EP0344503A2 - Pallier magnétique pour une pompe à vide tournant à grande vitesse - Google Patents

Pallier magnétique pour une pompe à vide tournant à grande vitesse Download PDF

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Publication number
EP0344503A2
EP0344503A2 EP89108664A EP89108664A EP0344503A2 EP 0344503 A2 EP0344503 A2 EP 0344503A2 EP 89108664 A EP89108664 A EP 89108664A EP 89108664 A EP89108664 A EP 89108664A EP 0344503 A2 EP0344503 A2 EP 0344503A2
Authority
EP
European Patent Office
Prior art keywords
rotor
magnetic
bearing
axial
magnetic bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP89108664A
Other languages
German (de)
English (en)
Other versions
EP0344503A3 (en
EP0344503B1 (fr
Inventor
Helmut Bernardt
Karl-Heinz Bernhardt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Arthur Pfeiffer Vakuumtechnik Wetzlar GmbH
Balzers Pfeiffer GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Arthur Pfeiffer Vakuumtechnik Wetzlar GmbH, Balzers Pfeiffer GmbH filed Critical Arthur Pfeiffer Vakuumtechnik Wetzlar GmbH
Priority to AT89108664T priority Critical patent/ATE99775T1/de
Publication of EP0344503A2 publication Critical patent/EP0344503A2/fr
Publication of EP0344503A3 publication Critical patent/EP0344503A3/de
Application granted granted Critical
Publication of EP0344503B1 publication Critical patent/EP0344503B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0474—Active magnetic bearings for rotary movement
    • F16C32/0476—Active magnetic bearings for rotary movement with active support of one degree of freedom, e.g. axial magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/0408—Passive magnetic bearings
    • F16C32/0423—Passive magnetic bearings with permanent magnets on both parts repelling each other
    • F16C32/0425—Passive magnetic bearings with permanent magnets on both parts repelling each other for radial load mainly
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0442—Active magnetic bearings with devices affected by abnormal, undesired or non-standard conditions such as shock-load, power outage, start-up or touchdown
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C39/00—Relieving load on bearings
    • F16C39/02—Relieving load on bearings using mechanical means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Definitions

  • the invention relates to a magnetic bearing for a rapidly rotating vacuum pump according to the preamble of the first claim, in particular for a turbomolecular pump.
  • a magnetic bearing actively controlled in five axes with lifting magnets is known, e.g. from DE PS 23 49 033, and a three-axis controlled magnetic bearing for a turbomolecular pump with a radial passive magnetic bearing from DE-0S 33 41 716.
  • the present invention has for its object to provide a magnetic bearing with only one axial control loop with simple linearizability between current and force and with little dependence between centering radial force and axial displacement of the rotor. If the active control fails, the shaft should be centered in the emergency camp without additional aids.
  • the rotor which generates an axial pumping effect in contactless interaction with the stator elements, is mounted in two passive, radially centering magnetic bearings.
  • One of the bearings is located on the high vacuum side of the pump, the other on the fore vacuum side.
  • the bearings consist of rings that are concentrically stacked on top of each other.
  • the inner rings are fixed to the housing and the outer rings are built into the rotor.
  • the working point of the magnetic bearing is chosen so that the rotor part of the magnetic bearing an amount which is small against the length of a magnetic ring against the stator part is shifted towards the high vacuum side of the pump. This results in a force on the rotor towards the high vacuum side that is proportional to the displacement between the rotor and the stator.
  • the radial centering force which is greatest at the unstable point (without axial rotor offset), is only slightly reduced by this shift.
  • the axial force generated by the passive radial bearings is compensated for by an electric solenoid, over the pole faces of which a disk attached to the rotor shaft rotates.
  • the axial position of the rotor is measured by a position sensor which regulates the current in the lifting magnet with the aid of an electronic control device so that the rotor is kept in suspension.
  • the lifting force is proportional to the square of the current and inversely proportional to the square of the air gap.
  • An embodiment of the radial bearing according to claim 1 with constant destabilizing axial stiffness allows a control device in which only the non-linearities of the solenoid in the controller have to be compensated. Linearizations of non-linearities of the axial force are not necessary.
  • the arrangement of the lower emergency bearing consisting of two play-free paired roller bearings between the tightening disk and the lower magnetic bearing with both axial and radial movement restrictions for the shaft, is particularly advantageous.
  • the tightening disc with the hub according to the invention made of a wear-resistant, well-slidable material with a molded cone, forms, together with the lower rolling bearing with a ground cone, a centering unit that automatically centers the rotor in the emergency camp if the electromagnet fails due to the upward force of the magnetic bearings.
  • the arrangement of the emergency bearing unit according to claim 2 limits the axial play of the rotor to a small range ⁇ z1 + ⁇ z2, in which the controller is stable in the event of external disturbances, ie the rotor returns to the axial operating point without generating vibrations.
  • ⁇ z1 is the distance of the conical emergency bearing stop from the working point
  • ⁇ r is the radial play of the emergency bearing. If tg ⁇ increases, the radial play is restricted; the centering becomes worse at a smaller angle.
  • An air gap is formed between the pulling washer and the magnet, the width of which can be adjusted particularly easily in the arrangement of the position sensor and shaft nut, as described in claim 5, the sum of the lengths of the shaft nut and position sensor being equal to the length of the electrical lifting magnet.
  • the air gaps between the tightening disc and solenoid on the one hand and between the shaft nut and position sensor on the other hand are the same.
  • the air gap between the shaft nut and the position sensor can be easily measured using the sensor voltage.
  • a radial force-free motor with air coil as described in DE-OS 34 32 946, is used to drive the pump. This prevents weakening of the radial bearings due to destabilizing forces.
  • the device described in DE-PS 32 39 328 is used for damping radial rotor vibrations.
  • the stator blades 4 are mounted in the housing 1, which is equipped with a high vacuum flange 2 and a fore vacuum flange 3.
  • the magnetically mounted rotor 5 carries the rotor blades 6, which rotate contactlessly between the stator blades 4 and thus bring about a pumping effect.
  • the rotor 5 is driven by a radial force-free motor 7.
  • the power supply to the motor and the position control of the rotor, as described in more detail below, takes place via the electrical connection 8.
  • the rotor is centered radially by two passive magnetic bearings, each consisting of a magnetic bearing rotor 9 and a magnetic bearing stator 10.
  • One magnetic bearing is on the high vacuum side and the second on the fore vacuum side.
  • the stator and rotor of the magnetic bearings consist of rings stacked concentrically on the same pole.
  • the inner rings, which form the magnetic bearing stator 10 are fixed to the housing, and the outer rings, which form the magnetic bearing rotor 9, are installed in the rotor 5.
  • the operating point of the magnetic bearings is selected so that the rotor rings 9 are displaced against the stator rings 10 in the direction of the high vacuum flange 2. This results in a force on the rotor 5 in the direction of the high vacuum flange 2. This axial force is compensated by an electrical lifting magnet 11.
  • the current of the solenoid 11 is controlled by a position sensor 12, which registers the axial position of the rotor 5, via an electronic control device 13.
  • Two emergency camps 14 and 15, one on the fore-vacuum side and one on the high-vacuum side, are provided in the event of a malfunction of the magnetic bearing.
  • a device for damping rotor vibrations is designated 16 and described in more detail in DE-PS 32 39 328.
  • Fig. 2 shows an enlarged section of the lower storage area.
  • the yoke of the lifting magnet 11 is formed by a disk mounted on the rotor shaft, which is designated here with a tightening disk 17.
  • the air gap between the tightening disk 17 and the solenoid 11 is designated 18, and the air gap between the shaft nut 20 and the sensor 12 is designated 19.
  • the tightening disk 17 is connected to the rotor shaft via a hub 21.
  • This hub 21 of the tightening disk 17 is provided on the side opposite the lower emergency bearing 14 with a cone 22 which, together with the inner cone 23 of the lower emergency bearing 14, forms a centering unit.
  • the arrangement of the solenoid 11 and position sensor 12 according to claim 5 results in simple assembly. First you set the shaft axially with an auxiliary device by the air gap width lower than the intended working point and center the magnet in this position. The intended air gap 19 is then set with the position sensor 12. The inventive arrangement of solenoid 11 and position sensor 12 ensures that the air gap 18 is equal to the air gap 19 between the position sensor 12 and shaft nut 20.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP89108664A 1988-06-01 1989-05-13 Pallier magnétique pour une pompe à vide tournant à grande vitesse Expired - Lifetime EP0344503B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT89108664T ATE99775T1 (de) 1988-06-01 1989-05-13 Magnetlagerung fuer eine schnell rotierende vakuumpumpe.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3818556A DE3818556A1 (de) 1988-06-01 1988-06-01 Magnetlager fuer eine schnell rotierende vakuumpumpe
DE3818556 1988-06-01

Publications (3)

Publication Number Publication Date
EP0344503A2 true EP0344503A2 (fr) 1989-12-06
EP0344503A3 EP0344503A3 (en) 1990-11-14
EP0344503B1 EP0344503B1 (fr) 1994-01-05

Family

ID=6355551

Family Applications (1)

Application Number Title Priority Date Filing Date
EP89108664A Expired - Lifetime EP0344503B1 (fr) 1988-06-01 1989-05-13 Pallier magnétique pour une pompe à vide tournant à grande vitesse

Country Status (5)

Country Link
US (1) US5166566A (fr)
EP (1) EP0344503B1 (fr)
JP (1) JPH0272216A (fr)
AT (1) ATE99775T1 (fr)
DE (2) DE3818556A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5104284A (en) * 1990-12-17 1992-04-14 Dresser-Rand Company Thrust compensating apparatus
US6102890A (en) * 1998-10-23 2000-08-15 Scimed Life Systems, Inc. Catheter having improved proximal shaft design
WO2014099845A1 (fr) * 2012-12-18 2014-06-26 Abb Research Ltd. Palier de butée magnétique
EP3805568A4 (fr) * 2018-06-01 2022-03-02 Edwards Japan Limited Pompe à vide et cible de capteur

Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0396849B1 (fr) * 1989-05-08 1994-08-10 Nippon Ferrofluidics Corporation Dispositif de palier magnétique
US5354179A (en) * 1990-08-01 1994-10-11 Matsushita Electric Industrial Co., Ltd. Fluid rotating apparatus
JP2513943B2 (ja) * 1991-05-15 1996-07-10 株式会社荏原製作所 磁気軸受装置
JP3074845B2 (ja) * 1991-10-08 2000-08-07 松下電器産業株式会社 流体回転装置
JPH05195957A (ja) * 1992-01-23 1993-08-06 Matsushita Electric Ind Co Ltd 真空ポンプ
JPH05202855A (ja) * 1992-01-29 1993-08-10 Matsushita Electric Ind Co Ltd 流体回転装置
JPH05272478A (ja) * 1992-01-31 1993-10-19 Matsushita Electric Ind Co Ltd 真空ポンプ
JPH05209589A (ja) * 1992-01-31 1993-08-20 Matsushita Electric Ind Co Ltd 流体回転装置
JPH0712091A (ja) * 1993-09-24 1995-01-17 Ebara Corp 磁気軸受装置
FR2715201B1 (fr) * 1994-01-19 1996-02-09 Inst Nat Polytech Grenoble Palier magnétique et ensemble comportant une partie statorique et une partie rotorique suspendue par un tel palier.
DE4410656A1 (de) * 1994-03-26 1995-09-28 Balzers Pfeiffer Gmbh Reibungspumpe
DE4427154A1 (de) * 1994-08-01 1996-02-08 Balzers Pfeiffer Gmbh Reibungspumpe mit Magnetlagerung
DE4427153A1 (de) * 1994-08-01 1996-02-08 Balzers Pfeiffer Gmbh Fluteinrichtung für magnetisch gelagerte Vakuumpumpen
FR2728738B1 (fr) * 1994-12-26 1997-01-31 Cit Alcatel Ensemble tournant comportant notamment des moyens de sustentation radiaux et une butee axiale magnetique
US6019581A (en) * 1995-08-08 2000-02-01 Leybold Aktiengesellschaft Friction vacuum pump with cooling arrangement
US5812477A (en) * 1996-10-03 1998-09-22 Micron Technology, Inc. Antifuse detection circuit
GB9703685D0 (en) 1997-02-21 1997-04-09 Glacier Metal Co Ltd Centrifugal separator
JP3452468B2 (ja) * 1997-08-15 2003-09-29 株式会社荏原製作所 ターボ分子ポンプ
US6071092A (en) * 1998-03-10 2000-06-06 Varian, Inc. Vacuum pump with improved back-up bearing assembly
JP2001241393A (ja) * 1999-12-21 2001-09-07 Seiko Seiki Co Ltd 真空ポンプ
DE10022062A1 (de) * 2000-05-06 2001-11-08 Leybold Vakuum Gmbh Maschine, vorzugsweise Vakuumpumpe, mit Magnetlagern
DE10043302A1 (de) * 2000-09-02 2002-03-14 Forschungszentrum Juelich Gmbh Magnetlagerung
DE10043235A1 (de) 2000-09-02 2002-03-14 Leybold Vakuum Gmbh Vakuumpumpe
FR2831621B1 (fr) * 2001-10-25 2004-02-13 Cit Alcatel Utilisation des billes en zircone pour les roulements d'atterrissage des pompes turbomoleculaires sur palier magnetique
DE602004025916D1 (de) * 2004-07-20 2010-04-22 Varian Spa Rotationsvakuumpumpe und ihr Auswuchtverfahren
DE102007036692A1 (de) 2006-09-22 2008-03-27 Ebm-Papst St. Georgen Gmbh & Co. Kg Lüfter
US7474025B1 (en) * 2007-08-04 2009-01-06 Hiwin Mikrosystem Corp. Main shaft clearance eliminating structure for a direct drive torque motor
DE102008016617A1 (de) 2008-04-01 2009-10-15 Efficient Energy Gmbh Rotor-/Stator-Kombination, Verfahren zum Betreiben einer Rotor-/Stator-Kombination und Verfahren zum Herstellen einer Rotor-/Stator-Kombination
DE102008035891A1 (de) * 2008-07-31 2010-02-04 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102009055888A1 (de) * 2009-11-26 2011-06-01 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
US11149737B2 (en) * 2010-05-21 2021-10-19 Edwards Japan Limited Deposition detection device for exhaust pump and exhaust pump having the same
JP2012065524A (ja) * 2010-09-20 2012-03-29 Advics Co Ltd 回転軸支持構造およびそれを有するマグネット式モータ
DE102011105806A1 (de) * 2011-05-05 2012-11-08 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Rotor
JP5578159B2 (ja) * 2011-11-18 2014-08-27 株式会社豊田自動織機 車両用圧縮機
JP6427963B2 (ja) * 2014-06-03 2018-11-28 株式会社島津製作所 真空ポンプ
DE102014112553A1 (de) * 2014-09-01 2016-03-03 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3196471B1 (fr) * 2016-01-19 2023-08-23 Pfeiffer Vacuum Gmbh Pompe a vide
JP7371852B2 (ja) * 2019-07-17 2023-10-31 エドワーズ株式会社 真空ポンプ
GB2588146A (en) * 2019-10-09 2021-04-21 Edwards Ltd Vacuum pump
CN113175479A (zh) * 2021-04-30 2021-07-27 清华大学 一种用于立式磁轴承台架的具有自定心功能的保护轴承

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DE2349033A1 (de) * 1973-09-29 1975-04-10 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe
DE2457783A1 (de) * 1974-12-06 1976-06-16 Pfeiffer Vakuumtechnik Magnetische anordnung
FR2309754A1 (fr) * 1975-05-02 1976-11-26 Teldix Gmbh Ensemble de paliers magnetiques
DE2524061A1 (de) * 1975-05-30 1976-12-09 Pfeiffer Vakuumtechnik Magnetisch gelagerte turbovakuumpumpe mit fanglager
CH634926A5 (en) * 1977-06-28 1983-02-28 Licentia Gmbh Lower magnetic bearing for the rotor shaft of an electricity meter

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JPS5663106A (en) * 1979-10-23 1981-05-29 Matsushita Electric Ind Co Ltd Negative pressure actuator
FR2511558B1 (fr) * 1981-08-17 1987-04-30 Aerospatiale Equipement pour le stockage de l'energie sous forme cinetique et la restitution de celle-ci sous forme electrique, et procede de mise en oeuvre de cet equipement
JPS5841296A (ja) * 1981-09-04 1983-03-10 Seiko Instr & Electronics Ltd 磁気軸受を応用した小型軸流分子ポンプ
DE3141841A1 (de) * 1981-10-22 1983-05-05 Brown, Boveri & Cie Ag, 6800 Mannheim "zentrier- und fangvorrichtung fuer beruehrungslos gelagerte rotoren"
FR2528127A1 (fr) * 1982-06-04 1983-12-09 Creusot Loire Moto-compresseur centrifuge electrique integre a grande vitesse
FR2532009B1 (fr) * 1982-08-19 1986-06-06 Aerospatiale Agencement de roue cinetique a paliers magnetiques, particulierement destine a servir d'accumulateur d'energie
DE3239328C2 (de) * 1982-10-23 1993-12-23 Pfeiffer Vakuumtechnik Magnetisch gelagerte Turbomolekularpumpe mit Schwingungsdämpfung
JPH0646036B2 (ja) * 1982-11-19 1994-06-15 セイコー電子工業株式会社 軸流分子ポンプ
JPS59168295A (ja) * 1983-03-16 1984-09-21 Hitachi Ltd タ−ボ分子ポンプ
DE3432946C2 (de) * 1984-09-07 1994-08-04 Pfeiffer Vakuumtechnik Kollektorloser Gleichstrommotor mit eisenloser Statorwicklung

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Publication number Priority date Publication date Assignee Title
DE2349033A1 (de) * 1973-09-29 1975-04-10 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe
DE2457783A1 (de) * 1974-12-06 1976-06-16 Pfeiffer Vakuumtechnik Magnetische anordnung
FR2309754A1 (fr) * 1975-05-02 1976-11-26 Teldix Gmbh Ensemble de paliers magnetiques
DE2524061A1 (de) * 1975-05-30 1976-12-09 Pfeiffer Vakuumtechnik Magnetisch gelagerte turbovakuumpumpe mit fanglager
CH634926A5 (en) * 1977-06-28 1983-02-28 Licentia Gmbh Lower magnetic bearing for the rotor shaft of an electricity meter

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5104284A (en) * 1990-12-17 1992-04-14 Dresser-Rand Company Thrust compensating apparatus
US6102890A (en) * 1998-10-23 2000-08-15 Scimed Life Systems, Inc. Catheter having improved proximal shaft design
WO2014099845A1 (fr) * 2012-12-18 2014-06-26 Abb Research Ltd. Palier de butée magnétique
US8963393B2 (en) 2012-12-18 2015-02-24 Abb Research Ltd. Magnetic thrust bearings
EP3805568A4 (fr) * 2018-06-01 2022-03-02 Edwards Japan Limited Pompe à vide et cible de capteur

Also Published As

Publication number Publication date
JPH0272216A (ja) 1990-03-12
DE58906621D1 (de) 1994-02-17
US5166566A (en) 1992-11-24
EP0344503A3 (en) 1990-11-14
EP0344503B1 (fr) 1994-01-05
DE3818556A1 (de) 1989-12-07
ATE99775T1 (de) 1994-01-15

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