EP2092350A2 - Dispositif et procédé de mesure pour inspecter une surface d'un substrat - Google Patents

Dispositif et procédé de mesure pour inspecter une surface d'un substrat

Info

Publication number
EP2092350A2
EP2092350A2 EP07822253A EP07822253A EP2092350A2 EP 2092350 A2 EP2092350 A2 EP 2092350A2 EP 07822253 A EP07822253 A EP 07822253A EP 07822253 A EP07822253 A EP 07822253A EP 2092350 A2 EP2092350 A2 EP 2092350A2
Authority
EP
European Patent Office
Prior art keywords
air
measuring
substrate
measuring device
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP07822253A
Other languages
German (de)
English (en)
Inventor
Hagen Klausmann
Karl Kragler
Martin Neusser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP2092350A2 publication Critical patent/EP2092350A2/fr
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/304—Contactless testing of printed or hybrid circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/07—Non contact-making probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/281—Specific types of tests or tests for a specific type of fault, e.g. thermal mapping, shorts testing
    • G01R31/2812—Checking for open circuits or shorts, e.g. solder bridges; Testing conductivity, resistivity or impedance

Definitions

  • the invention relates to a measuring device and a measuring method for inspecting a surface of a substrate, which measuring device has a sensor which can be positioned at a predetermined distance above a surface to be measured.
  • sensors are usually positioned at a predetermined distance above the substrate surface to be measured.
  • the positioning is usually carried out by a positioning system with which the sensor can be positioned within a plane parallel to the surface to be measured. By appropriate control of the positioning can thus be scanned, for example, by a meandering movement, the entire surface to be measured.
  • sensors are also used which have a plurality of individual sensors, so that the measuring time for a certain area is reduced in accordance with the number of individual sensors by simultaneously measuring a plurality of measuring points.
  • a camera with, for example, a line or area sensor is usually used.
  • a measuring tip or a plurality of measuring tips is used, which is subjected to a specific AC or DC voltage.
  • the measuring signal used is a small current flow over the respective measuring tip, which depends on the capacitance between the measuring tip or the respective measuring point of the surface to be measured.
  • a method is known in which the wiring pattern of a substrate used for a liquid crystal display (L_iquid (Crystal .Display, LCD) can be inspected for possible defects prior to completion of the LCD.)
  • Liquid Crystal .Display, LCD
  • capacitive measurement between a measuring tip In this way, unwanted short circuits, interruptions and constrictions of the printed conductor structure can be detected and a defect can either be repaired before the further processing of the LCD substrate or the LCD substrate can be sorted out of a production process In any case, the manufacturing costs for liquid crystal displays are significantly reduced.
  • a highly accurate adjustment and compliance with the distance between the sensor and the substrate surface to be measured is usually required.
  • the observance of an exact distance is significantly more difficult when the substrate to be measured has an uneven or slightly wavy surface.
  • a positioning system must be used, which not only has a positioning of the sensor in the plane parallel to the surface to be measured, but also a positioning perpendicular to this
  • the invention has for its object to provide a measuring device and a measuring method, which allow a precise measurement of an uneven substrate surface. This object is solved by the subject matters of the independent claims. Advantageous embodiments of the present invention are described in the dependent claims.
  • Independent claim 1 describes a measuring device for inspecting a surface of a substrate.
  • the measuring device has (a) a holding element and (b) an air-bearing element, which is attached to the holding element, which is designed such that an air bearing can be formed together with the surface of the substrate to be inspected, and which has an elasticity so that the air-bearing element is adaptable to surface irregularities.
  • the described measuring device further comprises (c) at least one sensor, which is attached to the air-bearing element and which is set up to detect the surface of the substrate.
  • the invention is based on the finding that the air-stored element is realized by means of a flexible sensor carrier.
  • the flexible sensor carrier can be constructed without the use of completely rigid elements or rigid materials.
  • the air-bearing element thus resembles an easily bendable ruler, which can adapt to the surface to be inspected if there are any unevennesses.
  • the flexible design of the air-bearing element makes it possible to adapt to long-range corrugations or ripples of the substrate surface to be inspected.
  • the air-bearing element can be realized for example by means of a thin glass, which has the required flexibility.
  • the flexible air-bearing element may at least partially be made of plastic such as polyvinyl chloride (PVC) or of a fiber-reinforced material such as a carbon fiber composite material.
  • PVC polyvinyl chloride
  • a fiber-reinforced material such as a carbon fiber composite material.
  • the holding element is for example a holding frame, in which the flexible air-bearing element is held by at least two sides.
  • the air-bearing element can be secured by means of flexible solid joints on the support frame.
  • solid-state joint is understood to mean a position of a component with a reduced bending stiffness, which point is located adjacent to one another
  • Zones of the component delimits, which have a significantly higher bending stiffness compared to the solid-state joint.
  • the holding element and the air-bearing element can be produced as a kinematic pair in one piece, for example by micromechanical structuring.
  • the reduced bending stiffness is usually generated by a local reduction in cross-section.
  • the cross section can be reduced only along one or else along several spatial directions.
  • the change in the cross section may have different geometric shapes. Reduces the cross section along the joint abruptly to a lower and also over a certain distance constant value, this results in a leaf spring joint.
  • the cross-section can also change continuously so that the taper, for example, has the shape of a circular arc.
  • the air bearing can be realized by blowing nozzles, which are formed in the flexible air-bearing member.
  • a predetermined measuring distance between the sensor and the substrate surface to be inspected may be defined by a force equilibrium between a pneumatic force and, for example, by the weight force.
  • the pneumatic force is generated by an air flow between see to be measured substrate surface and the flexible air-bearing element.
  • the weight depends on the mass of the measuring head, which is the air bearing Element and the sensor and possibly the holding element comprises. In this case, weight and pneumatic force are directed against each other, wherein an increase in the pneumatic force, for example, by increasing the air flow leads to an increase in the measuring distance.
  • the counterforce can increase the dynamic stability of the air bearing.
  • a balance of forces can also be generated between the pneumatic force and another force, so that surfaces can be measured that are not directed upwards in terms of gravity.
  • a force other than the force of gravity provides the opportunity to inspect a non-downward-facing substrate surface with respect to gravity. For example, by pressing the measuring head from the bottom by means of a vacuum suction, such a substrate surface can be inspected, in which case the measuring distance by an equilibrium of forces between (a) the pneumatic force and the gravity of the measuring head on one side and (b) an upward Pressing force of the vacuum suction on the other side is determined.
  • a surface inspection of vertically or obliquely extending surfaces is also possible, provided that the measuring head is pushed down at a corresponding angle to the substrate surface.
  • other ways of generating power as Vakuumansaugung conceivable.
  • the measuring device additionally comprises a positioning system, which is coupled to the holding element and / or with the substrate to be inspected, so that the sensor is positionable relative to the surface.
  • the positioning system may be a so-called congressnpositioniti- niersystem, which is a two-dimensional movement of the Sensor allows relative to the substrate surface.
  • both a two-dimensional positioning of the substrate and a two-dimensional positioning of the measuring head can take place, which measuring head comprises the holding element, the air-bearing element and the sensor.
  • the positioning system can also be configured such that the substrate is movable along a first direction and the measuring head along a second direction, which second direction is oriented at an angle, preferably perpendicular, to the first direction. In this way, a precise two-dimensional scanning of the substrate surface can be realized by a combination of two linear movements.
  • a one-dimensional positioning of the measuring head can take place relative to the substrate.
  • a planar scanning of the substrate surface can be realized if a measuring device or a measuring head with a plurality of sensors is used, which are arranged, for example, in a row which is oriented at an angle or preferably perpendicular to the linear direction of movement.
  • the measuring device additionally an emergency running coating, which is formed on the air-bearing member.
  • an emergency running coating which is formed on the air-bearing member.
  • This has the advantage that in the case of an unwanted mechanical contact between the air-bearing element and the substrate surface, for example, by a failure of a blown air generating device, which leads to a collapse of the air bearing, the substrate surface to be inspected is not damaged.
  • a runflat coating for example, a Teflon layer is suitable.
  • a runflat coating also has the advantage that the sensor mounted on the air-bearing element can also be protected from damage by the substrate.
  • the measuring device additionally comprises a bias voltage generating device, which is set up in such a way that the air-bearing element can be brought to the surface under mechanical pretension.
  • the use of such a prestressing-generating device has the advantage that a particularly good adaptation of the air-bearing element to the three-dimensionally shaped surface of the substrate can be ensured. In this way, both in terms of time and space, a constantly constant distance between the air-bearing element or the measuring head on the one side and the substrate surface to be inspected on the other side can be ensured. When using a measuring head with a large number of sensors, these sensors can thus be guided over the substrate surface in a comparatively simple manner at a constant measuring distance.
  • the bias voltage generating device which counteracts the air bearing, may for example comprise a magnetic field generating unit, so that the air-bearing element is pressed by a magnetic force in the direction of the substrate surface to be inspected.
  • the magnetic field generating unit may comprise, for example, one or more electromagnets which are arranged behind the substrate from the viewpoint of the measuring head. With a corresponding current application of the electromagnet or the electromagnets, a magnetic attraction of magnetic elements is effected, which are attached to the flexible air-bearing member. In this way, a virtually planar attractive force of the air-bearing element can be generated towards the substrate surface, wherein the area-acting attraction force with the above-described pneumatic force a Forces of equilibrium form. The measurement distance can be accurately adjusted by appropriately adjusting the ratio between the pneumatic force and the magnetic attraction force.
  • the bias voltage generating means is a vacuum suction device.
  • a vacuum suction has the advantage that between the pneumatic air bearing force and the pneumatic vacuum suction in a simple way a stable balance in favor of vacuum suction can be adjusted. This results in an adhesion of the measuring head to the substrate surface to be inspected with a precisely defined measuring distance, which is for example a few 10 ⁇ m. Due to the intrinsic flexibility of the air-bearing element, the entire measuring head can thus almost exactly adapt to the waviness of the substrate surface to be inspected.
  • a pneumatic prestressing-generating device has the advantage over other equally conceivable possibilities for generating a substantially homogeneous bias that the biasing device can be pneumatically combined with a blown air generating device for the air bearing of the air-bearing element on the substrate surface. This can be done for example by the use of venturi or other pneumatic elements, so that with a single compressed air or vacuum generating device both the required for the air storage blown air and the required for the pneumatic see-pressure can be generated negative pressure.
  • the measuring device additionally comprises at least one distance sensor which is formed on the air-bearing element.
  • a plurality of distance sensors are used, so that the respective measuring distance can be detected at a plurality of defined locations of the measuring head.
  • the distance sensor is an optical distance sensor and / or a capacitive distance sensor.
  • a confocal distance sensor which, in contrast to distance sensors based on the measuring principle of triangulation, has a coaxial guidance of illumination and measuring beam is suitable as the optical distance sensor, so that the distance measurement can be realized within a laterally very slightly expanded volume range.
  • confocal distance sensors have the advantage that very small measuring distances with a high accuracy, i. can be measured with a very high depth resolution on the order of ⁇ m.
  • Confocal distance sensors are described, for example, in WO 2005/078383 A1, in EP 1398597 A1 or in DE 19608468 A1.
  • interferometric sensors are used, which provide a suitable accuracy due to their high resolution.
  • the measuring device additionally comprises a control unit, which is coupled to the distance sensor and the bias voltage generating device and / or with the distance sensor and a blown air generating device.
  • a closed loop that is to say a loop for regulating the height, can be formed so that a defined measuring distance between air-bearing element or measuring head on the one side and the substrate surface to be inspected on the other side can always be ensured.
  • Independent claim 9 specifies a measuring method for inspecting a surface of a substrate. The measuring method comprises the following step: moving a measuring device described above relative to the
  • the at least one sensor at a predetermined measuring distance from the surface.
  • the invention is based on the finding that infol ⁇ ge the flexibility of the air-bearing member of the measuring head of the measuring device can automatically adapts to the three-dimensional surface structure of the substrate surface. In this way a stant both temporally and spatially con- distance of the at least one sensor from the at inspi ⁇ ornamental surface can be ensured.
  • FIG. 1 shows, in a cross-sectional representation, the adaptation of a flexible and pneumatically prestressed sensor carrier to the wavy surface of a substrate.
  • FIG. 2 shows a plan view of the sensor carrier shown in FIG.
  • FIG. 1 shows, according to an embodiment of the invention, a measuring device 100 which has a flexible sensor carrier 120 which can be moved by means of a surface positioning system 115 over a surface 141 of a substrate 140 to be inspected. The positioning can take place within a positioning plane spanned by an x-axis and a y-axis.
  • the measuring device 100 has a retaining element 110 which, according to the embodiment shown here, is a retaining frame 110. On the holding frame two fastening elements 111 are formed. In each case via a solid-state joint 112, the flexible sensor carrier 120 is connected to a fastening element 111.
  • the attachment of the flexible sensor carrier 120 by means of solid-state hinges 112 has the advantage that the sensor carrier 120 and the two fastening elements 111 can be produced in one piece, for example by micromechanical structuring methods. Of course, instead of solid joints 112, any other suspension or mechanical coupling elements can be used.
  • the flexible sensor carrier 120 is equipped with a plurality of sensors 130 arranged in a row along the x-axis.
  • the sensors 130 may be any sensors, such as optical, capacitive and / or inductive sensors.
  • the sensors 130 can also be arranged flat, so that the surface 141 can be scanned in a particularly effective manner by the simultaneous operation of a plurality of sensors 130.
  • the flexible sensor carrier 120 also has a plurality of blown air ducts 131, which are pneumatically coupled in a manner not shown with a blown air generating device 132.
  • a blown air generating device 132 By an appropriate action on the Blas Kunststoffkanäle 131 with compressed air thus an air flow is generated, which at the lower openings of the Blas Kunststoffkanäle 131st emerge in the direction of the substrate surface 141.
  • an air cushion is created between the underside of the flexible sensor carrier 120 and the surface 141, which causes an air bearing of the sensor carrier 120 on the surface 141 to be inspected.
  • the flexible sensor carrier 120 is therefore also referred to as air-bearing element 120 in this context.
  • the side of the air-bearing element 120 facing the surface 141 to be inspected has a so-called emergency coating 121.
  • the runflat coating is a Teflon layer 121, which prevents damage to the sensors 130 and / or the substrate surface 141 in the event of an accidental failure of the blown air generating device 132.
  • the air-supported element 120 can adapt to the corrugation of the surface 141 due to its intrinsic flexibility or elasticity. In this way, it is ensured that, despite the illustrated undulation of the substrate surface 141, all the sensors 130 are located substantially at the same measuring distance above the surface 141. This also applies to a movement of the flexible sensor carrier 120, in which the air-bearing element 120 can dynamically adapt to the three-dimensional structure of the surface 141.
  • Elements 120 are compensated.
  • a high flexibility of the air-bearing element 120 also allows adjustments Corrugations with a comparatively short range within a plane parallel to the x-axis and to the z-axis.
  • suction ports 133 are additionally formed in the flexible air bearing member 120, which are pneumatically coupled to a vacuum generator 134 in a manner not shown.
  • weight force of the flexible sensor carrier 120 additionally generates a suction force that pulls the sensor carrier 120 in the direction of the substrate 140.
  • an equilibrium of forces arises between the attractive weight force and the vacuum suction force on the one side and the repulsive air bearing force on the other side, which is generated by the blown air emerging from the blown air ducts 231.
  • the measuring distance between the individual sensors 130 and the substrate surface 141 can be adjusted. For this reason, both the blown air generator 132 and the vacuum generator 134 are coupled to a control unit 137.
  • the air-bearing element 120 can be realized for example by means of a thin glass, which has the required flexibility.
  • the flexible air-bearing element may at least partially be made of plastic such as polyvinyl chloride (PVC) or of a fiber-reinforced material such as a carbon fiber composite material.
  • PVC polyvinyl chloride
  • the use of ceramic, glass or carbon fiber composite material to manufacture the air bearing member 120 has the advantage that these materials can be precisely machined so that the blast air channels 131 and / or the suction ports 233 can be formed with high accuracy in the flexible sensor carrier 120.
  • the blast air channels 131 can be formed by means of laser processing. In this way, for example, blast air channels 131 can be produced with a diameter of only 4 microns and thus a correspondingly reduced pneumatic dead volume.
  • the described measuring device 100 can be used for example in the inspection of semi-finished liquid crystal displays.
  • printed conductor structures applied to a substrate surface are inspected, wherein the corresponding substrate along the substrate surface 141 has a lateral extent of the order of 300 mm to 400 mm.
  • substrates with other dimensions can be inspected, whereby due to the adaptability of the flexible sensor carrier 120 always a substantially constant measuring distance to the surface to be inspected can be ensured for all sensors 130.
  • the measuring device 100 described has the advantage that, depending on the particular application, the sensor carrier 120 can be scaled to the size of the surface 141 to be inspected in each case. Thus, for various inspection tasks, a suitable measuring device 100 can be produced which, due to the flexibility of the sensor carrier 120 used, enables a dynamic adaptation to the waviness of the surface to be inspected.
  • FIG. 2 shows a top view of the sensor carrier 120 shown in FIG. 1, which is now provided with the reference number 220.
  • three sensors 230 are integrated in the sensor carrier 220.
  • significantly more sensors 230 can be used, so that by a parallelized Scanning a substrate surface on particularly effective, ie can be inspected very quickly.
  • each sensor 230 is assigned two suction openings 233 and a plurality of fine blown air channels 231, which are arranged to the left and to the right of the respective sensor 230.
  • two intake openings 233 are formed directly next to a sensor 230.
  • a little further outside are the blast air ducts 231.
  • any other geometric arrangements are conceivable, which allow a force balance between the attractive weight and the Vakuumansaugkraft on the one hand and the repulsive Lucaslager- force on the other side at a predetermined measuring distance. In this way, a stable height positioning of the sensor carrier 220 can be ensured even with comparatively short-range surface corrugations.
  • distance sensors 235 are also provided in the sensor carrier 220.
  • the distance sensors are connected to the control unit, not shown in FIG. 2 (see FIG. 1, reference numeral 137), so that a closed control loop is realized with which the measuring distance of the sensors to the surface to be inspected can be precisely set and maintained during a measuring operation .
  • distance sensors optical or capacitive sensors distance sensors can be used.
  • a confocal distance sensor which, in contrast to distance sensors based on the measuring principle of triangulation, has a coaxial guidance of illumination and measuring beam is suitable as the optical distance sensor, so that the distance measurement can be realized within a laterally very slightly extended volume range.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

L'invention concerne un dispositif de mesure (100) pour inspecter une surface (141) d'un substrat (140). Ce dispositif de mesure (100) comprend un élément de support (110) et un élément à coussin d'air (120, 220) qui est fixé à cet élément de support (110) et qui est conçu de sorte qu'un coussin d'air puisse être formé avec la surface (141) du substrat (140) devant être inspectée, cet élément à coussin d'air (120, 220) présentant une élasticité de façon à s'adapter aux irrégularités de la surface (141). Le dispositif de mesure (100) selon l'invention présente en outre au moins un capteur (130, 230) qui est placé sur l'élément à coussin d'air (120, 220) et qui est destiné à détecter la surface (141) du substrat (140). Grâce à la flexibilité de l'élément à coussin d'air (120, 220), le ou les capteurs (130, 230) peuvent être déplacés en permanence à une distance constante de la surface (141) à inspecter, y compris en présence d'ondulations de celle-ci. L'invention concerne en outre un procédé de mesure pour l'inspection d'une surface, ce procédé consistant à déplacer le dispositif de mesure (100) susmentionné par rapport à la surface (141).
EP07822253A 2006-11-16 2007-11-06 Dispositif et procédé de mesure pour inspecter une surface d'un substrat Ceased EP2092350A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006054088A DE102006054088A1 (de) 2006-11-16 2006-11-16 Messvorrichtung und Messverfahren zum Inspizieren einer Oberfläche eines Substrates
PCT/EP2007/061936 WO2008058869A2 (fr) 2006-11-16 2007-11-06 Dispositif et procédé de mesure pour inspecter une surface d'un substrat

Publications (1)

Publication Number Publication Date
EP2092350A2 true EP2092350A2 (fr) 2009-08-26

Family

ID=39311198

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07822253A Ceased EP2092350A2 (fr) 2006-11-16 2007-11-06 Dispositif et procédé de mesure pour inspecter une surface d'un substrat

Country Status (6)

Country Link
EP (1) EP2092350A2 (fr)
JP (1) JP4922396B2 (fr)
KR (1) KR101014121B1 (fr)
CN (1) CN101432628B (fr)
DE (1) DE102006054088A1 (fr)
WO (1) WO2008058869A2 (fr)

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DE102010020011A1 (de) 2010-05-10 2011-11-10 Siemens Aktiengesellschaft Konstant-Spannungs-Sensor
CN102221354B (zh) * 2011-04-02 2013-01-09 中南大学 一种多测点浮动定位表面不平顺测量方法
JP6113355B2 (ja) * 2013-07-22 2017-04-12 ツェットエス−ハンドリング ゲゼルシャフト ミット ベシュレンクテル ハフツングＺＳ−Ｈａｎｄｌｉｎｇ ＧｍｂＨ 被加工物表面および帯状材料を検査するための装置
CN108398114B (zh) * 2018-02-12 2020-09-18 武汉华星光电半导体显示技术有限公司 曲面盖板边缘曲率测量装置、测量系统及测量方法
CN108375608A (zh) * 2018-03-12 2018-08-07 昆山国显光电有限公司 基板检测装置

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WO2007036461A1 (fr) * 2005-09-27 2007-04-05 Siemens Aktiengesellschaft Dispositif de mesure et systeme de mesure pour l'inspection d'une surface d'un substrat

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CN101432628B (zh) 2012-10-03
WO2008058869A3 (fr) 2008-07-24
KR101014121B1 (ko) 2011-02-14
CN101432628A (zh) 2009-05-13
DE102006054088A1 (de) 2008-05-21
JP2009535632A (ja) 2009-10-01
WO2008058869A2 (fr) 2008-05-22
JP4922396B2 (ja) 2012-04-25
KR20090016449A (ko) 2009-02-13

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