WO2005098958A1 - Herstellungsverfahren für ein pcm-speicherelement und entsprechendes pcm-speicherelement - Google Patents
Herstellungsverfahren für ein pcm-speicherelement und entsprechendes pcm-speicherelement Download PDFInfo
- Publication number
- WO2005098958A1 WO2005098958A1 PCT/EP2005/003069 EP2005003069W WO2005098958A1 WO 2005098958 A1 WO2005098958 A1 WO 2005098958A1 EP 2005003069 W EP2005003069 W EP 2005003069W WO 2005098958 A1 WO2005098958 A1 WO 2005098958A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- layer
- hole
- strip
- pcm
- providing
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- 239000000463 material Substances 0.000 claims abstract description 43
- 238000000034 method Methods 0.000 claims abstract description 34
- 238000009413 insulation Methods 0.000 claims abstract description 27
- 239000011810 insulating material Substances 0.000 claims abstract 3
- 230000000873 masking effect Effects 0.000 claims abstract 2
- 125000006850 spacer group Chemical group 0.000 claims description 35
- 238000005530 etching Methods 0.000 claims description 15
- 239000012774 insulation material Substances 0.000 claims description 15
- 239000004020 conductor Substances 0.000 claims description 7
- 238000000059 patterning Methods 0.000 claims description 2
- 238000011161 development Methods 0.000 description 12
- 230000018109 developmental process Effects 0.000 description 12
- 239000002184 metal Substances 0.000 description 11
- 230000008569 process Effects 0.000 description 11
- 229920002120 photoresistant polymer Polymers 0.000 description 9
- 238000001020 plasma etching Methods 0.000 description 6
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 5
- 229920005591 polysilicon Polymers 0.000 description 5
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 230000020169 heat generation Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000009477 glass transition Effects 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 150000004770 chalcogenides Chemical class 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/80—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/061—Shaping switching materials
- H10N70/068—Shaping switching materials by processes specially adapted for achieving sub-lithographic dimensions, e.g. using spacers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/231—Multistable switching devices, e.g. memristors based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/821—Device geometry
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/821—Device geometry
- H10N70/826—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/841—Electrodes
- H10N70/8413—Electrodes adapted for resistive heating
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/882—Compounds of sulfur, selenium or tellurium, e.g. chalcogenides
- H10N70/8828—Tellurides, e.g. GeSbTe
Definitions
- the present invention relates to a manufacturing method for a PCM memory element and a corresponding PCM memory element.
- PCM phase change memory
- US Pat. No. 5, 166, 758 in which electrical energy is used to convert a PCM material, typically chalcogenide alloys (eg Ge 2 Sb 2 Te 5 ) to convert between the crystalline phase (high conductivity, logic "1") and the amorphous phase (low conductivity, logic "0").
- chalcogenide alloys eg Ge 2 Sb 2 Te 5
- the conversion from the amorphous phase to the crystalline phase requires a heat pulse with a temperature higher than the glass transition temperature but lower than the melting temperature, whereas the conversion from the crystalline phase to the amorphous phase requires a heat pulse with a temperature higher than the melting temperature followed by rapid cooling required.
- the melting temperature is 600 ° C and the glass transition temperature is 300 ° C.
- the crystallization time is typically 50 ns.
- PCM phase change memory
- PCM memory elements have a whole series of advantageous properties, for example non-volatility, direct rewritability, non-destructive read ability, fast writing / erasing / reading, long service life (10 12 up to 10 13 read / write cycles), high packing density, low power consumption and easy integration with standard semiconductor processes.
- SRAM static random access memory
- EEPROM electrically erasable read memory
- ROM read-only memory
- One of the main problems with the known PCM memory elements is the relatively high heat generation during the programming and erasing operations.
- a reduction in the contacted electrode area can be used to increase the current density and thus to lower the energy consumption and the associated heat generation.
- the idea underlying the present invention is to use a sub-lithographic process to reduce the contact area of the PCM memory element.
- the invention provides a liner mask technique for designing the upper electrode.
- the first and second line devices are parallel strips.
- two segments of the mask strip are provided, the two segments having an intermediate space in the center of the hole, so that they each lie only over a strip-shaped resistance element.
- the strip-shaped resistance elements are provided on the wall of the hole by the following steps: providing a filling of the resistance material in the hole; Etching back of the filling; Providing a circumferential spacer (25) in the hole above the etched-back filling; Etching the filling using the spacer as a mask; Removing the spacer; and photolithographically patterning the etched fill into the stripe-shaped resistance elements.
- the strip-shaped resistance elements are provided on the wall of the hole by the following steps: providing a liner layer made of the resistance material in the hole and on the surrounding surface of the insulation material; Performing a space etch to remove the liner layer from the bottom of the hole and from the surrounding surface of the insulation material; and photolithographically structuring the etched liner layer into the strip-shaped resistance elements.
- the strip-shaped resistance elements and the filling are made from the Insulation material etched back in the hole, the layer of PCM material being provided as a cover in the hole.
- the strip-shaped resistance elements are etched back in the hole by a first depth and the filling made of the insulation material by a second depth which is less than the first depth, the layer of the PCM material being more circumferential than above the strip-shaped resistance elements Spacer is provided in the hole.
- the sublithographic mask strips are formed by the following steps: providing an auxiliary layer on the conductive layer; photolithographic structuring of the auxiliary layer into blocks, the edges of which define the mask strips; Providing a liner layer from the spacer material; Performing a space etching of the liner layer to form the mask strips; and removing the auxiliary layer.
- the upper electrodes are electrically connected to the further line device by the following steps: providing a liner layer and an insulation layer over the structure; Providing one or two contact plugs for contacting the top electrodes in the liner layer and the insulation layer; and providing a trace on the insulation layer for contacting the one or two contact plugs.
- a plurality of pairs of first and second line devices are provided and a plurality of holes per pair are also provided in the insulation layer, each of which exposes the first and second parallel line devices in sections.
- FIG. 1a, b to 10a, b show schematic representations of successive process stages of a production process of a PCM memory element as the first embodiment of the present invention, in each case in a top view perspective and cross-sectional perspective;
- FIG. 11a, b show schematic representations of a production method of a PCM memory element as a second embodiment of the present invention, in each case in a top view perspective and a cross-sectional perspective;
- FIG. 14a, b to 18a, b show schematic representations of a production method of a PCM memory element as the fourth embodiment of the present invention, in each case from a top perspective and cross-sectional perspective.
- reference numeral 10 denotes an insulation layer, for example a glass or a low-k material, in which two metallic conductor tracks Ma and Mb are embedded.
- Reference numerals 5a, 5b denote two rectangular holes which are provided next to one another in the insulation layer 10 and partially expose the parallel metal conductor tracks Ma, Mb in each of the holes 5a, 5b, as shown in FIG. 1b. These holes 5a, 5b can be formed by a conventional reactive ion etching step which stops on the metal conductor tracks Ma, Mb.
- the holes 5a, 5b are filled with a resistance material, for example TiN or WN.
- the resistance material filling is designated by reference number 20.
- the resistive material filling is then planarized by a CMP step and sunk into the holes 5a, 5b by a reactive ion etching process.
- a spacer layer made of silicon nitride or TEOS with a thickness of typically 40 nm is deposited over the entire structure and spacer 25 with a width of typically 30 nm is formed therefrom in the upper region of the holes 5a, 5b by a spacer etching process.
- the spacers run along the entire inner upper circumference of the holes 5a, 5b, as can be clearly seen in FIG. 2b.
- the spacers 25 are selectively removed from the resulting structure by an etching step.
- a photoresist mask (not shown) is then provided on the top of the insulation layer 10, by means of which the resistive material filling 20 is cut through in the holes 5a, 5b, so that U-shaped thin strips in the holes 5a, 5b on the opposite left and right wall halves remain, as can be seen in Fig. 4b.
- the lower electrodes of two PCM memory cells are finished in the same hole 5a or 5b.
- the photoresist mask is then removed from the surface of the insulation layer 10.
- TEOS insulation material is deposited over the resulting structure and polished back, so that an insulation material filling 30 remains in the holes 5a, 5b.
- back polishing which is carried out by a CMP step, a section of the surface of the insulation layer 10 is also removed, which, according to FIG. Thus, the top of the remaining half of the resistive fill 20 is ultimately in one
- the remaining halves of the resistance material filling 20 are countersunk in the holes 5a, 5b and likewise the insulation material filling 30 is countersunk by the same depth.
- a PCM material is then deposited over the resulting structure, for example by sputtering, here Ge 2 Sb 2 Ti 5 , and polished back in a further CMP step, which leads to the state shown in FIGS. 6a, 6b according to which the PCM layer 35 likewise forms a cover for the holes 5a, 5b.
- a conductive layer 40 is deposited over the entire structure and an auxiliary layer 45 made of polysilicon over the conductive layer 40.
- the polysilicon auxiliary layer 45 is then structured in a strip shape by means of a photoresist mask (not shown).
- the structuring takes place perpendicular to the direction of the metal strips Ma, Mb and in such a way that the holes 5a, 5b are approximately half covered.
- a liner layer made of TEOS is then deposited over the structured auxiliary layer 45 and subjected to a spacer etching, so that spacer strips above the holes 5a, 5b run essentially perpendicular to the metal interconnects 5a, 5b.
- This process step has the essential advantage that it creates sublithographic spacer strips 50, the size of which can be made significantly smaller than the lithographic resolution.
- the thickness of the TEOS layer is usually 40 nm.
- the polysilicon auxiliary layer 45 is removed and then a photoresist mask 55 is placed over the resulting one Structure formed, which has strips that run over the metal interconnects Ma, Mb.
- the spacer strips 50 are then cut open using the photoresist mask 55 and only remain below the photoresist mask 55. Subsequently, with reference to FIGS. 9a, 9b, the photoresist mask 55 is removed, followed by reactive ion etching of the layer 40 and the underlying PCM layer 35, the remaining segments of the spacer strip 50 serving as an etching mask.
- FIGS. 9a, 9b This structure shows the
- the advantage is that only a small volume of the PCM layer 35 is provided between the resistance material filling halves 20 functioning as the lower electrode and the strips 40 functioning as the upper electrode, which volume flows through later during operation.
- 10a, 10b show the final process steps for contacting the strips of layer 40, which act as the upper electrode.
- a silicon nitride liner layer 60 with a thickness of approximately 30 nm is deposited over the layer as an etching stop, and a further insulation layer 75 is then provided thereon.
- Contact plugs 70 are formed in the insulation layer 75 by a conventional contact hole technique.
- metallic connection strips 80 are provided over the resulting structure for connecting the contact plugs 70, which leads to the structure shown in FIGS. 10a, 10b.
- FIGS. 10a, 10b Particularly emphasized with an "x" in FIGS. 10a, 10b is the small volume of the PCM layer 35, which is converted to crystalline / amorphous during operation between the phases. Due to the small sublithographic design of this volume As a result of the stripes 40 of the upper electrodes structured by said liner technology, a lower current is sufficient to nevertheless achieve a sufficiently high current density which is required for phase transformation of the PCM material. The heat development takes place only in a very small volume.
- FIG. 11a, b show schematic representations of a production method of a PCM memory element as a second embodiment of the present invention, in each case in a top view perspective and a cross-sectional perspective.
- the strips 40 of the upper electrodes are connected in different ways.
- a contact plug 70 ′ is formed in the middle above the holes 5a, 5b in such a way that opposite strips 40 are contacted simultaneously. This can be advantageous when arranging the memory elements in a cell array.
- this solution is associated with higher heat generation, since a larger volume of the strips of the PCM material 35 contributes to the phase change.
- FIGS. 12a, b to 13a, b show schematic representations of a production method of a PCM memory element as a third embodiment of the present invention, in each case from a top view perspective and a cross-sectional perspective.
- the halves of the resistive material filling 20, which serve as lower electrodes, are manufactured in different ways.
- the state according to FIGS. 1 a, b is assumed, after which no resistance material filling 20 is subsequently provided, but a liner layer 20 ′ is deposited from the resistance material by an ALD or CVD method. This is then followed by a selective Structured spacer etching in such a way that it remains only on the walls of the holes 5a, 5b, which leads to the process state shown in FIGS. 12a, 12b.
- a lithography step corresponding to the lithography step explained in connection with FIGS. 4a, 4b is then carried out in order to cut through the liner layer 20 'remaining on the walls of the holes 5a, 5b from the resistance material and to form the already explained U-shaped halves on the opposite left and right walls of the holes 5a, 5b.
- an insulation material filling made of Ti-OS is deposited and polished back, which leads to the process state shown in FIGS. 13a, 13b. The method is then continued, as explained in connection with the above first embodiment in FIGS. 6a, 6b to 10a, 10b.
- FIG. 14a, b to 18a, b show schematic representations of a production method of a PCM memory element as the fourth embodiment of the present invention, in each case from a top perspective and cross-sectional perspective.
- the initial state is the state shown in FIGS. 4a, 4b after the resistance material filling 20 has been severed on the walls of the holes 5a, 5b.
- the resistance material filling 20 ′′ is first etched back by a first depth and the insulation material filling 30 is etched back by a second depth that is less than the first depth.
- a PCM layer 35 is then deposited over the resulting structure and subjected to a spacer etching, which leads to the process state shown in FIGS. 14a, 14b.
- auxiliary layer 45 made of polysilicon is deposited thereon and above.
- the polysilicon is then structured.
- a photoresist pocket 55 is then formed on the resulting structure and the spacer strips 50 are thus divided into segments.
- the layer 40 and the underlying PCM layer 35 are etched using the spacer strip segments as a mask.
- the spacer strip segments 50 have been removed, the structure shown in FIGS. 17a, 17b is obtained, which, in analogy to the first embodiment, has sublithographic conductive strips 40 as upper electrodes.
- the volume of the PCM layer 35, which contributes to the phase change, is very small, so that there is only an extremely low energy requirement for the phase conversion.
- FIGS. 18a, 18b The type of contacting shown in FIGS. 18a, 18b
- Strip 40 of the upper electrodes corresponds to the contacting explained with reference to FIGS. 10a, 10b.
- the selection of the layer materials or filler materials is only exemplary and can be varied in many ways.
- the PCM memory element has been provided between two adjacent metal levels, the present invention is not limited to this, and in general the PCM memory elements according to the invention can be arranged between any conductive layers, for example between the substrate and an overlying metal level.
- the line devices can also be designed not only as conductor tracks, but also, for example, as diffusion regions or the like
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Memories (AREA)
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP05716312A EP1730782A1 (de) | 2004-03-31 | 2005-03-22 | Herstellungsverfahren für ein pcm-speicherelement und entsprechendes pcm- speicherelement |
US11/522,225 US20070075434A1 (en) | 2004-03-31 | 2006-09-15 | Method for producing a PCM memory element and corresponding PCM memory element |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102004015899.1 | 2004-03-31 | ||
DE102004015899A DE102004015899B4 (de) | 2004-03-31 | 2004-03-31 | Herstellungsverfahren für ein PCM-Speicherelement |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/522,225 Continuation US20070075434A1 (en) | 2004-03-31 | 2006-09-15 | Method for producing a PCM memory element and corresponding PCM memory element |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2005098958A1 true WO2005098958A1 (de) | 2005-10-20 |
Family
ID=34963404
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2005/003069 WO2005098958A1 (de) | 2004-03-31 | 2005-03-22 | Herstellungsverfahren für ein pcm-speicherelement und entsprechendes pcm-speicherelement |
Country Status (4)
Country | Link |
---|---|
US (1) | US20070075434A1 (de) |
EP (1) | EP1730782A1 (de) |
DE (1) | DE102004015899B4 (de) |
WO (1) | WO2005098958A1 (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005001902B4 (de) * | 2005-01-14 | 2009-07-02 | Qimonda Ag | Verfahren zur Herstellung einer sublithographischen Kontaktstruktur in einer Speicherzelle |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000057498A1 (en) * | 1999-03-25 | 2000-09-28 | Energy Conversion Devices, Inc. | Electrically programmable memory element with improved contacts |
EP1339111A1 (de) * | 2002-02-20 | 2003-08-27 | STMicroelectronics S.r.l. | Kontaktstruktur, Phasenwechsel-Speicherzelle und deren Herstellungsverfahren mit Elimination von Doppelkontakten |
US6646297B2 (en) * | 2000-12-26 | 2003-11-11 | Ovonyx, Inc. | Lower electrode isolation in a double-wide trench |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5166758A (en) * | 1991-01-18 | 1992-11-24 | Energy Conversion Devices, Inc. | Electrically erasable phase change memory |
US20030075778A1 (en) * | 1997-10-01 | 2003-04-24 | Patrick Klersy | Programmable resistance memory element and method for making same |
US6589714B2 (en) * | 2001-06-26 | 2003-07-08 | Ovonyx, Inc. | Method for making programmable resistance memory element using silylated photoresist |
US6733956B2 (en) * | 2001-06-26 | 2004-05-11 | Ovonyx, Inc. | Method for making programmable resistance memory element |
-
2004
- 2004-03-31 DE DE102004015899A patent/DE102004015899B4/de not_active Expired - Fee Related
-
2005
- 2005-03-22 WO PCT/EP2005/003069 patent/WO2005098958A1/de not_active Application Discontinuation
- 2005-03-22 EP EP05716312A patent/EP1730782A1/de not_active Withdrawn
-
2006
- 2006-09-15 US US11/522,225 patent/US20070075434A1/en not_active Abandoned
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000057498A1 (en) * | 1999-03-25 | 2000-09-28 | Energy Conversion Devices, Inc. | Electrically programmable memory element with improved contacts |
US6646297B2 (en) * | 2000-12-26 | 2003-11-11 | Ovonyx, Inc. | Lower electrode isolation in a double-wide trench |
EP1339111A1 (de) * | 2002-02-20 | 2003-08-27 | STMicroelectronics S.r.l. | Kontaktstruktur, Phasenwechsel-Speicherzelle und deren Herstellungsverfahren mit Elimination von Doppelkontakten |
Also Published As
Publication number | Publication date |
---|---|
EP1730782A1 (de) | 2006-12-13 |
DE102004015899B4 (de) | 2009-01-02 |
DE102004015899A1 (de) | 2005-10-20 |
US20070075434A1 (en) | 2007-04-05 |
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