WO2006137233A1 - 有機半導体材料薄膜の形成方法および有機薄膜トランジスタの製造方法 - Google Patents
有機半導体材料薄膜の形成方法および有機薄膜トランジスタの製造方法 Download PDFInfo
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- WO2006137233A1 WO2006137233A1 PCT/JP2006/310177 JP2006310177W WO2006137233A1 WO 2006137233 A1 WO2006137233 A1 WO 2006137233A1 JP 2006310177 W JP2006310177 W JP 2006310177W WO 2006137233 A1 WO2006137233 A1 WO 2006137233A1
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- semiconductor material
- organic semiconductor
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- OFIYHXOOOISSDN-UHFFFAOYSA-N tellanylidenegallium Chemical compound [Te]=[Ga] OFIYHXOOOISSDN-UHFFFAOYSA-N 0.000 description 1
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- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
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- FMZQNTNMBORAJM-UHFFFAOYSA-N tri(propan-2-yl)-[2-[13-[2-tri(propan-2-yl)silylethynyl]pentacen-6-yl]ethynyl]silane Chemical compound C1=CC=C2C=C3C(C#C[Si](C(C)C)(C(C)C)C(C)C)=C(C=C4C(C=CC=C4)=C4)C4=C(C#C[Si](C(C)C)(C(C)C)C(C)C)C3=CC2=C1 FMZQNTNMBORAJM-UHFFFAOYSA-N 0.000 description 1
- ILJSQTXMGCGYMG-UHFFFAOYSA-N triacetic acid Chemical compound CC(=O)CC(=O)CC(O)=O ILJSQTXMGCGYMG-UHFFFAOYSA-N 0.000 description 1
- PYJJCSYBSYXGQQ-UHFFFAOYSA-N trichloro(octadecyl)silane Chemical compound CCCCCCCCCCCCCCCCCC[Si](Cl)(Cl)Cl PYJJCSYBSYXGQQ-UHFFFAOYSA-N 0.000 description 1
- RCHUVCPBWWSUMC-UHFFFAOYSA-N trichloro(octyl)silane Chemical compound CCCCCCCC[Si](Cl)(Cl)Cl RCHUVCPBWWSUMC-UHFFFAOYSA-N 0.000 description 1
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 1
- 239000005052 trichlorosilane Substances 0.000 description 1
- ITMCEJHCFYSIIV-UHFFFAOYSA-M triflate Chemical class [O-]S(=O)(=O)C(F)(F)F ITMCEJHCFYSIIV-UHFFFAOYSA-M 0.000 description 1
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- 125000000026 trimethylsilyl group Chemical group [H]C([H])([H])[Si]([*])(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
- H10K77/10—Substrates, e.g. flexible substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02623—Liquid deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having a potential-jump barrier or a surface barrier
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/464—Lateral top-gate IGFETs comprising only a single gate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having a potential-jump barrier or a surface barrier
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/466—Lateral bottom-gate IGFETs comprising only a single gate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Definitions
- the present invention relates to a method for forming an organic semiconductor material thin film on a substrate and a method for producing an organic thin film transistor using the method for forming an organic semiconductor material thin film.
- Organic semiconductors are easier to process than inorganic semiconductors and have a high affinity with plastic supports, making them attractive as thin-layer devices.
- a vapor deposition method is typical, but various methods are used depending on the characteristics of the material.
- organic semiconductor materials are characterized in that a thin film can be obtained more easily than vapor deposition by an atmospheric pressure process (wet process) in which a solution or liquid is applied to a substrate, such as coating or ink jet.
- Patent Document 1 attempts to reinforce an organic semiconductor polymer array by an alignment film in an attempt to obtain an organic semiconductor thin film by solution lamination.
- Patent Document 2 a liquid crystalline material is used as an organic semiconductor material solvent, and an organic semiconductor material is applied to the orientation-treated surface, thereby providing an organic semiconductor having a predetermined molecular orientation.
- a method of forming a layer is disclosed.
- Non-Patent Document 1 an organic semiconductor thin film or an organic semiconductor layer having a high carrier mobility is formed by drying a coating and a solvent using a thiophene polymer solution having a high mobility. Yes.
- Non-Patent Document 2 for example, in a vapor deposition film of pentacene The lower the surface energy on the substrate side, the lower the resulting pentacene thin film It is stated that the mobility is high.
- Carrier mobility in the organic semiconductor layer is determined by a molecular arrangement such as a ⁇ -stack of the crystal or organic semiconductor material structure in the organic semiconductor material film to be formed.
- the orientation in the drying process is important, for example, by adjusting the surface energy of the substrate to which the semiconductor solution as described above is applied, the carrier mobility of the semiconductor material film to be formed can be obtained for many organic semiconductor materials. It is difficult to improve performance, such as an increase in the situation!
- Patent Document 1 Pamphlet of International Publication No. 01Z47043
- Patent Document 2 JP 2004-31458 A
- Non-Patent Document 1 JACS 2004, 126, 3378
- Non-Patent Document 2 Synthetic Metals 148 (2005) 75— 79
- the present invention adjusts the surface energy of the organic semiconductor material solution together with the surface energy on the substrate side, thereby improving the mobility and the organic semiconductor material thin film with improved patterning accuracy on the substrate. It is a method of forming an organic thin film transistor that exhibits high performance by forming a semiconductor material thin film by these methods. Means for solving the problem
- ⁇ ⁇ ⁇ + ⁇ ⁇ + ⁇ h (where ⁇ d , ⁇ ⁇ , and ⁇ h are
- Y h to y h are in the range of -5mNZm to 20mNZm.
- the surface treatment is a treatment with a silane coupling agent
- an organic semiconductor material thin film with improved carrier mobility is obtained, and an organic thin film transistor with high efficiency is obtained.
- FIG. 1 is a diagram showing a configuration example of an organic thin film transistor according to the present invention.
- FIG. 2 is an example of a schematic equivalent circuit diagram of an organic TFT sheet according to the present invention.
- An organic thin film transistor that can be driven favorably by the method for forming an organic semiconductor material thin film of the present invention can be provided.
- An organic thin film transistor includes a top gate type having a source electrode and a drain electrode connected by an organic semiconductor layer on a support, and having a gate electrode on the support via a gate insulating layer.
- a top gate type having a source electrode and a drain electrode connected by an organic semiconductor layer on a support
- a gate electrode on the support via a gate insulating layer First, it is roughly classified into a bottom gate type having a gate electrode and having a source electrode and a drain electrode connected by an organic semiconductor channel through a gate insulating layer.
- the organic thin film transistor obtained by the method for forming an organic semiconductor film according to the present invention may be a top gate type or a bottom gate type, which may be misaligned or of any form.
- an organic semiconductor channel in a thin film transistor used in the process of the present invention is an organic semiconductor channel in a thin film transistor used in the process of the present invention.
- any organic compound may be selected as long as it functions as a semiconductor.
- the molecular weight is 5000 in terms of a weight average molecular weight. The following are preferred!
- the low molecular weight compound there is typically a compound such as pentacene.
- pentacene There are pentacenes having substituents described in WO03Z16599, WO03Z28125, USP6, 690, 029, JP-A 2004-10 7216, and pentacene precursors described in US2003-136964.
- the low molecular weight organic semiconductor material having a molecular weight or less a compound containing two or more hetero rings in the molecular structure is preferable.
- the hetero ring is a thiophene ring.
- Compounds having these are preferred, and examples thereof include compounds.
- the thiophene ring may have a substituent such as an alkyl group or may be unsubstituted, but it is preferably a compound containing a thiophene ring having a substituent, particularly an alkyl group, in the molecule. More preferably, both a thiophene ring having a substituent and an unsubstituted thiophene ring are included.
- the thiophene ring is connected to two or more. The number of thiophene rings to be connected is preferably 2 to 10.
- an oligomer having a weight average molecular weight of 5000 or less is preferred.
- examples of the oligomer that can be preferably used in the present invention include thiophene oligomer.
- the thiophene oligomer preferably used in the present invention includes a thiophene oligomer having a thiophene ring repeating unit having a substituent and an unsubstituted thiophene ring repeating unit force each having at least two partial structures.
- the number of thiophene rings contained in the thiophene oligomer is 8 to 40.
- the number of thiophene rings is preferably in the range of 8-20. More preferably, the thiophenoligomer has a partial structure represented by the following general formula (1).
- R represents a substituent
- examples of the substituent represented by R include an alkyl group (for example, methyl group, ethyl group, propyl group, isopropyl group, tert-butyl group, pentyl group, hexyl group). Octyl group, dodecyl group, tridecyl group, tetradecyl group, pentadecyl group, etc.), cycloalkyl group (eg, cyclopentyl group, cyclohexyl group, etc.), alkenyl group (eg, buyl group, aryl group, etc.), alkyl, etc.
- alkyl group for example, methyl group, ethyl group, propyl group, isopropyl group, tert-butyl group, pentyl group, hexyl group.
- -Ruyl group for example, ethynyl group, propargyl group, etc.
- aryl group for example, phenol group, p-chlorophenol group, mesityl group, tolyl group, xylyl group, naphthyl group, anthryl group, An azulenyl group, an acenaphthyl group, a fluorenyl group, a phenanthryl group, an indur group, a pyrenyl group, a biphenyl group, etc.
- an aromatic heterocyclic group for example, a furyl group, a chenyl group
- substituents may be further substituted with the above substituents, or a plurality thereof may be bonded to each other to form a ring.
- a preferred substituent is an alkyl group, more preferably an alkyl group having 2 to 20 carbon atoms, and particularly preferably an alkyl group having 6 to 12 carbon atoms.
- the terminal group of the thiophene oligomer used in the present invention will be described.
- the terminal group of the thiophene oligomer used in the present invention does not have a chael group.
- an aryl group for example, a phenyl group, p-Chlorofuryl group, mesityl group, tolyl group, xylyl group, naphthyl group, anthryl group, azulyl group, acenaphthyl group, fluorine group, phenanthryl group, indenyl group, pyrenyl group, biphenyl group Etc.
- alkyl group for example, methyl group, ethyl group, propyl group, isopropyl group, tert-butyl group, pentyl group, hexyl group, octyl group, dodecyl group, tridecyl group, tetradecyl group, pentadecyl group, etc.
- the thiophene oligomer used in the present invention preferably has no head-to-head structure in the structure, and more preferably, the structure has a head-to-tail structure, or It preferably has a tail-to-tail structure.
- head-to-head structure head-to-tail structure, and tail-to-tail structure according to the present invention
- head-to-head structure head-to-tail structure, and tail-to-tail structure according to the present invention
- ⁇ -electron organic solids (1998, published by the Japan Society for Publishing Press, Japan) This can be referred to on pages 27-32 and Adv. Mater. 1998, 10, No. 2, pages 93-116, etc.
- specific structural features are shown below.
- R has the same meaning as R in the general formula (1).
- a functionalized pentacene such as TIPS pentacene described in Advanced materials, 15, No. 23, 2 009-2011 may be used as an organic semiconductor material!
- the present invention provides a semiconductor material thin film more easily than vapor deposition or the like in a normal pressure process by applying an organic semiconductor solution to a substrate, for example, by coating or an inkjet method.
- an organic semiconductor solution for example, by coating or an inkjet method.
- the organic semiconductor material is dissolved in a solvent, and, for example, an organic semiconductor material thin film is obtained by supplying, coating, and drying on a substrate such as a silicon wafer with an oxide film. be able to.
- An organic semiconductor material thin film is an example of a conductor material crystal or an organic semiconductor material structure.
- the carrier mobility is determined by the molecular arrangement such as ⁇ -stack.
- applying a solution of an organic semiconductor material onto a substrate for example, coating or ink-jet method
- drying it to form a highly oriented structure can affect the compatibility with the substrate and the surface of the substrate.
- Various factors such as the state, affinity with the substrate surface, and the intermolecular force of the organic semiconductor material molecules (or oligomers and polymers) are involved, and it is often difficult to do this with good reproducibility. .
- the present invention when an organic semiconductor material solution is applied onto a substrate to obtain an organic semiconductor material thin film, the surface free energy of the substrate surface to which the semiconductor solution is applied, and a solvent that dissolves or disperses the organic semiconductor material By adjusting the surface free energy (that is, surface tension) to a range where each relationship satisfies a predetermined condition, the resulting organic semiconductor material thin film has high carrier mobility, and also has insulating and hydrophobic properties.
- the present invention has been completed by finding a method of forming an organic semiconductor material thin film that can be patterned even on a high substrate surface even if it is fine and highly accurate.
- the present invention provides an organic semiconductor solution on the insulator surface by controlling the correlation between the surface free energy of the insulator surface on which the organic semiconductor material thin film is to be formed and the surface free energy of the organic semiconductor solution.
- the insulator surface on which the organic semiconductor material thin film is to be formed is, for example, the surface of a silicon wafer substrate with an oxide film in the case of a bottom gate type organic thin film transistor, and the organic semiconductor material is formed on the substrate.
- a bottom-gate organic thin film transistor can be formed by forming a thin film, further forming a source electrode and a drain electrode, and connecting semiconductor layers.
- a silicon wafer also serves as a gate, and an oxide film (silicon oxide film) formed on the surface forms a gate insulating layer.
- an organic semiconductor layer is formed on a support that is an insulator, thereby forming a source electrode and a drain electrode connected to each other, and a gate insulating layer is further formed thereon.
- An organic thin film transistor is formed by forming a gate electrode through the layer.
- the organic semiconductor solution is first applied, and the support (insulator) surface on which the organic semiconductor material thin film (layer) is formed constitutes the insulator surface.
- the organic semiconductor material film solution must be fine and can be applied to the substrate with good turning accuracy.
- an organic semiconductor solution is applied to the surface of the substrate, and a semiconductor material thin film is formed on the substrate.
- Y h -y h is in the range of 5 mNZm to 20 mNZm
- the hydrogen bond component ⁇ h of the surface free energy on the substrate surface is 0 ⁇ h ⁇ m20 (mNZm)
- the surface energy of the substrate surface is low. It is preferable that the hydrogen bond component ⁇ h of the surface free energy of the substrate surface is 20 mNZm or more and smooth coating accuracy is high. ! Smooth film is difficult to obtain! ,.
- the substrate surface In order to reduce the surface energy of the substrate surface, particularly its hydrogen bonding component, it is preferable to subject the substrate surface to a surface treatment.
- the surface treatment is a treatment for reducing the surface energy of the substrate surface or changing the surface roughness.
- the surface energy of the substrate surface is sufficiently low and the interaction with the semiconductor material is not large, the interaction between the semiconductor material molecules is greatly expressed, so it is preferable for the orientation of the organic semiconductor material molecules. It is done.
- the smaller the hydrogen bond component of the surface free energy on the substrate surface side the easier the organic semiconductor material is oriented. Yes. This suggests that the orientation of the organic semiconductor material is influenced by force.
- the surface energy of the substrate surface is low, the force of this, and the hydrogen bonding component ⁇ h of the surface free energy of the surface of the insulator (solid) as the substrate is insulated.
- the difference between the surface free energy of the solvent that constitutes the liquid containing the organic semiconductor material and the hydrogen bonding component ⁇ h , ⁇ h — ⁇ h, which is about to be applied by coating or ink jet method, is 5 to S mNZm to 20 mNZm In such a range, selecting the solvent to be used for the substrate surface and the solution in each case has a great effect in promoting the molecular arrangement or orientation such as ⁇ stack on the substrate of the organic semiconductor material.
- the surface free energy of the surface of the insulator solid in the present invention can be measured by the following method.
- the contact angles of three kinds of standard liquids with known surface free energies, hexane, methylene iodide, water, and the surface of the solid to be measured are manufactured by Kyowa Interface Science Co., Ltd .: Contact angle meter C — Measure five times each with V, average the measured values, and obtain the average contact angle for each. Measurement is performed in an environment of 20 ° C and 50% RH.
- y (l + cos0) 2 ⁇ ( 7 Y 2 + ⁇ y ⁇ ⁇ ⁇ ) 1 2 + ( ⁇ ⁇ 2 ⁇
- the body surface ⁇ d is obtained.
- the surface free energy of the solid can be determined from the surface free energies of the above three solvents and the respective contact angles.
- Other combinations are not necessarily limited to n-hexane, methylene iodide, and water, but the surface free energy of n-hexane is only a dispersion term and is easy to calculate. .
- the surface of the mixed liquid is obtained by performing weighted averaging of each component of the surface free energy of each solvent, which is a component when using a mixed solvent, using the solvent ratio (molar ratio). Free energy.
- the surface free energy of the solvent is larger, and for example, the interaction between the organic semiconductor material molecules in the solution and the solvent is expected to be larger. It tends to affect the molecular stack of semiconductor materials.
- the hydrogen bonding component of the surface free energy of the organic semiconductor material solution or the solvent constituting the solution is large, the molecular orientation of the organic semiconductor material is affected and the organic semiconductor material molecules are immediately aligned on the substrate ( ⁇ -Structures such as stacks; for example, molecules are standing on the substrate) are easily formed, and organic semiconductor material thin films with high carrier mobility are easily formed.
- a semiconductor film can be obtained.
- the substrate surface has a dispersion component ⁇ polarity component of solid surface free energy.
- Min gamma S [rho, hydrogen bond component gamma S h of the hydrogen bond component gamma S h is required to be less than 20 mN / m.
- the hydrogen bonding component ⁇ h of the solid surface free energy which is preferably surface-treated, is preferred.
- V ⁇ surface with a small interaction of less than 15mNZm (greater than 0) and even less than lOmNZm! /.
- an organic semiconductor material film having high orientation and high carrier mobility can be formed on a hydrophobic and insulating surface having a small surface free energy.
- a film having high mobility can be obtained.
- a solution (solution) of an organic semiconductor material is applied to the insulator surface by, for example, a coating method, an ink jet method, a printing method, or the like to form an organic semiconductor thin film.
- the semiconductor thin film is formed by adjusting the surface of the insulator and the surface energy (surface tension) of the solvent used in the solution and applying the solution.
- the organic semiconductor material applied on the substrate is dried together with the volatilization of the solvent, and after drying, an organic semiconductor material thin film is formed on the substrate.
- the orientation is improved by molecular arrangement such as ⁇ -stack of organic semiconductor material molecules or crystallization, and the carrier mobility of the organic semiconductor material thin film is greatly improved.
- these organic semiconductor material films constitute an organic thin film transistor, they are formed on a substrate having an insulating film having a high hydrophobicity such as a gate insulating film, for example, a silicon thermal oxide film.
- the solvent for dissolving the organic semiconductor material may be selected so that the surface energy of the substrate having the insulator surface and the surface energy of the solvent to be used have the above relationship, but the affinity with the surface to be applied is not limited.
- aromatic hydrocarbons such as toluene, chain aliphatic hydrocarbons such as hexane and heptane, and cyclic aliphatic hydrocarbons such as cyclohexane and cyclopentane.
- Aliphatic hydrocarbons, halogenated hydrocarbons such as chloroform, 1,2-dichloroethane, chain ethers such as jetyl ether and diisopropyl ether, tetrahydrofluoro Cyclic ethers such as emissions or Jiokisan include ketones such as acetone Ya methyl E chill ketone and the like. Also, these solvents can be used in combination. Further, in order to promote the dissolution of the organic semiconductor material, the solubility in the organic semiconductor material is high, and other solvents are used as one component of the mixed solvent so that the above effects are not hindered, that is, 30% by mass in the solvent. In the following, preferably 10% by mass or less may be mixed and used.
- the insulator surface to which the organic semiconductor material solution is applied (the substrate having the insulator) is selected so that the surface free energy between the solvent constituting the solution and the insulator surface satisfies the above relationship. It is preferable to use in.
- the content of the organic semiconductor material in the solvent varies depending on the type of solvent used, the selection of the organic semiconductor material, and the like, but in order to apply these liquid materials on the substrate by coating to form a thin film,
- the organic semiconductor material is preferably dissolved in the range of 0.01 to: LO. 0% by mass, preferably 0.1 to 5.0% by mass. If the concentration is too high, uniform spreading on the substrate cannot be achieved, and if it is too low, pinholes of the coating due to liquid breakage on the substrate are likely to occur.
- the organic semiconductor material solution is applied to the insulator surface (on the substrate) by cast coating, spin coating, printing, ink jet method, abrasion method or the like, and dried.
- An organic semiconductor material thin film can be formed on the substrate.
- heat treatment may be performed at a predetermined temperature for a predetermined time.
- the molecules of the organic semiconductor material formed thereby The orientation or alignment can be further strengthened and promoted.
- the heat treatment is preferably performed at a temperature not higher than the melting point of the organic semiconductor material.
- the organic semiconductor material has an exothermic peak in the differential scanning calorimetry (DSC) measurement
- DSC differential scanning calorimetry
- the heat treatment is preferably performed for a certain period of time from 10 seconds to 1 week, preferably from 10 seconds to 1 day, more preferably from 10 seconds to 1 hour.
- the heat generation start temperature is 31.9 ° C.
- Melting point is 79.6 ° C.
- the melting point of the organic semiconductor material is preferably 50 ° C or higher and 200 ° C.
- the heat treatment at a temperature equal to or higher than the melting point melts the organic semiconductor material, so that the formed oriented or crystallized film is melted and destroyed.
- it is preferable to expose to an excessively high temperature because decomposition and alteration of the organic semiconductor material itself may occur.
- These heat treatments are preferably carried out in an inert gas such as nitrogen or helium or argon. Moreover, these 0. 7 X 10 2 ⁇ 1 as pressure of the inert gas. 3 X 10 2 kPa in the range, immediately Chi near atmospheric pressure is preferred.
- the substrate having an insulator surface on which the organic semiconductor material film is formed includes a top gate type, a bottom gate type, and the like, which will be described later.
- a gate type organic thin film transistor a gate insulating film (thermal oxide film formed on a polysilicon substrate) formed on a gate electrode can be used.
- a top gate thin film transistor or the like is a substrate having an insulator surface on which an organic semiconductor material thin film (layer) is first formed.
- the surface free energy of the surface of the insulator is defined as the surface free energy of the solid surface based on the Young-Fowkes equation.
- the surface is 0 ⁇ h ⁇ 10 (mNZm) ss
- the gate insulating film In order to obtain a surface having a small value of these hydrogen bonding components, for example, it is preferable to subject the gate insulating film to a surface treatment.
- Such treatments include a process of changing the surface roughness of the gate insulating film by polishing or the like, and an orientation process such as rubbing to form a self-aligned thin film.
- surface treatment with a silane coupling agent Preferred examples of the silane coupling agent include octadecyltrichlorosilane, octyltrichlorosilane, hexamethyldisilane, hexamethyldisilazane, and the like, but the present invention is not limited to these.
- Silane coupling agent The treatment by is preferable because it significantly reduces the surface free energy of the substrate surface.
- the contact angle measurement of the substrate surface to which the liquid material containing the organic semiconductor material is applied according to the present invention uses a contact angle meter CA-V or CA-DT'A type manufactured by Kyowa Interface Science Co., Ltd. Measured in an environment of 20 ° C and 50% RH.
- the thickness of the organic semiconductor layer formed in this way is not particularly limited, but the characteristics of the obtained organic thin film transistor (TFT) are greatly influenced by the thickness of the semiconductor layer.
- the film thickness varies depending on the semiconductor material, but in general: Lm or less, particularly 10 to 3 OOnm is preferred.
- the organic semiconductor layer is not limited to the organic semiconductor material alone.
- acrylic acid acetamido, dimethylamino group, cyano group, carboxyl group
- Materials having functional groups such as nitro groups, materials serving as acceptors such as benzoquinone derivatives, tetracyanoethylene and tetracyanquinodimethane and their derivatives, such as amino groups, triphenyl groups
- Materials having functional groups such as alkyl groups, hydroxyl groups, alkoxy groups, and phenyl groups, substituted amines such as phenylenediamine, anthracene, benzoanthracene, substituted benzoanthracenes, pyrene, substituted pyrene, force rubazole and derivatives thereof,
- tetrathiafulvalene and its derivatives V Doping may be performed by adding a material that can be a donor and a donor!
- the method for forming an organic semiconductor film according to the present invention is also useful for structuring, such as the orientation of the organic semiconductor material molecules of the doped organic semiconductor film.
- an organic thin film transistor will be described by taking as an example a bottom gate type organic thin film transistor which is preferably one of the embodiments.
- An organic thin film transistor is configured by optimally arranging a gate electrode, a gate insulating film, an active layer, a source electrode, and a drain electrode on a support. Therefore, for example, after forming a gate electrode on a support, a gate insulating film is formed, and an active layer (organic semiconductor material thin film (layer)) is formed on the gate insulating film by the method described above. Then, the organic thin film transistor according to the present invention is formed by forming the source and drain electrodes, respectively.
- a source and drain electrode pattern may be formed on the gate insulating film, and an organic semiconductor layer may be formed by patterning between the source and drain electrodes.
- the gate electrode, the gate insulating film, the organic semiconductor material thin film (layer), the source electrode, and the drain electrode should be appropriately patterned and optimally arranged on the support as necessary.
- the organic thin film transistor according to the present invention is obtained.
- the material for forming the source electrode, the drain electrode, and the gate electrode is not particularly limited as long as it is a conductive material, and various metal materials can be used.
- a method for forming an electrode a method of forming a conductive thin film formed using a method such as vapor deposition or sputtering using the above as a raw material by using a known photolithography method or a lift-off method, aluminum, copper, or the like Resist by thermal transfer, ink jet, etc. on metal foil There is a method of performing etching using, for example.
- conductive fine particle dispersion, conductive polymer solution or dispersion is directly patterned by ink jet method, lithograph or laser abrasion from coating film, etc.
- ink jet method lithograph or laser abrasion from coating film, etc.
- a method of patterning an ink containing a conductive polymer or conductive fine particles, a conductive paste, or the like by a printing method such as relief printing, intaglio printing, lithographic printing, or screen printing can also be used.
- a known conductive polymer whose conductivity has been improved by doping or the like, for example, conductive polyarlin, conductive polypyrrole, conductive polythiophene, a complex of polyethylenedioxythiophene and polystyrenesulfonic acid, etc. is also suitable. Used for. Of these, the one having a low electrical resistance on the contact surface with the semiconductor layer is preferred.
- Metal materials of conductive fine particles include platinum, gold, silver, cobalt, nickel, chromium, copper, iron, tin, antimony, lead, tantalum, indium, palladium, tellurium, Force that can use yum, iridium, aluminum, ruthenium, germanium, molybdenum, tungsten, zinc, etc.
- Platinum, gold, silver, copper, conoret, chromium, iridium, nickel, palladium, especially with a work function of 4.5 eV or more Molybdenum and tungsten are preferred.
- a metal ion in a liquid phase such as a physical generation method such as a gas evaporation method, a sputtering method or a metal vapor synthesis method, a colloid method, or a coprecipitation method is used.
- a chemical production method include reducing metal to produce fine metal particles, preferably disclosed in JP-A-11-76800, JP-A-11-80647, JP-A-11-319538, JP-A-2000-239853, and the like.
- Colloidal method JP 2001-254185, 2001-53028, 2001-35255, 2000-124157, 2000-123634, etc. [Evaporation method in gas described here] .
- the average particle diameter of the dispersed metal fine particles is preferably 20 nm or less.
- a conductive polymer to the metal fine particle dispersion, and if the source electrode and the drain electrode are formed by pressing, heating, etc., the organic semiconductor is formed by the conductive polymer. Can make ohmic contact with the layer. That is, the conductive polymer is interposed on the surface of the metal fine particles to reduce the contact resistance to the semiconductor, and the metal fine particles. The effect of the present invention can be further enhanced by heating and fusing the particles.
- the conductive polymer it is preferable to use a known conductive polymer whose conductivity has been improved by doping or the like.
- conductive polythiophene polyethylenedioxy
- polystyrene sulfonic acid is preferably used.
- the content of the metal fine particles is LV, preferably 0.00001-0. If this amount is exceeded, fusion of the metal fine particles may be inhibited.
- an electrode In the case of forming an electrode from these metal fine particle dispersions, it is preferable to heat-fuse the metal fine particles by heating after forming the source electrode and the drain electrode. Also, when forming the electrode, apply a pressure of approximately 1 to 50000 Pa, more preferably 1000 to 10,000 Pa, to promote fusion.
- a jet method when direct patterning is performed by an ink jet method, a jet method, a bubble jet (registered trademark) method may be used as an ink jet head ejection method.
- a known method such as a continuous jet type ink jet method such as an on-demand type electrostatic suction method can be used.
- inorganic oxide silicon oxide, aluminum oxide, tantalum oxide, titanium oxide, tin oxide, vanadium oxide, barium strontium titanate, barium zirconate titanate, lead zirconate titanate, lead lanthanum titanate, titanium Examples include strontium acid, barium titanate, barium magnesium fluoride, bismuth titanate, strontium bismuth titanate, strontium bismuth tantanoleate, bismuth tantalate bismuth, and trixium thidium trioxide. Of these, silicon oxide, acid aluminum, acid tantalum, and acid titanium are preferred. Inorganic nitrides such as silicon nitride and aluminum nitride can also be suitably used.
- the wet process includes a method of applying and drying a liquid in which fine particles of inorganic oxide are dispersed in an arbitrary organic solvent or water using a dispersion aid such as a surfactant as necessary.
- a so-called sol-gel method is used in which a solution of a precursor of the product, for example, an alkoxide is applied and dried.
- the preferred ones are the atmospheric pressure plasma method and the sol-gel method.
- the method of forming an insulating film by the atmospheric pressure plasma method is a process in which a thin film is formed on a substrate by discharging at atmospheric pressure or near atmospheric pressure to excite a reactive gas to form a thin film on a substrate.
- a highly functional thin film can be formed with high productivity.
- these insulating films may be subjected to surface treatment in advance.
- Preferred examples of these treatments include treatment with a silane coupling agent as described above and alignment treatment such as rubbing.
- polyimide, polyamide, polyester, polyacrylate, photo radical polymerization system, photopower thione polymerization system photocurable resin, or a copolymer containing an alicyclic-tolyl component is used as a method for forming an organic compound film.
- Polymers, polybuluphenol, polybulualcohol, novolac resin, cyanoethyl pullulan, and the like can also be used as a method for forming the organic compound film.
- the inorganic oxide film and the organic oxide film can be laminated and used together.
- the thickness of these insulating films is generally 50 nm to 3 ⁇ m, preferably 100 nm to 1 ⁇ m.
- the support is composed of glass or a flexible resin sheet, and for example, a plastic film can be used as the sheet.
- the plastic film include polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyetherol sulfone (PES), polyetherimide, polyetheretherketone, and polyphenylene sulfate.
- films such as fluid, polyarylate, polyimide, polycarbonate (PC), cellulose triacetate (TAC) and cellulose acetate propionate (CAP).
- FIG. 1 is a cross-sectional view showing a configuration example of an organic thin film transistor (TFT) according to the present invention.
- TFT organic thin film transistor
- a mask is used on a glass support 6 to form a pattern by, for example, vapor deposition of gold to form a source electrode 2 and a drain electrode 3, and an organic semiconductor material layer 1 is formed therebetween. Then, a gate insulating layer 5 is formed thereon, and a gate electrode 4 is further formed thereon to form an organic TFT.
- FIGS. 2B and 2C show other configuration examples of the top-gate organic thin film transistor.
- FIGS. 2 (c!) To (f) show configuration examples of bottom-gate organic thin film transistors (TFTs).
- TFTs bottom-gate organic thin film transistors
- FIG. 4 (d) after forming the gate electrode 4 on the support 6, the gate insulating layer 5 is formed, the source electrode 2 and the drain electrode 3 are formed on the gate insulating layer 5, and the gap between the source and drain electrodes is formed.
- the organic semiconductor material layer 1 is formed on the gate insulation layer to form a bottom gate type organic TFT.
- FIGS. 5 (f) a gate electrode 4 is formed on a support 6, a gate insulating layer 5 is formed, an organic semiconductor material layer 1 is formed thereon, and then a source electrode 2 and a drain electrode 3 are further formed. To form an organic TFT.
- FIG. 2 is an example of a schematic equivalent circuit diagram of a TFT sheet configured like an output element such as a liquid crystal or an electrophoretic element using the organic thin film transistor.
- the TFT sheet 10 has a large number of organic TFTs 11 arranged in a matrix. 7 is a gate bus line of each organic TF T11, and 8 is a source bus line of each organic TFT11.
- An output element 12 such as a liquid crystal or an electrophoretic element is connected to the source electrode of each organic TFT 11 to constitute a pixel in the display device.
- the pixel electrode may be used as an input electrode of the photosensor.
- the liquid crystal is shown as an output element in an equivalent circuit having resistance and capacitor power.
- 13 is a storage capacitor
- 14 is a vertical drive circuit
- 15 is a horizontal drive circuit.
- a 200 nm thick thermal oxide film was formed on an n-type Si wafer with a specific resistance of 0.02 ⁇ 'cm, and the surface was cleaned by oxygen plasma treatment to form a gate insulating film.
- a 200 nm thick thermal oxide film is formed on an n-type Si wafer with a specific resistance of 0.02 ⁇ 'cm, and this is used as a gate insulating film. Was measured.
- HMDS hexamethyldisilazane
- Comparative Example 1 and Examples 1 to 3 that is, a 200 nm thermal oxide film (SiO 2) surface formed on the Si wafer (Example 1), a 200 nm thermal acid film formed on the Si wafer (SiO 2) surface treated with HMDS treatment (Example 2) and thermal oxide film (SiO 2) surface treated with otatilylchlorosilane (OTS) (Example 3), and formed on the Si wafer
- the surface energy of the substrate surface used and the organic semiconductor material solution Table 3 summarizes the differences between the components of the surface energy of the solvent used (hydrogen bonding components of the surface free energy of the substrate) (hydrogen bonding components of the surface free energy of the solvent) (each at 20 ° C). Value when).
- Unit of surface free energy is mN / m
- Cyclohexane is the volume ratio
Abstract
Description
Claims
Priority Applications (3)
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GB0724500A GB2441702B (en) | 2005-06-21 | 2006-05-23 | Method for forming thin organic semiconductor material film and method for producing organic thin-film transistor |
US11/922,466 US20090111210A1 (en) | 2005-06-21 | 2006-05-23 | Method for Organic Semiconductor Material Thin-Film Formation and Process for Producing Organic Thin Film Transistor |
JP2007522216A JPWO2006137233A1 (ja) | 2005-06-21 | 2006-05-23 | 有機半導体材料薄膜の形成方法および有機薄膜トランジスタの製造方法 |
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WO2006137233A1 true WO2006137233A1 (ja) | 2006-12-28 |
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PCT/JP2006/310177 WO2006137233A1 (ja) | 2005-06-21 | 2006-05-23 | 有機半導体材料薄膜の形成方法および有機薄膜トランジスタの製造方法 |
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US (1) | US20090111210A1 (ja) |
JP (1) | JPWO2006137233A1 (ja) |
CN (1) | CN100568471C (ja) |
GB (1) | GB2441702B (ja) |
WO (1) | WO2006137233A1 (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007119703A1 (ja) * | 2006-04-14 | 2007-10-25 | Konica Minolta Holdings, Inc. | 結晶性有機半導体薄膜の製造方法、有機半導体薄膜、電子デバイスおよび薄膜トランジスタ |
WO2007125950A1 (ja) * | 2006-04-26 | 2007-11-08 | Konica Minolta Holdings, Inc. | 有機半導体薄膜および有機半導体デバイス |
WO2008093663A1 (ja) * | 2007-01-31 | 2008-08-07 | Konica Minolta Holdings, Inc. | 有機薄膜トランジスタ、その製造方法及び有機半導体デバイス |
JP2010034565A (ja) * | 2008-07-29 | 2010-02-12 | Korea Electronics Telecommun | 表面エネルギー制御を利用した有機薄膜トランジスタの製造方法 |
JP2011249666A (ja) * | 2010-05-28 | 2011-12-08 | Teijin Ltd | アルキルシラン積層体及びその製造方法、並びに薄膜トランジスタ |
WO2013084676A1 (ja) * | 2011-12-08 | 2013-06-13 | 東京エレクトロン株式会社 | 有機トランジスタ及びその製造方法 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100555702C (zh) * | 2006-04-29 | 2009-10-28 | 中国科学院长春应用化学研究所 | 有机半导体晶体薄膜及弱取向外延生长制备方法和应用 |
US7855121B2 (en) * | 2009-03-27 | 2010-12-21 | Samsung Electronics Co., Ltd. | Method of forming organic thin film and method of manufacturing semiconductor device using the same |
KR101898048B1 (ko) * | 2009-08-28 | 2018-09-12 | 고쿠리쓰다이가쿠호진 규슈다이가쿠 | 액정 표시 소자 및 상기 소자에 사용되는 기판 |
WO2014061451A1 (ja) * | 2012-10-19 | 2014-04-24 | 株式会社ニコン | 薄膜形成装置及び薄膜形成方法 |
CN110112073B (zh) * | 2019-04-22 | 2021-09-24 | 中国科学院微电子研究所 | 场效应晶体管制备方法及场效应晶体管 |
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JP4502382B2 (ja) * | 2004-11-02 | 2010-07-14 | キヤノン株式会社 | 有機トランジスタ |
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- 2006-05-23 JP JP2007522216A patent/JPWO2006137233A1/ja active Pending
- 2006-05-23 US US11/922,466 patent/US20090111210A1/en not_active Abandoned
- 2006-05-23 WO PCT/JP2006/310177 patent/WO2006137233A1/ja active Application Filing
- 2006-05-23 GB GB0724500A patent/GB2441702B/en not_active Expired - Fee Related
- 2006-05-23 CN CNB2006800219050A patent/CN100568471C/zh not_active Expired - Fee Related
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JP2004006758A (ja) * | 2002-04-11 | 2004-01-08 | Konica Minolta Holdings Inc | 有機半導体材料、これを用いた電界効果トランジスタ及びスイッチング素子 |
JP2004214482A (ja) * | 2003-01-07 | 2004-07-29 | Konica Minolta Holdings Inc | 有機半導体材料および有機薄膜トランジスタ |
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2007119703A1 (ja) * | 2006-04-14 | 2007-10-25 | Konica Minolta Holdings, Inc. | 結晶性有機半導体薄膜の製造方法、有機半導体薄膜、電子デバイスおよび薄膜トランジスタ |
WO2007125950A1 (ja) * | 2006-04-26 | 2007-11-08 | Konica Minolta Holdings, Inc. | 有機半導体薄膜および有機半導体デバイス |
WO2008093663A1 (ja) * | 2007-01-31 | 2008-08-07 | Konica Minolta Holdings, Inc. | 有機薄膜トランジスタ、その製造方法及び有機半導体デバイス |
JPWO2008093663A1 (ja) * | 2007-01-31 | 2010-05-20 | コニカミノルタホールディングス株式会社 | 有機薄膜トランジスタ、その製造方法及び有機半導体デバイス |
JP2010034565A (ja) * | 2008-07-29 | 2010-02-12 | Korea Electronics Telecommun | 表面エネルギー制御を利用した有機薄膜トランジスタの製造方法 |
JP2011249666A (ja) * | 2010-05-28 | 2011-12-08 | Teijin Ltd | アルキルシラン積層体及びその製造方法、並びに薄膜トランジスタ |
WO2013084676A1 (ja) * | 2011-12-08 | 2013-06-13 | 東京エレクトロン株式会社 | 有機トランジスタ及びその製造方法 |
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JPWO2006137233A1 (ja) | 2009-01-08 |
CN101203949A (zh) | 2008-06-18 |
GB0724500D0 (en) | 2008-01-30 |
GB2441702A (en) | 2008-03-12 |
US20090111210A1 (en) | 2009-04-30 |
GB2441702B (en) | 2010-10-27 |
CN100568471C (zh) | 2009-12-09 |
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