WO2006093349A1 - Appareil et procede d’inspection - Google Patents

Appareil et procede d’inspection Download PDF

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Publication number
WO2006093349A1
WO2006093349A1 PCT/JP2006/304668 JP2006304668W WO2006093349A1 WO 2006093349 A1 WO2006093349 A1 WO 2006093349A1 JP 2006304668 W JP2006304668 W JP 2006304668W WO 2006093349 A1 WO2006093349 A1 WO 2006093349A1
Authority
WO
WIPO (PCT)
Prior art keywords
inspection
sensor
gas flow
inspection object
liquid crystal
Prior art date
Application number
PCT/JP2006/304668
Other languages
English (en)
Japanese (ja)
Inventor
Masato Ikeda
Shuji Yamaoka
Shogo Ishioka
Original Assignee
Oht Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oht Inc. filed Critical Oht Inc.
Publication of WO2006093349A1 publication Critical patent/WO2006093349A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2300/00—Aspects of the constitution of display devices
    • G09G2300/04—Structural and physical details of display devices
    • G09G2300/0421—Structural details of the set of electrodes
    • G09G2300/0426—Layout of electrodes and connections
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/36—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using liquid crystals
    • G09G3/3611—Control of matrices with row and column drivers
    • G09G3/3648—Control of matrices with row and column drivers using an active matrix

Definitions

  • the present invention relates to an inspection apparatus and an inspection method for inspecting the quality of pixel electrodes formed on, for example, a liquid crystal panel and a liquid crystal display.
  • liquid crystal display panels with a high pixel count have been developed, and products that use them have been put on the market.
  • the so-called pin contact method uses a probe and does not improve the inspection accuracy. Therefore, in a non-contact state via capacitive coupling between the conductor pattern to be inspected and the sensor.
  • a method has been used in which an inspection signal is supplied to an inspection object, and the signal is detected from the inspection object in a non-contact state to conduct a continuity inspection.
  • a liquid crystal display substrate inspection apparatus disclosed in Patent Document 1 uses air levitation in a glass substrate inspection apparatus.
  • Patent Document 2 discloses a printed wiring board inspection device that moves a substrate to be inspected to a sensor position by airflow.
  • the levitation device described in Patent Document 3 moves a planar object with air pressure. It is a stable surface and uses less compressed air. Therefore, it is equipped with an air mixing means that mixes the supplied compressed air with the atmospheric air in the vicinity of the device, and reduces the compressed air by mixing the atmospheric air, and at the same time increases the air flow rate and injects it to the object. It is configured to float up.
  • Patent Document 1 Japanese Patent Laid-Open No. 1 1 1 1 4 2 8 0 2
  • Patent Document 2 Japanese Patent Laid-Open No. 2 0 0 2— 1 8 1 8 7 5
  • Patent Document 3 Japanese Patent Laid-Open No. 2 0 0 4-2 6 2 6 0 8
  • the sensor In the inspection using the non-contact method, the sensor is placed close to the pixel electrode of the liquid crystal display. Therefore, the glass substrate on which the pixel electrode to be inspected is placed is fixed on the stage, and the sensor head is aired. It is necessary to keep the gap between the inspection target and the sensor head constant by floating. In other words, in the non-contact method, it is necessary to determine whether the inspection target is good or not based on a slight level difference in the detection signal.
  • the inspection target and sensor head There is a problem that the gap between the object to be inspected and the sensor head cannot be controlled.
  • the inspection apparatus described in Patent Document 1 uses air to reduce the frictional resistance between the substrate to be inspected and the stage, and in the apparatus described in Patent Document 3, air is injected to the bottom of the substrate.
  • air is injected to the bottom of the substrate.
  • compressed air and air in the atmosphere are mixed and jetted to save compressed air. None of the devices controls the gap between the sensor and the test object.
  • the conventional air levitation method requires the adjustment in the z-axis direction (perpendicular to the object to be inspected) for each sensor, resulting in a complicated mechanism for maintaining the gap. Also, since the inertial mass of the sensor head is relatively large, when performing a high-speed scan, it may not be able to follow it and fall into a stop state (crash). Furthermore, adjustment work at the site of use The work is complicated and it is difficult to attach and detach the sensor. Disclosure of the invention
  • the present invention has been made in view of the above-described problems, and an object of the present invention is to provide an inspection apparatus and an inspection method capable of detecting the quality of pixel electrodes on a panel with high accuracy and high speed. That is, it is to provide an inspection apparatus and an inspection method that can follow high-speed scanning.
  • the present invention is an inspection apparatus that supplies an inspection signal to an inspection object and inspects the state of the inspection object, and is a first device that generates a gas flow from a first direction with respect to the inspection object.
  • Gas flow generating means for generating a gas flow with respect to the inspection object from a second direction opposite to the first direction, and detecting the inspection signal from the inspection object
  • a sensor detects the inspection signal in a non-contact manner from the inspection object in a state of being floated by the gas flow from the first direction and the gas flow from the second direction, and The quality of the inspection object is identified based on the detected change in the detection signal.
  • the gas flow from the first direction is a gas flow rising toward the inspection object
  • the gas flow from the second direction is a gas flow descending toward the inspection object.
  • the second gas flow generating means is provided in a plurality of regions in the vicinity of the sensor.
  • control means for controlling the ejection of the gas flow by the second gas flow generation means so that the sensor is separated from the inspection object by a predetermined distance.
  • control means individually selects the second gas flow generation means according to the distance between the sensor and the inspection object.
  • the gas flow is ejected.
  • control means measures the distance between the sensor and the inspection object based on the interference phase difference between the incident laser light and the reflected laser light on the inspection object, and the first measurement based on the measurement result. It is characterized in that the gas flow is controlled by the gas flow generating means (2).
  • the gas flow includes at least a gas flow of air, nitrogen, or other inert gas.
  • the senor has a configuration in which a portion facing the inspection object protrudes, and a sensor electrode is arranged on the protruding portion, and the inspection object is contactlessly connected through capacitive coupling between the sensor electrode and the inspection object. Further, the above inspection signal is detected.
  • the apparatus further comprises positioning movement means for positioning and moving the inspection object so as to sequentially scan the inspection object while maintaining the proximity state of the sensor electrode and the inspection object.
  • the present invention is an inspection method for supplying an inspection signal to an inspection object and inspecting the state of the inspection object by a sensor
  • a gas flow is generated from the direction 1 and a gas flow is also ejected from the second direction facing the first direction toward the inspection target, and the inspection target is floated by the sensor.
  • the inspection signal is detected in a non-contact manner from the inspection object, and the quality of the inspection object is identified based on a change in the detection signal.
  • the ejection of the gas flow from the second direction is controlled so that the sensor is separated from the inspection object by a predetermined distance.
  • the gas flow from the second direction is ejected from a plurality of regions near the sensor, and the gas flow from the second direction depends on the distance between the sensor and the inspection object. These gas flows are selected individually.
  • FIG. 1 is a block diagram showing the overall configuration of an inspection apparatus according to an embodiment of the present invention.
  • FIG. 2 is a diagram showing a cross-sectional configuration when the sensor of the embodiment is cut.
  • FIG. 3 is a diagram for explaining the position control of the inspection object and the sensor at the time of inspection.
  • FIG. 4 is a diagram showing an arrangement example of a laser input / output unit and an air jet unit in the sensor.
  • FIG. 5 is a flowchart showing a control procedure of the distance (gap) between the inspection object and the sensor in the inspection apparatus according to the present embodiment.
  • FIG. 6 is a diagram showing another arrangement example of the laser input / output unit and the air ejection unit.
  • Fig. 1 is a block diagram showing the overall configuration of an inspection apparatus (array test) according to this embodiment.
  • Fig. 1 (a) shows the configuration of signal processing
  • Fig. 1 (b) shows the configuration for air control.
  • the inspection target here has, for example, a structure in which a plurality of pixel electrodes and a thin film transistor (TFT) for driving them are arranged in an array (or matrix) on a glass substrate. LCD panel and evening type panel.
  • TFT thin film transistor
  • the line-shaped sensor 1 is positioned at a position separated from the liquid crystal panel 10 by a predetermined distance in the vertical direction.
  • This sensor 1 has, for example, the same width as the width of the liquid crystal panel 10 and a one-dimensional line for determining the presence / absence of disconnection of the pixel electrode on the liquid crystal panel 10 by a non-contact method using a sensor circuit described later. It is a sensor.
  • This inspection device inspects the quality of the pixel electrodes of the liquid crystal panel 10 based on the output from the sensor 1. Further, a pixel voltage supply unit 13 is connected to the liquid crystal panel 10, thereby supplying signals necessary for pixel inspection to individual pixel electrodes.
  • the sensor 1 includes a plurality of sensor substrates 5 a and 5 b arranged regularly as shown in FIG. 1 (a). That is, in the sensor 1, the sensor substrates 5a and 5b are arranged in a line, and they are alternately juxtaposed at a constant pitch width on the spacer 33 having a predetermined thickness.
  • This is a one-dimensional line sensor configured to have almost the same width as the inspection target part of the liquid crystal panel 10, and the tip part of the sensor board 5 a, 5 b on the spacer 33 side is arranged oppositely.
  • the other sensor substrate is arranged in such a manner that a part thereof overlaps with the tip end portion in the row direction.
  • the tip end portions of the sensor boards 5 a and 5 b partially overlap with the opposing sensor boards, so that the sensor circuits 3 1 ( Since the sensor electrodes of each other also overlap each other in the column direction, depending on the relative positional relationship between the pixel electrodes of the liquid crystal panel 10 and the sensor circuit, two sensor circuits More specifically, since the sensor electrode 3 1) can simultaneously detect signals, the pixel electrode can be reliably judged as good or bad.
  • the pixel signal detected by the sensor circuit 31 arranged on each sensor board 5a, 5b is input to the signal processing unit 3.
  • the signal processing unit 3 performs processing such as amplification, multiplexing, waveform shaping, and AZD conversion, for example.
  • the control part 6 Compares the signal level processed by the signal processing unit 3 with a preset reference value and determines whether or not it is within the reference range. The judgment result is sent to the display unit 9.
  • the sensor 1 outputs a laser beam 18 a (for example, a pulsed laser) toward the liquid crystal panel 10 to be inspected as shown in FIG.
  • Laser input / output unit 2 consisting of 1 8 and a light receiving unit 1 9 (for example, a photomultiplier tube) that receives the laser beam 19 9 (reflected beam) reflected by the liquid crystal panel 10 and returning again
  • the length measuring unit 4 that measures the distance to the inspection target (liquid crystal panel 10), and the length measuring unit 4 as described later.
  • An air control unit 1 2 that receives the measurement result, and an air injection unit 1 1 that ejects air (downward airflow) from the sensor 1 toward the inspection object in accordance with the control from the air control unit 12 .
  • the gas ejected toward the inspection object is described as an example of air.
  • the present invention is not limited to this, and for example, a gas flow caused by nitrogen or other inert gas may be used. Good.
  • control unit 6 is composed of, for example, a micro-port sensor, and comprehensively controls a predetermined inspection sequence.
  • the control unit 6 has a ROM 7 and a RAM 8, and the ROM 7 stores a control procedure including an inspection procedure as a computer program, for example, and the RAM temporarily stores, for example, control data and inspection data. Used as a work area to store automatically.
  • the display unit 9 is made up of, for example, a CRT, a liquid crystal display, and the like. If the inspection object (pixel electrode of the liquid crystal panel) that is the determination result sent from the control unit 6 is satisfactory, the position information of the sensor 1 is inspected. Visually display in a format that can be easily understood. If there is an abnormality in the position of sensor 1, this is indicated, and the pixel electrode etc. If there is a defect, the position of the electrode on the panel substrate is also displayed by, for example, the electrode number and coordinates. In addition, the display of the inspection result is not limited to the visual display, and may be output in a format such as sound. Also, visual display and audio may be mixed.
  • the drive unit 16 receives the control signal from the control unit 6 and moves the entire liquid crystal panel 10 in a predetermined direction at a predetermined speed.
  • the sensor 1 sequentially scans the arrayed pixel electrodes on the liquid crystal panel 10 in a non-contact state.
  • the drive unit 16 moves the liquid crystal panel 10 that has been levitated by the air flow from the bottom to the top in a predetermined direction on the order. For this reason, three-dimensional position control is possible by four-axis control of XYZ0 angles, and the liquid crystal panel 10 is positioned at a reference position before inspection, which is separated from the sensor position by a certain distance.
  • FIG. 2 shows a cross-sectional configuration when the sensor 1 is cut along the two-dot chain line A—A ′ in FIG.
  • the sensor substrates 5 a and 5 b are made of glass having a predetermined thickness t 2 (for example, 0.5 mm) with a size of, for example, 2500 mm ⁇ 100 mm, and approximately at the center thereof The structure is bent (bent) into an S-shape with a loose cross section.
  • a sensor circuit 31 having a sensor electrode 20 is disposed on the upper surface end of the sensor substrate 5a, 5b opposite to the inspection target.
  • the substrate material of the sensor substrates 5a and 5b is not limited to glass, and may be made of plastic or quartz, for example.
  • the liquid crystal panel 10 to be inspected is composed of a glass substrate and a plurality of pixel electrodes 15 formed on the surface thereof as shown in FIG. 2, and is arranged close to the pixel electrodes 15.
  • the sensor electrode 20 of the sensor 1 is connected to the pixel electrode 15 of the liquid crystal panel 10 from the pixel voltage supply unit 13 shown in FIG. Signal potential (pixel voltage) is detected in a non-contact manner.
  • the distance d between the sensor electrode 20 and the pixel electrode 15 on the liquid crystal panel 10 is set to For example, 50 or less.
  • the spacer 3 3 provided on the substrate 24 (having a thickness tl of 1.0 mm, for example) has a structure in which the central portion of the sensor 1 protrudes more vertically than the substrate 24.
  • the sensor electrode 20 constituting the sensor circuit 31 is connected to the gate terminal (G) of the CMO S element (MOS type field effect transistor) formed on the sensor substrates 5a and 5b, for example. It consists of a conductor film (for example, IT * film) having a predetermined area.
  • the substrate 24 is made of a metal such as aluminum.
  • FIG. 3 is a diagram for explaining the positional control and positional relationship between the inspection object and the sensor at the time of inspection.
  • the sensor 1 is fixedly disposed at a predetermined position above the liquid crystal panel 10 to be inspected in a non-contact state with the liquid crystal panel 10, and the air supply unit 5 is disposed below the liquid crystal panel 10.
  • An air flow (upward flow indicated by an upward arrow in the figure) is generated from the air supply unit 50 toward the liquid crystal panel 10, and the liquid crystal panel 10 receives the air flow and receives a predetermined distance. Only emerged. That is, the air supply section 50 has a large number of holes (not shown) over the entire upper surface, and the air flow ejected from these holes is blown evenly over the entire inspection target, The liquid crystal panel 10 is lifted by the pressure of the air flow.
  • FIG. 4 shows an example of the arrangement of the laser input / output unit and air ejection unit in the sensor.
  • FIG. 4 shows the state when the sensor 1 is viewed from the liquid crystal panel 10 side.
  • the sensor 2 substrate 2 4 On the side where the substrate 5 a, 5 b is arranged, the laser input / output units 2 a to 2 z and the air jet are ejected at regular intervals at the end of the substrate 24 near the sensor substrates 5 a, 5 b. Parts 1 1 a to 1 1 z are arranged.
  • Each laser input / output unit 2a to 2z outputs laser light from its output unit 18 (see Fig. 1 (b)) toward the liquid crystal panel 10 during inspection, and receives the reflected laser beam.
  • the length measuring unit 4 determines the distance between the sensor electrode 20 and the pixel electrode 15 on the liquid crystal panel 10 based on the interference phase difference between the laser beam incident on the liquid crystal panel 10 and the reflected laser beam. Measure d.
  • the air control unit 1 2 determines which of the sensor substrates 5 a and 5 b has an abnormality in the distance d between the sensor electrode 20 and the pixel electrode 15. In other words, it is determined whether the distance is too close or too far from the predetermined distance determined in advance. Then, the air control unit 12 controls the air ejection units 1 1 a to 1 1 z individually according to the determination result.
  • Feed pack control is performed so that the distance d between the sensor electrode and the pixel electrode of the liquid crystal panel is maintained at a predetermined value (a constant value). For example, when the distance d between the sensor electrode and the pixel electrode is smaller than a predetermined value in the vicinity of the laser input / output units 2a to 2c, the air control unit 12 It is determined that the sensor 1 is too close, and a predetermined amount of air (downflow) is ejected from the air ejection portions 1 1 a to l 1 c.
  • FIG. 5 shows a control procedure for the distance (gap) between the inspection target and the sensor in the inspection apparatus according to the present embodiment. It is a flowchart.
  • the length measuring unit 4 uses a sensor electrode and a liquid crystal panel based on the interference phase difference between the incident laser beam and the reflected laser beam from all laser input / output units 2a to 2z. Measure the distance d between the upper pixel electrodes.
  • the measured value is compared with a predetermined value to determine whether the distance (gap) d between the sensor electrode and the pixel electrode is within an appropriate range.
  • step S 1 3 If the distance (gap) d is an appropriate value as a result of the determination in step S 1 3, the air amount from the air ejection sections 1 1 a to 1 1 z is maintained at the current value in step S 1 4. . If it is determined that the distance (gap) d is small, it is determined that the liquid crystal panel 10 is too close to the sensor 1. In step S15, the sensor 1 is too close to the liquid crystal panel 10 In step S16, select the air outlet corresponding to the identified location. In step S 17, the air ejection amount from the selected air ejection section is increased.
  • step S 25 the air blowout part corresponding to the identified part is selected in step S26. Then, in the following step S27, the air ejection amount from the selected air ejection section is reduced.
  • the liquid crystal panel 10 is moved, for example, in the direction of the arrow in FIG. Then, the sensor 1 sequentially scans the pixel electrodes 15 on the liquid crystal panel 10, thereby checking the quality continuously. In step S 3 0, the end of the inspection is determined. If all the pixels have not been inspected, the process returns to step S 1 1 and the distance d between the sensor electrode and the pixel electrode is measured again. Then, the air ejection control is continued as described above. When the inspection is completed, measurement and air control are also completed.
  • the sensor and liquid crystal panel are measured by laser measurement.
  • air is also blown from the sensor side based on the result, and the gap between the sensor and the liquid crystal panel is controlled, eliminating the need for on-site adjustments. It becomes easy to attach and detach.
  • air flow from both sides of the inspection target not only facilitates control of the distance between the sensor and the inspection target, but also provides high tracking capability for high-speed operation for scanning and inspection of the inspection target.
  • damage to the liquid crystal panel can be easily avoided.
  • the distance between the sensor and the object to be inspected can be controlled to the minimum, the sensitivity and resolution of the sensor are improved, and the pixel voltage of the pixel electrode can be reliably detected in a non-contact manner.
  • by providing a length measurement unit and air control unit corresponding to the sensor substrate of the sensor it is possible to control the distance between the sensor and the inspection target at the same time or individually at multiple locations of the sensor, and it is necessary to adjust the Z axis for each sensor Disappears.
  • the arrangement of the laser input / output part and the air ejection part in the sensor is not limited to the example shown in FIG. 4, but the laser input / output part is placed on both sides of the tip of each sensor board 5a, 5b as shown in FIG. May be provided.
  • the gap control between the inspection target and the sensor head can be easily performed with high accuracy, and the quality of the inspection target can be detected accurately and at high speed.
  • the sensor is easy to attach and detach because of its simple mechanism.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Liquid Crystal (AREA)

Abstract

La présente invention concerne un appareil et un procédé d’inspection pour inspecter la conformité d’un objet devant être inspecté à grande vitesse. Une inspection sans contact est réalisée en fixant un capteur (1) sur une section supérieure d’un panneau à cristaux liquides (substrat de verre) (10) c’est-à-dire l’objet à inspecter et en faisant flotter ledit objet (10) par un écoulement d’air. Au moment de la réalisation d’une telle inspection, une distance entre le capteur (1) et le panneau à cristaux liquides (10) est mesurée par une mesure de longueur au laser par une section de mesure de longueur (4). Sur la base de résultats, de l’air est envoyé depuis une partie de jet d’air (11) également depuis le côté du capteur et la distance (écart) entre le capteur (1) et le panneau à cristaux liquides (10) est régulée.
PCT/JP2006/304668 2005-03-04 2006-03-03 Appareil et procede d’inspection WO2006093349A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005-061290 2005-03-04
JP2005061290A JP2006242860A (ja) 2005-03-04 2005-03-04 検査装置および検査方法

Publications (1)

Publication Number Publication Date
WO2006093349A1 true WO2006093349A1 (fr) 2006-09-08

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JP (1) JP2006242860A (fr)
TW (1) TW200643411A (fr)
WO (1) WO2006093349A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2092350A2 (fr) * 2006-11-16 2009-08-26 Siemens Aktiengesellschaft Dispositif et procédé de mesure pour inspecter une surface d'un substrat
WO2012122578A1 (fr) * 2011-03-17 2012-09-20 Rainer Gaggl Dispositif pour l'essai haute tension de dispositifs à semi-conducteurs

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005046154B4 (de) * 2005-09-27 2008-07-03 Siemens Ag Messvorrichtung und Messsystem zum Inspizieren einer Oberfläche eines Substrates
JP5299037B2 (ja) 2009-04-04 2013-09-25 日本電産リード株式会社 検査用プローブ
KR20110127598A (ko) * 2010-05-19 2011-11-25 우관제 터치 센서용 검사장치

Citations (3)

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Publication number Priority date Publication date Assignee Title
JP2002050662A (ja) * 2000-07-31 2002-02-15 Fujitsu Ltd 半導体基板試験装置および半導体基板試験方法
JP2003177153A (ja) * 2002-08-21 2003-06-27 Mitsubishi Heavy Ind Ltd 液晶パネル検査装置
WO2003061354A2 (fr) * 2001-12-27 2003-07-24 Orbotech Ltd. Systeme et procedes de convoyage et de transport d'articles en levitation

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002050662A (ja) * 2000-07-31 2002-02-15 Fujitsu Ltd 半導体基板試験装置および半導体基板試験方法
WO2003061354A2 (fr) * 2001-12-27 2003-07-24 Orbotech Ltd. Systeme et procedes de convoyage et de transport d'articles en levitation
JP2003177153A (ja) * 2002-08-21 2003-06-27 Mitsubishi Heavy Ind Ltd 液晶パネル検査装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2092350A2 (fr) * 2006-11-16 2009-08-26 Siemens Aktiengesellschaft Dispositif et procédé de mesure pour inspecter une surface d'un substrat
WO2012122578A1 (fr) * 2011-03-17 2012-09-20 Rainer Gaggl Dispositif pour l'essai haute tension de dispositifs à semi-conducteurs
US9291664B2 (en) 2011-03-17 2016-03-22 Rainer Gaggl Device for high voltage testing of semiconductor components

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Publication number Publication date
JP2006242860A (ja) 2006-09-14
TW200643411A (en) 2006-12-16

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