WO2004101866A3 - Procede et dispositifs pour prolonger la duree d'utilisation d'une solution de procede utilisee dans un processus de revetement metallique par reduction chimique - Google Patents
Procede et dispositifs pour prolonger la duree d'utilisation d'une solution de procede utilisee dans un processus de revetement metallique par reduction chimique Download PDFInfo
- Publication number
- WO2004101866A3 WO2004101866A3 PCT/DE2004/001043 DE2004001043W WO2004101866A3 WO 2004101866 A3 WO2004101866 A3 WO 2004101866A3 DE 2004001043 W DE2004001043 W DE 2004001043W WO 2004101866 A3 WO2004101866 A3 WO 2004101866A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- process solution
- chemical
- service life
- coating
- interfering
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1617—Purification and regeneration of coating baths
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/12—Process control or regulation
- C25D21/14—Controlled addition of electrolyte components
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/16—Regeneration of process solutions
- C25D21/22—Regeneration of process solutions by ion-exchange
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electrochemistry (AREA)
- Automation & Control Theory (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Chemically Coating (AREA)
- Chemical Treatment Of Metals (AREA)
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP04738516A EP1623058A2 (fr) | 2003-05-12 | 2004-05-12 | Procede et dispositifs pour prolonger la duree d'utilisation d'une solution de procede utilisee dans un processus de revetement metallique par reduction chimique |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10322120.4 | 2003-05-12 | ||
DE2003122120 DE10322120A1 (de) | 2003-05-12 | 2003-05-12 | Verfahren und Vorrichtungen zur Verlängerung der Nutzungsdauer einer Prozesslösung für die chemisch-reduktive Metallbeschichtung |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2004101866A2 WO2004101866A2 (fr) | 2004-11-25 |
WO2004101866A3 true WO2004101866A3 (fr) | 2005-07-21 |
Family
ID=33440894
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE2004/001043 WO2004101866A2 (fr) | 2003-05-12 | 2004-05-12 | Procede et dispositifs pour prolonger la duree d'utilisation d'une solution de procede utilisee dans un processus de revetement metallique par reduction chimique |
Country Status (3)
Country | Link |
---|---|
EP (2) | EP2039810A3 (fr) |
DE (1) | DE10322120A1 (fr) |
WO (1) | WO2004101866A2 (fr) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102004038693B4 (de) * | 2004-08-10 | 2010-02-25 | Blasberg Werra Chemie Gmbh | Vorrichtung und Verfahren zur Entfernung von Fremdstoffen aus Prozesslösungen und Verfahren zur Regenerierung eines Kationenaustauschers |
ES2698205T3 (es) | 2005-11-25 | 2019-02-01 | Macdermid Enthone Inc | Procedimiento y dispositivo para la purificación de soluciones de proceso |
DE102008056776A1 (de) | 2008-11-11 | 2010-05-12 | Enthone Inc., West Haven | Galvanisches Bad und Verfahren zur Abscheidung von zinkhaltigen Schichten |
DE102018008312A1 (de) * | 2018-10-22 | 2020-04-23 | RIAG Oberflächentechnik AG | Verfahren zur Beschichtung von Substratoberflächen, Vorrichtung mit Beschichtungsbad, Dichtemesseinrichtung, Entnahmeeinrichtung, Zugabeeinrichtungen und Steuerung |
CN110880449B (zh) * | 2019-09-30 | 2022-07-19 | 王偲偲 | 一种硅片清洗方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4863612A (en) * | 1987-08-10 | 1989-09-05 | Kinetico, Inc. | Apparatus and method for recovering materials from process baths |
US5112392A (en) * | 1991-06-21 | 1992-05-12 | Martin Marietta Energy Systems, Inc. | Recovery process for electroless plating baths |
DE4310366C1 (de) * | 1993-03-30 | 1994-10-13 | Fraunhofer Ges Forschung | Verfahren zum Regenerieren von wässrigen, außenstromlos arbeitenden Beschichtungsbädern |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2726968A (en) | 1953-12-03 | 1955-12-13 | Gen Motors Corp | Electroless nickel solution control |
US2726969A (en) | 1953-12-03 | 1955-12-13 | Gen Motors Corp | Chemical reduction plating process |
DE19851180C1 (de) * | 1998-11-06 | 2000-04-20 | Guv Ges Fuer Umweltvertraeglic | Verfahren zum Regenerieren einer Prozeßlösung |
-
2003
- 2003-05-12 DE DE2003122120 patent/DE10322120A1/de not_active Ceased
-
2004
- 2004-05-12 EP EP08022592A patent/EP2039810A3/fr not_active Withdrawn
- 2004-05-12 EP EP04738516A patent/EP1623058A2/fr not_active Withdrawn
- 2004-05-12 WO PCT/DE2004/001043 patent/WO2004101866A2/fr active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4863612A (en) * | 1987-08-10 | 1989-09-05 | Kinetico, Inc. | Apparatus and method for recovering materials from process baths |
US4863612B1 (en) * | 1987-08-10 | 1994-11-01 | Kineticon Inc | Apparatus and method for recovering materials from process baths |
US5112392A (en) * | 1991-06-21 | 1992-05-12 | Martin Marietta Energy Systems, Inc. | Recovery process for electroless plating baths |
DE4310366C1 (de) * | 1993-03-30 | 1994-10-13 | Fraunhofer Ges Forschung | Verfahren zum Regenerieren von wässrigen, außenstromlos arbeitenden Beschichtungsbädern |
Non-Patent Citations (1)
Title |
---|
CLEAN PRODUCTS AND PROCESSES, vol. 2, no. 4, 2001, HEIDELBERG, pages 209 - 219, XP008041196 * |
Also Published As
Publication number | Publication date |
---|---|
WO2004101866A2 (fr) | 2004-11-25 |
EP2039810A3 (fr) | 2011-11-02 |
EP2039810A2 (fr) | 2009-03-25 |
EP1623058A2 (fr) | 2006-02-08 |
EP2039810A8 (fr) | 2011-12-14 |
DE10322120A1 (de) | 2004-12-09 |
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