WO2007004551A1

WO2007004551A1 - Container transporting apparatus and container transporting system

Info

Publication number: WO2007004551A1
Application number: PCT/JP2006/313084
Authority: WO
Inventors: Fumio Sakiya
Original assignee: Rorze Corporation
Priority date: 2005-07-01
Filing date: 2006-06-30
Publication date: 2007-01-11
Also published as: JPWO2007004551A1; KR20080016614A; CN101180719A; KR100991609B1; CN100578750C; JP4615015B2

Abstract

Provided are a container transporting apparatus and a container transporting system which can suitably transport containers corresponding to a process speed, arrangement configuration and the like of a processing apparatus. The container transporting system is provided for transporting the container which stores substrates inside, and is provided with a plurality of container transporting apparatuses. The container transporting apparatus is provided with a transporting robot having a lifting means for lifting the container being held and a linearly shifting means; and a placing table for placing at least one container.

Description

Specification

Container transport device and container transport system

Technical field

The present invention relates to a container transport apparatus and a transport system for storing substrates and the like that are transported and processed in a highly clean environment.

Background art

[0002] Generally, substrates such as LCDs and semiconductor wafers do not like dust, so their production is performed in a highly clean environment, a so-called clean room. In such a manufacturing plant, it is necessary to transport the substrate between multiple processing equipment that performs various processes such as the cleaning process before thin film formation, the thin film formation process, and the resist process. A so-called container is used. This container can store 25 boards on an internal shelf, and is installed on an automatic guided vehicle (AGV) that runs in the factory, or on a rail laid on the factory ceiling. It is transported by HT (Overhead Hoist Transfer) that is suspended and runs like a monorail.

[0003] Each processing apparatus is provided with a container mounting table, and the container is transferred between the container mounting table and, for example, AGV by a robot (loader 'unloader) provided in the processing apparatus or AGV. Has been done. Further, the transfer of the substrate from the container on the container mounting table to each processing apparatus is performed for each substrate using a known SCARA robot.

[0004] As an example of a conventional container transport device, there is one described in Patent Document 1, for example. The container transport device disclosed in Patent Document 1 will be described below with reference to FIG. This container transport device is a container emptied by container loader A1 between container loader A1 for loading container 110 containing substrates and container unloader A2 for unloading container 110 for storing processed substrates. By providing the container traverse transport base 111 that moves and moves up and down 110, it is possible to load / unload multiple containers 110, and it is possible to run without waiting for AGV to deliver containers S . In recent years, it has been desired to reduce inventory by storing as few substrates as necessary in a container and flowing them to a production line. In this case, since the processing time by the processing device is shortened, the container transfer device is configured so that the container can be placed on the front surface of the processing device, so that the substrate can be placed on the processing device without causing a waiting time. The power S can be supplied. On the other hand, in the case of a processing device with a long processing time, the AGV can be operated efficiently by configuring the container transfer device so that multiple containers can be received from AGV and temporarily stored. be able to.

Patent Document 1: Japanese Patent Application Laid-Open No. 8-167641

Disclosure of the invention

Problems to be solved by the invention

However, in the container transfer device of Patent Document 1, there are 1 substrate loading stand Sl, buffer stand SB, and substrate unloading stand S2 between the container loader A1 and the container loader A2. The predetermined processing apparatus is arranged in a row and needs to be arranged behind the substrate loading stand S1 and the substrate unloading stand S2. For this reason, there is a problem that there is a great restriction on the arrangement of each device, such as the need to increase the interval between processing devices in contact with P.

[0008] In addition, when AGV is used to transport containers to container loader A1 and to collect containers from container unloader A2, AG V and container transport device that can run freely in the factory Therefore, there is a problem that all the devices related to container transportation must be controlled collectively. Furthermore, AGV needs to move between container loader A1 and container unloader A2 just by transporting and collecting containers to container loader A1 or container unloader A2. As a result, it is difficult to secure a safe area for workers.

[0009] On the other hand, when OHT is used for transporting containers, the OHT is attached to the ceiling of the factory, making it difficult to install and maintain it. In addition, since the OHT drive part and the traveling rail are provided above the processing device etc., there is a problem that dust falls from above and the cleanliness of the clean room is lowered. further, Since the traveling rails are arranged so as to circulate in the factory, it is extremely difficult to relay the rails when the layout is changed or expanded in the factory.

[0010] Further, in the conventional container transport device, the arrangement and configuration are greatly restricted as described above, so that a waiting time is generated in a processing device with a short processing time or in front of a processing device with a long processing time. When AGV was kept waiting for a long time, it happened, and there was a problem when the production process was delayed.

[0011] Therefore, the present invention has been made to solve these problems, and provides a container transport device and a container transport system that can transport a container suitably according to the processing speed, arrangement configuration, etc. of the processing device. The purpose is to do. Means for solving the problem

[0012] A first aspect of the container transport device of the present invention is a container transport device that transports a container that accommodates a substrate therein, and a linear movement that moves the container up and down, and a linear movement that moves the container up and down. A transfer robot having a means, and a mounting table on which one or more of the containers can be mounted.

[0013] In another aspect of the container transport device of the present invention, the linear moving unit includes an arm body that holds the container and rotates in a vertical plane, and rotates the arm body. It is characterized by moving the container back and forth.

[0014] In another aspect of the container transport device of the present invention, the arm body includes two arms and a connecting portion that connects one end of each of the two arms. The other end is fixed, the container is held at the other end of the other arm, and the container is moved back and forth by rotating the two arms in the opposite directions around the connecting portion. Features.

[0015] In another aspect of the container transport device of the present invention, the two arms are each composed of two connecting members, and the connecting portion includes two gears that are fitted to each other. Any one of the connecting members constituting one of the arms, and one of the connecting members constituting the other arm and the other connecting member of each of the two gears. It is characterized by being connected to.

[0016] Another aspect of the container transport device of the present invention is the connecting member connected to the gear. It further has a motor for rotating any one of the above.

[0017] In another aspect of the container transport device of the present invention, the elevating means includes a movable member to which the linear moving means is fixed, and a screw shaft that moves the movable member up and down by rotating. The container held by the linear moving means is moved up and down by rotating the screw shaft.

[0018] Another aspect of the container transport device of the present invention is characterized by further comprising a motor for rotating the screw shaft.

[0019] Another aspect of the container transport device of the present invention is characterized in that the elevating means is configured to be able to move up and down above the height of the container.

[0020] Another aspect of the container transport device of the present invention is characterized by further comprising a rotating means capable of rotating the container in the horizontal direction.

[0021] Another aspect of the container transport device of the present invention includes one transport robot and two or more mounting tables, and the one transport robot is included in all the mounting tables. Is configured to be transportable.

[0022] In a first aspect of the container transport system of the present invention, the container transport system according to any one of the above aspects includes a plurality of container transport devices adjacent to each other in a linear direction or a direction perpendicular to the linear direction, and the container The container can be transported to at least the adjacent container transport device by the transport robot provided in the transport device.

[0023] Another aspect of the container transport system of the present invention is characterized in that the plurality of container transport devices operate in synchronization.

The invention's effect

[0024] According to the present invention, it is possible to provide a container transport device and a container transport system capable of transporting a container suitably in accordance with the processing speed and arrangement configuration of the processing device. Since the container transport device of the present invention includes a transport robot capable of transporting containers in the vertical and horizontal directions, the container can be easily transported to the mounting table of the adjacent device.

[0025] Further, according to the container transport system of the present invention, the arrangement configuration and the processing speed of the processing apparatus. The efficiency of the processing apparatus can be greatly improved by flexibly combining the container transport apparatus of the present invention in response to the above. In addition, it is easy to respond to production line layout changes and expansions.

Brief Description of Drawings

FIG. 1 is a perspective view showing an embodiment of a container transport device and a container transport system of the present invention.

FIG. 2 is a cross-sectional view showing an embodiment of a transfer robot.

FIG. 3 is a perspective view showing another embodiment of the transfer robot.

FIG. 4 is a cross-sectional view showing rotation transmission means of another embodiment of the transfer robot.

FIG. 5 is a side view showing holding means of the transfer robot.

FIG. 6 is a plan view showing an embodiment of the container transport device and the container transport system of the present invention.

FIG. 7 is a plan view showing another embodiment of the container transport device and the container transport system of the present invention.

FIG. 8 is a side view showing the operation of the transfer robot.

FIG. 9 is a side view showing a state in which stacked containers are transported by a transport robot.

FIG. 10 is a plan view showing still another embodiment of the container transport device of the present invention.

FIG. 11 is a side view showing a conventional container transport device.

Explanation of symbols

[0027] 1 container transport device

2 Transfer robot

3 container

4 mounting table

5 Substrate transfer device

7 Processing equipment

8 Load port

9 stages Lifting means

Enclosure

Linear motion guide means Screw shaft

motor

Movable member

First arm

Second arm

Arm body

Pulley

Bearing

Benole Pass

Rotation axis

Container holding means First connecting member Second connecting member Rotation transmission means Housing

Third connecting member Fourth connecting member Rotating spindle

Difficult

Housing for holding means Rotary actuator Rotating spindle

Connecting member

Holding member

AGV 110 containers

111 Container transverse transport base

BEST MODE FOR CARRYING OUT THE INVENTION

[0028] The container transport device and the container transport system of the present invention can be applied to a process of moving and processing an article in a highly clean environment (such as a tarn nolem), and transports an LCD substrate as an electronic component below. The container transport device and the container transport system of the present invention will be described using examples.

FIG. 1 is a perspective view showing a container transport device and a container transport system in a preferred embodiment of the present invention. The container transport system 100 of the present embodiment is configured by combining eight container transport devices l (la to lh). Each container transfer device 1 includes a transfer robot 2 (2a to 2h) and a mounting table 4 (4a to 4h) for mounting the container 3.

[0030] Behind the container transport system 100, substrate transport devices 5 (5a, 5b) for transporting the substrates stored in the container 3 to the various processing devices 7 are disposed. The substrate transfer device 5 includes a load port 8 (having a stage 9 for placing the container 3 transported by the transfer robot 2 and a mechanism for unlocking the lid of the container 3 (not shown). 8a and 8b) are provided. In the container transfer system 100 of the present embodiment, the container transfer devices 1c to 1e are in front of the substrate transfer device 5a, and the container transfer devices 1f to 1h are in front of the substrate transfer device 5b. Placed in parallel (in a direction perpendicular to the front of the substrate transfer device 5), and in addition to the container transfer device lc ~: le in front of the container transfer device la, and the container transfer device If ~: in front of lh In addition, container transport devices lb are placed side by side in tandem.

[0031] By arranging the container transfer device la to lh as described above, the transfer robots 2a and 2b can move the container 3 in the lateral direction (longitudinal direction) of the mounting tables 4a and 4b, The robots 2c to 2h can move the container 3 between the mounting tables 4a and 4b and the substrate transfer device 5. The transfer robot 2a can move the container 3 to a position where the transfer robots 2b to 2e can be held in parallel. Similarly, the transfer robot 2b can move the container 3 to a position where the transfer robots 2f to h can be held in parallel. Can be made. Furthermore, the transfer robots 2a and 2b can also be used to transfer the container 3 from, for example, an AGV stopped near the ends of the mounting tables 4a and 4b. Therefore, it becomes unnecessary to equip AGV with a transfer robot, and it is possible to widen the AGV mounting table so that more containers can be transferred.

Next, an example of the internal structure of the transfer robot 2 will be described using the cross-sectional view shown in FIG. The transfer robot 2 includes an elevating means 10 and an arm body 18 that are installed beside the mounting table 4. The lifting means 10 includes a linear guide means 12 attached to the casing 11 of the container transport device 1, a motor 14a attached to the lower part of the casing 11, a screw shaft 13 connected to the motor 14a, and a screw shaft. The movable member 15 is moved up and down by 13 rotations. The screw shaft 13 is rotated by the rotation of the motor 14a, so that the movable member 15 is moved up and down.

The arm body 18 includes a first arm 16 and a second arm 17, and one end of the first arm 16 is connected to a motor 14 b fixed to the movable member 15. Further, a pulley 19a fixed to the movable member 15 concentrically with the motor 14 is provided. Near the other end of the first arm 16, a pulley 19b is rotatably provided via a bearing 20, and a belt 21a is hung between the pulley 19a and the pulley 19b. One end of the second arm 17 is fixed to the rotating shaft 22 (connecting portion) of the pulley 19b. Like the first arm 16, the pulley 19c, 19d and the benore 21b are located inside the second arm 17. I'm praised by my strength. The pulley 19 c is pivotally attached to the second arm 17, and the pulley 19 d rotatably attached to the vicinity of the other end of the second arm 19 is fixed to the holding means 23. The holding means 23 can be rotated with respect to the second arm 17 via the bearing 20 in accordance with the rotation of the pulley 19d.

[0035] In the arm body 18 configured as described above, the first arm 16 is rotated by the rotation of the motor 14b, and at the same time, the belt 21a moves the pulley 19a in the reverse direction, whereby the pulley 19b rotates the motor 14b. Rotates in the opposite direction. The diameter of the pulley 19b is set to half the diameter of the pulley 19a, and the pulley 19b rotates in the opposite direction by twice the rotation of the motor 14b. As a result, the second arm 17 rotates twice in the opposite direction to the first arm 16. By connecting the pulleys 19c and 19d and the belt 21b with the same configuration, the container holding means 23 Can be kept horizontal.

Another embodiment of the arm body 18 provided in the transfer robot 2 will be described below using the perspective view shown in FIG. One end of each of the first connecting member 24 and the second connecting member 25 is rotatably attached to the movable member 15. Further, a rotation transmitting means 26 (connecting portion) is attached to the other ends of the first connecting member 24 and the second connecting member 25. Connecting member

24, 25, the movable member 15, and the casing 28 of the rotation transmission means 26 form a link mechanism, and the operation of the motor 14 attached to the movable member 15 causes the first connecting member 24 to rotate, In conjunction with this, other members also rotate. Similarly, a link mechanism is formed by the third connecting member 29, the fourth connecting member 30, the rotation transmitting means 26, and the cassette holding means 23, and rotates in conjunction with the first connecting member 24. It is structured as follows.

FIG. 4 is a cross-sectional view showing the structure of the rotation transmission means 26 shown in FIG. Connecting member 24,

The rotation support shafts 31a to 31d of 25, 29, and 30 are attached to the rotation transmission means 26 so as to be rotatable via a bearing 20. Gears 32a and 32b are provided at the tips of the rotation support shafts 31a and 31d, and the rotation of the first connecting member 24 is the same as that of the fourth connecting member 30 in the reverse rotation direction by fitting them together. Transmitted at speed. Thus, by rotating the motor 14, the connecting members 24 and 25 and the connecting members 29 and 30 can be rotated in the opposite directions. Accordingly, the cassette holding means 23 is moved as shown in FIG. It can be moved left and right on the drawing.

[0038] As described above, the transfer robot 2 includes the arm body 18 that can be rotated in the vertical plane, so that the container 3 can be moved linearly. It is easy to work while avoiding the movement range of 8, and power S can be easily secured.

An example of the container holding means 23 provided in the transfer robot 2 will be described below with reference to FIG. For example, the container holding means 23 attached to the tip of the second arm 17 has a rotary actuator 34 (in this embodiment, an air actuator whose pivot can be rotated by an air cylinder) on its housing 33. ) Is attached, and the central portion of the connecting member 36 is fixed to the rotating support shaft 35. The connecting member 36 is configured by two members rotatably connected to each other, and one ends of holding members 37a and 37b are rotatably connected to both ends thereof. The holding members 37a and 37b are rotatably attached to the housing 33. Thus, the rotary actuator 34 can be actuated to rotate the portion fixed to the housing 33 as a fulcrum. Accordingly, the container 3 can be held by the other ends of the holding members 37a and 37b approaching or separating from each other.

[0040] Next, with reference to the drawings, an embodiment in which the container transfer device is suitably arranged will be described below with respect to the container transfer system of the present invention configured by arranging a plurality of container transfer devices of the present invention.

FIG. 6 is a plan view of an embodiment in which the arrangement of the container transfer device 1 is configured in the same manner as the container transfer system 100 shown in FIG. In other words, it is possible to move the container 3 in the horizontal direction (vertical direction in the figure) with the container transfer devices la, lb, etc. arranged in the vertical plane 1J on the front surface. The container transfer devices la, lb and the substrate transfer device The container 3 can be moved between the container transfer devices la and lb and the substrate transfer device 5 by the container transfer device 1 arranged in the vertical direction between the container transfer device 5 and the substrate transfer device 5.

FIG. 7 shows another embodiment of the container transport device and the container transport system of the present invention. In the container transport system shown in FIG. 7, all the mounting tables 4 of the container transport device 1 shown in FIG. 6 can place two or more containers 3, whereas in this embodiment, only one container can be placed. Conveyor Ik is provided. In addition, the AGV40 is stopped near the end of the container transfer device li, lj arranged adjacent to the container transfer device lc, and holds the container 3x placed on the AGV. It can be transferred to the mounting tables 4i and 4j.

[0043] The container transfer device lj of the present embodiment is provided with three transfer robots 2, and the AGV 40 also has a mounting table on which a plurality of containers 3 can be mounted. As a result, a plurality of containers 3 can be simultaneously transferred between the AGV 40 and the container transfer devices li and lj using three transfer robots 2. Since the container transfer device 1 of the present invention includes the transfer robot 2, the AGV 40 does not need to include the transfer robot, and the AGV 40 can be provided with a mounting table on which a plurality of containers 3 can be mounted. The interior can be made into a mini-environment (higher clean environment) so that the mounting table 4 of the container transportation measure 1 can be temporarily stored.

[0044] Since the container transfer device 1 of the present invention includes the transfer robot 2 having the lifting and lowering means and the linear movement means, even when a plurality of containers 3 are mounted on the mounting table 4, It is not always necessary to transport containers 3 in the order in which they are placed. For example, as shown in FIG. 8, the order in which containers 3 are transported can be changed. In the side view shown in Fig. 8, two containers 3a and 3b are placed on the mounting table 4, and the container 3b is transferred to the load port with priority over the container 3a on the load port 8 side. Is shown.

FIG. 8 (a) shows a state where the transfer robot 2 holds the upper part of the container 3b. FIG. 8 (b) shows a state in which the elevating means 10 is operated and the container 3b is lifted. FIG. 8 (c) shows a state where the arm body 18 is operated and the container 3 b is moved above the stage 9 of the load port 8. FIG. 8 (d) shows a state in which the lifting / lowering means 10 is operated to lower the container 3 b and place it on the stage 9.

[0046] As described above, the order in which the containers 3 are transported can be changed. Therefore, in the substrate manufacturing process, the container 3 that was input to the manufacturing line later is replaced with the container 3 that was previously input. Since it is possible to overtake the process before processing, it is possible to perform various processes quickly.

[0047] Further, according to the container transport device 1 of the present invention, by using the elevating means and the linear moving means, for example, as shown in FIG. It is also possible to let Alternatively, it is also possible to transport a plurality of stacked containers 3 sequentially from the upper container 3.

FIG. 10 shows still another embodiment of the container transport device 1 of the present invention. The container transfer device 1 of the present embodiment includes a transfer robot 2 and two mounting tables 4 on both sides of the transfer robot 2. The transfer robot 2 of the present embodiment is provided with a rotating means capable of rotating the container 3 in the horizontal direction in addition to the lifting means and the linear moving means.

In the embodiment shown in FIG. 10, three substrate transfer apparatuses 5 are arranged on both sides of the container transfer apparatus 1. Each of the two mounting tables 4 is long enough to deliver the container 3 so as to face the three substrate transfer devices 5. By configuring the container transfer device of the present invention as shown in FIG. 10, the container 3 can be transferred between the six substrate transfer devices 5 and the mounting table 4 by one transfer robot 2. Become.

[0050] As described above, the container transfer device of the present invention includes a mounting table and at least one transfer port bot, and a plurality of container transfer devices are provided on the floor of the clean nolem. It can easily cope with production line layout changes and expansions, and can easily perform maintenance work. Even when a small amount of substrates are accommodated in the container and a large amount of container is flowed to the production line, the container can be transported to various processing equipment without waiting for AGV.

[0051] In the container transport device of the present invention, it is possible to easily reduce the generation of dust by sealing the movable part.

It should be noted that the description in the present embodiment shows an example of the container transport device and the container transport system according to the present invention, and is not limited to this. The detailed configuration and detailed operation of the container transport device and the container transport system in the present embodiment can be changed as appropriate without departing from the spirit of the present invention.

[0053] This specification is based on Japanese Patent Application No. 2005-193804 filed on Jul. 1, 2005. All this content is included here.

Industrial applicability

[0054] The present invention can be easily applied to any article that needs to be carried out in a clean environment where movement and processing are high.

Claims

The scope of the claims

[1] A container transfer device for transferring a container for storing a substrate therein,

A transfer robot having elevating means for elevating and lowering the container and linear moving means for moving back and forth;

A mounting table on which one or more of the containers can be mounted.

A container conveying device characterized by the above.

[2] The linear moving means includes an arm body that holds the container and rotates in a vertical plane,

The container is moved back and forth by rotating the arm body.

The container transport device according to claim 1, wherein:

[3] The arm body includes two arms and a connecting portion that connects one end of each of the two arms.

The other end of the one arm is fixed, and the container is held at the other end of the other arm,

The container is moved back and forth by rotating the two arms in the reverse direction around the connecting portion.

The container transport device according to claim 1 or claim 2, wherein

[4] The two arms are each constituted by two connecting members, and the rotation transmitting means includes two gears in which the connecting portions are fitted to each other, and constitutes one of the arms. The one of the connecting members and the one of the connecting members constituting the other arm are respectively connected to each of the two gears. Container transport device.

[5] The apparatus further includes a motor for rotating any one of the connecting members connected to the gear.

The container transport device according to claim 4, wherein

[6] The elevating means includes a movable member to which the linear moving means is fixed, and a screw shaft that moves the movable member up and down by rotating,

By rotating the screw shaft, the container held by the linear moving means is raised. Raise and lower

The container transport device according to claim 1, wherein:

[7] The apparatus further includes a motor for rotating the screw shaft.

The container transport device according to claim 6.

[8] The elevating means is configured to be able to be raised and lowered above the height of the container.

The container transport device according to claim 1, claim 6, or claim 7.

[9] The apparatus further includes a rotating means capable of rotating the container in the horizontal direction.

The container transport device according to claim 1, wherein:

[10] comprising one transfer robot and two or more mounting tables described above,

The one transfer robot is configured to transfer the container to all of the mounting tables.

The container conveying device according to any one of claims 1 to 9, characterized by:

[11] A plurality of container transport devices according to any one of claims 1 to 10 are provided adjacent to each other in a linear direction or in a direction perpendicular to the linear direction,

The container can be transported to / from at least the adjacent container transport device by the transport robot provided in the container transport device.

A container transport system characterized by that.

[12] The plurality of container transport devices are operating in synchronization.

The container transport system according to claim 11, wherein: