WO2004099622A1 - Pompe rotative - Google Patents

Pompe rotative Download PDF

Info

Publication number
WO2004099622A1
WO2004099622A1 PCT/EP2004/004713 EP2004004713W WO2004099622A1 WO 2004099622 A1 WO2004099622 A1 WO 2004099622A1 EP 2004004713 W EP2004004713 W EP 2004004713W WO 2004099622 A1 WO2004099622 A1 WO 2004099622A1
Authority
WO
WIPO (PCT)
Prior art keywords
housing
ring
outer ring
bearing
rotor
Prior art date
Application number
PCT/EP2004/004713
Other languages
German (de)
English (en)
Inventor
Christian Beyer
Heinrich Engländer
Original Assignee
Leybold Vakuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum Gmbh filed Critical Leybold Vakuum Gmbh
Publication of WO2004099622A1 publication Critical patent/WO2004099622A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/051—Axial thrust balancing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C25/00—Bearings for exclusively rotary movement adjustable for wear or play
    • F16C25/06—Ball or roller bearings
    • F16C25/08—Ball or roller bearings self-adjusting
    • F16C25/086—Ball or roller bearings self-adjusting with magnetic means to preload the bearing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C27/00—Elastic or yielding bearings or bearing supports, for exclusively rotary movement
    • F16C27/06—Elastic or yielding bearings or bearing supports, for exclusively rotary movement by means of parts of rubber or like materials
    • F16C27/066—Ball or roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00—Bearings with rolling contact, for exclusively rotary movement
    • F16C19/54—Systems consisting of a plurality of bearings with rolling friction
    • F16C19/546—Systems with spaced apart rolling bearings including at least one angular contact bearing
    • F16C19/547—Systems with spaced apart rolling bearings including at least one angular contact bearing with two angular contact rolling bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Definitions

  • the invention relates to a turbomolecular pump or a turbovacuum pump and in particular to the mounting of the rotor shaft in a turbovacuum pump.
  • DE 197 09 205 AI (Leybold) describes a vacuum pump with a shaft bearing in which the rotor shaft is mounted in roller bearings.
  • the roller bearings are ball bearings, the outer ring of which is axially supported on the housing.
  • the outer ring sits in a sliding sleeve, which is surrounded by a damping elastomeric O-ring.
  • a high-speed turbopump of a similar type is described in DE 199 55 517 AI (Leybold).
  • the outer ring of the ball bearing supporting the rotor shaft is supported on the housing in physical contact with the housing.
  • the invention has for its object to improve the bearing of the rotor shaft with regard to the rotor vibrations transmitted to the housing in a turbo vacuum pump.
  • the support device which supports the outer ring of a rolling bearing on the housing side, consists of at least one rolling bearing from a magnet arrangement of two repelling magnets that form an axial air gap.
  • the bearing arrangement according to the invention brings about contactless axial support of the bearings on the housing, as a result of which the transmission of rotor vibrations to the housing is reduced.
  • Two repulsive magnetic ring pairs are installed on the bearing contact surfaces to the housing, which form a very small air gap.
  • the air gap is only in the order of magnitude of the wave play.
  • One ring is supported against the housing and the other ring against the outer ring of the rolling bearing.
  • the negative rigidity of the magnet arrangement ensures that the ball bearings are preloaded.
  • the contactless axial support of the bearings prevents the additional transmission of radial vibratory movements due to friction. Misalignments of the bearing outer rings are also compensated for.
  • the invention is particularly applicable to high-speed turbo vacuum pumps in which the speed is above 15,000 rpm.
  • the invention has particularly favorable effects in a speed range above 27,000 rpm.
  • the invention is applicable to turbomolecular pumps and other turbovacuum pumps, such as turbostream pumps.
  • the outer ring of the rolling bearing is axially movably guided in a sliding sleeve of the housing.
  • the 'sliding sleeve can be held movable in an elastic O-ring.
  • Fig. 1 shows a longitudinal section through a turbomolecular pump
  • FIG. 2 is an enlarged. Representation of detail II from FIG. 1.
  • the turbomolecular pump shown has a stator 10 with numerous inwardly projecting stator disks 11, which is mounted in the pump part 12b of a housing 12.
  • the housing 12 also includes a motor part 12a.
  • Rotor disks 13 of a rotor 14 protrude between the stator disks 11.
  • the distances between the stator disks and rotor disks are of the order of millimeters. If the circumferential If the speed at the outer edge of the rotor disks is in the order of magnitude of the average thermal speed of the gas molecules to be pumped, the pumping effect is achieved to the desired extent. This is the case at rotor speeds of around 36,000 rpm up to 72,000 rpm.
  • the rotor 14 is mounted on a rotor shaft 15 which is mounted in the motor part 12a of the housing 12 with two bearing devices 16 and 17.
  • the rotor 18 is fastened on the rotor shaft 15 between the two bearing devices 16, 17. This has several permanent magnets arranged in a distributed manner.
  • the windings 19 of the motor 20 are located in a recess of the motor part 12a of the housing.
  • the recess is sealed with a sleeve 24 which is permeable to magnetic fields.
  • the bearing device 16 facing the rotor 14 is arranged in a bore in the motor part 12a. It contains a roller bearing 21, which is designed here as a ball bearing, and an axially acting support device.
  • the bearing device 17 of the rear end of the rotor shaft is accommodated in a housing cover 23 of the motor part 12a. It also contains a roller bearing 21a and a magnetic support device 22a.
  • the rotor shaft 15 rotates at a speed of over 27,000 rpm, whereby the rotor 14 also rotates. This creates a high vacuum in the pump part 12b of the housing 12.
  • the outlet of the pump is connected to a backing pump that counteracts the gas that is expelled Atmosphere condensed. For this reason, the pump part is sealed off from the motor part by a plurality of seals 25, 26 and 27, the interior of the sleeve 24 being assigned to the vacuum region.
  • the bearing device 16 is described below with reference to FIG. 2.
  • the bearing device 17 is designed in a corresponding manner.
  • the roller bearing 21 has an inner ring 30 which sits on a section of the rotor shaft 15 and presses against an annular shoulder 31 of the rotor shaft.
  • the inner ring 30 is supported on the opposite side by a sleeve 32, the end of which presses against a wall 33 of the pump part 12b.
  • the inner ring 30 is fixed immovably on the rotor shaft 15 by a clamping device 29 (FIG. 1).
  • a supporting force which is generated by the support device 22, acts on the outer ring 34 from the rotor side (in the drawings: from above). This support force tends to push the outer ring 34 down and prevent it from moving upward.
  • the design of the ball bearing prevents the outer ring from migrating downwards.
  • the support device 22 consists of a magnet arrangement consisting of a first magnet 35, which is supported on the motor part 12a and a second magnet 36, which is supported on the outer ring 34 of the roller bearing 21.
  • Both magnets 35, 36 are ring magnets which surround the sleeve 32 and are magnetized axially to the rotor shaft. These are permanent magnets, the same poles (eg north poles) facing each other, so that the magnets 35, 36 repel each other.
  • the bearing with the magnet arrangement is positioned such that there is a very small air gap 37 of the order of a tenth of a millimeter between the magnets 35, 36.
  • the outer ring 34 of the roller bearing 21 is contained in a sliding sleeve 38, which in turn is guided in a corresponding recess in the pump part 12b of the housing.
  • an O-ring 40 made of elastomer material, which projects into an outer ring groove of the sliding sleeve 38.
  • the O-ring 40 enables the sliding sleeve 38 to be able to adapt to misalignments to a certain extent and, on the other hand, has a vibration-damping effect.
  • the bearing device 17 at the rear end of the rotor shaft 15 is generally designed in the same way. It has two ring-shaped magnets 35, 36 which are axially polarized and face one another with poles of the same name.
  • the outer magnet 35 is supported in the cover 23 of the motor part 12a and the other magnet 36 is supported on the outer ring of the roller bearing 21a.
  • a sliding sleeve 38 is also provided here. However, the sliding sleeve is not absolutely necessary in both cases.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Rolling Contact Bearings (AREA)

Abstract

L'invention concerne une pompe à vide rotative servant à créer un vide poussé. Cette pompe comprend un arbre rotor (15) à vitesse de rotation élevée qui est monté dans deux paliers à roulement (21, 21a). La bague extérieure (34) d'un palier à roulement est précontrainte dans le sens axial par un système d'aimants comprenant deux aimants annulaires (35, 36) entre lesquels un entrefer (37) est formé. Cette configuration permet d'empêcher que des vibrations génératrices de bruit soient transmises du rotor au carter (12).
PCT/EP2004/004713 2003-05-09 2004-05-04 Pompe rotative WO2004099622A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10320851.8 2003-05-09
DE10320851A DE10320851A1 (de) 2003-05-09 2003-05-09 Turbopumpe

Publications (1)

Publication Number Publication Date
WO2004099622A1 true WO2004099622A1 (fr) 2004-11-18

Family

ID=33394387

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2004/004713 WO2004099622A1 (fr) 2003-05-09 2004-05-04 Pompe rotative

Country Status (3)

Country Link
DE (1) DE10320851A1 (fr)
TW (1) TW200506222A (fr)
WO (1) WO2004099622A1 (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008035113A1 (fr) 2006-09-22 2008-03-27 Edwards Limited Pompe à vide
US20100104428A1 (en) * 2006-09-22 2010-04-29 Martin Ernst Tollner Molecular drag pumping mechanism
CN103644145A (zh) * 2013-12-04 2014-03-19 江苏大学 一种盘管冷却结构的热水循环泵悬架体
CN104185736A (zh) * 2012-04-04 2014-12-03 株式会社岛津制作所 真空泵
US20160069391A1 (en) * 2014-09-10 2016-03-10 Shimadzu Corporation Vacuum pump
WO2022020343A1 (fr) * 2020-07-20 2022-01-27 Milwaukee Electric Tool Corporation Système et ensemble de palier de moteur électrique

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0509190D0 (en) * 2005-05-05 2005-06-15 Boc Group Plc Vacuum pump
GB0511877D0 (en) 2005-06-10 2005-07-20 Boc Group Plc Vacuum pump
DE102011080796B4 (de) * 2011-08-11 2023-05-25 Aktiebolaget Skf Axial belastbare Lageranordnung
DE102018115160A1 (de) * 2018-06-25 2020-01-02 Ebm-Papst St. Georgen Gmbh & Co. Kg Aufnahme für ein Drehlager
CN109026826B (zh) * 2018-09-18 2024-03-29 台州德基水泵科技有限公司 一种降噪自吸泵
GB2581203A (en) * 2019-02-11 2020-08-12 Edwards Ltd Vacuum pump

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3011078A1 (de) * 1979-03-20 1980-09-25 Aerospatiale Lagerbock mit faktisch null-laengsspiel aufweisendem lager
DE2942008A1 (de) * 1979-10-17 1981-04-30 Leybold Heraeus Gmbh & Co Kg Wellenlagerung
JPS60252194A (ja) * 1984-05-28 1985-12-12 Shimadzu Corp タ−ボ分子ポンプ
US4655616A (en) * 1985-09-25 1987-04-07 Magtrol, Inc. Computer direct disc drive with magnetically stabilized shaft
DE19709205A1 (de) * 1997-03-06 1998-09-10 Leybold Vakuum Gmbh Vakuumpumpe mit Wellenlagerung
EP1220421A2 (fr) * 2000-12-26 2002-07-03 Kabushiki Kaisha Topcon Moteur rotatif de petite dimension

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2735535B1 (fr) * 1995-06-16 1997-07-11 Cit Alcatel Pompe turbomoleculaire
ITTO980453A1 (it) * 1998-05-27 1999-11-29 Varian Spa Pompa da vuoto compatta
DE19955517A1 (de) * 1999-11-18 2001-05-23 Leybold Vakuum Gmbh Schnelllaufende Turbopumpe
DE10043235A1 (de) * 2000-09-02 2002-03-14 Leybold Vakuum Gmbh Vakuumpumpe

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3011078A1 (de) * 1979-03-20 1980-09-25 Aerospatiale Lagerbock mit faktisch null-laengsspiel aufweisendem lager
DE2942008A1 (de) * 1979-10-17 1981-04-30 Leybold Heraeus Gmbh & Co Kg Wellenlagerung
JPS60252194A (ja) * 1984-05-28 1985-12-12 Shimadzu Corp タ−ボ分子ポンプ
US4655616A (en) * 1985-09-25 1987-04-07 Magtrol, Inc. Computer direct disc drive with magnetically stabilized shaft
DE19709205A1 (de) * 1997-03-06 1998-09-10 Leybold Vakuum Gmbh Vakuumpumpe mit Wellenlagerung
EP1220421A2 (fr) * 2000-12-26 2002-07-03 Kabushiki Kaisha Topcon Moteur rotatif de petite dimension

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 010, no. 126 (M - 477) 10 May 1986 (1986-05-10) *

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008035113A1 (fr) 2006-09-22 2008-03-27 Edwards Limited Pompe à vide
US20100104428A1 (en) * 2006-09-22 2010-04-29 Martin Ernst Tollner Molecular drag pumping mechanism
US8662841B2 (en) 2006-09-22 2014-03-04 Edwards Limited Vacuum pump
CN104185736A (zh) * 2012-04-04 2014-12-03 株式会社岛津制作所 真空泵
US10590961B2 (en) 2012-04-04 2020-03-17 Shimadzu Corporation Vacuum pump
CN103644145A (zh) * 2013-12-04 2014-03-19 江苏大学 一种盘管冷却结构的热水循环泵悬架体
CN103644145B (zh) * 2013-12-04 2016-01-27 江苏大学 一种盘管冷却结构的热水循环泵悬架体
US20160069391A1 (en) * 2014-09-10 2016-03-10 Shimadzu Corporation Vacuum pump
CN105402142A (zh) * 2014-09-10 2016-03-16 株式会社岛津制作所 真空泵
US9816562B2 (en) * 2014-09-10 2017-11-14 Shimadzu Corporation Vacuum pump
WO2022020343A1 (fr) * 2020-07-20 2022-01-27 Milwaukee Electric Tool Corporation Système et ensemble de palier de moteur électrique
EP4183031A4 (fr) * 2020-07-20 2024-07-31 Milwaukee Electric Tool Corp Système et ensemble de palier de moteur électrique

Also Published As

Publication number Publication date
TW200506222A (en) 2005-02-16
DE10320851A1 (de) 2004-11-25

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