WO2006001328A1 - カーボン製筒状容器 - Google Patents
カーボン製筒状容器 Download PDFInfo
- Publication number
- WO2006001328A1 WO2006001328A1 PCT/JP2005/011518 JP2005011518W WO2006001328A1 WO 2006001328 A1 WO2006001328 A1 WO 2006001328A1 JP 2005011518 W JP2005011518 W JP 2005011518W WO 2006001328 A1 WO2006001328 A1 WO 2006001328A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- carbon
- silicon
- cylindrical container
- cylindrical
- container
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/002—Crucibles or containers for supporting the melt
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
- B22D41/00—Casting melt-holding vessels, e.g. ladles, tundishes, cups or the like
- B22D41/12—Travelling ladles or similar containers; Cars for ladles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
- B22D41/00—Casting melt-holding vessels, e.g. ladles, tundishes, cups or the like
- B22D41/50—Pouring-nozzles
- B22D41/502—Connection arrangements; Sealing means therefor
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/52—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
- F27D1/04—Casings; Linings; Walls; Roofs characterised by the form, e.g. shape of the bricks or blocks used
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/94—Products characterised by their shape
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
- C04B2235/963—Surface properties, e.g. surface roughness
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
Definitions
- the present invention is a novel carbon cylindrical container comprising a plurality of carbon molded bodies whose inner surface is in contact with a silicon melt, and is suitable for a silicon precipitation reaction by a decomposition and reduction reaction of silanes.
- the present invention relates to a carbon cylindrical container used.
- containers that handle silicon melt include containers used for manufacturing silicon ingots and wafers by melting silicon, and trichlorosilane (SiHCl, below) on the inner surface of the container.
- Examples thereof include a container in which silicon is deposited by contacting a source gas for con deposition.
- Examples of materials for containers for handling these silicon melts include quartz, ceramics, and carbon. However, in terms of processability, durability, heat resistance, chemical stability, mixing of impurities, etc. Depending on the case, carbon is preferably used.
- silanes and hydrogen are reacted on the inner surface of a cylindrical container (reaction container), and silicon deposited on the inner surface is melted and recovered. Carbon is used as the material of the cylindrical container in contact with the silicon melt (see Patent Document 1).
- the conventional carbon cylindrical container is formed by forming a plurality of cylindrical carbon molded bodies and connecting them in the form of screw joints, or by connecting them using a joined body.
- the intended size was a 'shaped container.
- Patent Document 1 Japanese Patent Laid-Open No. 2002-29726
- Patent Document 2 JP-A-7-257981
- a carbon cylindrical container having a carbon carbide layer as a joint in advance is used as a container whose inner surface is in contact with the silicon melt, for example.
- a reaction vessel for the production of crystalline silicon When used as a reaction vessel for the production of crystalline silicon, cracks occur in the carbon molded body or carbon carbide layer during long-term operation with a heating / cooling operation cycle, or the carbon carbide layer deteriorates during long-term use. The problem was that the silicon melt leaked out of the reaction vessel.
- the reason for the occurrence of this crack is that when the carbonized carbide layer at the joint becomes thick, a large strain is applied to the carbon molded body due to the difference in thermal expansion between the carbon molded body and the carbonized carbide layer. Conceivable.
- the cause of the deterioration of the carbide layer is that the carbide layer formed by the above-mentioned method has a function as a silicon melt leakage prevention layer, but is partially incomplete. It is thought that this is because it has a homogeneous composition and is slightly eluted in the silicon melt.
- an object of the present invention is to prevent leakage of silicon melt in a carbon cylindrical container made of a plurality of carbon molded bodies whose inner surface is in contact with silicon melt.
- a container it is an object of the present invention to provide a carbon cylindrical container that can be used as a reaction container that does not leak silicon melt in the production of silicon that is operated for a long period of time with a temperature increasing / decreasing cycle.
- a carbon cylindrical container constructed in a multistage manner by connecting a plurality of carbon cylindrical members to each other with screw portions provided along the circumference of each end portion,
- the matching cylindrical members each have an annular flat surface extending in the radial direction from the inner peripheral wall force so as to form an annular butting surface on the inner peripheral wall side when connected,
- a carbon cylindrical container characterized in that the sum of the surface roughness (Ra) of each annular plane forming the butted surfaces is 1 to: LOO ⁇ m.
- a carbon cylindrical container according to the present invention is constructed by connecting a plurality of carbon cylindrical members to each other with screw portions provided along the circumference of each end portion, and has an inner peripheral wall.
- the gap of the connecting portion is sealed. Therefore, for example, when the carbon cylindrical container of the present invention is used for silicon production, there is no possibility that the silicon melt enters the inside of the vessel wall and is solidified to break the connecting portion. In addition, since the source gas and silicon melt do not leak through the vessel wall, the periphery of the cylindrical container with high reaction efficiency is not contaminated or damaged. Since the screw part is securely fixed without distortion and does not loosen, the mechanical strength of the connecting part is high. Many By connecting these members, it is possible to obtain a large cylindrical container having a sealing property, reliability and strength comparable to an integrally molded product.
- the carbon cylindrical container of the present invention is one in which the cylindrical container is composed of a plurality of carbon molded bodies, and is particularly preferably used in applications where the inner surface is in contact with the silicon melt.
- examples of the carbon cylindrical container of the present invention include a container that holds a silicon melt, a conduit that transfers the silicon melt, a reaction container for silicon production, and the like.
- the cylindrical container when a carbon cylindrical container is used as a reaction container for silicon production, the cylindrical container reacts with TCS or the like and hydrogen on the inner surface of the cylindrical container. And the inner surface can be heated to a melting point of silicon (1430 ° C.) or higher to melt all or part of the generated silicon.
- the cylindrical container reaction container
- the aspect in which the silicon melt and the inner surface of the cylindrical container are in contact with each other can be obtained by once forming silicon on the surface in a solid state, and then melting and bringing the silicon into contact. It can be melted and brought into contact with the surface at the same time.
- FIG. 1 shows a perspective view of a typical embodiment of the carbon cylindrical container of the present invention. Screw portions are provided at the end portions of the individual cylindrical members, and the cylindrical container 1 is constructed in multiple stages by screwing each other's screw portions between the members.
- FIG. 2 schematically shows a cross section of the connecting portion of the cylindrical members 2 and 3 connected to each other. In the connecting portion, the cylindrical members 2 and 3 are respectively provided with screw portions 4 and 5 along the circumference. Further, the cylindrical members 2 and 3 have annular planes 8 and 9 extending radially from the inner peripheral walls 6 and 7.
- Ra value The sum of the surface roughness (Ra) of the annular planes 8 and 9 (hereinafter referred to as Ra value) is 1 to: LOO ⁇ m, more preferably 1 to 50 ⁇ m.
- Ra value is important when the inner wall of the container comes into contact with the silicon melt, as will be described later. It is measured based on Rai IS B0601.
- the cylindrical container constructed as described above has a gap of a specific size due to the Ra value of the annular flat surfaces 8 and 9 on the inner peripheral wall side of each connecting portion. Moreover, it can be disassembled into individual cylindrical members by loosening the threaded portions. As described below, by incorporating the silicon production reaction into the silicon production apparatus, all such gaps are sealed and the connecting portion is fixed so as not to be separated.
- a raw material gas containing silane is supplied into the cylindrical container, and the cylindrical container is heated to form a silica on the inner peripheral wall of the cylindrical container.
- a con melt is produced.
- carbon on the inner peripheral wall in contact with silicon is carbonized.
- the silicon melt enters the slight gaps existing in each connecting portion of the inner peripheral wall, and carbonizes.
- the volume is approximately doubled. If the Ra value is in the above range, the gaps existing on the inner peripheral wall side of each connecting portion are completely sealed by volume expansion due to carbonization.
- the Ra value is achieved by performing grinding or milling on a predetermined annular plane of each cylindrical member, and further performing polishing if necessary.
- the width in the radial direction of the inner peripheral wall force of the annular planes 8 and 9 satisfying the above Ra value may be lmm or more because it is sealed by carbonization, but is preferably 5 mm or more, more preferably 10 mm or more. It is.
- the diameter of the container can be appropriately selected according to the scale of the production apparatus without particular limitation.
- the length of the container can be set to an arbitrary length by connecting a number of members.
- the shape of the container can be a shape having a constant diameter at any position, or a shape having a different diameter depending on the part.
- a multi-threaded screw such as a single thread or a double thread is used as the threaded portion provided in the connecting portion.
- the number of threads is shown in FIGS. 2 and 3 as three threads, but is not limited to this, and is appropriately selected in consideration of the size and thickness of the container, the strength of the carbon used, and the like.
- the material of the carbon forming the container is not particularly limited, but a carbon having an isotropic material structure in which the amount of change in the coefficient of thermal expansion due to the measurement direction is small is preferable because it has a connecting portion structure.
- the carbon cylindrical container of the present invention has an annular gap expanding portion at an outer peripheral end portion of an annular flat surface that forms the butting surface 10, and the carbon material 11 is interposed in the gap expanding portion.
- the outer peripheral end of the butt surface 10 is sealed with the carbon material 11.
- the carbon material 11 prevents leakage. That is, according to the confirmation of the present inventors, when the carbon material 11 comes into contact with the silicon melt and a part thereof is carbonized, the volume expansion occurs as described above, and the gap expanding portion is formed. Even when the melt arrived, it was found that the carbon material 11 effectively exerted the sealing effect.
- the gap enlargement portion is formed by providing a step at the outer circumferential end of the annular plane or by providing a wave-like deformation portion.
- FIG. 4 shows an example in which a gap is formed by providing a notch by forming a step at the end of the annular plane of the upper cylindrical member 2.
- the notch may be formed in both the cylindrical members 2 and 3 (FIG. 5).
- the cross section of the gap enlargement The shape is not particularly limited, and it may be a rectangular parallelepiped shape or a mountain shape.
- the upper cylindrical member 2 may be provided with a mountain-shaped notch and the lower cylindrical member 3 may be formed with a mountain-shaped convex portion.
- the upper and lower surfaces of the gap enlarged portion may be processed into a wave shape (see FIG. 7).
- the volume of the gap enlarged portion is preferably slightly smaller than the volume of the carbon material under normal pressure. Since the carbon material is compressed by interposing the carbon material in the gap enlarged portion and joining the cylindrical members with screws, the carbon material is filled in the gap enlarged portion without a gap. As a result, the sealing effect by the carbon material is further improved.
- the density of the carbon material after the carbon material is interposed in the gap enlarged portion and the cylindrical members are joined with screws is preferably 1. OgZcm 3 or more.
- the density of the carbon material is less than 1. OgZ cm 3
- the carbon material has a density of 1. OgZcm 3 or more
- the carbide layer formed by contact with the silicon melt has a strong ability to prevent the penetration of the carbon carbide into the silicon melt. It is possible to obtain a strong carbide layer that is also suppressed.
- the base layer can be formed, and the durability can be further improved.
- the upper limit of the density of the carbon material is the compressibility of the carbon material, the surface state of the butt joint portion of the carbon molded body, the amount of the silicon melt contacting the carbon material, the size of the carbon molded body 'shape
- it is preferably 2. Og / cm 3 or less in industrial silicon production.
- the present invention in order to interpose a carbon material having a density of 1. Og / cm 3 or more in the gap between the butted parts of the carbon molded bodies, carbon powder having a certain particle size is sprayed, and the carbon material is sprayed.
- the layered structure of graphite used as packing and gasket material It is preferable to use a flat plate-shaped molded product or a molded product obtained by compression-molding carbon powder.
- the carbon material molded product has a compressibility interposed in the gap, the carbon material adheres to the upper and lower surfaces of the gap enlarged portion, and the gap can be effectively closed.
- the density of the carbon material in the joint is calculated from the weight of the carbon material and the volume of the gap enlarged portion.
- the size of the carbon material that is, the thickness a and the width b of the carbon material is substantially equal to the size of the gap enlarged portion. That is, the thickness a of the carbon material is not particularly limited, and may be set as appropriate depending on the material used, the size, the strength, the shape of the gap enlarged portion, the amount of the silicon melt that comes into contact, and the like. If the thickness becomes too large, cracks are likely to occur due to the difference in thermal expansion between the carbon material and the carbon carbide layer to be generated. Therefore, it is preferable to make the thickness as thin as possible. In an industrial silicon production reactor, the thickness a is preferably 1.0 ⁇ m to 1000 ⁇ m, more preferably 1.0 ⁇ m to 100 ⁇ m.
- the width b of the carbon material is not particularly limited, and may be appropriately set depending on the material, size, strength, shape of the butt portion, amount of the silicon melt to be contacted, etc. . In particular, in an industrial reactor for silicon production, about 5.0 to 30.Omm is preferable.
- the carbon cylindrical container according to the present invention is constructed by connecting a plurality of carbon cylindrical members, and the gap between the connecting portions is sealed on the inner peripheral wall. Therefore, for example, when the carbon cylindrical container of the present invention is used for silicon production, there is no possibility that the silicon melt enters the inside of the vessel wall and solidifies to break the connecting portion. In addition, since the source gas and the silicon melt do not leak through the vessel wall, the periphery of the cylindrical container with high reaction efficiency is not contaminated or damaged. Since the screw part is securely fixed without distortion and does not loosen, the mechanical strength of the connecting part is high. By connecting a large number of members, it is possible to obtain a large cylindrical container having a hermeticity, reliability and strength comparable to an integrally molded product.
- the cylindrical container is made of isotropic carbon and has an outer diameter of 75mm, an inner diameter of 45mm, and a length of 1000m.
- a cylindrical container with a cylindrical shape of m, divided into 5 in the length direction, and having a screw structure at the end was joined.
- Table 1 shows the surface roughness and width of the annular flat surface on the inner wall facing surface.
- the cylindrical container joined in this manner is attached to the polycrystalline silicon manufacturing apparatus, and a mixed gas of trichlorosilane 1 Okg / H and hydrogen 40Nm 3 / H is circulated inside the cylindrical container, and the cylindrical container is formed by high-frequency heating.
- the container was heated to 1450 ° C or higher, and polycrystalline silicon was deposited in a molten state for 100 hours and continuously dropped from the bottom of the cylindrical container to obtain silicon. After the reaction, the cylindrical container was taken out from the manufacturing apparatus and the state of the cylindrical container was confirmed.
- FIG. 1 is a perspective view showing a typical embodiment of a cylindrical container of the present invention.
- FIG. 2 is a schematic diagram of a connecting portion of cylindrical members constituting the cylindrical container of the present invention.
- FIG. 3 is a schematic diagram of a connecting portion of cylindrical members constituting the cylindrical container of the present invention.
- FIG. 4 Shows a state in which a carbon material is interposed at the outer circumferential end of the butt face.
- FIG. 5 shows a state in which a carbon material is interposed at the outer peripheral end of the butted surface.
- FIG. 6 Shows a state in which a carbon material is interposed at the outer peripheral end of the butted surface.
- FIG. 7 shows a state in which a carbon material is interposed at the outer peripheral end of the butted surface.
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- General Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Crystallography & Structural Chemistry (AREA)
- Structural Engineering (AREA)
- Silicon Compounds (AREA)
- Ceramic Products (AREA)
- Casting Support Devices, Ladles, And Melt Control Thereby (AREA)
- Rigid Containers With Two Or More Constituent Elements (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
Description
Claims
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006528580A JP4762900B2 (ja) | 2004-06-23 | 2005-06-23 | カーボン製筒状容器 |
US11/630,663 US20090311450A1 (en) | 2004-06-23 | 2005-06-23 | Tubular container made of carbon |
CA2572194A CA2572194C (en) | 2004-06-23 | 2005-06-23 | Carbon columnar container |
AU2005257313A AU2005257313B2 (en) | 2004-06-23 | 2005-06-23 | Tubular container made of carbon |
EP05753511A EP1772430A4 (en) | 2004-06-23 | 2005-06-23 | TUBULAR CONTAINER OF CARBON |
NO20070367A NO20070367L (no) | 2004-06-23 | 2007-01-23 | Rorformet beholder laget i karbon |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004-185436 | 2004-06-23 | ||
JP2004185436 | 2004-06-23 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2006001328A1 true WO2006001328A1 (ja) | 2006-01-05 |
Family
ID=35781784
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2005/011518 WO2006001328A1 (ja) | 2004-06-23 | 2005-06-23 | カーボン製筒状容器 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20090311450A1 (ja) |
EP (1) | EP1772430A4 (ja) |
JP (1) | JP4762900B2 (ja) |
AU (1) | AU2005257313B2 (ja) |
CA (1) | CA2572194C (ja) |
NO (1) | NO20070367L (ja) |
WO (1) | WO2006001328A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5653857B2 (ja) * | 2011-07-25 | 2015-01-14 | 株式会社トクヤマ | ポリシリコン受け容器 |
US10407310B2 (en) | 2017-01-26 | 2019-09-10 | Rec Silicon Inc | System for reducing agglomeration during annealing of flowable, finely divided solids |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03279274A (ja) * | 1990-03-28 | 1991-12-10 | Ngk Insulators Ltd | セラミック接合体 |
JP2002029726A (ja) * | 2000-05-11 | 2002-01-29 | Tokuyama Corp | シリコン生成用反応装置 |
JP2003054933A (ja) * | 2001-06-05 | 2003-02-26 | Tokuyama Corp | シリコン生成用反応装置 |
JP2003192461A (ja) * | 2001-12-26 | 2003-07-09 | Kyocera Corp | 炭化珪素接合体及びその接合方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA677473A (en) * | 1964-01-07 | A. Parken Edward | Joint for carbon tubes | |
US2894776A (en) * | 1954-08-12 | 1959-07-14 | Union Carbide Corp | Electrode joint |
US3822902A (en) * | 1972-12-13 | 1974-07-09 | Exxon Production Research Co | Connection for pipe joints |
US4332295A (en) * | 1980-05-19 | 1982-06-01 | Hague International | Composite ceramic heat exchange tube |
US4705307A (en) * | 1984-09-21 | 1987-11-10 | James B. N. Morris | Tubular goods joint |
DE3904200A1 (de) * | 1989-02-13 | 1990-08-16 | Kempchen & Co Gmbh | Dichtungsanordnung, insbesondere hochdruck-dichtungsanordnung |
-
2005
- 2005-06-23 CA CA2572194A patent/CA2572194C/en not_active Expired - Fee Related
- 2005-06-23 AU AU2005257313A patent/AU2005257313B2/en not_active Ceased
- 2005-06-23 JP JP2006528580A patent/JP4762900B2/ja not_active Expired - Fee Related
- 2005-06-23 EP EP05753511A patent/EP1772430A4/en not_active Withdrawn
- 2005-06-23 WO PCT/JP2005/011518 patent/WO2006001328A1/ja active Application Filing
- 2005-06-23 US US11/630,663 patent/US20090311450A1/en not_active Abandoned
-
2007
- 2007-01-23 NO NO20070367A patent/NO20070367L/no not_active Application Discontinuation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03279274A (ja) * | 1990-03-28 | 1991-12-10 | Ngk Insulators Ltd | セラミック接合体 |
JP2002029726A (ja) * | 2000-05-11 | 2002-01-29 | Tokuyama Corp | シリコン生成用反応装置 |
JP2003054933A (ja) * | 2001-06-05 | 2003-02-26 | Tokuyama Corp | シリコン生成用反応装置 |
JP2003192461A (ja) * | 2001-12-26 | 2003-07-09 | Kyocera Corp | 炭化珪素接合体及びその接合方法 |
Also Published As
Publication number | Publication date |
---|---|
JP4762900B2 (ja) | 2011-08-31 |
CA2572194A1 (en) | 2006-01-05 |
US20090311450A1 (en) | 2009-12-17 |
CA2572194C (en) | 2010-05-11 |
AU2005257313A1 (en) | 2006-01-05 |
AU2005257313B2 (en) | 2009-05-21 |
NO20070367L (no) | 2007-03-22 |
JPWO2006001328A1 (ja) | 2008-04-17 |
EP1772430A1 (en) | 2007-04-11 |
EP1772430A4 (en) | 2011-11-02 |
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