WO2006025214A1 - 逆止弁及びダイヤフラムポンプ - Google Patents
逆止弁及びダイヤフラムポンプ Download PDFInfo
- Publication number
- WO2006025214A1 WO2006025214A1 PCT/JP2005/014978 JP2005014978W WO2006025214A1 WO 2006025214 A1 WO2006025214 A1 WO 2006025214A1 JP 2005014978 W JP2005014978 W JP 2005014978W WO 2006025214 A1 WO2006025214 A1 WO 2006025214A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- valve
- valve body
- check valve
- housing
- discharge
- Prior art date
Links
- 239000012530 fluid Substances 0.000 claims abstract description 35
- 230000004044 response Effects 0.000 abstract description 7
- 239000010408 film Substances 0.000 description 10
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 230000001105 regulatory effect Effects 0.000 description 5
- 238000005452 bending Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000446 fuel Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000004033 plastic Substances 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000004043 responsiveness Effects 0.000 description 3
- 239000004743 Polypropylene Substances 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 238000007865 diluting Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000004049 embossing Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- -1 polypropylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7837—Direct response valves [i.e., check valve type]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7837—Direct response valves [i.e., check valve type]
- Y10T137/7879—Resilient material valve
Definitions
- the present invention relates to a check valve suitable for use in a pump for controlling a flow rate of a minute amount of liquid and a diaphragm pump using the check valve.
- Patent Document 1 discloses a check valve for a piezoelectric vibrator pump using a piezoelectric vibrator as a drive source and a cantilever-shaped valve body formed in a frame (valve box / valve chamber).
- a check valve for a piezoelectric vibrator pump using a piezoelectric vibrator as a drive source and a cantilever-shaped valve body formed in a frame (valve box / valve chamber).
- a support arm is inserted into and supported by the inner wall of the frame portion, and the other end is a valve body capable of closing the valve hole.
- the valve body and the support arm are made of a single plate made of metal or plastic.
- Patent Document 1 JP-A-4 72479 (right column on page 4, Fig. 1)
- a cantilever-shaped valve element generally uses a metal, a grease material, or a rubber material as its material.
- This valve body is a force that is opened by pressure. Because the valve body is rigid, the amount of deformation is not stable due to parts and vertical variations, that is, the time to close is not stable, and the response is unstable. There was an inconvenience.
- valve body When the valve body is formed of a resin material, it has a certain thickness, so that it requires a little force to deform in order to be open. Therefore, if the longitudinal dimension is increased, the required force can be reduced, but the size (volume) of the valve chamber will increase, and it will be dissolved by the liquid! As a result, the remaining space for bubbles to grow increases, which affects the liquid transfer capacity of the pump. There is also concern about plastic deformation of the disc. In addition, when the valve body is formed of a rubber material, there is no concern about plastic deformation, but there is a limit to reducing the thickness, and the force and size for deformation have the same disadvantages as those made from resin.
- the present invention has been made in view of the above-described problems, and provides a check valve that can reduce the valve chamber with good responsiveness and is less susceptible to air bubbles, and a diaphragm pump using the check valve The purpose is to do.
- the check valve of the present invention has a valve chamber formed by a top wall having a fluid inlet, a bottom wall having a fluid outlet and a side wall, and a base end fixed to the side wall in the valve chamber. And a valve body that is supported in a cantilevered manner as a free end, and is arranged on the inlet port, and the bottom wall has a base wall force along the valve body and a ceiling wall force that gradually moves toward the tip.
- a valve seat having an inclined surface that is inclined is formed.
- the inclined surface is formed on the valve seat on the bottom wall! Therefore, the cantilevered valve element moves between the top wall and the valve seat having the inclined surface.
- the valve seat is restricted by the inclined valve seat, and the amount of movement of the valve element is reduced, and the response time from opening to closing is shortened.
- the valve chamber can be small and is not easily affected by bubbles. Furthermore, even if a soft valve body is used, the valve body is hardly deformed because it is regulated by the inclined surface of the valve seat.
- the check valve of the present invention is characterized in that the valve seat is formed with a groove portion having one end connected to the discharge port and the other end extended from the tip of the valve body. . That is, in this check valve, since the groove is formed in the valve seat, when the fluid pushes the valve body into the open state, the valve body is disposed on the discharge port in contact with the inclined surface of the valve seat. In addition, the fluid can flow out to the discharge port through the other end force groove portion of the groove portion arranged on the distal end side of the valve body.
- the check valve of the present invention is characterized in that at least one of the introduction port and the discharge port is disposed on the proximal end side of the valve body. That is, if the introduction port and the discharge port are arranged on the distal end side of the valve body, a strong force may be applied to the distal end of the valve body and the valve body may be bent. Since at least one of the introduction port and the discharge port is arranged on the proximal end side of the valve body, it is possible to suppress the deformation of the valve body, which is difficult to apply a strong force to the distal end side of the valve body, The opening / closing operation of the valve can be maintained. In particular, when a valve seat having the above groove portion is adopted, even if the discharge port is arranged on the base end side of the valve body, a fluid flow path is ensured by the groove portion, so that good valve operation is maintained. can do.
- the check valve of the present invention is characterized in that the valve body is formed of a flexible film.
- this check valve uses a soft thin film valve body made of a flexible film, the length of the valve body in the longitudinal direction can be shortened and opened and closed because there is little rigidity and the force required for deformation is small. The required fluid volume can be reduced. Therefore, the size of the valve chamber can be further reduced, and the responsiveness and stability of the valve operation can be improved, and the influence of bubbles can be further reduced.
- the check valve of the present invention includes a first casing having a top wall, a second casing having a bottom wall, a first casing and a second casing having a valve body.
- opposing surfaces are formed so as to sandwich the base end of the valve body. That is, in this check valve, the proximal end (fulcrum) of the valve body is clarified by holding the proximal end of the valve body between the convex portion and the recessed portion, and the valve body is positioned and the position of the valve body is determined.
- the diaphragm pump of the present invention includes an upper suction flow path and an upper discharge flow path that are formed between a diaphragm to which a piezoelectric element is attached and a diaphragm, and are connected to the pressure chamber.
- a lower housing having a housing, a lower suction channel connected to the upper suction channel via a suction-side check valve, and a lower discharge channel connected to the upper discharge channel via a discharge-side check valve
- the suction side check valve and the discharge side check valve are the check valves of the present invention, and the upper suction flow path and the lower discharge flow path are connected to the discharge ports, respectively.
- an inlet port is connected to each of the lower suction flow paths.
- the check valve according to the present invention is adopted for the suction-side check valve and the discharge-side check valve, so that the flow rate of a very small amount of liquid that is highly responsive and less affected by bubbles is increased. It can be controlled with accuracy.
- the invention's effect is adopted for the suction-side check valve and the discharge-side check valve, so that the flow rate of a very small amount of liquid that is highly responsive and less affected by bubbles is increased. It can be controlled with accuracy.
- the check valve according to the present invention since the valve seat having the inclined surface is formed on the bottom wall, the amount of movement of the valve element is restricted by the valve seat having the inclined surface, and the response is high. Therefore, efficient and highly accurate valve operation becomes possible.
- the valve chamber is small and is not easily affected by air bubbles.
- the valve body is regulated by the inclined surface of the valve seat. Therefore, by adopting this check valve for the diaphragm pump, it is possible to control the flow rate of a minute amount of liquid with high response and high accuracy, and it is possible to obtain a pump suitable for a fuel cell or the like.
- FIGS. 1 to 5 An embodiment of a check valve and a diaphragm pump using the check valve according to the present invention will be described with reference to FIGS. 1 to 5.
- the diaphragm pump using the check valve of the present embodiment is a pump for a fuel cell that supplies methanol as a fluid, for example.
- a diaphragm 2 to which a piezoelectric element 1 is attached A pressure chamber 3 is formed between the diaphragm 2 and an upper housing 4 having an upper suction flow path 4a and an upper discharge flow path 4b connected to the pressure chamber 3, and a suction side check valve in the upper suction flow path 4a.
- a lower housing 6 having a lower suction flow path 6b connected to a lower suction flow path 6b connected to the upper discharge flow path 4b via a discharge check valve 5B.
- the diaphragm 2 is bonded to the resin diaphragm 2a, a part of the lower surface of which forms the wall of the pressure chamber 3, the metal diaphragm 2b bonded to the resin diaphragm 2a, and the metal diaphragm 2b.
- the piezoelectric element 1 is a piezo element (PZ T), is connected to a power source (not shown), and expands and contracts when a voltage is applied.
- the suction-side check valve 5A and the discharge-side check valve 5B include a top wall 8 having a fluid inlet 8a and a bottom wall 9 having a fluid outlet 9a.
- the valve chamber 11 formed by the side wall 10 and the base end in the valve chamber 11 are fixed to the side wall 10 and the tip end is a free end and is supported in a cantilevered manner, and is disposed on the inlet 8a.
- the bottom wall 9 is formed on the lower surface of the upper casing (second casing) 4, and the top wall 8 is formed on the upper surface of the lower casing (first casing) 6.
- the top wall 8 is formed on the lower surface of the upper housing (first housing) 4 and the bottom wall 9 is formed on the upper surface of the lower housing (second housing) 6.
- the discharge port 9a is connected to each of the upper suction channel 4a and the lower discharge channel 6b
- the introduction port 8a is connected to each of the upper discharge channel 4b and the lower suction channel 6a.
- the lower suction channel 6 a is connected to a fluid supply source (not shown) via a fluid supply pipe 13.
- the lower discharge flow path 6b is connected to a fluid supply destination (not shown) via the fluid discharge pipe.
- the valve body 12a is formed in a tongue-like cantilever shape by punching a film body 12 sandwiched between the upper housing 4 and the lower housing 6 with a mold.
- the film body 12 and the valve body 12a are formed of a flexible film such as PP (polypropylene).
- the upper housing 4 and the lower housing 6 are joined by laser welding the hatched region R shown in FIG. 3 with the film body 12 sandwiched therebetween.
- FIGS. 4 and 5 show the valve body 12a assembled in the upper housing 4 and the lower housing 6, and the valve body 12a in this embodiment is not subjected to processing such as embossing. It is a flat member as shown in Fig. 2 (b).
- the bottom wall 9 is a flat surface 9bl that is substantially parallel to the top wall 8 at a predetermined interval when facing the top wall 8, and a surface that continues from the flat surface 9bl and that is proximal to the valve body 12a.
- a valve seat 9b having an inclined surface 9b2 inclined so as to gradually move away from the top wall 8 toward the force tip is formed.
- the inclined surface 9b2 of the valve seat 9b is formed with a groove portion 9c having one end connected to the discharge port 9a and the other end extended from the tip of the valve body 12a.
- the valve seat 9b is formed wider and longer in the longitudinal direction than the valve body 12a so that the entire valve body 12a can be supported.
- introduction port 8a and the discharge port 9a are arranged on the base end side of the valve body 12a, and a facing surface P2 formed in a lower concave portion 16b and an upper concave portion 17a, which will be described later, is connected to the flat surface 9bl. It is provided continuously.
- the upper convex portion 16a, the lower concave portion 16b, the upper concave portion 17a and the lower convex portion 17b are all provided so as to extend wider than the valve body 12a in a direction perpendicular to the longitudinal direction of the valve body 12a.
- Opposite faces Pl and P2 that are parallel to each other and sandwich the base end of the valve body 12a are formed in the upper convex part 16a and the lower concave part 16b that are fitted to each other.
- the upper concave portion 17a and the lower convex portion 17b are also formed with mutually parallel opposing surfaces P 1 and P2 that sandwich the base end of the valve body 12a.
- the opposed surfaces Pl and P2 are formed to be inclined with respect to the bottom wall 8 so as to form a predetermined angle.
- the base end of the valve body 12a is sandwiched between the upper convex portion 16a and the lower concave portion 16b, and between the upper concave portion 17a and the lower convex portion 17b, so that the base end ( The fulcrum q) becomes clear, and the valve body 12a can be positioned and the displacement of the valve body 12a can be prevented.
- the opposing surfaces Pl and P2 are formed so as to be inclined at a predetermined angle with respect to the bottom wall 8, they are arranged so as to press the valve body 12a against the inlet 8a in the closed state. Is possible.
- valve body 12a Even if the valve body 12a swells due to methanol and expands or contracts due to a temperature change, the valve body 12a is supported in a cantilever shape and is sandwiched between the convex and concave portions so that the fulcrum is clear. Therefore, even in that case, highly accurate valve operation can be maintained.
- valve body 12a is sandwiched between the upper convex portion 16a and the lower concave portion 16b, and the mutually parallel facing surfaces Pl and P2 formed on the upper concave portion 17a and the lower convex portion 17b, thereby Even when a positional deviation between the convex part 16a and the lower concave part 16b or a positional deviation between the upper concave part 17a and the lower convex part 17b occurs, the angle at which the valve body 12a projects into the valve chamber 11 can be made constant. .
- valve body 12a when the valve body 12a is sandwiched between a concave portion and a convex portion that have a curvature with each other, if a displacement occurs between the concave portion and the convex portion during fitting, the surface of the surface that sandwiches the base end of the valve body 12a Since the angle changes, there is an inconvenience that the way (protrusion angle) of the valve body 12a protruding into the valve chamber 11 changes.
- the angles of the opposing surfaces Pl and P2 that clamp the base end of the valve body 12a are constant even when assembly displacement or the like occurs.
- the valve body 12a protruding into the valve chamber 11 at a predetermined angle can be obtained with high accuracy.
- the fluid in the pressure chamber 3 When the fluid in the pressure chamber 3 is pressurized by the bending movement of the diaphragm 2, the fluid in the pressure chamber 3 is discharged through the upper discharge passage 4b, the discharge-side check valve 5B, and the lower discharge passage 6b. It is discharged into the pipe 14. At this time, in the suction side check valve 5A, the valve body 12a closes the inlet 8a to prevent the fluid from flowing back to the fluid supply pipe 13.
- valve body 12a When the fluid enters the valve chamber 11 from the lower suction flow path 6a or the upper discharge flow path 4b through the introduction port 8a, the valve body 12a that has blocked the introduction port 8a is pushed up by the fluid. At this time, the valve body 12a is regulated by the valve seat 9b having the inclined surface 9b2, and a certain flow path is secured in the valve chamber 11.
- the fluid flowing into the valve chamber 11 flows from the proximal end side of the valve body 12a to the distal end side, and the one end force of the groove portion 9c opened on the distal end side of the valve body 12a also flows into the groove portion 9c. Further, the fluid is discharged from the discharge port 9a to the upper suction flow path 4a or the lower discharge flow path 6b through the groove 9c.
- the introduction port 8a and the discharge port 9a are arranged on the proximal end side of the valve body 12a, the deformation of the valve body 12a, which is difficult to apply a strong force of fluid to the distal end side of the valve body 12a, is suppressed, A normal valve opening / closing operation can be maintained.
- the same effect can be obtained by disposing at least one of the introduction port 8a and the discharge port 9a on the proximal end side of the valve body 12a. Power As in the present embodiment, by arranging both the introduction port 8a and the discharge port 9a on the proximal end side of the valve body 12a, the above effect can be obtained more efficiently.
- valve body 12a regulated by the valve seat 9b returns to its original state and closes by closing the introduction port 8a. Operation is performed and backflow can be prevented.
- the valve seat 9b having the inclined surface 9b2 is formed on the bottom wall 9, so that the cantilevered valve body 12a is interposed between the top wall 8 and the valve seat 9b.
- the valve seat 9b having the inclined surface 9b2 is restricted and the amount of movement of the valve body 12a is reduced, and the response time from opening to closing is shortened.
- the valve chamber 11 is small and is not easily affected by bubbles.
- the valve body 12a is hardly deformed because it is regulated by the inclined surface 9b2 of the valve seat 9b.
- the valve seat 9b is provided with a flat surface 9bl on the base end side of the valve body 12a to restrict the movement of the valve body 12a base end (fulcrum q) when bent and excessively add the base end (fulcrum q). This prevents plastic deformation caused by stress.
- the valve seat 9b is provided with the flat surface 9bl.
- the valve is continuously formed from the facing surface P2 of the lower recess 16b and the upper recess 17a.
- the inclined surface 9b2 may be formed from the base end of the seat 9b.
- the length of the valve element 12a in the longitudinal direction can be shortened because there is almost no rigidity and the force required for deformation is small. It is possible to reduce the fluid volume required for the operation. Therefore, the size of the valve chamber 11 can be further reduced, and the responsiveness and stability of the valve operation can be improved and the influence of bubbles can be further reduced.
- a check valve and a diaphragm pump using the check valve may be applied to a check valve for other uses and a pump using the check valve.
- the present invention may be applied to a diluting water circulation pump for fuel cells, a medical pump for controlling a minute flow rate of a chemical solution, or an analysis pump.
- FIG. 1 is a cross-sectional view showing a diaphragm pump according to an embodiment of the present invention.
- FIG. 2 is a cross-sectional view and an exploded cross-sectional view showing a check valve in an embodiment according to the present invention.
- FIG. 3 is a top view of a check valve showing a valve chamber portion and a laser welding region in a perspective state according to an embodiment of the present invention.
- FIG. 4 is an exploded perspective view showing a check valve in an embodiment according to the present invention.
- FIG. 5 is an exploded perspective view of a main part showing a valve chamber portion of a check valve in an embodiment according to the present invention.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
- Check Valves (AREA)
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP20050772505 EP1785652A1 (en) | 2004-08-30 | 2005-08-17 | Check valve and diaphragm pump |
US11/659,879 US20070248478A1 (en) | 2004-08-30 | 2005-08-17 | Check Valve and Diaphram Pump |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004-250744 | 2004-08-30 | ||
JP2004250744A JP2006063960A (ja) | 2004-08-30 | 2004-08-30 | 逆止弁及びダイヤフラムポンプ |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2006025214A1 true WO2006025214A1 (ja) | 2006-03-09 |
Family
ID=35999872
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2005/014978 WO2006025214A1 (ja) | 2004-08-30 | 2005-08-17 | 逆止弁及びダイヤフラムポンプ |
Country Status (5)
Country | Link |
---|---|
US (1) | US20070248478A1 (ja) |
EP (1) | EP1785652A1 (ja) |
JP (1) | JP2006063960A (ja) |
CN (1) | CN101018965A (ja) |
WO (1) | WO2006025214A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012029902A (ja) * | 2010-07-30 | 2012-02-16 | Terumo Corp | コンプレッサおよび酸素濃縮装置 |
JP2012031793A (ja) * | 2010-07-30 | 2012-02-16 | Terumo Corp | コンプレッサおよび酸素濃縮装置 |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008180179A (ja) * | 2007-01-25 | 2008-08-07 | Star Micronics Co Ltd | ダイヤフラムポンプ |
JP2008180161A (ja) * | 2007-01-25 | 2008-08-07 | Star Micronics Co Ltd | ダイヤフラムポンプ |
CN101377192B (zh) * | 2007-08-30 | 2012-06-13 | 研能科技股份有限公司 | 流体输送装置 |
CN101463808B (zh) * | 2007-12-21 | 2010-12-08 | 研能科技股份有限公司 | 流体输送装置 |
US8703358B2 (en) | 2008-11-20 | 2014-04-22 | Mti Microfuel Cells, Inc. | Fuel cell feed systems |
CN102444566B (zh) * | 2010-10-12 | 2014-07-16 | 研能科技股份有限公司 | 流体输送装置 |
CN102252666B (zh) * | 2011-06-21 | 2014-04-23 | 南京航空航天大学 | 一种基于锥形螺旋流管无阀压电泵的陀螺 |
EP2762725A4 (en) * | 2011-09-27 | 2015-06-10 | Kikuchi Seisakusho Co Ltd | MICRODIAPHRAGM PUMP |
EP2724061B1 (de) * | 2011-12-02 | 2014-12-31 | Festo AG & Co. KG | Ventilanordnung |
CN107023455A (zh) * | 2012-04-19 | 2017-08-08 | 株式会社村田制作所 | 阀、流体控制装置 |
AU2014205179B2 (en) * | 2013-01-11 | 2018-08-09 | Minipumps, Llc | Diaphragm check valves and methods of manufacture thereof |
CN103486010A (zh) * | 2013-09-06 | 2014-01-01 | 东莞市爱迪机电科技有限公司 | 一种电磁隔膜定量泵 |
JP6981762B2 (ja) * | 2016-08-08 | 2021-12-17 | 株式会社エンプラス | 流体取扱装置および流体取扱方法 |
CN109707875B (zh) * | 2017-10-26 | 2024-02-06 | 厦门三登塑胶工业有限公司 | 翻板式逆止阀 |
CN113944615A (zh) * | 2021-10-26 | 2022-01-18 | 上海应用技术大学 | 一种一体化微压电液体泵送装置及其制造和驱动方法 |
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JPS5349315A (en) * | 1976-10-18 | 1978-05-04 | Enomoto Maikuroponpu Seisakush | Diaphragm pumps |
JPS592360Y2 (ja) * | 1978-03-02 | 1984-01-23 | テイケイ気化器株式会社 | 舌状チェック弁装置 |
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US5245956A (en) * | 1993-01-11 | 1993-09-21 | Barry Davidson | Reed valve assembly |
DE19720482C5 (de) * | 1997-05-16 | 2006-01-26 | INSTITUT FüR MIKROTECHNIK MAINZ GMBH | Mikromembranpumpe |
US6139291A (en) * | 1999-03-23 | 2000-10-31 | Copeland Corporation | Scroll machine with discharge valve |
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2004
- 2004-08-30 JP JP2004250744A patent/JP2006063960A/ja active Pending
-
2005
- 2005-08-17 US US11/659,879 patent/US20070248478A1/en not_active Abandoned
- 2005-08-17 WO PCT/JP2005/014978 patent/WO2006025214A1/ja active Application Filing
- 2005-08-17 CN CNA2005800266926A patent/CN101018965A/zh active Pending
- 2005-08-17 EP EP20050772505 patent/EP1785652A1/en not_active Withdrawn
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JPS52106810U (ja) * | 1976-02-12 | 1977-08-15 | ||
JPS5349315A (en) * | 1976-10-18 | 1978-05-04 | Enomoto Maikuroponpu Seisakush | Diaphragm pumps |
JPS592360Y2 (ja) * | 1978-03-02 | 1984-01-23 | テイケイ気化器株式会社 | 舌状チェック弁装置 |
JPS5987286A (ja) * | 1982-11-11 | 1984-05-19 | Ricoh Co Ltd | 電歪子ポンプ |
JPS59200080A (ja) * | 1983-04-25 | 1984-11-13 | Ricoh Co Ltd | 液体ポンプ |
JPH0472479A (ja) | 1990-05-30 | 1992-03-06 | Mitsubishi Kasei Corp | 圧電振動子ポンプ用逆止弁 |
JP2003225898A (ja) * | 2002-02-06 | 2003-08-12 | Fuji Electric Co Ltd | 多層基板型マイクロ構造物の製造方法及びマイクロポンプ |
JP2004092588A (ja) * | 2002-09-03 | 2004-03-25 | Alps Electric Co Ltd | ポンプ |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012029902A (ja) * | 2010-07-30 | 2012-02-16 | Terumo Corp | コンプレッサおよび酸素濃縮装置 |
JP2012031793A (ja) * | 2010-07-30 | 2012-02-16 | Terumo Corp | コンプレッサおよび酸素濃縮装置 |
Also Published As
Publication number | Publication date |
---|---|
JP2006063960A (ja) | 2006-03-09 |
EP1785652A1 (en) | 2007-05-16 |
US20070248478A1 (en) | 2007-10-25 |
CN101018965A (zh) | 2007-08-15 |
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