WO2005029102A1 - 誤差要因取得用装置、方法、プログラムおよび記録媒体 - Google Patents
誤差要因取得用装置、方法、プログラムおよび記録媒体 Download PDFInfo
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- WO2005029102A1 WO2005029102A1 PCT/JP2004/013713 JP2004013713W WO2005029102A1 WO 2005029102 A1 WO2005029102 A1 WO 2005029102A1 JP 2004013713 W JP2004013713 W JP 2004013713W WO 2005029102 A1 WO2005029102 A1 WO 2005029102A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/28—Measuring attenuation, gain, phase shift or derived characteristics of electric four pole networks, i.e. two-port networks; Measuring transient response
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
- G01R35/005—Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references
Definitions
- the present invention relates to measurement of an error factor when calculating and measuring circuit parameters of a device under test.
- a signal is transmitted from the signal source 130 to the receiving unit 140 via the DUT 400.
- This signal is received by receiving section 140.
- By measuring the signal received by the receiving unit 140 it is possible to obtain the S parameter and the frequency characteristic of the DUT 400.
- FIG. 17 shows a signal flow graph relating to the signal source 130.
- RF IN is a signal input from signal source 130 to DUT 400, etc.
- S 1 1m is DUT 4 S-parameters such as DUT 400 obtained from signals reflected from 00 etc.
- S11a are S-parameters of true DUT 400 etc. without measurement system error.
- the error can be corrected, for example, as described in Patent Document 1. Such correction is called calibration.
- a calibration kit is connected to the signal source 130 to realize three states: open (open), short (short), and load (standard load Z0).
- the signal reflected from the calibration kit at this time is acquired by a prism, and three kinds of S parameters (S11m) corresponding to the three states are obtained. From the three types of S parameters, three types of variables E d, E r. E s are obtained.
- three types of calibration kits that is, open (open), short (short), and load (standard load Z0) must be attached to and detached from the signal source 130.
- the number of attachment / detachment operations is two (for putting on and taking off) for each type of calibration kit.
- an object of the present invention is to make it possible to calibrate a measurement system over a circuit parameter of a device under test by reducing the number of mounting and dismounting of a calibration kit. Disclosure of the invention
- a network analyzer including a signal output unit, an output port for outputting a signal from the signal output unit, and a reception port for receiving a signal, and a device under test
- An error factor acquisition device for acquiring an error factor between the network device and a first state realizing unit for realizing a first state with respect to an output port and a reception port of a network analyzer;
- a first calibration means connected to the receiving port, and a second state realizing unit for realizing the second state of the output port or the receiving port of the network analyzer, wherein the first calibration means and the device under test are
- a second calibration means connected to the first calibration means, wherein the first calibration means connects the output port and the reception port to either the first state realizing section or the second calibration means.
- an error factor acquiring device for acquiring an error factor between a network analyzer and a device under test.
- the network analyzer includes a signal output unit, an output port for outputting a signal from the signal output unit, and a reception port for receiving the signal.
- the error factor acquisition device includes a first calibration unit and a second calibration unit.
- the first calibration unit has a first state realizing unit that realizes a first state for the output port and the receiving port of the network analyzer, and is connected to the output port and the receiving port.
- the second calibration unit has a second state realizing unit that realizes a second state for the output port or the reception port of the network analyzer, and is connected to the first calibration unit and the device under test.
- the first calibration means includes an output port and a reception port, A first connection unit that connects to either the first state realization unit or the second calibration unit;
- the second calibration means has a second connection unit that connects the output port and the reception port to either the second state realization unit or the device under test.
- the first state realizing unit realizes the open calibration tool for realizing the open state, the short-circuit calibration tool for realizing the short-circuit state, and the state of the standard load.
- the second state realizing unit realizes an open calibration tool for realizing an open state, a short-circuit calibration tool for realizing a short-circuit state, and a standard load state. It can be configured to have a standard load calibration tool and a calibration tool connection part for connecting any one of the open calibration tool, the short circuit calibration tool, and the standard load calibration tool to the network analyzer.
- the number of ports of the device under test is larger than the number of ports of the network analyzer, and the port of the first (2) It can be configured to have branch connection means to connect to any of the ports of the calibration means.
- the device under test can be configured to include the wafer and the wafer probe that is in contact with the wafer and connected to the second calibration unit.
- a network analyzer including a signal output unit, an output port for outputting a signal from the signal output unit, and a reception port for receiving a signal;
- An error factor acquisition device for acquiring an error factor between the device and an object, comprising: (1) a first state realizing section for realizing a first state for an output port and a receiving port of a network analyzer; First calibration means connected to the output port and the reception port, and (2) a second state realization unit for realizing the second state of the output port or the reception port of the network analyzer, (3) 'The first calibration means connects the output port and the reception port to the first state realization section or the second calibration means. Either Has a first connection portion for connecting to the crab,
- the second calibration means uses an error factor acquiring device having a second connection unit for connecting the output port and the reception port to either the second state realization unit or the device under test.
- This is an error factor acquisition method for acquiring the cause.
- the network analyzer When the network analyzer is connected to the first state realization unit, the signal before being output from the output port and reflected from the first state realization unit to the output port A first error factor acquiring step for acquiring a first error factor between the network analyzer and the first calibration means based on a predetermined parameter measured for the signal and the signal received at the reception port;
- a network analyzer including a signal output unit, an output port for outputting a signal from the signal output unit, and a reception port for receiving the signal, and a device under test
- An error factor acquisition device for acquiring an error factor between the network analyzer and (1) a first state realizing unit for realizing a first state with respect to an output port and a receiving port of the network analyzer; A first calibration means connected to the output port and the reception port; and (2) a second state realization section for realizing the second state of the output port or the reception port of the network analyzer, wherein the first calibration means is provided.
- the first calibration means connects the output port and the reception port to the first state realization section or the second calibration means.
- the second calibration means includes a second connection unit that connects the output port and the reception port to either the second state realization unit or the device under test.
- the object to be measured has a wafer, and a wafer probe which is in contact with the wafer and connected to the second calibration means.
- a first error factor acquiring step for acquiring a first error factor between the network analyzer and the first calibration means based on a predetermined parameter measured for the detected signal; When connected to the current part, the signal before output from the output port and the A second error factor acquiring step of acquiring a second error factor between the device under test and the first calibration means based on a signal reflected from the two-state realizing unit to the output port; A wafer measurement step of measuring predetermined parameters of the wafer based on the error factor and the error factor of the wafer probe.
- a network analyzer including a signal output unit, an output port for outputting a signal from the signal output unit, and a reception port for receiving a signal
- An error factor acquiring device for acquiring an error factor, comprising: (1) a first state realizing section for realizing a first state with respect to an output port and a receiving port of a network analyzer; A first calibration means connected to the receiving port, and (2) a second state realizing section for realizing the second state of the output port or the receiving port of the network analyzer, wherein the first calibrating means and the measured (3)
- the first calibration means sets the output port and the reception port to one of the first state realization unit and the second calibration means.
- the second calibration means has a second connection unit that connects the output port and the reception port to either the second state realization unit or the device under test, A program for executing an error factor acquisition process for acquiring an error factor using an error factor acquisition device in the evening, when the network analyzer is connected to the first state realization unit.
- a network analyzer based on predetermined parameters measured for a signal before output from the output port, a signal reflected from the first state realization unit to the output port, and a signal received at the reception port.
- a first error factor acquisition process for acquiring a first error factor between the first calibration means and the first calibration means; When connected to the two-state realizing section, based on the signal before being output from the output port and the signal reflected from the second state realizing section to the output port, the first calibration section between the DUT and the first calibration means is provided.
- This is a program for causing a computer to execute a second error factor acquisition process for acquiring two error factors.
- a network analyzer having a signal output unit, an output port for outputting a signal from the signal output unit, and a reception port for receiving a signal
- An error factor acquiring device for acquiring the error factor of (1), comprising: (1) a first state realizing section for realizing a first state with respect to an output port and a receiving port of a network analyzer; A first calibration means connected to the output port and the reception port, and (2) a second state realization unit for realizing the second state of the output port or the reception port of the network analyzer, the first calibration means And a second calibration means connected to the device under test.
- the first calibration means sets the output port and the reception port to one of the first state realizing section and the second calibration means.
- the second calibration means has a second connection unit that connects the output port and the reception port to either the second state realization unit or the device under test.
- the device under test includes a wafer and a wafer probe which is in contact with the wafer and connected to the second calibration means. This is a program to be executed by a computer, and when a network analyzer is connected to the first state realization unit, the signal before being output from the output port is reflected from the first state realization unit to the output port.
- a first error factor acquisition process for acquiring a first error factor between the network analyzer and the first calibration means based on a predetermined parameter measured for the signal and the signal received at the reception port;
- the DUT and the first calibration are performed based on the signal before output from the output port and the signal reflected from the second state realization unit to the output port.
- a second error factor acquisition process for acquiring a second error factor between the first and second means, and a wafer for measuring a predetermined parameter of the first error factor based on the first error factor, the second error factor, and the error factor of the wafer probe. This is a program that causes a computer to execute the measurement process.
- a network analyzer including a signal output unit, an output port for outputting a signal from the signal output unit, and a reception port for receiving the signal, (1) a first state realizing section for realizing a first state with respect to an output port and a receiving port of a network analyzer; A first calibration means connected to the receiving port; and (2) a second state realizing section for realizing the second state of the output port or the receiving port of the network analyzer, wherein the first calibration means and the device under test are connected to each other.
- the first calibration means connects the output port and the reception port to either the first state realization section or the second calibration means.
- the second calibrating means has a second connection unit that connects the output port and the reception port to either the second state realizing unit or the device under test.
- a computer-readable recording medium on which a program for causing an error factor acquisition process to acquire an error factor using a factor acquisition device to be executed in a combi- nation is provided, and the network analyzer is in the first state.
- a first error factor acquisition process for acquiring a first error factor between the network analyzer and the first calibration means based on a predetermined parameter measured for the received signal;
- a second signal between the DUT and the first calibration means is generated.
- a computer which records a program for causing a computer to execute a second error factor acquisition process for acquiring an error factor.
- a network analyzer including a signal output unit, an output port for outputting a signal from the signal output unit, and a reception port for receiving a signal; (1) a first state realizing unit that realizes a first state with respect to an output port and a receiving port of a network analyzer.
- a first calibration means connected to the output port and the reception port; and (2) a second state realization unit for realizing the second state of the output port or the reception port of the network analyzer.
- the first calibration means includes an output port and a reception port, and the first calibration means includes a first state realization section or a second calibration means.
- the second calibration means has a second connection unit that connects the output port and the reception port to either the second state realization unit or the device under test.
- the device under test includes a wafer and a wafer probe which is in contact with the wafer and connected to the second calibration means.
- a computer-readable recording medium on which a program to be executed by a computer is recorded.
- the second error factor between the DUT and the first calibration means is determined based on the signal before output from the output port and the signal reflected from the second state realizing unit to the output port.
- the second error factor acquisition process to be acquired and the wafer measurement process for measuring a predetermined parameter of the wafer based on the first error factor, the second error factor, and the error factor of the wafer probe are performed by computer.
- This is a computer-readable recording medium that stores a program to be executed by a computer.
- FIG. 1 is a diagram showing a configuration of a measurement system in which the error factor acquiring device according to the first embodiment of the present invention is used.
- FIG. 2 is a diagram showing a configuration of the network analyzer 1. As shown in FIG.
- FIG. 3 is a diagram showing a configuration of the first state realizing unit 120.
- FIG. 4 is a diagram showing a configuration of the second state realization unit 220.
- FIG. 5 is a signal flow graph when port 202 is connected to DUT 400, where port 18 is an output port and port 28 is a reception port (FIG. 5 (a)). The case where port 18 is a receiving port and port 28 is an output port (Fig. 5 (b)).
- FIG. 6 is a flowchart showing the operation of the first embodiment.
- Figure 7 shows the error factors E df and E r f E s f ( Figure 7 (a))
- FIG. 8 is a signal flow graph showing E d T rr s E sr (FIG. 7 (b)).
- FIG. 8 is a signal flow graph showing error factors E tf and E Lf (FIG. 8 (a)) and error factors E tr and E L r (FIG. 8 (b)).
- Fig. 9 shows the error factors A11, A12, A21, A22 (Fig. 9 (a)) and the error factors B11, B12, B21, B22 (Fig. 9 (b)).
- FIG. 9 shows the error factors A11, A12, A21, A22 (Fig. 9 (a)) and the error factors B11, B12, B21, B22 (Fig. 9 (b)).
- FIG. 10 is a diagram showing a configuration of a measurement system in which the error factor acquisition device according to the second embodiment of the present invention is used.
- FIG. 11 is a diagram showing an internal configuration of the first calibrator 100 according to the second embodiment of the present invention.
- FIG. 12 is a diagram showing a configuration of a measurement system in which the error factor acquisition device according to the third embodiment of the present invention is used.
- FIG. 13 is a diagram showing the internal configuration of the 9-port test set 500.
- FIG. 14 is a diagram showing a configuration of a measurement system in which the error factor acquisition device according to the fourth embodiment of the present invention is used.
- Figure 15 shows that the first connection 110a (110b) connects port 18 (28) to the second calibrator 200, and the second connection 210 connects the port 202 to the wafer.
- This is a signal flow chart when the probe is connected to the probe 420.
- port 18 is an output port and port 28 is a reception port
- port 18 is a reception port and port 28 is an output port. (Fig. 15 (b)).
- FIG. 16 is a diagram for explaining a method for measuring circuit parameters of a device under test (DUT) according to the related art.
- FIG. 17 is a signal flow graph for a signal source 130 according to the related art.
- FIG. 1 is a diagram showing a configuration of a measurement system in which the error factor acquiring device according to the first embodiment of the present invention is used.
- the measurement system includes a network analyzer 1, a first calibrator 100, a second calibrator 200, a cable 300, and a DUT 400.
- the first calibrator 100 and the second calibrator 200 constitute an error factor acquisition device.
- Figure 2 shows the configuration of network analyzer 1.
- the network analyzer 1 has a signal source 10, a receiving means 20, a measurement system error factor recording unit 30, a circuit parameter measurement unit 40, a measurement system error factor acquisition unit 50, and a reception-side measurement system error factor.
- the recording unit 70 is provided.
- the signal source 10 has a signal output unit 12, a switch 13, a bridge 14a, 14b, a receiver ( ⁇ S) 16a, a receiver (TS) 16b, and a port 18.
- the signal output unit 12 outputs an input signal of a predetermined frequency. The fixed frequency can be changed.
- the switch 13 is a switch for selecting whether to output the input signal output from the signal output unit 12 from the port 18 or the port 28.
- the switch 13 has terminals 13a, 13b, and 13c. Terminal 13 a is connected to port 18, terminal 13 b is connected to receiving means 20, and terminal 13 c is connected to signal output unit 12. If the terminal 13a is connected to the terminal 13c, that is, if the switch 13 is on the side of the terminal 13a, an input signal is output from the port 18.
- the page 14b supplies this signal to the receiver (TS) 16b.
- the bridge 14a supplies the signal output from the signal output unit 12 to the receiver (RS) 16a.
- the page 14b supplies an input signal that is output from the port 18 to the receiver (TS) 16b with the reflected signal that has been reflected back.
- the pages 14a and 14b may be part-split. The other prisms described below can be substituted with power splitters.
- Receiver (RS) 16a measures the S-parameters of the signal received via bridge 14a.
- Receiver (TS) 16b measures the S-parameters of the signal received via bridge 14b.
- Port 18 is a terminal for outputting an input signal.
- the receiving means 20 has bridges 24a and 24b, a receiver (TR) 26a, a receiver (RR) 26b, and a port 28. When the input signal is output from the port 18, the bridge 24 a supplies the signal input from the port 28 to the receiver (TR) 26 a.
- the receiver (TR) 26a measures the S parameter of the received signal.
- Port 28 is a terminal through which the receiving means 20 receives a signal.
- the input signal output from the signal output unit 12 is sent to the receiving means 20 via the switch 13.
- Pledge 24b provides this input signal to receiver (RR) 26b.
- the bridge 24a supplies an input signal which is output from the port 28 to the receiver (TR) 26a after being reflected and returned.
- port (receiving port) 28 receives the signal through DUT 400.
- the port (receiving port) 18 receives the signal via the DUT 400.
- the receiver (TR) 26a measures the S-parameter of the signal received via the bridge 24a.
- the receiver (RR) 26b measures the S-parameter of the input signal received via the page 24b.
- the measurement system error factor recording unit 30 records an error factor of the measurement system of the network analyzer 1.
- the error factors of the measurement system are the first error factor and the second error factor. There are differences.
- the first error factor is an error factor between the network analyzer 1 and the first calibrator 100.
- the second error factor is an error factor between the DUT 400 and the first calibrator 100.
- the second error factor is an error factor mainly caused by the cable 300.
- the circuit parameter overnight measurement unit 40 is an error factor of the measurement system of the network analyzer 1.
- the error factors of the measurement system are the first error factor and the second error factor. There are differences.
- the first error factor is an error factor between the network analyzer 1 and the first calibrator 100.
- the second error factor is an error factor between the DUT 400 and the first calibrator 100.
- the second error factor is an error factor mainly caused by the cable 300.
- receiver (TR) 2 6a receiver (TS) 16b DUT 4
- the measurement system error factor acquisition unit 50 acquires the measurement system error factor based on the measurement results of the receiver (RS) 16a, the receiver (TS) 16b, and the receiver (TR) 26a.
- the receiver-side measurement system error factor acquisition unit 70 measures based on the measurement results of the receiver (RR) 26 b, receiver (TR) 26 a, receiver (TS) 16 b, and signal output acquisition unit 62 Get the error factors of the system.
- the first calibrator 100 has ports 102, 104, 106, and 108, connection sections 110a and 110b, and a first state realization section 120. Port 102 is connected to Port 18.
- Port 104 is connected to Port 28.
- Port 106 is connected to port 202 of the second calibrator 200.
- Port 108 is connected to port 202 of the second calibrator 200.
- the first connection unit 110a is connected to the ports 102, 106 and the first state realization unit 120.
- the first connection unit 110a connects the port 102 to the port 106 or the first state realization unit 120. Therefore, the first connection unit 110a connects the port 18 to the second calibrator 200 or the first state realization unit 120.
- Port 18 is an output port (when a signal is output from port 18) or a reception port (when a signal is output from port 28).
- the first connection unit 110b is connected to the ports 104, 108 and the first state realization unit 120.
- the first connection unit 110 connects the port 104 to the port 108 or the first state realization unit 120. Therefore, the first connection unit 110b connects the port 28 to the second calibrator 200 or the first state realization unit 120.
- Port 28 is a receiving port (when a signal is output from port 18) or an output port (when a signal is output from port 28).
- the first state realizing unit 120 realizes the first state for the ports 18 and 28, that is, for the output port and the receiving port.
- FIG. 3 shows the configuration of the first state realizing unit 120.
- 1st state realizing section 1 20 is open calibration tool 1 2 2 op, 1 230 p, short circuit calibration tool 1 2 2 s, 1 2 3 s, standard load calibration tool 1 2 2 L, 1 2 3 L s Short circuit 1 2 4, port connection 1 2 6, 1 2 8
- the calibration tool is a well-known tool that realizes three states of open (open), short (short), and load (standard load Z0) as described in JP-A-11-38054. is there.
- Open calibration tool 1 2 2 op realizes the open state of port 18.
- the open calibration tool 1 2 3 op realizes the open state for port 28.
- the short-circuit calibration tool 1 2 2 s realizes a short-circuit state for port 18.
- the short-circuit calibration tool 1 2 3 realizes a short-circuit state for port 28.
- the standard load calibration tool 1 2 2 L achieves a standard load condition for port 18.
- the standard load calibration tool 1 2 3 L realizes the standard load condition for port 28.
- the short-circuit portion 124 is for connecting the port 18 and the port 28. That is, the first state is the state of open, short circuit and standard load for port 18, the state of open, short circuit and standard load for port 28, and the connection between port 18 and port 28. Means state.
- Port connection 1 2 6 is connected to 1st connection 1 110 a, open calibration tool 1 2 2 op, short circuit calibration tool 1 2 2 s, standard load calibration tool 1 2 2 L, short circuit 1 2 4 Connect any one of The port connections 126 are a kind of switch.
- the port connection unit 128 connects one of the open calibration tool 123 op, the short-circuit calibration tool 123 s, the standard load calibration tool 123 L, and the short-circuit unit 124 to the first connection unit 110 b.
- the port connection unit 128 is a type of switch.
- the second calibrator 200 has ports 202 and 204, a second connection unit 210, and a second state realization unit 220. Port 202 is connected to port 106 (108).
- Port 204 is connected to port 402 of DUT 400.
- the second connection part 210 is connected to the ports 202 and 204 and the second state realization part 220.
- the second connection unit 210 connects the port 202 to the port 204 or the second state realization unit 220.
- port 18 is connected to port 18 (28) via first connection 110a (110b)
- second connection 210 will connect port 18 (28).
- the second state realizing unit 220 realizes the second state for the port 18 (28), that is, for the output port or the receiving port.
- FIG. 4 shows the configuration of the second state realization unit 220.
- the second state realizing unit 220 has an open calibration tool 2220p, a short circuit calibration tool 222s, a standard load calibration tool 222L, and a calibration tool connection unit 224.
- the calibration tool is a well-known tool that realizes three states of open (open), short (short circuit), and load (standard load Z0).
- the open calibration tool 2 220 p realizes an open state for port 18 (28).
- the short-circuit calibration tool 2 22 s implements a short-circuit condition for port 18 (28).
- the standard load calibration tool 2 2 2 L realizes the standard load condition for port 18 (28).
- the second state means an open state, a short circuit state, and a normal load state for the port 18 or 28.
- the calibration tool connection 2 24 connects to the second connection 2 110 any one of the open calibration tool 2 2 2 op, the short circuit calibration tool 22 2 s, and the standard load calibration tool 22 2 L. I do.
- the calibration tool connection part 224 is a kind of switch.
- the cable 300 connects the port 106 (108) of the first calibrator 100 to the port 202 of the second calibrator 200.
- 0111400 has ports 402 and 404.
- the DUT 400 is a device under test, and the purpose of the network analyzer 1 is to measure the true S parameters of the DUT 400.
- Figure 5 shows that the first connection 110a (110b) connects port 18 (28) to the second calibrator 200, and the second connection 210 connects port 202 to the DUT. It is a signal flow graph when connected to 400.
- Fig. 5 (a) shows the signal flow graph when port 18 is the output port and port 28 is the receiving port
- Fig. 5 (b) shows the signal flow when port 18 is the receiving port and port 28 is the output port. This is a graph of the signal.
- the error factors of the measurement system include a first error factor and a second error factor.
- the first error factors are Edf, Erf, Esf, Etf, and ELf.
- the second error factors are All, A12, A21, A22, B11, B12s B21 and B22.
- the suffix f in the first error factor is an abbreviation for forward, which means that an input signal is supplied from the port 18 to the DUT 400.
- Ed error due to the directionality of the bridge
- Er error due to reflection tracking
- Es error due to source matching
- Et error due to transmission tracking
- EL load matching This is the error caused. Referring to FIG.
- the first error factor, Ed r, E rr s E sr, Et r is EL r.
- the second error factors are All, A12, A21, A22, BliB12, B21, and B22.
- the suffix “” in the first error factor is an abbreviation of “reverse”, which means that an input signal is supplied from the port 28 to the DUT 400.
- FIG. 6 is a flowchart showing the operation of the first embodiment.
- the network analyzer 1 is connected to the first state realization unit 120 (S10). That is, the port 18 is connected to the first state realizing unit 120 by the first connecting unit 110a, and the port 28 is connected to the first state realizing unit 120 by the first connecting unit 110b.
- the first error factor is obtained (S12).
- a signal is output from port 18.
- the port connection 126 connects the open calibration tool 122 op to the port 18 via the first connection 1 10.a to the port 18, then connects the short-circuit calibration tool 122 s, and the standard load calibration tool 122 L Connect.
- the measurement system error factor acquisition unit 50 calculates the error factors Edf, Erf, and Esf shown in FIG. And write it to the measurement system error factor recording unit 30.
- the port connection unit 126 connects the short-circuit unit 124 to the port 18 via the first connection unit 110a, and the port connection unit 128 also connects via the first connection unit 11 Ob. , Connect the short circuit part 124 to the port 28.
- the measurement system error factor acquisition unit 50 calculates the error shown in Fig. 8 (a).
- the factors Etf and ELf are obtained and written to the measurement system error factor recording unit 30.
- a signal is output from port 28.
- the port connection 1 28 connects the open calibration tool 1 2 3 op to the port 2 8 via the first connection 1 110 b, and then connects the short circuit calibration tool 1 2 3 s, and Connect the standard load calibration tool 1 2 3 L.
- the receiving-side measurement system error factor obtaining unit 70 obtains the error factors E dr, E d shown in FIG. 7 (b). Obtain rr s EST and write it to the measurement system error factor recording unit 30.
- the port connection section 1 26 connects the short-circuit section 1 2 4 to the port 18 via the first connection section 110 a, and the port connection section 1 2 8 also connects to the first connection section 1 1 Connect the short circuit part 1 24 to the port 28 via O b.
- the receiver-side measurement system error factor acquisition unit 70 obtains the data shown in FIG. Find the error factors E tr and EL r shown in) and write them to the measurement system error factor recording unit 30. Thus, the first error factor can be obtained.
- the network analyzer 1 and the second calibrator 200 are connected (S14). That is, the port 18 is connected to the second calibrator 200 by the first connection unit 110a, and the port 28 is connected to the second calibrator 200 by the first connection unit 110b. Connect to. Further, the network analyzer 1 is connected to the second state realizing section 220 (S16).
- the port 18 (28) is connected to the second state realizing unit 220 via the first connecting unit 110 a (110 b) by the second connecting unit 210. I do.
- the second error factor is obtained (S18).
- a signal is output from port 18.
- the calibration tool connection 224 connects the open calibration tool 222 op to the port 18 via the second connection 210 and then connects the short-circuit calibration tool 222 s and the standard load calibration tool 222 L Connect.
- the measurement system error factor acquisition unit 50 determines the error factors A11, A12, A2 shown in FIG. 9 (a). 1. Find A22 and write it to the measurement system error factor recording unit 30.
- the calibration tool connection 224 connects the open calibration tool 222 op to the port 28 via the second connection 210, then connects the short-circuit calibration tool 222 s, and then connects the standard load calibration tool 222 L Connect.
- the receiver-side measurement system error factor obtaining unit 70 obtains the error factors B11 and B12 shown in FIG. 9 (b). , B21, and B22 are obtained and written to the measurement system error factor record 30. Thus, the second error factor can be obtained.
- the network analyzer 1 is connected to the DUT 400 (S20).
- the port 18 (28) is connected to the port 402 (404) of the DUT 400 via the first connection 110a (110b) by the second connection 210.
- the signal is output from port 18 or 28, and the receiver (RS) 16a, receiver (TS) 16b, receiver (TR) 26a and
- the circuit parameter measurement section 40 measures the S parameters of the DUT 400 from the measured values of the receiver and the receiver (RR) 26b (S22). This measured value is affected by measurement system error factors. Therefore, the circuit parameter overnight measurement unit 40 reads the measurement system error factors recorded in the measurement system error factor recording unit 30 and removes the influence of the measurement system error factors from the actually measured S parameters of the DUT 400. The true three parameters of 0111400 are measured (S24).
- the first connection sections 110a and 110b The network analyzer 1 can be calibrated simply by operating the second connection section 210 and the port connection sections 126 and 128s 224.
- FIG. 10 is a diagram showing a configuration of a measurement system in which the error factor acquisition device according to the second embodiment of the present invention is used.
- the measurement system includes a network analyzer 1, a first calibrator 100, a second calibrator 200, a cable 300, and a DUT400.
- the first calibrator 100 and the second calibrator 200 constitute an error factor acquisition device.
- Network analyzer 1 has ports 18, 28, 38, and 48.
- the internal configuration is almost the same as in the first embodiment.
- a signal output from one port can be received by any of the other ports.
- a signal output from port 18 can be received by any of ports 28, 38, and 48.
- each port has a bridge 14a, 14bs equivalent to a receiver 16a, 16b.
- FIG. 11 shows the internal configuration of the first calibrator 100.
- the first calibrator 100 is connected to ports 101, 102, 103, 104, 105, 106, 107, 108, first connection 1 110a, 110 b 1 1 0 c, 1 1 0 d, 1st state realizing section 1 2 0 a, 1 2 0 b, 1 2 0 c, 1 2 0 d, switch S l, S 2, S 3, S 4, S ll, S12, S13, and S14.
- Port 102 is connected to port 18.
- Port 104 is connected to Port 28.
- Port 101 is connected to port 38.
- Port 103 is connected to port 48.
- Ports 105, 106, 107, 108 are connected to port 202 of the second calibrator 200.
- the first connection unit 110a connects the port 102 to the port 106, the switch S11, or the first state realization unit 120a.
- the first connection unit 110b connects the port 104 to the port 108, the switch S12, or the first state realization unit 120b.
- the first connection unit 110c connects the port 101 to the port 105, the switch S13, or the first state realization unit 120c.
- the first connection 1 110 d connects port 103 to port 1 07. Connect to switch S14 or first state realization unit 120d.
- the first state realization unit 120a is connected to the first connection unit 110a and the switch S1.
- the first state realizing unit 120b is connected to the first connecting unit 110b and the switch S2.
- the first state realizing section 120c is connected to the first connecting section 110c and the switch S3.
- the first state realization unit 120d is connected to the first connection unit 110d and the switch S4.
- the internal configuration of the first state realizing sections 120a, 120b, 120c, 120d is the same as in the first embodiment.
- Switches S1, S2, S3, S4 are connected to switches Sll, S12, S13, S14.
- One of the switches S1, S2, S3 and S4 is turned on.
- the switch S1 is turned on
- one of the switches S12, S13, and S14 is turned on.
- the switch S2 is turned on
- one of the switches Sll, S13, and S14 is set to 0N.
- the switch S3 any one of the switches S11, S12, and S14 is turned on.
- the switch S4 When the switch S4 is turned on, one of the switches S11 and S12s S13 is turned on.
- the second calibrator 200, the cable 300, and the DUT 400 are the same as in the first embodiment. However, the DUT 400 has four ports.
- the operation of the second embodiment will be described. The operation of the second embodiment is almost the same as the operation of the first embodiment, see the flowchart of FIG. This will be explained.
- the network analyzer 1 is connected to the first state realization units 120a, 120b, 120c, and 120d (S10). That is, the port 18 is connected to the first state realizing section 120a by the first connecting section 110a, and the port 28 is realized to the first state by the first connecting section 110b.
- Port 1 2 Ob port 38 through the first connection 110c, and port 48 through the first state realization 120c, and port 48 through the first connection 110d.
- the first error factor is obtained (S12). This is almost the same as in the first embodiment. That is, signals are output from ports 18, 28, 38, and 48. Then, ports 18, 28, 38, and 48 are connected to the first state realizing units 120 a, 120 b, 120 c, and 120 d open calibration tool, short-circuit calibration tool, and standard Connect the load calibration tools one after another.
- port 18 is connected to port 28 via the first connection unit 110a, the first state realization unit 120a, the switch SI, the switch S12, and the first connection unit 110b. To connect.
- the network analyzer 1 and the second calibrator 200 are connected (S14). That is, port 18 is connected to the second calibrator 200 by the first connection unit 110a, and port 28 is connected to the second calibrator 200 by the first connection unit 110b. Connect port 38 with the first connection 110c to the second calibrator 200, and connect the port with the first connection 110d. The port 48 is connected to the second calibrator 200. Further, the network analyzer 1 is connected to the second state realization section 220 (S16).
- the ports 18, 28, 38, and 48 are connected to the second state realizing section by the second connecting section 210 via the first connecting sections 110a, 110b, 110c, and 110d. Connect to 220.
- the second error factor is obtained (S18). This is almost the same as in the first embodiment. That is, signals are output from ports 18, 28, 38, and 48. Then, the open calibration tool, the short-circuit calibration tool, and the standard load calibration tool of the second state realizing section 220 are connected to the ports 18, 28, 38, 48 one after another. Then, the second error factor is obtained based on the measured value of the receiver at that time. Then, the network analyzer 1 is connected to the DUT 400 (S20).
- the ports 18, 28, 38, and 48 are connected to the DUT 400 through the first connection sections 110 a, 110 b, 110 c, and 110 d by the second connection section 210. Connect to each port.
- a signal is output from any of ports 18, 28, 38, and 48, and the circuit parameter measurement section 40 measures the S parameter of the DUT 400 from the measured value of the receiver (S22). .
- This measured value is affected by measurement system error factors. Therefore, the circuit parameter overnight measurement unit 40 reads the measurement system error factors recorded in the measurement system error factor recording unit 30 and reads the actually measured S parameters of the DUT 400. Then, the influence of the measurement system error factor is removed, and the true S parameter of the DUT 400 is measured (S24).
- the same effect as in the first embodiment can be obtained even when the number of ports of the network analyzer 1 and the DUT 400 is four.
- FIG. 12 is a diagram showing a configuration of a measurement system in which the error factor acquisition device according to the third embodiment of the present invention is used.
- the measurement system includes a network analyzer 1, a first calibrator 100, a second calibrator 200, a cable 300, a DUT 400, and a 9-port test set 500.
- the first calibrator 100 and the second calibrator 200 constitute an error factor acquisition device.
- the same parts as those of the second embodiment are denoted by the same reference numerals, and the description is omitted.
- the network analyzer 1, the first calibrator 100, the second calibrator 200, the cable 300, and the DUT 400 are the same as in the second embodiment.
- 9-port test set (branch connection means) 500 is port 502, 504, 506, 508, 512, 514, 516, 518, 520, 52 2, 5, 24, 5 26, and 5 28. Ports 502, 504, 506, 508 are connected to ports 106, 108, 105, 107, respectively. Ports 5 12, 5 14, 5 16, 5 18, 5 20, 5 22, 5 24, 5 26, 5 2 8 are each connected to port 202 I have.
- Figure 13 shows the internal configuration of the 9-port test set 500.
- Port 502 is connected to port 512 or 514.
- Port 504 is connected to port 514 or 516. However, if port 502 is connected to port 514, port 514 is connected to port 516.
- Port 506 is connected to ports 518, 520 or 522.
- Port 508 is connected to ports 524, 526 or 528. In this way, the ports 106, 108, 105, and 107 of the first calibrator 100 are connected to any of the ports 220 of the second calibrator 200. .
- the operation of the third embodiment is almost the same as that of the second embodiment.
- the ports 18, 28, 38, and 48 of the network analyzer 1 are connected to any of the second calibrators 200 using the 9-port test set 500.
- the third embodiment even if the number of ports (9) of the DUT 400 is larger than the number of ports (4) of the network analyzer 1, the first embodiment The same effect as in the embodiment can be obtained. Even if the number of ports of the DUT 400 is further increased, the same effect can be obtained by using a test head similar to the 9-port test set 500.
- FIG. 14 is a diagram showing a configuration of a measurement system in which the error factor acquisition device according to the fourth embodiment of the present invention is used.
- the measurement system includes a network analyzer 1, a first calibrator 100, a second calibrator 200, a cable 300, a wafer 410, and a wafer probe 420.
- the first calibrator 100 and the second calibrator 200 constitute an error factor acquisition device.
- the network analyzer 1, the first calibrator 100, the second calibrator 200, and the cable 300 are the same as in the first embodiment.
- the wafer 410 is intended for measurement by the network analyzer 1.
- FIG. 15 shows that the first connection 1 110a (110b) connects the port 18 (28) to the second calibrator 200, and the second connection 2110 Is a signal flow graph when port 202 is connected to wafer probe 420.
- FIG. 15 (a) is a signal flow graph when port 18 is an output port and port 28 is a reception port
- Fig. 15 (b) is port 18 as a reception port and port 28
- Fig. 4 is a signal flow graph when is used as an output port.
- the signal flow graph shown in FIG. 15 shows the first embodiment (see FIG. 5).
- the difference is that error factors P11, P12, P21, and P22 of the wafer probe 420 are further added.
- the wafer prop 420 is elaborately created and has little individual difference in electrical characteristics. Therefore, if the error factors P 11, P 12, P 21, and P 22 of the wafer probe 420 are recorded in advance in the measurement system error factor recording unit 30, the measured S parameters of the DUT 400 can be used. By removing the effects of the error factors P11, P12, P21 and P22, the true S-parameter of the DUT 400 can be measured.
- the operation of the fourth embodiment is almost the same as that of the first embodiment (see FIG. 6).
- the measurement system error factors recorded in the measurement system error factor recording unit 30 also include the error factors P11, P12, P21, and P22 of the wafer probe 420. Therefore, the circuit parameter overnight measurement unit 40 determines the measurement system error factors (first error factor, second error factor, and error factor P11, P12, P21) recorded in the measurement system error factor recording unit 30. , P22), and removes the influence of the measurement system error factor from the measured S-parameters of the DUT 400 to measure the true S-parameters of the DUT 400 (S24). Further, the above embodiment can be realized as follows.
- Each of the above parts (for example, the measurement system error factor recording unit 30, the CPU, hard disk, and media (floppy (registered trademark) disk, CD-1; ROM, etc.) Circuit Read the medium that stores the program that implements the parameter measurement unit 40, measurement system error factor acquisition unit 50, and reception-side measurement system error factor recording unit 70), and install it on the disk. Even in this way, The above functions can be realized
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Resistance Or Impedance (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Tests Of Electronic Circuits (AREA)
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2004800270077A CN100422752C (zh) | 2003-09-18 | 2004-09-14 | 误差因子获取器件 |
US10/572,381 US7348784B2 (en) | 2003-09-18 | 2004-09-14 | Error factor acquisition device, method, program, and recording medium |
DE112004001746T DE112004001746T5 (de) | 2003-09-18 | 2004-09-14 | Vorrichtung, Verfahren, Programm und Aufzeichnungsmedium zur Erfassung von Fehlerfaktoren |
KR1020067005342A KR100752252B1 (ko) | 2003-09-18 | 2004-09-14 | 오차 요인 취득용 장치, 오차 요인 취득 방법, 및 인스트럭션 프로그램을 기록한 컴퓨터 판독가능한 기록 매체 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2003325793A JP4274462B2 (ja) | 2003-09-18 | 2003-09-18 | 誤差要因取得用装置、方法、プログラムおよび記録媒体 |
JP2003-325793 | 2003-09-18 |
Publications (1)
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WO2005029102A1 true WO2005029102A1 (ja) | 2005-03-31 |
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PCT/JP2004/013713 WO2005029102A1 (ja) | 2003-09-18 | 2004-09-14 | 誤差要因取得用装置、方法、プログラムおよび記録媒体 |
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US (1) | US7348784B2 (ja) |
JP (1) | JP4274462B2 (ja) |
KR (1) | KR100752252B1 (ja) |
CN (1) | CN100422752C (ja) |
DE (1) | DE112004001746T5 (ja) |
TW (1) | TWI279553B (ja) |
WO (1) | WO2005029102A1 (ja) |
Families Citing this family (12)
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JP5242881B2 (ja) * | 2004-02-23 | 2013-07-24 | ローデ ウント シュワルツ ゲーエムベーハー ウント コー カーゲー | ネットワークアナライザ、ネットワーク解析方法、プログラムおよび記録媒体 |
TW200817688A (en) * | 2006-08-30 | 2008-04-16 | Advantest Corp | Element judging device, method, program, recording medium and measuring device |
JP4188396B2 (ja) * | 2006-08-31 | 2008-11-26 | 株式会社アドバンテスト | 誤差要因判定装置、方法、プログラム、記録媒体および該装置を備えた出力補正装置、反射係数測定装置 |
WO2008065791A1 (fr) * | 2006-11-30 | 2008-06-05 | Murata Manufacturing Co., Ltd. | Procédé de correction d'erreur de caractéristiques hautes fréquences d'un composant électronique |
US7518378B2 (en) * | 2007-02-13 | 2009-04-14 | Keithley Instruments, Inc. | Cable compensation for pulsed I-V measurements |
TWI407115B (zh) * | 2007-12-31 | 2013-09-01 | Hon Hai Prec Ind Co Ltd | 一種測量無源電路s參數之方法和實施該方法之測量裝置 |
US8484518B2 (en) * | 2009-04-28 | 2013-07-09 | Alcatel Lucent | System and method for consecutive identical digit reduction |
CN103328994B (zh) * | 2010-12-22 | 2016-10-26 | 爱德万测试公司 | 用于测试器的校准模块和测试器 |
TWI554772B (zh) * | 2013-12-13 | 2016-10-21 | Mpi Corp | Detection and debugging of the system |
US20160146920A1 (en) * | 2014-11-20 | 2016-05-26 | Sigurd Microelectronics Corp. | Rf parameter calibration method |
GB201602773D0 (en) | 2016-02-17 | 2016-03-30 | Orsus Medical Ltd | A method and apparatus for measuring the concentration of target substances in blood |
KR102592534B1 (ko) * | 2021-06-30 | 2023-10-24 | 한국표준과학연구원 | 산란계수 측정오차 보정 방법 |
Citations (2)
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JPH0688844A (ja) * | 1992-09-04 | 1994-03-29 | Kyocera Corp | マルチポート回路のsパラメータ測定方法 |
JPH10197577A (ja) * | 1997-01-10 | 1998-07-31 | Kyocera Corp | 高周波測定の校正標準器および校正法ならびに高周波用伝送線路の伝送損失の測定方法 |
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US4859936A (en) * | 1987-01-29 | 1989-08-22 | John Fluke Mfg. Co., Inc. | Method of and apparatus for determining AC calibration errors and apparatus using device with AC calibration errors |
JP4124841B2 (ja) | 1997-07-18 | 2008-07-23 | 株式会社アドバンテスト | ネットワーク・アナライザ、高周波周波数特性測定装置および誤差要因測定方法 |
JP2001153904A (ja) * | 1999-11-25 | 2001-06-08 | Advantest Corp | ネットワークアナライザ、ネットワーク解析方法および記録媒体 |
US6701265B2 (en) * | 2002-03-05 | 2004-03-02 | Tektronix, Inc. | Calibration for vector network analyzer |
US6853198B2 (en) * | 2002-11-14 | 2005-02-08 | Agilent Technologies, Inc. | Method and apparatus for performing multiport through-reflect-line calibration and measurement |
-
2003
- 2003-09-18 JP JP2003325793A patent/JP4274462B2/ja not_active Expired - Fee Related
-
2004
- 2004-09-14 DE DE112004001746T patent/DE112004001746T5/de not_active Withdrawn
- 2004-09-14 KR KR1020067005342A patent/KR100752252B1/ko not_active IP Right Cessation
- 2004-09-14 WO PCT/JP2004/013713 patent/WO2005029102A1/ja active Application Filing
- 2004-09-14 US US10/572,381 patent/US7348784B2/en not_active Expired - Fee Related
- 2004-09-14 CN CNB2004800270077A patent/CN100422752C/zh not_active Expired - Fee Related
- 2004-09-16 TW TW093128009A patent/TWI279553B/zh not_active IP Right Cessation
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JPH0688844A (ja) * | 1992-09-04 | 1994-03-29 | Kyocera Corp | マルチポート回路のsパラメータ測定方法 |
JPH10197577A (ja) * | 1997-01-10 | 1998-07-31 | Kyocera Corp | 高周波測定の校正標準器および校正法ならびに高周波用伝送線路の伝送損失の測定方法 |
Also Published As
Publication number | Publication date |
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KR20060040743A (ko) | 2006-05-10 |
CN1853109A (zh) | 2006-10-25 |
DE112004001746T5 (de) | 2008-03-06 |
US7348784B2 (en) | 2008-03-25 |
TWI279553B (en) | 2007-04-21 |
US20070029989A1 (en) | 2007-02-08 |
CN100422752C (zh) | 2008-10-01 |
KR100752252B1 (ko) | 2007-08-29 |
JP2005091194A (ja) | 2005-04-07 |
TW200513654A (en) | 2005-04-16 |
JP4274462B2 (ja) | 2009-06-10 |
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