JP6621868B2 - Storage system - Google Patents

Description

  There are several ways of storing semiconductor wafer containers in a semiconductor manufacturing facility (fab). A large centralized stocker can store wafer containers until the wafers are needed for processing, and transfer the wafer containers at the input port called Automatic Material Handling System (AMHS) Receive from the system. In general, AMHS is any computer controlled system in a factory that moves workpieces between work stations and between work stations and storage stations. Within the fab, AMHS moves wafer containers and empty containers between process equipment, metrology equipment, and stockers. When processing for a wafer is required, the wafer is removed from these storage shelves into these containers by a robot mechanism (stocker robot), sent to an output port provided in the stocker, and lifted by AMHS And delivered to the desired processing station. Stocker robots typically require a large space between the walls of a stationary storage shelf. This space is necessary to take into account the movement gap and movement of the stocker robot and its container payload. There may also be one or more ports that allow a human operator to manually deliver and remove containers from the stocker.

  Small stockers may be placed in the fab's processing bays to improve the storage distribution of the containers, and the containers can be stored in such processing bays near the next processing station for the containers. When the next processing operation relating to the container is necessary, the delivery time of the container is reduced and the moving distance of the container is shortened. In addition, the distribution of small stockers reduces the problem of AMHS traffic congestion at the large stockers and the restriction on the throughput of a single stocker robot at the large stockers. There are drawbacks to use. The small stocker still has the components of a large stocker, which includes the stocker robot and its operating clearance space, controller and input / output ports. Due to this overlap, small stockers that are distributed are more expensive than large stockers if the total number of storage locations is the same. Some fabs are structured with parallel passages (“bays”) of equipment (“tools”) that process, measure or handle semiconductors. Also, if a large number of small stockers are placed in each bay adjacent to the tool, due to the reduced storage density of the small stocker and the necessary clearance between the stocker and the tool, the storage requirements for the fab Increases the floor space used. Floor space is extremely valuable within the fab because such floor space is used for processing tools that manufacture the product, thus minimizing the use of floor space for storage functions. This is desirable.

  Accordingly, there is a need for a container storage system that is simple and inexpensive, uses minimal floor space while allowing high density storage of containers near the processing tool.

  One aspect of the present invention is a compact and simple system for storing containers in a horizontal plane. The container is stored on a storage shelf that can be circulated in a loop.

  Another aspect of the present invention is to provide a storage system that does not utilize floor space. This system can be installed above floor-mounted equipment and tools. In some cases, some parts of the tool are above the storage system, but the storage system will still be above the main functional part of the tool. For example, if the tool is one or more load ports, the storage system is still placed “above” the tool, even if certain components of the tool are located above the storage system. It will be. The term “above” should generally be understood to be at a height that is higher than the height of the tool, eg the functional part of the tool. Thus, the storage system is located directly above (eg, aligned) or not directly above (eg, not aligned) as long as the storage system is at a higher height than the tool. Either of these may be used. As used herein, the term “height” may be measured relative to a reference plane. A “reference plane”, in one embodiment, is a room, such as a clean room, factory, or laboratory floor.

  Another aspect of the present invention is to provide a storage system that does not obstruct access to floor-mounted facilities and tools. The system can be installed between tools, but at a height above the tools that allows unobstructed access to the sides of the tool for maintenance and work.

  Another aspect of the present invention is to provide a storage system having a higher container storage density than conventional stockers by eliminating the large gap space required for stocker robots.

  Another aspect of the present invention is to provide a storage system that can interact with the AMHS of the fab.

  Another aspect of the present invention is to provide a storage system for accessing a storage container at high speed.

  Another aspect of the present invention is to provide a storage system with an active port that can reduce the delay in approaching the storage container and provide flexible interaction with the AMHS.

  Another aspect of the present invention is a storage system with an active port that provides unimpeded access to an underlying load port via an overhead transport vehicle (OHT) when the active port is retracted. I will provide a.

  Another aspect of the present invention is to provide a storage system comprising a plurality of storage shelves located at multiple levels or heights. Each level storage system circulates storage shelves along a loop and has one or more active ports.

  Yet another aspect of the present invention is to provide a storage system that can be installed above a tool for local storage of containers used by the tool.

  Yet another aspect of the present invention is to provide an active port that transports containers between the storage system and the tool without the aid of AMHS, and a storage system that uses a hoist or other mechanism.

  Yet another aspect of the present invention is a storage system that uses an active port and hoist or other mechanism to transfer containers between the storage system and the tool, while AMHS can still deliver and remove containers from the tool. Is to provide.

  In yet another embodiment, a storage system is disclosed. The storage system has a storage system assembly positioned at a height that is higher than the height of the tool used to handle the substrate to be processed. The storage system is configured to locally store one or more containers for the substrate before or after being processed by the tool. The storage system assembly includes a frame and a base plate coupled to the frame. The base plate has a drive pulley, an idler pulley, a belt, a track, and a motor. The storage system assembly further includes a plurality of storage shelves, each of the plurality of storage shelves having a shelf plate with a shelf feature that supports the container, coupled to the belt, movable, and on the track. Combined and guided to one or more positions. A motor is coupled to the drive pulley to move the belt, and each of the plurality of storage shelves moves together along the track to one or more positions. The track has at least some straight portions and some non-linear portions, the straight portions and the non-linear portions being arranged in a loop above the base plate.

  In yet another aspect, one storage system has an active port assembly coupled to the frame of the storage system assembly. The active port assembly has a port plate positioned at one of the positions along the track. The active port assembly further includes a horizontal movement assembly that defines an extended position outside the frame and a retracted position inside the frame. The active port assembly also includes a vertical movement assembly. The vertical movement assembly is coupled to a port plate with port features and defines an upper position and a lower position. The horizontal movement assembly is coupled to the vertical movement assembly, and in the retracted position, the port plate is positioned below one of the shelf plates when in the lower position, and the port plate in the retracted position is When it is in the lower position, it is positioned below one of the shelf plates, and the port plate in the retracted position is positioned above one of the shelf plates when it is in the upper position.

  In yet another aspect, a storage system is disclosed. The storage system has a storage system assembly positioned at a height that is higher than the height of the tool used to handle the substrate to be processed. The storage system is configured to locally store one or more containers for the substrate. The storage system assembly includes a plurality of storage shelves, each of the plurality of storage shelves having a shelf plate with a shelf feature that supports a container, coupled to a belt, horizontally movable, and rails And are guided to one or more positions. The storage system assembly further includes a motor coupled to the drive pulley to move the belt, each of the plurality of storage shelves moving together along the rail to one or more positions. . The rail has at least some straight portions and some non-linear portions, and the straight portions and the non-linear portions are arranged to form a loop.

  In one alternative, the storage system further includes an active port assembly that includes a port plate positioned at one of the locations along the rail. The active port assembly further includes: (i) a horizontal movement assembly that defines an extended position outside the frame and a retracted position inside the frame; and (ii) a vertical movement coupled to the port plate with port features. The vertical movement assembly includes an assembly, the vertical movement assembly defines an upper position and a lower position, and the horizontal movement assembly is coupled to the vertical movement assembly.

It is a top view of the present invention including an active port. It is a top view of the curved guide rail and support cart. It is a side view of a rail and a support trolley. FIG. 6 is a plan view of the present invention without an active port. FIG. 3 is another view of the present invention without an active port. FIG. 2 is a diagram of the present invention installed in an overhead transport (OHT) type AMHS. It is a side view of the storage shelf which retracted the active port. It is a figure which shows one position of an active port mechanism. It is a figure which shows another position of an active port mechanism. It is a figure which shows another position of an active port mechanism. It is a figure which shows another position of an active port mechanism. FIG. 4 is a diagram of the present invention including an active port. FIG. 6 is a side view of the present invention including an active port. FIG. 3 is a diagram of the present invention including a transfer hoist and an active port. FIG. 3 is a side view of the present invention including a transfer hoist and an active port. It is a figure of the transfer hoist of this invention. It is another figure of the transfer hoist of this invention. FIG. 4 is another diagram of the present invention having multiple storage levels. It is a top view of this invention which shows the form of an active port and OHT. It is a top view of this invention which shows the form of an active port and OHT. 1 is a side view of an embodiment of the present invention with AMHS. 1 is a side view of an embodiment of the present invention with AMHS. 1 is a side view of an embodiment of the present invention with AMHS. 1 is a side view of the present invention with AMHS. FIG. 1 is a side view of the present invention with AMHS. FIG. 1 is a side view of the present invention with AMHS. FIG. It is a top view of the floor space used by the conventional stocker. FIG. 3 is a plan view of a floor space used by the storage system of the present invention.

  Although the description of embodiments of the present invention relates to the use of a FOUP (front open unified pod) for storage of semiconductor wafers within a fab, the present invention is not limited to FOUP and / or semiconductor manufacturing. For purposes of describing the present invention, other embodiments include wafer containers (with or without walls), substrate containers (with or without walls), cassettes, flat panel display cassettes, SMIF pods (standard mechanical interface pods). , Reticle pods, or any structure that supports a substrate, whether the structure supports a single substrate or multiple substrates, is located in an enclosure or external Regardless of whether it is open to the environment.

  One embodiment of the present invention is shown in FIG. The storage system 100 has six movable storage shelves 110a to 110f. Each storage shelf is connected to the drive chain 111 via a vertical pin attached to the link of the drive chain 111. The vertical pin engages or mates with a slot provided on the lower surface of the storage shelf assembly, the slot is oriented perpendicular to the direction of chain movement and rotates without the vertical pin being constrained And large enough to allow sliding. The horizontal movement of the storage shelves is guided by rails 112, which engage the support carts under the shelf assembly. The rail 112 has a straight portion 112a and a curved portion 112b. As the drive chain 111 moves, the drive chain 111 pulls the storage shelf by engagement or fitting with the slot of the vertical pin within the slot, and the rail and support carriage move the storage shelf straight to the rail 112. An oval shape composed of the portion 112a and the curved portion 112b is kept on a constraining path that makes one round. It should be understood that the form of the trajectory need not be “oval” and many forms are possible. In one embodiment, any form that defines a loop may be used, the loop having several straight portions and several non-linear portions. Therefore, the oval exemplary form is only one example.

  There are other ways to engage or mate the storage shelf and drive chain. For example, a metal plate bracket with holes or slots may be fastened to the drive chain. The holes or slots in the bracket engage or fit into fixed pins or other features provided on the storage shelf. Any other type of engagement or mating hardware is allowed, but such engagement or mating hardware provides sufficient freedom between the drive chain and the storage shelf and Provided that it can be pulled by the drive chain.

  This embodiment uses a sprocket and a drive chain as drive means, but other drive components are commercially available and may be used as a modification. Alternative drive devices include, but are not limited to, timing belts and pulleys, plastic chains and sprockets, or steel belts and pulleys. The pulley may be a plastic disk, and the belt may be a plastic belt, rubber belt, smooth belt, ribbed belt, pebble belt, continuous belt, partial belt, and the like. In yet another embodiment, the belt and pulley may be placed below the base plate 129 or in a separate room to reduce dust.

  The storage system of FIG. 1 moves the storage shelves in a loop. A loop is a continuous guide path for storage shelves that are repeatedly moved in any direction. For example, if the storage shelf 110a starts from the position shown in FIG. 1 and rotates the drive sprocket counterclockwise, the storage shelf 110a passes through the positions shown as storage shelves 110b-110f, and finally as shown in the figure. Return to the original start position. In this case, all storage shelves move together in the same direction, and all storage shelves must move simultaneously. One storage shelf cannot move without all storage shelves in the loop moving. The loop shown in FIG. 1 is close to an oval, but the loop may be of any shape and may have a loop that moves in both directions.

  The motor 113 rotates the drive sprocket 114 via a timing belt (not shown), which allows the motor 113 to be attached to the side of the drive sprocket 114. As a variant, the motor may have a gear head or may be directly coupled to the center of the drive sprocket. Other methods of coupling the motor to the drive sprocket are known in the art and may be used as a variation. In this embodiment, the motor 113 is a step motor that moves to a desired position without feedback by a position measuring device such as an optical encoder, but other types of motors such as a brushless DC servo motor with a rotary encoder are used. May be. The stepper motor moves to the desired position by a predetermined number of small increments of its electrical phase. In this way, the step motor moves accurately to a predetermined position without feedback by the position measuring device. The brushless DC servo motor uses a feedback device such as an optical rotary encoder in order to control the trajectory of movement and stop at a desired position.

  The drive chain 111 is wound around both the drive sprocket 114 and the idler sprocket 115. Base plate 129 is a support structure for mounting system components. The drive sprocket 114 and idler sprocket 115 have a bearing assembly at the center thereof that is coupled to the base plate 129 so that the sprockets 114, 115 can rotate freely. The motor 113 is coupled to the base plate together with the motor mount 116.

  Base plate 129 is shown as a continuous solid plate, but refers to any flat plate structure that can support system components. For example, the base plate may be made of multiple plates, may be made of a folded metal plate, may be made of a metal plate supported by a frame, It may be made of a lattice structure. The base plate should have a substantial free area to allow vertical air flow within the fab's clean room.

  The motor 113 is electrically connected to a control circuit (not shown). In this embodiment, the control circuit is a step motor amplifier and a microprocessor mounted controller. The step motor amplifier is connected to the motor wire and supplies driving power for rotating the motor in response to a control signal from the microprocessor-mounted controller. The microprocessor mounted controller executes a series of program instructions that control the movement trajectory and position of the motor and interacts with the external system, which should move the fab control system, tool control system, storage shelf, for example And an operator interface that determines how the storage shelf is moved.

  Control circuit of another modified example for controlling a motor, for example, a programmable logic controller (PLC), a personal computer (PC) equipped with a motor amplifier, a custom design embedded control PC board equipped with a microprocessor and an integrated motor drive circuit It may be used.

  Another variation has two controllers, one controller controlling the motor in its own program sequence and the other controller interacting with an external system in its own program sequence. The two controllers integrate their operation via serial or parallel communication lines. Although it is possible to have a controller divided into any number of separate controllers, having one microprocessor-equipped controller that executes a single program sequence is the simplest to control the entire storage system It is a way.

  The control circuit can interact with the external system using a variety of methods. For example, the control circuit can communicate with the fab control network using Ethernet (registered trademark) compliant with the S88 (Semiconductor Equipment and Materials International) E88 standard for the stocker interface. As a variant, the control circuit can communicate with the fab or tool control system using Ethernet or RS232 type serial communication. The control circuit can also communicate with an external system via a set of parallel signal lines. There are various types of communications used in the fab, and the present invention could be embodied in various forms depending on the control architecture or fab needs.

  FIG. 1 also shows the active ports 117, 118 in the retracted position. The active ports 117 and 118 are mechanisms used for either placing the FOUP on the storage shelf or lowering the FOUP from the storage shelf. The active port can move horizontally to the retracted or extended position. The active port can also move the port plate 119 vertically to the upper or lower position. The port plate 119 in the lower position and in the retracted position allows for movement of the storage shelf 110 because the port plate 119 is located below the shelf plate 120 and above the support plate 121. FIG. 7 shows the vertical gap between the port plate 119 and the storage shelf 110 when the port plate 119 is in the down position and in the retracted position. This vertical gap is indicated by a broken line and defines a C-shaped space 120a. FIG. 1 shows the gap between the retracted port plate 119 and the storage shelf 110 when the storage shelf is in one of its stopped positions. This clearance allows the port plate 119 to move vertically from the stop position of the port plate 119 to lift the FOUP from the storage shelf or place the FOUP on the storage shelf.

  Although FIG. 1 shows two active ports 117, 118, any number can be used depending on the size of the storage system and the form of AMHS. Active ports 117, 118 are located on any side of the storage system. 19A and 19B are plan views of different forms of the active ports 117 and 118 and the OHT vehicle (overhead moving vehicle). FIG. 19A shows a storage system 100 with active ports 117, 118. The active port 118 is located at the end of the storage system and is aligned with the OHT rail 132b that supports the OHT vehicle 131b, while the active port 117 is located at the side of the storage system and supports the OHT vehicle 131a. Aligned with the OHT rail 132a. FIG. 19B shows a storage system 100 with active ports 117, 118, 153, 154. In FIG. 19B, the active ports 117, 118 are aligned with the OHT rail 132a and the OHT vehicle 131a, and the active ports 153, 154 are aligned with the OHT rail 132b and the OHT vehicle 131b on the opposite side of the storage system.

  1 and 7 show pins (eg, features) used to align and hold the FOUP. The shelf pins 122 engage mating features (eg, slots) provided on the bottom surface of the FOUP to accurately position and support the FOUP while the FOUP rests on the shelf plate. The port pin 123 engages the same counterpart feature (eg, slot) provided on the bottom surface of the FOUP to accurately position and support the FOUP while the FOUP rests on the port plate. The slot allows both pins 122, 123 to engage or fit into the bottom of the container base. On the other hand, as shown in the figure, the pins 122 and 123 are positioned close to each other at each of the three locations (see the storage shelf 120 and the port plate 119 of the storage shelf 110b in FIG. 1). In the stop position, the FOUP at the active port has respective supports that are transferred from the shelf pins to the port pins by raising the port plate 119 to the upper position.

  Although the FOUP is designed to have features on the bottom plate for engagement with the pins, other features can be used to hold the container precisely on the shelf plate or port plate. Good. For example, raised features provided on the port plate or shelf plate may constrain the outer edge of the bottom of the container or may engage a recessed area provided on the bottom of the container. Thus, it should be understood that other retention features that are not pins may be used. The retention feature may connect, hold, couple, fit or engage, or hold the container. Also, the container need not be FOUP, the container may be open, closed, partially closed / open, and the container may also be of any size or A type of substrate can be held. The port feature and the plate feature include any type of retention feature including a pin, as described in the claims. If the port feature is a pin, the pin is referred to herein as a port pin, and if the plate feature is a pin, the pin is referred to herein as a plate pin.

  8, 9, 10 and 11 show the four positions of the port plate 119 when moved by the active port assembly 119a. The active port assembly 119a is shown removed from the base plate 129 for clarity. In FIG. 8, the port plate 119 is retracted and is in the lower retracted position. In FIG. 9, the port plate 119 has been raised to the upper position by the vertically moving assembly 119a-2, for example, removing the FOUP from the storage shelf. Vertical movement is accomplished in a number of ways. In one example, vertical movement is achieved by actuation of vertical pneumatic cylinder 124 and is guided by vertical linear bearing 125. When the active port base 126 is installed in the storage system, the active port base 126 is attached to the base plate 129. Also, as shown, the port plate 119 has an opening 119b sufficient to fit around the storage shelf. In one embodiment, this opening 119b defines a space on one side, and the port plate pins 123 are still located at both ends of the opening 119b and on the opposite side of the opening to the space. . In FIG. 10, the port plate 119 in the upper position is moved in the horizontal direction to the extended position using the horizontal movement assembly 119a-1. As an example, the horizontal movement assembly 119a-1 includes an actuating portion of a horizontal pneumatic cylinder 127 and is guided by a horizontal linear bearing 128. In FIG. 10, the body of the horizontal pneumatic cylinder is not visible because it is located below the active port base 126, and only the cylinder's actuator rod can be seen. In FIG. 11, the port plate 119 has been moved to the lower position, in which state the port plate 119 is ready to move to the retracted position without worrying about collision with the moving storage shelf or FOUP. ing.

  In this embodiment, the vertical and horizontal linear movements of the active port are achieved using pneumatic cylinders, but as a variant, other drive means known in the art may be used, Such driving means is, for example, a ball screw or a lead screw driven by an electric motor. The driving means of another modification is a rack gear driven by an electric motor to which a spur gear is attached.

  The operation of the active ports 117 and 118 is integrated with the operation of the motor 113. In this embodiment, the active port is controlled by the same control circuit that is used to control the operation of the motor 113, but there are many different forms of the control circuit. One variation has an active port that is controlled by one or more microprocessor-based controllers, which in turn integrate the motor control circuit with parallel or serial signals to integrate functions. Communicate through.

  4 and 5 show a storage system in which a FOUP 130 is placed on each of the storage shelves. The storage shelf spacing is such that the storage shelf and the FOUP move around the storage system 100 once, and the storage shelf and the FOUP do not collide with each other when they turn at the corner. Although six storage shelves are shown in FIGS. 4 and 5, additional storage shelves and FOUPs may be accommodated by extending the length of the system. The most efficient use of space is to leave the curved portion 112b of the rail unchanged and extend the length of the straight portion 112a of the rail together with the base plate 129 and the drive chain 111, but at both ends By increasing the radius of the curved portion 112b of the rail along with the diameter of the sprockets 114, 115, the length of the drive chain for mounting the storage shelves may be extended. Increasing the drive chain length by either method or a combination of both methods allows more storage shelves to be installed with minimal spacing.

  FIG. 6 shows an OHT vehicle (overhead moving vehicle) 131 with the FOUP 130 aligned on an empty storage shelf 110a of the storage system, with the OHT vehicle 131 positioned at a height above the tools in the fab. Yes. The OHT vehicle 131 can use the OHT rails 132 that support it to move the FOUP between stockers, storage systems, and tools. The OHT wheel 131 grips the FOUP through the FOUP top handle 133 using a gripping mechanism, and moves around the fab at a height above the tool. The FOUP is lowered or raised at the stocker, storage system or tool by using a hoist. The other five storage shelves 110b-110f have FOUPs stored thereon, and the storage shelves 110a are empty. The OHT vehicle 131 moves along the OHT rail 132 and stops at a position aligned with the stopped storage shelf 110a.

  At this position, the OHT vehicle 131 lowers the FOUP onto the storage shelf 110a. After lowering the FOUP onto the storage shelf 110a, the OHT vehicle 131 retracts the hoist and moves to another location or lifts another FOUP from the storage system. In order to lift another FOUP, the OHT vehicle 131 waits until the desired FOUP is moved to the alignment position under the OHT vehicle 131, lowers the gripping part using a hoist, and grips the FOUP top handle. , Raise FOUP and move forward to the next place. The positioning of the new FOUP for lifting is very quick because it only requires the operation of a single motor. The storage system control circuit drives the motor in either direction to move the FOUP to the aligned position under the OHT vehicle and selects the direction that results in the minimum travel distance with the minimum delay.

  12 and 13 illustrate the present invention provided above the tool 135, which provides local storage for FOUPs that are scheduled to be processed by the tool. Storage system assembly 100b of storage system 100 is shown to include a frame 100c. The frame 100c has structural and non-structural components as long as it is attached to the surface of the tool assembly 200 (see FIG. 13). The assembly 200 may include only a portion of the tool, or additional components such as panels, electronics, screens, frames, ducts, vents, filters, tracks, pneumatic equipment, circuits, equipment connections, frame stabilizers. In addition, an electrical connector and a communication connector may be included. Thus, placing the storage system assembly 100b over the tool includes placing or coupling the storage system assembly 100b to a tool component or component coupled to the tool. FIG. 13 shows an example in which the OHT vehicle 131 is aligned above the tool shelf of the active port plate 119 and the tool load port 134a. The tool shelf is a lowering or lifting point for the OHT vehicle 131, and the active port plate 119 is also a lowering or lifting point for the OHT vehicle 131 because the tool shelf and the active port plate are This is because it aligns within an area configured to receive or supply containers (eg, a container loading area).

  The OHT wheel 131 moves along the OHT rail 132 until it is aligned with the active port 117, the active port 118, or any tool load port 134a, 134b, 134c. The OHT vehicle 131 is in place to place the FOUP on the empty active port 117 and retracts the active port 117 to lower the FOUP onto the empty storage shelf 110a, although other FOUP transfer methods are possible. For example, if all the active ports are retracted, the OHT vehicle 131 transfers the FOUP to one of the load ports 134a, 134b, 134c.

  Another example has an OHT vehicle that has reached the position of the active port 117 without supporting the FOUP. The active port 117 lifts the FOUP from the storage shelf, moves it to the extended position, and in the extended position, grips the FOUP with the OHT gripper and lifts it to the OHT vehicle. After retracting the active port 117, the OHT vehicle lowers the FOUP to one of the load ports 134a, 134b, 134c.

  While processing a wafer from a FOUP, the storage system may be used to store an empty FOUP. This allows a larger batch of wafers to be processed simultaneously with a limited number of tool load ports. In this case, if the active port is retracted, the OHT vehicle lifts an empty FOUP from one of the load ports, eg, the load port 134a to the OHT vehicle, extends the active port, eg, the active port 117, and then The empty FOUP is lowered onto the active port, after which the active port is retracted and the empty FOUP is lowered onto the empty storage shelf aligned with the active port.

  12 and 13, a storage system with an active port is installed above the tool, but the storage system need not be above the tool. If the storage system is located anywhere along the path of the OHT vehicle, the OHT vehicle can use the active port to access the FOUP stored in the storage system, and the requirement is that the active port It is only that the hoist of the OHT vehicle can be aligned with the active port when extended.

  14 and 15 illustrate an embodiment of the present invention in which a hoist can transfer FOUP between a storage system and a tool without the assistance of an OHT vehicle. Transfer hoist 136 is shown with transfer hoist gripper 140 retracted into transfer hoist frame 142. The transfer hoist 136 may also be aligned above the active port plate 119 or may be aligned above one or more of the load port shelves. In this embodiment, the transfer hoist extends into the same area (eg, container load area) as the active port is extended when the active port is extended, where the load port shelf is Has been placed. This enables efficient transfer using the transfer hoist 136. An example of a transfer hoist 136, an active port plate 119, and a load port shelf 134a-1 aligned with each other is shown in FIG.

  As an example, the transfer hoist 136 can move laterally along the hoist linear drive 137. The degree of lateral movement includes the positions aligned above the active ports 117, 118 and the load ports 134a, 134b, 134c. The linear drive means in the hoist linear drive device 137 is any method known in the art. For example, the linear drive means may be an electric motor with a rack gear and a spur gear, or may be a ball nut driven by a horizontal ball screw and an electric motor. The cantilevered support 138 is guided by one or more linear bearings and is connected to the movable part of the linear drive means. The linear bearings and cantilevered supports must be sufficiently rigid to keep the transfer hoist 136 with the full FOUP on it in a proper horizontal plane. A flexible cable assembly within the hoist linear drive allows power and communication wiring to be connected between the storage system and its control circuit and the control circuit of the transfer hoist.

  The OHT vehicle 131 can transfer FOUPs from and to both active ports and all load ports, but the OHT vehicle need not transfer FOUPs from and to the load ports. The transfer hoist can transfer the FOUP from the storage system to the load port without waiting for the arrival of the OHT vehicle upon request from the tool. The OHT vehicle can deliver the FOUP to the storage system regardless of the state of the tool load port in order to maintain an inventory of the FOUP to be processed by the tool. The OHT vehicle can lift the processed FOUP from either the tool load port or the storage system. In one case, if the load port does not need to start processing for a new FOUP, the processed FOUP may wait on the load port until an OHT vehicle is available to remove the processed FOUP. Good. In other cases where the load port with the processed FOUP needs to start processing for a new FOUP, the processed FOUP may be moved to the active port with a transfer hoist, and the active port may empty the processed FOUP. Place it on the storage shelf and then use the transfer hoist to move the new FOUP from the storage shelf to the active port and to the load port just opened.

  16 and 17 show the design details of the transport hoist 136. Generally, the transport hoist has many of the same features as the hoist mechanism provided on the OHT vehicle and retracts a belt that moves the FOUP gripping mechanism between a lower position and an upper position. The hoist frame 142 houses an electric motor, which rotates the belt drive pulley 147 and retracts the transfer hoist belt 141 into the transfer hoist frame 142. The retracted belt is wound around a belt winding pulley 148 that provides a continuous winding torque. The transfer hoist belt 141 is connected to the transfer hoist gripper 140, and thus retracting the transfer hoist belt 141 into the transfer hoist frame 142 results in the transfer hoist gripper 140 moving in the vertical direction. The transfer hoist gripper 140 surrounds the periphery of the FOUP top handle 133 and then activates the gripper latch 146 to position the gripper latch 146 below the lower edge of the FOUP top handle. With the support of the gripper latch 146, the FOUP can be lifted from the support surface on which it rests. Power transmission and communication between the transfer hoist frame 142 and the transfer hoist gripper 140 is performed by electric wires embedded in the transfer hoist belt. Alternatively, the transfer hoist gripper may be battery powered, and charging of the battery is accomplished via electrical contacts when the transfer hoist gripper 140 is raised to the transfer hoist frame 142. In the case of a battery-type gripper, communication is wireless by radio frequency transmission or light beam transmission (visible light or infrared light).

  FIG. 16 shows additional details of the hoist linear drive assembly 137. The plate 170 supports the horizontal drive motor 169 and the hoist linear rail 165. Linear rail bearing 166 is attached to cantilevered support 138 along with ball nut mount 171. A ball screw 167 is attached to the shaft of the drive motor 169 and passes through a ball nut 168 held by a ball nut mount 171. When the drive motor shaft is rotated, the ball nut 168 and the ball nut mount 171 slide on the hoist linear rail 165 and the linear rail bearing 166 so that the ball nut 168 and the ball nut mount 171 are cantilevered. 138 and transfer hoist 136 are pushed laterally. For the sake of clarity, the cable supplying power and control signals to the hoist is not shown.

  The components of the modification may be used in a hoist linear drive assembly. For example, the rotary motor 169 may be replaced by a linear motor, which is a permanent magnet mounted on a plate 170 and a winding assembly mounted on a sliding cantilevered support block 138 block. Have As a modification, the ball screw and the ball nut may be replaced with a lead screw and a nut, or the linear bearing may be replaced with a pair of parallel guide shafts and a tubular bearing.

  2 and 3 show details of the bearing assembly, which guides and supports the storage shelves. Some companies, such as THK Corporation and Bishop Wise Carver, have a bearing / rail system that can be used to assist in moving along a straight rail or track and a combination of a curved rail or track. providing. THK Corporation provides a product called “Straight Guide HMG”, and Bishop Wise Carver provides “PRT Track System” with curved and straight parts. Several methods are known in the art for moving between a curved rail section and a straight rail section, and FIGS. 2 and 3 are just one example. A support plate 121 supports the storage shelf. Each support plate 121 is connected to each of the two roller plates 144 by pins and roller plate bearings 145. The roller plate 144 can freely rotate about a roller plate bearing 145, and two rollers 143 are attached to each roller plate 144, and each of the rollers rotates about the bearing. Can do. The two rollers are spaced from each other so that they apply a lateral force that sandwiches the rail from both sides. As the support carriage moves along the curved rail, the roller plate 144 can rotate to allow unobstructed movement. The rail can take several structural forms as long as a track is provided to complete the loop.

  FIG. 18 shows a storage system having two levels of storage loops stacked vertically. The upper level storage loop 149 has active ports 117a, 118a. The lower level storage loop 150 has active ports 117b, 118b. FIG. 18 shows the FOUP 130 ready to be mounted on the extended active port 117b. The active port 117a above the active port 117b must be retracted in order for the OHT vehicle 131 to perform unimpeded delivery of FOUPs to the active port 117b, but the active port 118a or 118b is extended. For example, it has a FOUP that is ready to be lifted by an OHT vehicle. This type of multi-level storage system may have more than one level with different locations and quantities of storage shelves. FIG. 18 shows a storage system 100 installed directly below the OHT mounted on the ceiling, the storage system being placed at any height. The storage system 100 may be supported by a structure installed on the floor, may be supported by a ceiling structure, may be supported by an AMHS structure, or may be supported by a combination thereof. Good. The storage system may also be supported by a structure of tools or other fab equipment features.

  20A, 20B and 20C are simplified side views of a storage system having an active port and illustrate how such a storage system transports FOUPs using various basic types of AMHS. . Arrows indicate the FOUP path during transfer. FIG. 20A shows an AMHS 151 located on the side of the storage system. This type of AMHS has a built-in transfer device that places the FOUP on the extended active port 117 and then the active port 117 retracts to transfer the FOUP to the storage shelf 110. To do. FIG. 20B shows an AMHS 155 (eg, OHT) that lowers the FOUP over the active port 117, and then the active port 117 retracts to transfer the FOUP to the storage shelf 110. FIG. 20C shows an AMHS 156 provided on the side of the storage system and not having an integral transfer device. This type of AMHS requires an external transfer device 152 that lifts the FOUP from the AMHS 156 and moves it to the active port 117 and then at the active port 117 moves the FOUP to the storage shelf 110. .

  FIGS. 21A, 21B and 21C are simplified side views of storage systems without active ports, showing how such storage systems transport FOUPs using various basic types of AMHS. . Arrows indicate the FOUP path during transfer. FIG. 21A shows an AMHS 151 located on the side of the storage system. This type of AMHS has a built-in transfer device that can place the FOUP directly on the storage shelf 110. FIG. 21B shows an AMHS 155 (eg, OHT) that lowers the FOUP directly onto the storage shelf 110. FIG. 21C shows an AMHS 156 provided on the side of the storage system and not having an integral transfer device. This type of AMHS requires an external transfer device 152 that lifts the FOUP from the AMHS 156 and moves it directly to the storage shelf 110.

  22A and 22B are simplified plan views showing a comparison of floor space used by a conventional stocker and the storage system of the present invention. Each of these figures shows one level of storage location, and a conventional stocker 157 or storage system 100 has a multi-level illustrated FOUP arrangement. In FIG. 22A, a conventional stocker 157 has ten FOUPs 130, and five FOUPs are arranged in two rows. The two rows of FOUPs are separated by a stocker robot gap space 161, which is necessary to move the stocker robot 158 horizontally for access to the stored FOUP. The stocker robot 158 has a vertical column 159 that moves the stocker robot arm 160 in the vertical direction to align with each storage level. The stocker robot end space 162 is required when the vertical strut 159 approaches the leftmost FOUP at the storage level. The stocker robot gap space 161 must be large enough to accommodate the FOUP and a portion of the robot arm when the robot arm is rotated 180 degrees between storage positions on both sides of the gap space 161. In contrast, the storage system 100 according to the design of the present invention shown in FIG. 22B requires much less floor area than a conventional stocker for storage of 10 FOUPs 130. Since the storage system 100 does not require a stocker robot, the gap space 161 and end space 162 of FIG. 22A are omitted, resulting in a much denser arrangement than conventional stockers.

  22A and 22B also illustrate the improved transfer efficiency of the storage system 100 of the present invention. In order to remove the FOUP from the storage location 163 of FIG. 22A, the stocker robot 158 must first move horizontally to align with the storage location, and the motor in the stocker robot arm 160 then moves the arm. Extend under the FOUP, lift the arm with the FOUP, retract the arm and FOUP, and then the stocker robot moves horizontally to the desired destination port. In FIG. 22B, the storage system 100 of the present invention only needs to operate a single motor that moves all FOUPs simultaneously until the FOUP shelf at position 164 is moved three or four positions. For example, a conventional stocker uses only a fraction of the time used to retrieve a FOUP.

It should be understood that the mechanisms and methods described above for storing and accessing a semiconductor wafer container are for illustrative purposes only and the invention is not limited thereby. It will be apparent to those skilled in the art that the advantages of the mechanisms and methods described above are achieved. In addition, it should be understood that various design modifications, application examples, and modified embodiments are included within the scope and spirit of the present invention as set forth in the claims. For example, the following forms are included in the scope of the present invention.
[Form 1]
A storage system,
A storage system assembly positioned at a height higher than that of the tool used to handle the substrate to be processed, the storage system being for a substrate before or after being processed by the tool Configured to locally store one or more containers of the storage system assembly,
(A) a frame;
(B) a base plate coupled to the frame, the base plate having a drive pulley, an idler pulley, a belt, a track, and a motor;
(C) further including a plurality of storage shelves, each of the plurality of storage shelves having a shelf plate with a shelf feature supporting a container, coupled to the belt and movable; Is guided to one or more positions,
The motor is coupled to the drive pulley to move the belt, and each of the plurality of storage shelves moves together along the track to the one or more positions, the track being A storage system having at least some straight portions and some non-linear portions, the straight portions and non-linear portions being arranged in a loop above the base plate.
[Form 2]
(D) further comprising an active port assembly coupled to a frame of the storage system assembly, the active port assembly having a port plate positioned at one of the positions along the track. The active port assembly comprises:
(I) a horizontal movement assembly defining an extended position outside the frame and a retracted position inside the frame;
(Ii) a vertical movement assembly coupled to the port plate with a port feature, wherein the vertical movement assembly defines an upper position and a lower position, the horizontal movement assembly comprising: Coupled to the vertical movement assembly;
The port plate in the retracted position is located below one of the shelf plates when it is in the lower position;
The storage system according to aspect 1, wherein the port plate in the retracted position is located above one of the shelf plates when it is in the upper position.
[Form 3]
The storage system of claim 2, wherein the port plate in the retracted position and in the upper position lifts a container that was on the shelf feature of the shelf plate over the port feature of the port plate.
[Form 4]
The storage system according to aspect 2, wherein the port plate in a retracted position and in a lower position allows unimpeded movement of the storage shelf along the trajectory to the one or more positions.
[Form 5]
Each of the storage shelves includes a C-shaped space, the C-shaped space providing a place for the port plate when the port plate is in the retracted position and in the lower position, and the port plate is in the retracted position. The storage system of claim 2, wherein the port feature is maintained at a level below the plate feature when in the down position.
[Form 6]
The port plate has an opening on one side thereof, and the opening is larger than the dimensions of the shelf plate, and the port pin and the shelf pin can be engaged with a slot portion of the container base The storage system according to aspect 2, wherein the storage systems are in close proximity to each other.
[Form 7]
The storage system according to aspect 1, wherein the belt is one of a linked chain or a molded belt, and the drive pulley and the idler pulley are one of a sprocket or a disk.
[Form 8]
The drive pulley and the idler pulley are sprockets, the belt is a chain, and each of the storage shelves is coupled to the chain at a set position where each of the storage shelves moves together. The storage system described in.
[Form 9]
The frame of the storage system assembly is coupled thereon to the frame of the tool assembly, the tool being at least one load port, and the at least one load port being one or more load ports. The storage system according to aspect 1, wherein the storage system interacts with a substrate processing tool.
[Form 10]
The tool has a load port with a load port shelf, the load port shelf extends away from the load port and enters a container load area, and the port plate in the extended position is the container load Placed in the area,
The storage system of claim 2, wherein the port plate in the extended position is located above the load port shelf in one of an aligned orientation or an unaligned orientation.
[Form 11]
And further comprising a transfer hoist disposed above the frame of the storage system assembly, wherein the transfer hoist is in the direction of the port plate when the port plate is in the extended position and in the direction of the load port shelf. Extending away from the storage system assembly, the transfer hoist
(I) lifting or placing the container from the port plate in the extended position, or
(Ii) lifting or placing a container from the loadport shelf, or
(Iii) The storage system of aspect 10, wherein the storage system is configured to lift or place containers from the port plate and the load port shelf in an extended position.
[Form 12]
The storage system according to aspect 11, further comprising a linear drive device that horizontally moves the transfer hoist located above the port plate in an extended position and above the load port shelf.
[Form 13]
The storage system according to aspect 1, wherein the storage system assembly is positioned below an overhead transport vehicle.
[Form 14]
14. The storage system of aspect 13, wherein the overhead transport vehicle path is capable of delivering or removing containers directly from one of the storage shelves.
[Form 15]
The storage system according to aspect 2, wherein the storage system assembly is positioned below an overhead transport vehicle.
[Form 16]
The path of the overhead transfer vehicle delivers or removes containers directly from one of the storage shelves, the port plate in the extended position, the port plate in the retracted and up position, or the tool shelf. A storage system according to aspect 13, wherein the storage system is capable.
[Form 17]
The storage system of aspect 2, wherein two or more active port assemblies are coupled to the frame and positioned at different locations along the track.
[Form 18]
The storage system of claim 17, wherein each of the active port assemblies is positioned on the same side of the frame or on a different side.
[Form 19]
One or more overhead transfer vehicles interact with one or more active port assemblies, the one or more active port assemblies being on the same side of the frame or different 19. Storage system according to aspect 18, arranged on the side.
[Form 20]
The storage system according to aspect 1, wherein the storage shelf includes a roller attached to the track or a bearing attached to the track.
[Form 21]
The storage system according to aspect 1, wherein two or more storage system assemblies are stacked on the tool, each storage system assembly having a level.
[Form 22]
A storage system,
A storage system assembly positioned at a height higher than the height of the tool used to handle the substrate to be processed, said storage system locally containing one or more containers for the substrate Configured to store and
The storage system assembly includes:
(A) including a plurality of storage shelves, each of the plurality of storage shelves having a shelf plate with a shelf feature supporting a container, coupled to a belt and movable in a horizontal direction, coupled to a rail Being guided to one or more locations,
(B) further including a motor coupled to a drive pulley to move the belt, each of the plurality of storage shelves moving together along the rail to the one or more positions. The storage system, wherein the rail has at least some straight portions and some non-linear portions, the straight portions and non-linear portions being arranged in a loop.
[Form 23]
23. A storage system according to aspect 22, wherein the belt is one of a linked chain or a molded belt and the drive pulley is one of a sprocket or a disk.
[Form 24]
A storage system,
Having a storage system assembly positioned at a height higher than that of the tool used to handle the substrate to be processed, said storage system locally storing one or more containers of the substrate Configured to
The storage system assembly includes:
(A) including a plurality of storage shelves, each of the plurality of storage shelves having a shelf plate with a shelf feature supporting a container, coupled to a belt and movable in a horizontal direction, coupled to a track; Being guided to one or more locations,
(B) further including a motor coupled to a drive pulley to move the belt, each of the plurality of storage shelves moving together along the rail to the one or more positions. The rail has at least some straight portions and some non-linear portions, the straight portions and the non-linear portions being arranged in a loop;
(C) an active port assembly having a port plate positioned at one of the locations along the rail, the active port assembly comprising:
(I) a horizontal moving assembly defining an extended position and a retracted position;
(Ii) a vertical movement assembly coupled to the port plate with a port feature, wherein the vertical movement assembly defines an upper position and a lower position; The storage system, wherein the horizontal movement assembly is coupled to the vertical movement assembly.
[Form 25]
25. A storage system according to aspect 24, wherein the belt is one of a linked chain or a molded belt and the drive pulley is one of a sprocket or a disk.
[Form 26]
The port plate in the retracted position is located below one of the shelf plates when it is in the lower position;
25. The storage system of aspect 24, wherein the port plate in a retracted position is located above one of the shelf plates when it is in an upper position.
[Form 27]
25. The storage system of aspect 24, wherein the port plate in the retracted position and in the upper position lifts a container that was on the shelf feature of the shelf plate over the port feature of the port plate.
[Form 28]
25. A storage system according to aspect 24, wherein the port plate in a retracted position and in a lower position allows unimpeded movement of the storage shelf along the rail to the one or more positions.
[Form 29]
Each of the storage shelves includes a C-shaped space, the C-shaped space providing a place for the port plate when the port plate is in the retracted position and in the lower position, and the port plate is in the retracted position. 25. The storage system of aspect 24, wherein when in the down position, the port feature is maintained at a level below the plate feature.
[Form 30]
The port plate has an opening on one side thereof, the opening being larger than the dimensions of the shelf plate, the port feature and the shelf feature being engaged with a slot location on a container base. 25. A storage system according to aspect 24, wherein the storage systems are in close proximity to each other to allow for combination.
[Form 31]
The storage system assembly is coupled thereon to a frame of the tool assembly, the tool being at least one load port, the at least one load port being one or more substrate processes. 25. A storage system according to aspect 24, which interacts with a tool.
[Form 32]
The tool has a load port with a load port shelf, the load port shelf extends away from the load port and enters a container load area, and the port plate in the extended position is the container load Placed in the area,
25. The storage system of aspect 24, wherein the port plate in an extended position is located above the load port shelf in one of an aligned orientation or an unaligned orientation.
[Form 33]
And further comprising a transfer hoist disposed above the storage system assembly, wherein when the port plate is in the extended position and in the direction of the load port shelf, the transfer hoist is in the direction of the port plate. Extending away from the system assembly, the transfer hoist
(I) lifting or placing the container from the port plate in the extended position, or
(Ii) lifting or placing a container from the loadport shelf, or
(Iii) The storage system according to aspect 32, wherein the storage system is configured to lift or place a container from the port plate and the load port shelf in an extended position.
[Form 34]
34. A storage system according to aspect 33, further comprising a linear drive that horizontally moves the transfer hoist located above the port plate in an extended position and above the load port shelf.
[Form 35]
The storage system according to aspect 33, wherein the storage system assembly is positioned below an overhead transport vehicle.
[Form 36]
36. A storage system according to aspect 35, wherein the overhead transport vehicle path is capable of delivering or removing containers directly from one of the storage shelves.
[Form 37]
The storage system according to aspect 24, wherein two or more active port assemblies are coupled to the storage system assembly and positioned at different locations along the track.
[Form 38]
38. The storage system of aspect 37, wherein each of the active port assemblies is positioned on the same side of the frame or on a different side.
[Form 39]
One or more overhead transfer vehicles interact with one or more active port assemblies, the one or more active port assemblies being on the same side of the storage system assembly A storage system according to aspect 37, disposed on or on different sides.

100 storage system 100c frame 110 storage shelf 111 drive chain 112 rail 113 motor 114 drive sprocket 115 idler sprocket 117, 118 active port 119 port plate 119a active port assembly 119a-1 horizontal moving assembly 120 shelf plate 122 shelf pin (shelf) Features)
123 Port pin (port feature)
126 Active port base 127 Pneumatic cylinder 128 Linear bearing 129 Base plate 130 FOUP (container)
131b Overhead Transfer Vehicle 135 Tool 136 Transfer Hoist 137 Hoist Linear Drive Device 138 Cantilever Support 140 Gripper 141 Transfer Hoist Belt 142 Hoist Frame 158 Stocker Robot

Claims (24)

A storage system,
A frame of said storage system coupled above to a frame of a tool assembly;
A base plate coupled to a frame of the storage system, the base plate coupled to a rotating mechanism driven by a motor, disposed in an orientation that constitutes a horizontal plane, and positioned below the motor. ,
And a plurality of storage shelves, wherein the plurality of storage shelves are coupled to the rotating mechanism for horizontal movement thereof and move together to one or more positions, the plurality of storage shelves. One has shelf plates and
A support plate coupled to the shelf plate;
Has an active port assembly coupled to the frame of the storage system, the active port assembly includes a single port plate positioned at the one of said positions, said active port assembly further seen including a horizontal movement assembly defining the retracted position of the port plate inside the frame of the extended position and the storage system of the port plate in the outer frame of the storage system, said port plate, retracted position The storage system is disposed above the support plate and below the shelf plate .   And an active port coupled to the active port assembly, wherein the storage system frame and the active port together form a wall that partially surrounds the base plate, the rotation mechanism, and the storage shelf. The storage system of claim 1. The tool is configured to process a wafer configured to be stored in a container;
Each of said plurality of storage shelves, has a number of shelves features configured to support the container when the container is placed on the storage shelf, said port plate, the container of the port plate The storage system of claim 1, comprising a number of port features configured to support a container when disposed thereon. The rotating mechanism includes a plurality of sprockets, a rail, a chain, the motor, the sprocket includes a driving sprocket, wherein the idler sprocket, the rail is coupled to the base plate, the motor, the drive Coupled to a sprocket, the plurality of sprockets coupled to the chain, the chain coupled to the plurality of storage shelves, and the motor rotating the drive sprocket to move the chain The storage system of claim 1, wherein the storage system is configured to move the storage shelf relative to the base plate. The support plate is one of a plurality of support plates, and the shelf plate is one of a plurality of shelf plates;
The rotating mechanism includes a rail, a plurality of support plates supported on the rail, the rail is coupled to the base plate, said plurality of support plates, so as to rotate relative to the rail is configured, the storage shelf comprises a plurality of shelves plates, the vertical gap formed between the shelf plate and the support plate, the transferring the containers to one of the storage shelves or containers The storage system of claim 1, wherein the port plate allows the port plate to partially surround the vertical gap prior to receiving from the one of the storage shelves. The shelf plate is configured to support a container , each of the plurality of storage shelves having a number of shelf features, wherein the shelf features are disposed when the container is disposed on the storage shelf. The storage system of claim 1, wherein the container is engaged with a port of the container to lock the container relative to the storage shelf.   The horizontal movement assembly includes a pneumatic cylinder, a plurality of linear bearings, and an active port base coupled to the base plate, the linear bearing coupled to the active port base, and the pneumatic cylinder includes the retracting The storage system of claim 1, wherein the storage system is configured to retract relative to the active port base to define a position and to extend relative to the active port base to determine the extended position.   In the extended position, the port plate is configured to transfer the container to an overhead transfer vehicle when the container is supported on the port plate, and to support the container on the port plate. The storage system of claim 1, wherein the storage system is configured to receive a container from the overhead transport vehicle. The tool has a plurality of load ports, one of the load port, the active port assembly is aligned with said port plate and vertical when in the extended position, according to claim 1 Storage system. A storage system,
A frame of said storage system coupled above to a frame of a tool assembly;
A base plate coupled to a frame of the storage system, the base plate coupled to a rotating mechanism driven by a motor, disposed in an orientation that constitutes a horizontal plane, and positioned below the motor. ,
And a plurality of storage shelves, wherein the plurality of storage shelves are coupled to the rotating mechanism for horizontal movement thereof and move together to one or more positions, the plurality of storage shelves. One has shelf plates and
A support plate coupled to the shelf plate;
Has an active port assembly coupled to the frame of the storage system, the active port assembly includes a single port plate positioned at the one of said positions, said active port assembly And a horizontal movement assembly defining an extended position of the port plate outside the frame of the storage system and a retracted position of the port plate inside the frame of the storage system, the port plate being in the retracted position , Disposed above the support plate and below the shelf plate,
The storage system further comprising a transfer hoist assembly disposed above the frame of the storage system and coupled to the frame of the storage system. The transfer hoist assembly includes a hoist linear drive assembly, a cantilevered support, and a hoist frame, the hoist linear drive assembly coupled to a frame of the storage system and the cantilever. A type support is coupled to the hoist linear drive assembly and the hoist frame, the hoist frame facilitating transfer of containers to and from the active port when in the extended position. The storage system of claim 10 , wherein the storage system is configured to move horizontally relative to a frame of the storage system. The transfer hoist assembly includes a hoist linear drive assembly, a cantilevered support, a hoist frame, a transfer hoist belt, and a gripper, wherein the hoist linear drive assembly includes the hoist linear drive assembly. Coupled to a frame, the cantilevered support is coupled to the hoist linear drive assembly and the hoist frame, the hoist frame is coupled to the transfer hoist belt, and the transfer hoist belt is coupled to the gripper coupled to the hoist frame, in order to facilitate the transfer of containers from the to the active port and the port plate when in the extended position, so as to move horizontally relative to the frame of the storage system The gripper is arranged on the port plate in the extended position of the container. Configured to extend through the transfer hoist belt with respect to the hoist frame for transferring the container from the port plate when placed, or for placing the container on the extended port plate The storage system according to claim 10 . And an active port coupled to the active port assembly, wherein the storage system frame and the active port together form a wall that partially surrounds the base plate, the rotation mechanism, and the storage shelf. And
Each of the storage shelves has a number of shelf features configured to support the containers when the containers are placed on the storage shelves, and the port plate is disposed on the port plate. The storage system of claim 10 , comprising a number of port features configured to support the container when done. The rotating mechanism includes a plurality of sprockets, a rail, a chain, the motor, the sprocket includes a driving sprocket, wherein the idler sprocket, the rail is coupled to the base plate, the motor, the drive Coupled to a sprocket, the plurality of sprockets configured to engage the chain, the chain coupled to the plurality of storage shelves, and the motor driving the drive to further move the chain The storage system of claim 10 , wherein the storage system is configured to rotate a sprocket and the chain moves to move the storage shelf relative to the base plate. The support plate is one of a plurality of support plates, and the shelf plate is one of a plurality of shelf plates;
The rotating mechanism includes a rail, a plurality of support plates supported on the rail, the rail is coupled to the base plate, said plurality of support plates, so as to rotate relative to the rail is configured, the storage shelf comprises a plurality of shelves plates, the vertical gap formed between the shelf plate and the support plate, the transferring the containers to one of the storage shelves or containers The storage system of claim 10 , allowing the port plate to partially surround the vertical gap before receiving from the one of the storage shelves. The shelf plate is configured to support a container , each of the plurality of storage shelves having a number of shelf features, wherein the shelf features are disposed when the container is disposed on the storage shelf. 11. The storage system of claim 10 , wherein the storage system engages with a port of the container to lock the container against the storage shelf. The horizontal movement assembly includes a pneumatic cylinder, a plurality of linear bearings, and an active port base coupled to the base plate, the linear bearing coupled to the active port base, and the pneumatic cylinder includes the retracting The storage system of claim 10 , wherein the storage system is configured to retract relative to the active port base to define a position and to extend relative to the active port base to determine the extended position. A storage system,
A first frame of the storage system coupled above to a frame of a tool assembly;
A base plate coupled to a first frame of the storage system, wherein the base plate is coupled to a rotating mechanism driven by a motor, and is disposed in an orientation forming a horizontal plane, below the motor. Located in
And a plurality of storage shelves, wherein the plurality of storage shelves are coupled to the rotating mechanism for horizontal movement thereof and move together to one or more positions, the plurality of storage shelves. One has shelf plates and
A support plate coupled to the shelf plate;
Anda first active port assembly coupled to the first frame of the storage system, the first active port assembly, first positioned at one of said locations The first active port assembly further includes an extended position of the first port plate outside the first frame of the storage system and an inner side of the first frame of the storage system . A horizontal movement assembly defining a retracted position of the first port plate , wherein the first port plate is disposed above the support plate and below the shelf plate in the retracted position;
The storage system further comprising a second frame of the storage system coupled above the first frame. Further comprising a second active port assembly coupled to the second frame of the storage system, the second active port assembly further second outside the second frame of the storage system storage system of the extended position of the port plate and defining a retracted position of the second port plate on the inside of the second frame of the storage system comprises a horizontally moving assembly, according to claim 18. And an active port coupled to the first active port assembly, wherein the first frame and the active port of the storage system together partially form the base plate, the rotating mechanism, and the storage shelf. Constitutes a wall that surrounds
Each of the storage shelves has a number of shelf features configured to support a container when the container is disposed on the storage shelf, and the first port plate includes a container that is the first shelf . The storage system of claim 18 , comprising a number of port features configured to support a container when placed on a port plate of the container. The rotating mechanism includes a plurality of sprockets, a rail, a chain, the motor, the sprocket includes a driving sprocket, wherein the idler sprocket, the rail is coupled to the base plate, the motor, the drive Coupled to a sprocket, the plurality of sprockets coupled to the chain, the chain coupled to the plurality of storage shelves, and the motor rotating the drive sprocket to move the chain 19. The storage system of claim 18 , wherein the storage system is configured to move to move the storage shelf relative to the base plate. The support plate is one of a plurality of support plates, and the shelf plate is one of a plurality of shelf plates;
The rotating mechanism includes a rail, a plurality of support plates supported on the rail, the rail is coupled to the base plate, said plurality of support plates, so as to rotate relative to the rail is configured, the storage shelf comprises a plurality of shelves plates, the vertical gap formed between the shelf plate and the support plate, the transferring the containers to one of the storage shelves or containers The storage system of claim 18 , wherein the first port plate allows the vertical gap to partially enclose the vertical gap before receiving from the one of the storage shelves. The shelf plate is configured to support a container , each of the plurality of storage shelves having a number of shelf features, wherein the shelf features are disposed when the container is disposed on the storage shelf. 19. The storage system of claim 18 , wherein the storage system engages with a port of the container to lock the container against the storage shelf. The horizontal movement assembly includes a pneumatic cylinder, a plurality of linear bearings, and an active port base, wherein the active port base is coupled to the base plate, the linear bearing is coupled to the active port base, and pneumatic cylinder, wherein is configured to retract to the active port-based, adapted to extend with respect to the active port-based to define the extended position to define the retracted position, according to claim 18 Storage system.

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