agfa Graphics Nv Method for processing a lithographic printing plate
EP3637188A1 (en) 2018-10-08 2020-04-15 Agfa Nv An effervescent developer precursor for processing a lithographic printing plate precursor
US10800612B2 (en) 2018-10-12 2020-10-13 Pretium Packaging, L.L.C. Apparatus and method for transferring containers
TWI775779B (zh) * 2017-07-21 2022-09-01 美商應用材料股份有限公司 分選單元、檢驗系統及用於操作分選單元的方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5860083B2 (ja) 2014-03-04 2016-02-16 ファナック株式会社 ロボットハンドを用いたコンテナ搬送装置
CN111099292B (zh) * 2019-12-18 2021-06-11 南京视莱尔汽车电子有限公司 一种汽车零件生产车间用的搬运机器人及使用方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08124992A (ja) * 1994-10-24 1996-05-17 Dainippon Screen Mfg Co Ltd 基板処理装置のキャリア搬入・搬出装置
JP2002246439A (ja) * 2001-02-20 2002-08-30 Tokyo Electron Ltd 被処理体の搬出入装置と処理システム
JP2003243471A (ja) * 2002-02-15 2003-08-29 Thk Co Ltd 搬送装置
JP2004119627A (ja) * 2002-09-25 2004-04-15 Hitachi Kokusai Electric Inc 半導体製造装置
JP2005072412A (ja) * 2003-08-27 2005-03-17 Hitachi Kokusai Electric Inc 基板処理装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0619942U (ja) * 1992-08-07 1994-03-15 ナガタコーギョウ株式会社 プレス間ハンドリングロボット装架装置
JP3591679B2 (ja) * 1997-04-17 2004-11-24 株式会社アドバンテスト Ｉｃ用トレイ取出装置及びｉｃ用トレイ収納装置
JPH10305925A (ja) * 1997-05-06 1998-11-17 Eretsutsu:Kk リフターストッカーシステム

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08124992A (ja) * 1994-10-24 1996-05-17 Dainippon Screen Mfg Co Ltd 基板処理装置のキャリア搬入・搬出装置
JP2002246439A (ja) * 2001-02-20 2002-08-30 Tokyo Electron Ltd 被処理体の搬出入装置と処理システム
JP2003243471A (ja) * 2002-02-15 2003-08-29 Thk Co Ltd 搬送装置
JP2004119627A (ja) * 2002-09-25 2004-04-15 Hitachi Kokusai Electric Inc 半導体製造装置
JP2005072412A (ja) * 2003-08-27 2005-03-17 Hitachi Kokusai Electric Inc 基板処理装置

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8915692B2 (en) 2008-02-21 2014-12-23 Harvest Automation, Inc. Adaptable container handling system
US9147173B2 (en) 2011-10-31 2015-09-29 Harvest Automation, Inc. Methods and systems for automated transportation of items between variable endpoints
US9568917B2 (en) 2011-10-31 2017-02-14 Harvest Automation, Inc. Methods and systems for automated transportation of items between variable endpoints
US8676425B2 (en) 2011-11-02 2014-03-18 Harvest Automation, Inc. Methods and systems for maintenance and other processing of container-grown plants using autonomous mobile robots
US8937410B2 (en) 2012-01-17 2015-01-20 Harvest Automation, Inc. Emergency stop method and system for autonomous mobile robots
EP3032334A1 (en) 2014-12-08 2016-06-15 Agfa Graphics Nv A system for reducing ablation debris
WO2017157579A1 (en) 2016-03-16 2017-09-21 Agfa Graphics Nv Method for processing a lithographic printing plate
WO2017157572A1 (en) 2016-03-16 2017-09-21 Agfa Graphics Nv Apparatus for processing a lithographic printing plate and corresponding method
WO2017157578A1 (en) 2016-03-16 2017-09-21 Agfa Graphics Nv Method for processing a lithographic printing plate
WO2017157571A1 (en) 2016-03-16 2017-09-21 Agfa Graphics Nv Method and apparatus for processing a lithographic printing plate
WO2017157575A1 (en) 2016-03-16 2017-09-21 Agfa Graphics Nv Method and apparatus for processing a lithographic printing plate
WO2017157576A1 (en) 2016-03-16 2017-09-21 Agfa Graphics Nv Method for processing a lithographic printing plate
TWI775779B (zh) * 2017-07-21 2022-09-01 美商應用材料股份有限公司 分選單元、檢驗系統及用於操作分選單元的方法
EP3637188A1 (en) 2018-10-08 2020-04-15 Agfa Nv An effervescent developer precursor for processing a lithographic printing plate precursor
WO2020074258A1 (en) 2018-10-08 2020-04-16 Agfa Nv An effervescent developer precursor for processing a lithographic printing plate precursor
US10800612B2 (en) 2018-10-12 2020-10-13 Pretium Packaging, L.L.C. Apparatus and method for transferring containers
US11577916B2 (en) 2018-10-12 2023-02-14 Pretium Packaging, L.L.C. Apparatus and method for transferring containers

Also Published As

Publication number Publication date
CN101180719A (zh) 2008-05-14
JPWO2007004551A1 (ja) 2009-01-29
KR20080016614A (ko) 2008-02-21
KR100991609B1 (ko) 2010-11-04
CN100578750C (zh) 2010-01-06
JP4615015B2 (ja) 2011-01-19

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