JP2006242860A - 検査装置および検査方法 - Google Patents

検査装置および検査方法 Download PDF

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Publication number
JP2006242860A
JP2006242860A JP2005061290A JP2005061290A JP2006242860A JP 2006242860 A JP2006242860 A JP 2006242860A JP 2005061290 A JP2005061290 A JP 2005061290A JP 2005061290 A JP2005061290 A JP 2005061290A JP 2006242860 A JP2006242860 A JP 2006242860A
Authority
JP
Japan
Prior art keywords
inspection
sensor
gas flow
inspection object
liquid crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2005061290A
Other languages
English (en)
Japanese (ja)
Inventor
Masato Ikeda
真人 池田
Hideji Yamaoka
秀嗣 山岡
Seigo Ishioka
聖悟 石岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OHT Inc
Original Assignee
OHT Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OHT Inc filed Critical OHT Inc
Priority to JP2005061290A priority Critical patent/JP2006242860A/ja
Priority to TW095107381A priority patent/TW200643411A/zh
Priority to PCT/JP2006/304668 priority patent/WO2006093349A1/fr
Publication of JP2006242860A publication Critical patent/JP2006242860A/ja
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2300/00—Aspects of the constitution of display devices
    • G09G2300/04—Structural and physical details of display devices
    • G09G2300/0421—Structural details of the set of electrodes
    • G09G2300/0426—Layout of electrodes and connections
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/36—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using liquid crystals
    • G09G3/3611—Control of matrices with row and column drivers
    • G09G3/3648—Control of matrices with row and column drivers using an active matrix

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Liquid Crystal (AREA)
JP2005061290A 2005-03-04 2005-03-04 検査装置および検査方法 Withdrawn JP2006242860A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2005061290A JP2006242860A (ja) 2005-03-04 2005-03-04 検査装置および検査方法
TW095107381A TW200643411A (en) 2005-03-04 2006-03-03 Inspection device and inspection method
PCT/JP2006/304668 WO2006093349A1 (fr) 2005-03-04 2006-03-03 Appareil et procede d’inspection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005061290A JP2006242860A (ja) 2005-03-04 2005-03-04 検査装置および検査方法

Publications (1)

Publication Number Publication Date
JP2006242860A true JP2006242860A (ja) 2006-09-14

Family

ID=36941370

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005061290A Withdrawn JP2006242860A (ja) 2005-03-04 2005-03-04 検査装置および検査方法

Country Status (3)

Country Link
JP (1) JP2006242860A (fr)
TW (1) TW200643411A (fr)
WO (1) WO2006093349A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009510419A (ja) * 2005-09-27 2009-03-12 シーメンス アクチエンゲゼルシヤフト 基板の表面を検査するための測定装置および測定システム
JP2009535632A (ja) * 2006-11-16 2009-10-01 シーメンス アクチエンゲゼルシヤフト 基板の表面の検査用の測定装置および測定方法
WO2011145877A2 (fr) * 2010-05-19 2011-11-24 Woo Gwan-Je Appareil d'essai de capteur tactile
KR101108557B1 (ko) 2009-04-04 2012-01-30 니혼덴산리드가부시키가이샤 검사용 프로브

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT511226B1 (de) * 2011-03-17 2013-03-15 Rainer Dr Gaggl Vorrichtung zum hochspannungsprüfen von halbleiterbauelementen

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4592885B2 (ja) * 2000-07-31 2010-12-08 富士通セミコンダクター株式会社 半導体基板試験装置
TWI222423B (en) * 2001-12-27 2004-10-21 Orbotech Ltd System and methods for conveying and transporting levitated articles
JP3448290B2 (ja) * 2002-08-21 2003-09-22 三菱重工業株式会社 液晶パネル検査装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009510419A (ja) * 2005-09-27 2009-03-12 シーメンス アクチエンゲゼルシヤフト 基板の表面を検査するための測定装置および測定システム
JP4940242B2 (ja) * 2005-09-27 2012-05-30 シーメンス アクチエンゲゼルシヤフト 基板の表面を検査するための測定システム
JP2009535632A (ja) * 2006-11-16 2009-10-01 シーメンス アクチエンゲゼルシヤフト 基板の表面の検査用の測定装置および測定方法
JP4922396B2 (ja) * 2006-11-16 2012-04-25 シーメンス アクチエンゲゼルシヤフト 基板の表面の検査用の測定装置および測定方法
KR101108557B1 (ko) 2009-04-04 2012-01-30 니혼덴산리드가부시키가이샤 검사용 프로브
WO2011145877A2 (fr) * 2010-05-19 2011-11-24 Woo Gwan-Je Appareil d'essai de capteur tactile
WO2011145877A3 (fr) * 2010-05-19 2012-03-08 Woo Gwan-Je Appareil d'essai de capteur tactile

Also Published As

Publication number Publication date
TW200643411A (en) 2006-12-16
WO2006093349A1 (fr) 2006-09-08

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Legal Events

Date Code Title Description
A300 Withdrawal of application because of no request for examination

Free format text: JAPANESE INTERMEDIATE CODE: A300

Effective date: 20080513