WO2005040930A1 - 現像装置、現像方法、及び現像液循環方法 - Google Patents
現像装置、現像方法、及び現像液循環方法 Download PDFInfo
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- WO2005040930A1 WO2005040930A1 PCT/JP2004/015920 JP2004015920W WO2005040930A1 WO 2005040930 A1 WO2005040930 A1 WO 2005040930A1 JP 2004015920 W JP2004015920 W JP 2004015920W WO 2005040930 A1 WO2005040930 A1 WO 2005040930A1
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- Prior art keywords
- developing
- filtrate
- ultrafiltration
- tank
- developer
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- 238000000034 method Methods 0.000 title claims description 62
- 238000011161 development Methods 0.000 title abstract description 22
- 238000000108 ultra-filtration Methods 0.000 claims abstract description 181
- 239000000706 filtrate Substances 0.000 claims abstract description 117
- 239000007788 liquid Substances 0.000 claims abstract description 88
- 238000011001 backwashing Methods 0.000 claims description 50
- 239000012141 concentrate Substances 0.000 claims description 45
- 230000008569 process Effects 0.000 claims description 25
- 230000002441 reversible effect Effects 0.000 claims description 18
- 238000004140 cleaning Methods 0.000 claims description 17
- 238000001914 filtration Methods 0.000 claims description 13
- 230000007246 mechanism Effects 0.000 claims description 13
- 230000035699 permeability Effects 0.000 claims description 9
- 238000005406 washing Methods 0.000 claims description 6
- 239000002245 particle Substances 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims description 2
- 238000011144 upstream manufacturing Methods 0.000 claims description 2
- 238000011109 contamination Methods 0.000 description 18
- 230000018109 developmental process Effects 0.000 description 17
- 230000000694 effects Effects 0.000 description 10
- 230000002829 reductive effect Effects 0.000 description 10
- 239000000356 contaminant Substances 0.000 description 8
- 239000000047 product Substances 0.000 description 8
- 239000000758 substrate Substances 0.000 description 7
- 230000007423 decrease Effects 0.000 description 6
- 238000012423 maintenance Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000003860 storage Methods 0.000 description 5
- 230000000737 periodic effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000002699 waste material Substances 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000012510 hollow fiber Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000003504 photosensitizing agent Substances 0.000 description 2
- 239000000049 pigment Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000001172 regenerating effect Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 230000001010 compromised effect Effects 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000001471 micro-filtration Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/14—Ultrafiltration; Microfiltration
- B01D61/145—Ultrafiltration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/14—Ultrafiltration; Microfiltration
- B01D61/145—Ultrafiltration
- B01D61/146—Ultrafiltration comprising multiple ultrafiltration steps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D65/00—Accessories or auxiliary operations, in general, for separation processes or apparatus using semi-permeable membranes
- B01D65/08—Prevention of membrane fouling or of concentration polarisation
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
- G03F7/3042—Imagewise removal using liquid means from printing plates transported horizontally through the processing stations
- G03F7/3071—Process control means, e.g. for replenishing
Definitions
- the present invention relates to a developing device, a developing method, and a developer circulating method, and more particularly, to development when forming a colored pixel in manufacturing a color filter.
- a color filter used for a liquid crystal display or the like is an optical element having a pattern of fine red, green, blue, and the like.
- the manufacturing process includes steps of applying a photosensitive resist on a transparent substrate such as glass and developing the same, and the same process is repeated for each color.
- a conventional developing process in the production of a color filter will be described.
- the developing step is an important step that affects the shape of the pattern in the photolithographic process, with the aim of dissolving and removing the uncured resist after exposure.
- Items managed in the development process include the development time, the temperature of the developer, and the like. The items are all based on the developing power of the developer used, although they vary depending on the configuration and method of the developing tank.
- a normal developing device is composed of a developing tank and a developing solution tank, regardless of a batch type or a single wafer type, and involves simple circulation of the developing solution.
- the number of sheets to be processed is controlled, and after processing a predetermined number of sheets, the developer in the developer tank is drained all at once, or replenishment and development of new developer
- An object of the present invention is to reduce the quality of a developing solution by treating the developing solution subjected to development with an ultrafiltration filter, reusing the filtrate, and circulating a concentrated solution.
- An object of the present invention is to provide a developing apparatus, a developing method, and a developing solution circulating method, which make it possible to keep running costs low and to easily control a process.
- Another object of the present invention is to prevent clogging of the ultrafiltration filter when used for a long time.
- An imaging device that prevents a decrease in filtrate volume, facilitates maintenance, eliminates the need for fine adjustment of development parameters even in continuous operation, and does not impair workability even when the product is enlarged.
- An object of the present invention is to provide a developing method and a developer circulating method.
- a developing tank in which a developing process is performed, a developing solution circulating tank containing a developing solution, and a developing solution in the developing solution circulating tank are sent to the developing tank.
- the developing device according to the first aspect of the present invention configured as described above can employ various configurations as described below.
- the ultrafiltration filter is configured to have a filtration accuracy of a molecular weight cut off of 1,000 to a particle size of 10 ⁇ m.
- a structure further comprising a means for periodically supplying a constant amount of the developing solution to the circulation tank.
- An adjusting valve for adjusting the flow rate of the filtrate having the ultrafiltration filter power, a flow meter for measuring the flow rate of the filtrate from the ultrafiltration filter, and the flow rate of the concentrated solution from the ultrafiltration filter.
- a configuration further comprising a flow meter for measuring the flow rate, and a constant liquid permeability mode mechanism for automatically adjusting the ratio of the filtrate flow rate and the concentrate flow rate to an optimum value.
- An adjustment valve for adjusting the flow rate of the filtrate having the ultrafiltration filter power, a pressure gauge for measuring the pressure of the filtrate from the ultrafiltration filter, and the ultrafiltration filter.
- a configuration further comprising a constant filtrate pressure mode mechanism for automatically adjusting the pressure of the filtrate to an optimum value.
- the developing device can further include a backwashing liquid supply system that sends a backwashing liquid to the ultrafiltration filter.
- a backwashing liquid supply system that sends a backwashing liquid to the ultrafiltration filter.
- the backwashing liquid supply system includes a flow meter that measures a flow rate of the backwashing liquid and a pressure gauge that measures a pressure of the backwashing liquid.
- the backwashing liquid supply system is connected to the ultrafiltration filter!
- a backwash tank for storing the separated filtrate as a backwash solution for the filtration filter shall be provided.
- the backwashing liquid supply system controls the flow rate or the pressure of the backwashing liquid to be maintained at a set value based on a measurement value fed back from either the flow meter or the pressure gauge. Provide a backwash control system.
- the reverse cleaning control system can set a reverse cleaning time.
- the backwash control system is provided with an automatic valve in a concentrated liquid circulation path upstream of the ultrafiltration filter, and can select a valve closed state or a valve open state during backwash.
- the backwash control system includes a backwash pump having an inverter, and controls the pump frequency to maintain a set value by controlling a pump frequency.
- a plurality of the ultrafiltration filters are provided, a filtrate having a first ultrafiltration filter power is stored in the backwash tank, and the stored filtrate is stored in the first ultrafiltration filter.
- a mechanism is provided for backwashing the second and subsequent ultrafiltration filters in the same manner, and a plurality of ultrafiltration filters are periodically backwashed during continuous operation. Be done.
- the developing device includes a plurality of the ultrafiltration filters, and the flow of the concentrated liquid in the first ultrafiltration filter is opposite to the direction in which the concentrated liquid flows in the normal state.
- the ultrafiltration filter is washed by changing the flow of the concentrate by flowing back in the direction of
- the second and subsequent ultrafiltration filters are equipped with a mechanism to reverse the flow of the concentrate sequentially in the same manner.
- the flow of the concentrate is sequentially reversed through a plurality of ultrafiltration filters. It can be configured.
- the developing solution is supplied to the developing tank by using the developing solution sent from the developing solution circulating tank.
- a developing method for performing a developing process is provided.
- the ultrafiltration concentrated solution tank power is periodically discarded, and an amount corresponding to the discarded developer is removed.
- a developing solution circulating method is provided in which a developing solution circulating tank is periodically supplied with a new developing solution to maintain a liquid amount balance.
- FIG. 1 is a diagram showing a correlation between a developer contamination degree and time in a conventional system and a system of the present invention.
- FIG. 2 is a flowchart of a developing device according to an embodiment of the present invention.
- FIG. 3 is a flowchart of a developing device according to another embodiment of the present invention, which does not require a backwashing pipeline.
- FIG. 4 is an explanatory diagram of a time chart of a reverse cleaning mechanism.
- FIG. 5 is an explanatory diagram of a time chart of a backwash / backflow mechanism.
- the developing device includes a developing solution circulating system that circulates a developing solution to be subjected to a developing process and a developing solution that has been subjected to the developing process.
- An ultrafiltration filter that separates a part of the developing solution into a filtrate and a concentrated solution, and the filtrate separated by the ultrafiltration filter is returned to the developer circulation system, and the filtrate is circulated to concentrate. It is composed of a liquid circulation system.
- the developer circulating system includes a developing tank in which a developing process is performed, a developer circulating tank that stores the developing solution, a unit that sends the developing solution in the developing solution circulating tank to the developing tank, Means for returning the developing solution used in the developing process in the developing tank to the developing solution circulating tank, wherein the filtrate / concentrated solution circulating system controls the developing solution sent from the developing solution circulating tank.
- An ultrafiltration concentrate tank to be accommodated, means for sending the developer in the ultrafiltration concentrate tank to the ultrafiltration filter, and a concentrate separated by the ultrafiltration filter.
- the developer is separated into a filtrate and a concentrated solution, and the filtrate is separated from the developer.
- the concentrate is sent to the circulation tank and the concentrate is sent to the ultrafiltration concentrate tank, so the developer after the development process is separated into a low-contamination developer circulation tank and a high-contamination ultrafiltration concentrate tank.
- the developing solution used for developing the substrate to be developed in the developing tank is sent from the developing solution circulating tank, product defects due to the low-contamination level of the developing solution are reduced.
- the developing tank uses a developer that is less contaminated than in the past, troubles caused by the apparatus are reduced and maintainability is improved.
- the developing device When the developing device is continuously operated, a fixed amount of the developing solution in the ultrafiltration concentrated solution tank is periodically discarded, and a fixed amount of the developing solution is periodically supplied to the developing solution circulating tank.
- the new developing solution is periodically supplied to the developing solution circulating tank, and the supplied amount is periodically discarded from the highly-contaminated ultrafiltration concentrated solution tank. It takes less time to secure the required amount of filtrate, enabling efficient supply and waste liquid flow, leading to a reduction in the amount of developer used.
- the developing solution in the initial state which starts with a new developing solution, has a strong developing power and then gradually decreases in developing activity. Therefore, fine adjustment of the developing time in the process is necessary. This is because active species in the developer are reduced. Therefore, replenishment of the developing solution is indispensable for replenishment of active species.
- the developing power since the supply of the new developing solution and the waste amount of the ultrafiltration concentrated solution tank are kept constant, the developing power reaches a steady state with a predetermined number of processed sheets, and the maintenance Since the degree is low, it is not necessary to finely adjust the development parameters while keeping the conditions in the steady state, and stable development can be performed for a long time.
- the steady state of the developing power of such a developing solution is determined by the supply amount of the developing new solution and the periodic disposal amount of the developing solution from the ultrafiltration concentrated solution tank. Neglecting the amount of developer taken out by the substrate to be developed, the amount of supply is equal to the amount of waste, and developing power in a steady state can be adjusted by increasing or decreasing both. If long-term development is required depending on the type of photosensitizer, the amount of both can be increased, and conversely, if the photosensitizer can be developed in a short period of time, it can be optimized by taking measures to reduce it. .
- the ultrafiltration filter used degrades with little force corresponding to the use time, which leads to a decrease in the filtrate volume. However, this deterioration can be suppressed by performing a backwashing process on each ultrafiltration filter at regular intervals.
- the ultrafiltration filter used traps contaminants in the developing solution, so that the filter becomes clogged with time and the amount of the filtrate decreases.
- backflow treatment at regular intervals on each ultrafiltration filter, clogging of contaminants can be eliminated, and contaminants inside the ultrafiltration filter can be removed. Can be suppressed.
- FIG. 1 shows a comparison between the conventional system and the system of the present invention.
- A shows the correlation between time and the degree of developer contamination using the method of the present invention.
- B develops a predetermined number of substrates to be developed, drains all the developing solution, and supplies new developing solution. Is the time when the developer is changed after the new developing solution is supplied and the developing solution in the developing solution tank is continuously drained, and after a predetermined number of substrates are developed, the developing solution is replaced. Shows the correlation of
- a developing apparatus As described above, according to the present invention, there are provided a developing apparatus, a developing method, and a developer circulating method in which workability does not deteriorate even when a product is enlarged and process management is extremely easy.
- the inventors of the present invention used a conventional method corresponding to C in Fig. 1 for the amount of developer used per substrate to be developed in the case of performing a development process for producing a color filter.
- An experiment was performed in which the method of the present invention, which corresponds to A of FIG. 1, was compared. The results are shown in the table below.
- the amount of developer used in the conventional method is 13 per color filter in total, but in the method of the present invention, it is reduced to 5 or less, which is less than half. You can see that. From this result, a very large cost reduction effect can be obtained by the method of the present invention. You can see that.
- the amount of developer used is substantially the same for all members. In particular, the use of B and PS is decreasing.
- FIG. 2 is a flowchart of the developing device according to one embodiment of the present invention.
- Reference numeral 4 indicates a developing solution circulating tank.
- the developing solution is supplied to the developing solution circulating tank 4 through a developing solution supply line 3 .
- the developing solution in the developing solution circulating tank 4 is sent to the developing solution use point 1 via the developing solution circulating pump 17, and the developing substrate 2 is subjected to development processing in the developing tank 2.
- the force with use point 1 as the showering process is not limited to this method.
- the developer used for the development is returned to the developer circulation tank 4 through the pipe 24, and this circulation is continuously repeated during operation of the apparatus.
- a part of the developing solution stored in the developing solution circulating tank 4 is sent to the ultrafiltration concentrated solution tank 5 via the developing circulating solution sending pump 15.
- the supply of the new developing solution can be supplied not only from the new developing solution supply line 3 but also to the ultrafiltration concentrated solution tank 5. Therefore, when the developer circulation tank 4 and the ultrafiltration concentrate tank 5 are operated from an empty state, for example, at the time of renewing the developer, first, the developer circulation tank 4 and the ultrafiltration concentrate tank 5 are both operated. Fill the developing solution. It is desirable to provide a liquid level sensor in the developer circulation tank 4 and the ultrafiltration concentrate tank 5 to control the amount of the developer.
- the developer in the ultrafiltration concentrate tank 5 is sent to five ultrafiltration filters 7-11 via the concentrate feed pump 16.
- the ultrafiltration filter the developer is separated into a filtrate that passes through the filter and a concentrate that does not pass through.
- the former is sent to the three-way valve 14 and the latter is sent to the ultrafiltration filter concentrate circulation line 21.
- the ultrafiltration filter concentrated liquid circulation line 21 is a circulation line in which the concentrated liquid is returned to the ultrafiltration concentrated liquid tank 5.
- the filtrate is usually stored in the filtrate tank 12 through the ultrafiltration filter filtrate line 22 via the three-way valve 14. Further, the filtrate is continuously sent from the filtrate tank 12 to the developer circulation tank 4 via a filtrate sending pump 18.
- the constant filtrate mode, the constant filtrate flow mode, or the constant filtrate pressure mode is selected. Or one of the modes is selected, and the liquid permeability (the ratio of the filtrate flow rate to the concentrate flow rate) is selected.
- the developing device operates in a state where the flow rate of the filtrate or the pressure of the filtrate is controlled to be constant.
- the concentrated liquid feed pump 16 does not perform control linked to the three modes described above, which is capable of changing the feed pressure and flow rate of the concentrated liquid by frequency control by an inverter.
- the pump 16 is independently inverter-controlled so that the initial set pressure set in the condition setting is always maintained. That is, during operation of the developing device, the pressure gauge 43 is controlled to be always at the set value.
- the air operation is performed so that the ratio (liquid permeability) between the value of the flow meter 39 (filtrate flow rate) and the value of the flow meter 38 (concentrate flow rate) becomes the set value.
- Valve (adjustment valve) 32 is feedback controlled.
- the appropriate liquid permeability largely depends on the type of the filter, and particularly depends on the inner diameter of the hollow fiber constituting the filter and the molecular weight cut off. If the liquid permeability is high, the flow rate of the filtrate with respect to the flow rate of the concentrated solution will be high, and the retention of contaminants on the inner surface of the hollow fiber membrane will be promoted, and the backwashing effect will be reduced.
- the optimal value of the liquid permeability should be 80% or less of the value when the air operation valve (adjustment valve) 32 is fully opened. This is the same when operating with the valve 35 being throttled.
- the air operation valve (adjustment valve) 32 is feedback-controlled so that the value of the flow meter 39 becomes an optimum value according to the type of the ultrafiltration filter. Since the optimal flow rate of the ultrafiltration filter varies depending on the type, if the flow rate is not optimal, the filter may become clogged in a short time, and the required amount of filtrate may not be secured.
- the optimum flow value should be 80% or less of the value when the air operation valve (adjustment valve) 32 is fully opened.
- the air operation valve (adjustment knob) 32 is controlled so that the value of the pressure gauge 42 becomes constant.
- the set value of the pressure gauge 42 is OkPa when the air operation valve is fully opened, so it is preferable that the set value be 10 kPa or more.
- the molecular weight cut off is 10 00—For ultrafiltration filters with a particle size range of 10 m.
- the permeation of dissolved ions is also blocked, so that the properties of the developer itself may be lost.
- contaminants cannot be trapped, and the cleanliness of the filtrate is reduced.
- the filtration accuracy of an ultrafiltration filter is classified by a value called a molecular weight cutoff.
- the ultrafiltration filters usable in the present invention include those commonly used under the names of microfiltration filters, microfilters and the like.
- the filtrate of the ultrafiltration filter is also used as a liquid for back washing.
- one ultrafiltration filter is always selected as the ultrafiltration filter to be backwashed.
- the ultrafiltration filter 7 is selected as an example.
- the force sent from the ultrafiltration concentrate tank 5 to the entire ultrafiltration filter via the concentrate supply pump 16 and selected as the backwash mode, the filtrate obtained from the ultrafiltration filter 7 is a three-way valve. It is stored in the backwash tank 13 through the ultrafiltration filter backwash filtrate line 23 via 14.
- the backwash tank 13 is provided with a liquid level sensor, and when the sensor detects a predetermined liquid level, the backwash liquid feed pump 19 starts operating, and the backwash filtrate line 23 and It is sent to the filtrate side of the ultrafiltration filter 7 via the three-way valve 14, and the ultrafiltration filter 7 is backwashed.
- the liquid used for the backwash may be discarded, here, an example in which the liquid is returned to the ultrafiltration concentrate tank 5 through the valve 34 and the backwash liquid return line 20 is shown.
- the backwashing operation is time-controlled, and after the backwashing operation for a predetermined time, the next ultrafiltration filter 8 is selected in the backwashing mode, and the same operation is repeated.
- a flow meter 45 and a pressure gauge 46 are attached to the reverse cleaning path 23, and either! / Or a difference between the reverse cleaning flow fixed mode and the reverse cleaning pressure fixed mode is selected.
- the backwash pump 16 is inverter-controlled so that the value of the flow meter 45 becomes the set value.
- the backwash pump 16 is inverter-controlled so that the value of the pressure gauge 46 becomes a set value.
- a set value can be set for each filter.
- the reverse cleaning time is managed by the control system of the apparatus. The ability to set the backwash time for each filter Basically, it is desirable that all ultrafiltration filters 7-11 be backwashed with the same backwash time.
- the auto valve 30 at the time of back washing can be selected from an open state and a closed state, and is normally operated in an open state, that is, in a state in which the concentrated liquid is circulated.
- an open state that is, in a state in which the concentrated liquid is circulated.
- the concentrated liquid can flow in one ultrafiltration filter in a direction opposite to the flow direction in the normal state.
- the concentrated liquid is caused to flow back to the ultrafiltration filter 7.
- the effect of washing the inside of the ultrafiltration filter can be obtained by changing the flow of the concentrated solution by flowing the concentrated solution back into the ultrafiltration filter.
- the concentrated liquid sent from the concentrated liquid sending pump 16 passes through the reverse flow pipe 44 via the valve 30 and the three-way valve 28, and flows into the ultrafiltration filter via the three-way valve 29.
- the concentrate after washing with the ultrafiltration filter is returned to the ultrafiltration concentrate tank 5 through the knob 31.
- the backflow time is time-controlled and flows backward for a predetermined time. At this time, the filtrate side valve 32 is closed.
- FIG. 3 is a flowchart of the developing device that does not require a conduit for the backflow of the concentrated liquid.
- the ultra-filter 7 is selected as an example.
- the valve 30 is closed and the valve 31 is opened at the same time as the reverse flow mode, the concentrate from the ultrafiltration filter 8-11 flows into the ultrafiltration filter 7 through the flow meter 38, and the backflow to the ultrafiltration filter 7 Be started.
- the knob 32 is closed to prevent the filtrate from flowing out of the ultrafiltration filter 7.
- the valve 35 is adjusted so that an appropriate amount of the concentrated liquid flows from the ultrafiltration filter 8-11 to the ultrafiltration filter 7.
- the developer circulation tank 4, ultrafiltration concentrate tank 5, filtrate tank 12, and backwash tank 13 in Fig. 2 All were equipped with liquid level management sensors, and were fed back to each pump so that the liquid level was always constant.
- the developing circulating liquid feed pump 15, the concentrated liquid feed pump 16, and the filtrate feed pump 18 are closely related, and all the criteria are the filtrate flow rate fed by the filtrate feed pump 18.
- This filtrate flow rate means the filtrate flow rate obtained by the ultrafiltration filter power, and the pump frequency is controlled by the flow meter 36 attached to the ultrafiltration filter filtrate line 22. This constantly controls the flow rate in addition to the information of the liquid level management sensor of the filtrate tank 12.
- the developing circulating liquid feed pump 15 basically feeds back the flow rate of the filtrate sending pump 18 as it is, but the periodic supply of the new developing solution in the developing solution circulating tank 4 and the periodic supply of the ultrafiltration concentrated solution tank 5 Due to the influence of the drain, feedback is also received from the liquid level management sensors owned by each.
- the flow rate of the filtrate sent to the developing solution circulation tank 4 by the filtrate sending pump 18 is 10 liters Z
- the developing solution sent to the ultrafiltration concentrate tank 5 by the developing circulating solution sending pump 15 The flow rate of the developer was 10 liters Z corresponding to the filtrate flow rate, and the flow rate of the developer sent to the use point 1 by the developer circulation pump 17 was 247 liters / minute.
- the number of ultrafiltration filters to be used is 5, and the molecular weight cut off is 30,000-50,000, for example. 50,000 were selected.
- Power of developing solution containing pigment Power required to reduce the molecular weight of the fraction to 10,000 or less in order to remove the pigment If the molecular weight of the fraction is too low, the composition of the developing solution itself will be affected.
- the molecular weight was determined to be 30,000-50,000. This is to ensure a sufficient amount of filtrate, and to reduce the degree of contamination in the steady state of A shown in Fig. 1.
- the pump 16 for feeding the concentrated solution sent a total of about 700 liters of the developing solution to the five ultrafiltration filters, and was designed with a filtrate recovery of about 3 to 10%, for example, 5%.
- the sending pressure to the ultrafiltration filter is set at 50% of the upper limit of the quality standard of the filter as a guide, and the operating system is a device that can select two types: fixed sending pressure mode and fixed filtrate flow rate mode.
- the liquid supply pressure fixing mode is a mode in which the operation is performed while fixing the pressure on the input side of the ultrafiltration filter, and is not involved in the flow rate control of the filtrate. That is, the liquid side valve 32 may be a manual valve.
- the filtrate flow rate fixing mode is a mode in which the flow rate of the filtrate path 22 is fixed. In both cases, feedback is applied to the pump 16 from the pressure gauge 43 and the flow meter 38, and the frequency is controlled by the inverter.
- the amount of the filtrate fluctuates due to the type of the concentrated solution and the clogging of the ultrafiltration filter over time, so that the filtrate flow rate is fixed in order to maintain a stable composition of the developer.
- Constant mode is desirable. For that purpose, it is necessary to select an ultrafiltration filter that can be operated in a state where the fluctuation of the filtrate flow rate is small and the average pressure of the concentrated liquid is low.
- the average pressure of the concentrated solution is a value obtained by adding the pressures on the input side and the output side of the ultrafiltration filter and dividing the result by two.
- the guideline is preferably 100 kPa or less.
- the concentrated liquid circulation valve at the time of back washing is preferably in an open state. This is because, since the quality standard pressure of a general ultrafiltration filter is 300 kPa, by applying a backwash pressure of 300 kPa, a backwash effect at a differential pressure of 200 kPa can be obtained. If the backwash pressure can be set to be at least twice the average pressure of the concentrate, it may be more effective to perform the backwash with the concentrate circulating. The above is the description of the backwash pressure fixing mode. Even if the force backwash pressure is the same, the backwash flow rate may fluctuate greatly. This is often related to the degree of clogging of the ultrafiltration filter.
- the minimum is 20 seconds per one ultrafiltration filter, and it is desirable that it be longer.
- the backwashing interval here is called the backwashing interval, and the balance with the backwashing time is adjusted so that it is within 30 minutes.
- Figure 4 shows the relationship between backwashing time and backwashing interval.
- Tl, ⁇ 3, ⁇ 5, ⁇ 7, and ⁇ 9 are storage times of the backwash tank in each ultrafiltration filter 7-11, and T2, T4, T6, T8, and T10 are This is the backwash time of the filtration filter 7-11.
- T11 in the figure is the reverse cleaning interval. Assuming a storage time of 3 minutes and a backwash time of 1 minute, the backwash interval is a simple calculation of 20 minutes. It is possible to incorporate all five ultrafiltration filters 7-11 after backwashing, but as shown in Fig. 4 due to the increase in backwashing interval and fluctuations in filtrate flow rate and concentrate circulation pressure due to load on the control system. In the example, operation of four ultrafiltration filters was assumed.
- the storage time is greatly related to the amount of the backwash solution used. This is because if the amount of backwash used is large, the used filtrate must be stored in the backwash tank when the backwash mode shifts to the next ultrafiltration outside filter. Therefore, if a large amount of the backwashing liquid is used, the storage time becomes longer, and as a result, the backwashing interval becomes longer.
- FIG. 5 shows a time chart of a mechanism for performing both back washing with the filtrate and washing with the back flow of the concentrated solution.
- a indicates a time interval in which all five ultrafiltration filters shown in FIG. 1 are operating.
- g indicates the time interval during which the concentrate in the ultrafiltration filter 7 is back-flowed, thereby washing the ultrafiltration filter.
- the valve on the filtrate side of the ultrafiltration filter 7 is closed, the amount of filtrate obtained is smaller than in the case of the time interval a.
- b indicates the time required for the set time of the backflow of the concentrated solution to end, the valve on the filtrate side to be opened, and the filtrate obtained from the ultrafiltration filter 7 to reach the predetermined liquid level in the backwash tank.
- c indicates the time required for the liquid level sensor of the backwash tank to detect the set liquid level and perform the backwash of the ultrafiltration filter 7.
- f is the sum of time intervals a, g, b, and c, and one cycle of the ultrafiltration filter 7 selected for washing (backwash and backflow) is determined at this time.
- the backwashing / backflow mode shifts to the next ultrafiltration filter 8, and at time interval h, the concentrated solution in the ultrafiltration filter 8 flows back again. Start filtrate storage. Similarly, this backwashing / backflow cycle is sequentially performed with each ultrafiltration filter.
- b is a time determined by the liquid supply pressure of the filter and the type of filter. Therefore, one cycle can be determined arbitrarily by determining f as a parameter. The determination of these parameters determines the filtrate volume and backwashing efficiency, so it is necessary to operate at appropriate values. The backwash was performed at a fixed pressure and the upper limit of the pressure was used as it was in order to allow as much liquid permeation as possible in a short time.
Abstract
Description
Claims
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KR1020057012944A KR101111455B1 (ko) | 2003-10-28 | 2004-10-27 | 현상장치, 현상방법, 및 현상액 순환방법 |
JP2005515016A JP4645449B2 (ja) | 2003-10-28 | 2004-10-27 | 現像装置 |
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JP2007241077A (ja) * | 2006-03-10 | 2007-09-20 | Toppan Printing Co Ltd | カラーフィルタ製造における現像液濃度調整方法および現像装置 |
EP1893325A2 (en) * | 2005-06-23 | 2008-03-05 | Ben Gurion University of the Negev Research and Development Authority Ltd. | Method and apparatus for repositioning flow elements in a tapered flow structure |
JPWO2006129567A1 (ja) * | 2005-05-30 | 2009-01-08 | パイオニア株式会社 | ウェット処理装置及び表示パネルの製造方法 |
JP2010064034A (ja) * | 2008-09-12 | 2010-03-25 | Toppan Printing Co Ltd | 現像液濾過装置 |
JP2010145919A (ja) * | 2008-12-22 | 2010-07-01 | Toppan Printing Co Ltd | 現像装置および現像方法 |
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CN110703565A (zh) * | 2019-11-01 | 2020-01-17 | 广东威迪科技股份有限公司 | 一种线路板显影液循环回收系统 |
CN110703565B (zh) * | 2019-11-01 | 2022-11-25 | 广东威迪科技股份有限公司 | 一种线路板显影液循环回收系统 |
Also Published As
Publication number | Publication date |
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KR101111455B1 (ko) | 2012-03-13 |
TWI371651B (en) | 2012-09-01 |
JPWO2005040930A1 (ja) | 2007-04-19 |
KR20060123671A (ko) | 2006-12-04 |
JP4645449B2 (ja) | 2011-03-09 |
JP5182391B2 (ja) | 2013-04-17 |
JP2011141563A (ja) | 2011-07-21 |
JP2011018943A (ja) | 2011-01-27 |
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