WO2006077836A1 - Procédé de travail de simple cristal de fluorure en un seul élément avec face de cristal cylindrique (100) - Google Patents

Procédé de travail de simple cristal de fluorure en un seul élément avec face de cristal cylindrique (100) Download PDF

Info

Publication number
WO2006077836A1
WO2006077836A1 PCT/JP2006/300546 JP2006300546W WO2006077836A1 WO 2006077836 A1 WO2006077836 A1 WO 2006077836A1 JP 2006300546 W JP2006300546 W JP 2006300546W WO 2006077836 A1 WO2006077836 A1 WO 2006077836A1
Authority
WO
WIPO (PCT)
Prior art keywords
single crystal
cylindrical
fluoride
crystal
calcium fluoride
Prior art date
Application number
PCT/JP2006/300546
Other languages
English (en)
Japanese (ja)
Inventor
Takafumi Yamazaki
Daisuke Totsuka
Masao Sekiguchi
Toshihiko Yamamoto
Original Assignee
Mitsui Mining & Smelting Co., Ltd.
Nihon Kessho Kogaku Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Mining & Smelting Co., Ltd., Nihon Kessho Kogaku Co., Ltd. filed Critical Mitsui Mining & Smelting Co., Ltd.
Publication of WO2006077836A1 publication Critical patent/WO2006077836A1/fr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/12—Halides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure

Definitions

  • the present invention relates to a method for processing a cylindrical fluoride single crystal having a (100) crystal plane, in which the strain birefringence inside the (100) plane crystal is greatly reduced.
  • the (100) crystal plane means that the bottom and top surfaces of the cylindrical and polyhedral fluoride single crystals are the (100) orientation crystal planes.
  • An example of a cylindrical body is shown in (a) and a hexagonal columnar body is shown in Fig. 1 (b).
  • Photolithography is for exposing and transferring a fine pattern of the integrated circuit on a wafer, and an exposure apparatus called a stepper is used. Due to the demands of the above-mentioned fine processing technology, this stepper is also required to have high performance and high performance.
  • the projection lens of this stepper requires high resolution and deep depth of focus in order to obtain high imaging performance.
  • Resolution and depth of focus are determined by exposure wavelength and numerical aperture (NA).
  • NA numerical aperture
  • the numerical aperture may be increased, but the depth of focus becomes shallow. Therefore, there is a limit to increasing the numerical aperture.
  • the shorter the exposure wavelength the smaller the angle of the diffracted light in the same pattern, so the numerical aperture of the lens is reduced. For this reason, it is required to shorten the exposure wavelength.
  • a fluoride crystal As a glass material that can cope with such a short wavelength, a fluoride crystal can be cited.
  • fluoride crystals single crystals that avoid the effects of grain boundaries and crystal orientations are used, and bridge crystals are used. It is nurtured by the Mann Law.
  • the characteristics required for a fluoride single crystal used as a lens material of an exposure apparatus are birefringence (strain birefringence), light transmittance, refractive index homogeneity, and the like.
  • annealing treatment is generally performed after growing a single crystal.
  • Patent Document 1 Patent No. 3466948
  • annealing treatment is performed, and the birefringence (strain birefringence) of the fluoride crystal is reduced in a short time by controlling the cooling rate at that time. It describes what you can do.
  • Patent Document 2 Patent No. 3466950 discloses that dust and coloring are caused by annealing in a state in which a force that compensates the internal stress distribution of the fluoride crystal is stored during annealing. It is described that a fluoride crystal with reduced residual stress which is difficult to occur can be obtained.
  • Patent Document 3 Japanese Patent Laid-Open No. 2000-34193
  • the transmittance is improved by providing a surface cleaning step or an altered layer removal step after the annealing treatment step before the annealing treatment (heat treatment) step, respectively. It is described that a fluoride single crystal can be produced in which a deteriorated layer does not exist in the surface layer where the internal turbidity is high and the strain is low.
  • Patent Document 4 Japanese Patent Laid-Open No. 2004-99409
  • the cooling rate is continuously increased while maintaining an internal stress level that does not cause plastic deformation.
  • the quality is high and the productivity is good.
  • Patent Document 5 Japanese Patent Laid-Open No. 10-2510966
  • the homogeneity of the refractive index is obtained by annealing a fluorite single crystal that has been processed into a shape that approximates or resembles the planar contour shape of the final product.
  • Patent Document 1 Japanese Patent No. 3466948
  • Patent Document 2 Japanese Patent No. 3466950
  • Patent Document 3 Japanese Patent Laid-Open No. 2000-34193
  • Patent Document 4 Japanese Unexamined Patent Application Publication No. 2004-99409
  • Patent Document 5 Japanese Patent Laid-Open No. 10-251096 Patent Documents:! To 5 specify lens conditions for exposure apparatus by specifying manufacturing conditions or manufacturing processes when manufacturing fluoride single crystals such as calcium fluoride (fluorite) single crystals. It improves the properties required for the fluoride single crystal used in the film, such as strain birefringence and transmittance.
  • fluoride single crystals such as calcium fluoride (fluorite) single crystals. It improves the properties required for the fluoride single crystal used in the film, such as strain birefringence and transmittance.
  • the fluoride single crystal used in the optical system of the exposure apparatus combines (111) plane orientation and (100) plane single crystal to cancel the intrinsic birefringence, and (100) plane
  • Significantly reducing the strain birefringence inside the orientation crystal is extremely important for applications such as lens materials for exposure equipment.
  • an object of the present invention is to provide a method for processing a cylindrical fluoride single crystal having a (100) crystal plane, in which the strain birefringence inside the (100) plane crystal is greatly reduced. is there. Means for solving the problem
  • the present invention is characterized in that the grown single crystal ingot is cut to obtain a polyhedron, the polyhedron is annealed, and then cut further.
  • the present invention provides a method for processing a product single crystal.
  • the present invention also provides a (100) crystal plane fluoride single crystal obtained by cutting a grown single crystal ingot to obtain a polyhedron, annealing the polygon, and further cutting and processing the polyhedron.
  • the above processing is cylindrical grinding, and the surface roughness (RMS: root mean square roughness) of the single crystal cylindrical grinding surface (cylindrical side surface) after the cylindrical grinding is 0 .
  • the present invention provides a method for processing a cylindrical fluoride single crystal having a (100) crystal plane, which is characterized by! -5.0 xm.
  • the cylindrical machining is performed in the direction of the cylindrical axis.
  • the cutting speed of the stone is 1 mm / min to 300 mm / min, and the rotation speed of the fluoride single crystal with respect to the grindstone is 5 rpm to 15 rpm.
  • the grindstone particle size of the cylindrical grinding is # 100 to # 240.
  • the strain birefringence inside the (100) -oriented crystal can be further reduced.
  • the strain birefringence of the (100) -oriented crystal inside of the cylindrical fluoride single crystal can be greatly reduced.
  • Fluoride single crystal ingot growing step In the processing method according to the present invention, a fluoride single crystal is first grown.
  • a fluoride single crystal calcium fluoride, barium fluoride, strontium fluoride, magnesium fluoride, etc. are used as an optical component with high power transmission, and calcium fluoride called fluorite is representative. Is.
  • Fluoride raw materials such as fluoride powder and dissolved pulverized products are put into a crucible for growth and melted, and then slowly cooled to grow crystals to produce a fluoride single crystal ingot having a diameter of about 250 mm to 350 mm.
  • the crystal growth method the Bridgman method (stock burger method, crucible descending method) or Chiyoklarsky method is adopted.
  • the crucible to be used is preferably a graphite norebo.
  • the furnace temperature is raised to a temperature above which the fluoride raw material of the crucible melts, and after the crucible is lowered, a temperature gradient of 5 ° C / hr to 25 ° C / hr. Reduce the single crystal grown to a room temperature. All during the training carried out in a vacuum atmosphere (1 X 10 "3 Pa ⁇ l X 10 _5 Pa). Growth rate (reduction rate) of the single crystal is Gyotsu at 0 ⁇ lmm / hr ⁇ 5 • OmmZhr.
  • Simple annealing treatment and cutting process of fluoride single crystal ingot The fluoride single crystal ingot grown in this way has a residual strain that is too large to cause cracks in the ingot. Occurs. Therefore, at a low temperature to prevent cracks in the ingot It is desirable that annealing be performed in a simple atmosphere, specifically 200 to 500 ° C, 7 to 21 days in an inert atmosphere to reduce residual strain.
  • An ingot having a reduced residual strain is obtained by using a diamond saw or the like, for example, from lmm / min to
  • Polygonal bodies such as hexagonal cylinders and octagonal cylinders are generally used as the polygons.
  • the cutting size and side orientation are arbitrary.
  • Annealing process of fluoride single crystal polyhedron Next, the fluoride single crystal polyhedron is annealed in an annealing furnace.
  • the annealing conditions are generally in an inert atmosphere with a maximum temperature of 1100 ° C to 1300 ° C, a temperature gradient in the annealing furnace of 0.4 ° C / cm or less, and a temperature of 0.4 ° C Zhr or more. The temperature falls at the rate of temperature drop.
  • the annealing period is 1 to 2 months.
  • annealing the fluoride single crystal polyhedron can reduce the strain birefringence.
  • FIG. 2 (a) shows the bottom shape of the fluoride single crystal polyhedron before and after annealing, and the bottom shape is an unequal hexagon.
  • Fig. 2 (b) shows the bottom shape after cutting the fluoride single crystal polyhedron after annealing, and the bottom shape is a substantially regular hexagon. The circle inside the substantially regular hexagon is a region where a predetermined cylindrical crystal is to be obtained.
  • Fig. 2 (c) shows the bottom shape after cylindrical grinding of a fluoride single crystal polyhedron, and the bottom shape is a perfect circle conforming to product standards.
  • the fluoride single crystal polyhedron subjected to the annealing treatment is cut.
  • the cutting is performed at the same speed as described above using a diamond saw or the like as described above.
  • the shape of the fluoride to be cut and the cut size are arbitrarily determined depending on the shape and size of the final product, but in the present invention, the shape is finally cylindrical, so that the shape is a polygonal column that is close to this. It is preferable to use a hexagonal columnar body or an octagonal columnar body.
  • a low strain single crystal having a (100) orientation is achieved by cutting the annealed fluoride single crystal polyhedron. Further, in the processing method of the present invention, as will be described later, by processing under specific conditions after cutting, further production of a low strain single crystal having a (100) plane orientation can be achieved. Next, a fluoride single crystal of a polygonal columnar body whose bottom surface shape is cut as shown in FIG. 2 (b) is processed. Cylindrical grinding, that is, rounding is adopted as the processing.
  • the cutting speed of the grindstone in the direction of the cylindrical axis is preferably lm m / min to 300 mmz min, more preferably 5 mm / min to 15 mm min. (Work), that is, the rotation speed of the fluoride single crystal is preferably 5 rpm to 15 rpm, more preferably 5 rpm to 10 rpm. If the cutting speed or rotational speed is outside the above range, the strain birefringence inside the crystal with the (100) orientation cannot be significantly reduced. Further, the grindstone particle size used in this cylindrical grinding process is preferably # 100 to ⁇ 240, and more preferably # 120 to # 180.
  • the surface roughness (RMS) of the single crystal cylindrical grinding surface (cylindrical side surface) after cylindrical grinding obtained in this way is from 0 ⁇ l / im to 5.0 / im, and even 1 ⁇ 0 / im to 2.0 / im.
  • a single crystal having such a surface roughness can reduce strain birefringence inside the (100) -oriented crystal.
  • a calcium fluoride single crystal ingot grown by the Bridgeman Stock Burger method was subjected to a simple annealing treatment in an argon atmosphere at 250 ° C for 14 days, and then cut to obtain a calcium hexagonal columnar body.
  • the calcium fluoride hexagonal column was annealed.
  • the annealing treatment was performed at a maximum temperature of 1 100 ° C to 1300 ° C in an inert atmosphere, with a temperature gradient in the annealing furnace of 0.4 ° C / cm or less, and a temperature decrease rate of 0.4 ° C / h or more.
  • the annealing period is one month.
  • the annealed calcium fluoride hexagonal columnar body was further cut to obtain a calcium fluoride hexagonal columnar body that was slightly smaller.
  • the annealed calcium fluoride hexagonal column was further cut to obtain a calcium fluoride hexagonal column that was slightly smaller.
  • the ingot was subjected to a simple annealing treatment and then cut to obtain a calcium fluoride hexagonal columnar body.
  • the calcium fluoride hexagonal column was annealed.
  • the annealing treatment was performed in an inert atmosphere with a maximum temperature of 1100 ° C to 1300 ° C, a temperature gradient in the annealing furnace of 0.4 ° C / cm or less, and a temperature decrease rate of 0.4 ° CZh or more.
  • the annealing period is one month.
  • the annealed calcium fluoride hexagonal columnar body was further cut and then subjected to cylindrical grinding to produce a calcium fluoride cylinder having a diameter of 100 mm. Machining conditions were a grinding wheel cutting speed of 5mm / min in the direction of the cylinder axis, a workpiece rotation speed of 15i "pm against the grinding wheel, and a grinding wheel grain size of # 150.
  • Strain birefringence (mean, deviation, root mean square) within the 50 to 110 mm diameter in the calcium fluoride hexagonal column after annealing and the calcium fluoride cylinder after cylindrical grinding Maximum and minimum) were measured using an automatic strain birefringence meter. The results are shown in Table 3.
  • Example 4 A calcium fluoride single crystal ingot grown by the Bridgeman Stock Burger method was subjected to a simple annealing treatment, and then cut to obtain a calcium fluoride hexagonal columnar body.
  • the calcium fluoride hexagonal columnar body was annealed, cut and cylindrically ground according to Example 3 to produce a calcium fluoride cylindrical body having a diameter of 150 mm.
  • Strain birefringence (mean, deviation, root mean square) of (100) orientation within 50 to 150 mm diameter in hexagonal columnar calcium fluoride after annealing and calcium fluoride cylinder after cylindrical grinding Maximum and minimum) were measured using an automatic strain birefringence meter. The results are shown in Table 4. The surface roughness (RMS) of the single crystal cylindrical grinding surface (cylindrical side surface) after cylindrical grinding was 1.
  • Example 3 a calcium fluoride single crystal ingot grown by the Bridgeman Stock Burger method was subjected to a simple annealing treatment, and then cut to obtain a calcium fluoride (111) -oriented hexagonal columnar body.
  • the calcium fluoride hexagonal columnar body was annealed, cut and cylindrically ground according to Example 3.
  • Calcium fluoride hexagonal column after annealing, and (111) orientation birefringence (average, deviation, root mean square, maximum, minimum) within a diameter of 87mm to 240mm in cylindrical calcium fluoride after cylindrical grinding was measured using an automatic strain birefringence measuring instrument. The results are shown in Table 5.
  • a calcium fluoride single crystal ingot grown by the Bridgeman Stock Burger method was subjected to a simple annealing treatment and then cut to obtain a calcium fluoride hexagonal columnar body.
  • the calcium fluoride hexagonal columnar body was subjected to cylindrical grinding under the same conditions as in Example 3 to produce a calcium fluoride cylindrical body.
  • this calcium fluoride cylinder was annealed under the same conditions as in Example 3, and finally a calcium fluoride cylinder having a diameter of 130 mm was produced.
  • the calcium fluoride cylinder produced in Comparative Example 3 was again subjected to cylindrical grinding under the same conditions as in Example 3, and finally a calcium fluoride cylinder having a diameter of 120 mm was produced.
  • a calcium fluoride single crystal ingot grown by the Bridgeman Stock Burger method was subjected to a simple annealing treatment and then cut to obtain a calcium fluoride hexagonal columnar body.
  • the calcium fluoride hexagonal columnar body was annealed according to Example 3, and then immersed in an etching solution (O + HCl: concentration 10%) to dissolve the surface between 0.05 mm and 0.1 mm.
  • Example 1 and Example 2 the force S obtained by cutting the calcium fluoride hexagonal column and the strain birefringence in the (100) plane orientation are reduced, so that the strain birefringence can be reduced. Yes (see Table 1 and Table 2).
  • Example 3 and 4 the calcium fluoride hexagonal columnar body was cut and then subjected to cylindrical grinding under certain conditions. However, since the strain birefringence in the (100) plane orientation was further reduced, Refraction can be further reduced (see Table 3 and Table 4). However, as in Comparative Example 1, even if the calcium hexagonal columnar body is subjected to cylindrical grinding under certain conditions, the strain birefringence in the (111) plane orientation does not change significantly before and after cylindrical processing (Table 5). reference).
  • Comparative Example 2 to Comparative Example 4 are obtained by subjecting the calcium fluoride hexagonal columnar body to cylindrical grinding before annealing, and after annealing to 0 to 2 times cylindrical grinding. Since the strain birefringence of the direction does not become small, the strain birefringence is not reduced (see Table 6 to Table 8). In Comparative Example 5, the stress birefringence of the (100) plane orientation is not reduced by force chemical grinding, which is an etching treatment of a calcium fluoride hexagonal columnar body, so the strain birefringence is not reduced (see Table 9). .
  • the cylindrical fluoride single crystal obtained by the processing method according to the present invention is suitable as a lens for an exposure apparatus because the strain birefringence inside the (100) plane crystal is greatly reduced. It can also be used as a glass material for other optical components.
  • FIG. 1 shows a (100) crystal plane
  • FIG. 1 (a) is a cylindrical body
  • FIG. 1 (b) is a hexagonal cylindrical body.
  • FIG. 2 is a view of cutting a fluoride single crystal polyhedron (hexagonal column) of the processing method according to the present invention, It is a figure which shows an example of the bottom face (top surface) shape in a process, FIG. 2 (a) is front and back, FIG. 2 (b) is after cutting

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)

Abstract

L’invention concerne un procédé de travail de simple cristal de fluorure en un seul élément avec face de cristal cylindrique (100) où l’on a réduit sensiblement la contrainte/la biréfringence dans le cristal à orientation de face (100). Elle porte sur un procédé de travail de simple cristal de fluorure en un seul élément avec une face de cristal (100), caractérisé en ce que l’on découpe un lingot de simple cristal cultivé en un polyèdre, et l’on recuit le polyèdre avant de le découper de nouveau. De plus, par exemple, l’invention divulgue un procédé de travail de simple cristal de fluorure en un seul élément avec face de cristal cylindrique (100), caractérisé en ce que l’on découpe un lingot de simple cristal cultivé en un polyèdre, et l’on recuit le polyèdre avant de le découper de nouveau et de le soumettre à un meulage cylindrique pour que la rugosité de surface (RMS) d’une face de simple cristal après le meulage cylindrique soit comprise entre 0,1 et 5,0 µm.
PCT/JP2006/300546 2005-01-19 2006-01-17 Procédé de travail de simple cristal de fluorure en un seul élément avec face de cristal cylindrique (100) WO2006077836A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005-011758 2005-01-19
JP2005011758A JP4756630B2 (ja) 2005-01-19 2005-01-19 （１００）結晶面の円筒状フッ化物単結晶の加工方法

Publications (1)

Publication Number Publication Date
WO2006077836A1 true WO2006077836A1 (fr) 2006-07-27

Family

ID=36692225

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2006/300546 WO2006077836A1 (fr) 2005-01-19 2006-01-17 Procédé de travail de simple cristal de fluorure en un seul élément avec face de cristal cylindrique (100)

Country Status (2)

Country Link
JP (1) JP4756630B2 (fr)
WO (1) WO2006077836A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4839205B2 (ja) * 2006-12-25 2011-12-21 三井金属鉱業株式会社 蛍石の製造方法
JP4839204B2 (ja) * 2006-12-25 2011-12-21 三井金属鉱業株式会社 蛍石
KR101356363B1 (ko) 2007-01-31 2014-02-06 아이카고교 가부시키가이샤 멜라민 화장 적층시트
JP6045633B2 (ja) * 2015-05-25 2016-12-14 住友化学株式会社 窒化物半導体基板の製造方法
JP2020179474A (ja) * 2019-04-26 2020-11-05 株式会社ディスコ 板状物の加工方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10251096A (ja) * 1997-03-10 1998-09-22 Nikon Corp 蛍石単結晶のアニール方法
WO2003009017A1 (fr) * 2001-07-17 2003-01-30 Nikon Corporation Procede de fabrication d'un element optique

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10251096A (ja) * 1997-03-10 1998-09-22 Nikon Corp 蛍石単結晶のアニール方法
WO2003009017A1 (fr) * 2001-07-17 2003-01-30 Nikon Corporation Procede de fabrication d'un element optique

Also Published As

Publication number Publication date
JP4756630B2 (ja) 2011-08-24
JP2006199528A (ja) 2006-08-03

Similar Documents

Publication Publication Date Title
EP0939147B1 (fr) Procédé de fabrication de fluorure de calcium et fluorure de calcium pour la photolithographie
US7754011B2 (en) Method of manufacturing a calcium fluoride single crystal
WO2006077836A1 (fr) Procédé de travail de simple cristal de fluorure en un seul élément avec face de cristal cylindrique (100)
US7837969B2 (en) Method of making large-volume CaF2 single crystals for optical elements with an optic axis parallel to the (100)-or (110)-crystal axis and CaF2 single crystal made thereby
JP2003161708A (ja) 光リソグラフィー用光学部材及びその評価方法
US20040005266A1 (en) Optical member, process for producing the same, and projection aligner
JP3686204B2 (ja) 蛍石単結晶のアニール方法
JP4092515B2 (ja) 蛍石の製造方法
JP4892192B2 (ja) 減じられた応力複屈折及びより均質な屈折率をもつ低応力大容積の非（１１１）配向結晶の製造方法及び同方法により製造される結晶
JP4723525B2 (ja) ＢａＬｉＦ３単結晶体の製造方法
JP2007290950A (ja) マイクロリソグラフィーに使用する光学素子に特に適した材料、およびこの材料からブランクを製造する方法
JP2005239540A (ja) 減じられた応力複屈折性及び均質な屈折率をもつ低応力大容積結晶の製造方法、及び同方法により製造される結晶
JPH11240798A (ja) 蛍石の製造方法及び光リソグラフィー用の蛍石
US7014703B2 (en) Method for annealing group IIA metal fluoride crystals
JP4836905B2 (ja) ＢａＬｉＦ３単結晶体の製造方法
JP4158252B2 (ja) 蛍石単結晶、その熱処理方法及び蛍石単結晶素材の製造方法
JP6035584B2 (ja) 蛍石結晶の製造方法
JP2004315247A (ja) ＳｉＯ２−ＴｉＯ２系ガラスの製造方法、ＳｉＯ２−ＴｉＯ２系ガラス及び露光装置
JP4797447B2 (ja) 光学用被加工部材，光学部材，光学系及び光露光装置
JP2004284850A (ja) フッ化カルシウム結晶の製造方法
JP3780532B2 (ja) 合成石英ガラス光学体の改質方法 および合成石英ガラス光学体
JP2002160999A (ja) 結晶成長方法，フッ化物結晶の成形方法，光学部材の成形方法及び結晶成長用種結晶
JP2006078565A (ja) 光学部材及び光学装置
JP2004145309A (ja) フッ化物結晶から形成された光学部材の製造方法
JP2005330120A (ja) 蛍石単結晶の熱処理装置

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application
NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 06711826

Country of ref document: EP

Kind code of ref document: A1

WWW Wipo information: withdrawn in national office

Ref document number: 6711826

Country of ref document: EP