TW200506222A - Turbo pump - Google Patents

Turbo pump

Info

Publication number
TW200506222A
TW200506222A TW093111332A TW93111332A TW200506222A TW 200506222 A TW200506222 A TW 200506222A TW 093111332 A TW093111332 A TW 093111332A TW 93111332 A TW93111332 A TW 93111332A TW 200506222 A TW200506222 A TW 200506222A
Authority
TW
Taiwan
Prior art keywords
turbo pump
generating
rotor
biased
noise
Prior art date
Application number
TW093111332A
Other languages
Chinese (zh)
Inventor
Christian Beyer
Heinrich Englaender
Original Assignee
Leybold Vakuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum Gmbh filed Critical Leybold Vakuum Gmbh
Publication of TW200506222A publication Critical patent/TW200506222A/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/051—Axial thrust balancing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C25/00—Bearings for exclusively rotary movement adjustable for wear or play
    • F16C25/06—Ball or roller bearings
    • F16C25/08—Ball or roller bearings self-adjusting
    • F16C25/086—Ball or roller bearings self-adjusting with magnetic means to preload the bearing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C27/00—Elastic or yielding bearings or bearing supports, for exclusively rotary movement
    • F16C27/06—Elastic or yielding bearings or bearing supports, for exclusively rotary movement by means of parts of rubber or like materials
    • F16C27/066—Ball or roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00—Bearings with rolling contact, for exclusively rotary movement
    • F16C19/54—Systems consisting of a plurality of bearings with rolling friction
    • F16C19/546—Systems with spaced apart rolling bearings including at least one angular contact bearing
    • F16C19/547—Systems with spaced apart rolling bearings including at least one angular contact bearing with two angular contact rolling bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Abstract

The turbo vacuum pump for generating a high vacuum comprises a rotor shaft (15) rotating a high speed and supported in two roller bearings (21,21a). The outer ring (34) of one roller bearing is biased in the axial direction by a magnet assembly comprising two annular magnets (35,36) with an air gap (37) formed therebetween. In this manner, the transmission of noise-generating vibrations from the rotor to the housing (12) is prevented.
TW093111332A 2003-05-09 2004-04-23 Turbo pump TW200506222A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10320851A DE10320851A1 (en) 2003-05-09 2003-05-09 turbopump

Publications (1)

Publication Number Publication Date
TW200506222A true TW200506222A (en) 2005-02-16

Family

ID=33394387

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093111332A TW200506222A (en) 2003-05-09 2004-04-23 Turbo pump

Country Status (3)

Country Link
DE (1) DE10320851A1 (en)
TW (1) TW200506222A (en)
WO (1) WO2004099622A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109026826A (en) * 2018-09-18 2018-12-18 台州德基水泵科技有限公司 A kind of noise reduction self priming pump

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0509190D0 (en) * 2005-05-05 2005-06-15 Boc Group Plc Vacuum pump
GB0511877D0 (en) * 2005-06-10 2005-07-20 Boc Group Plc Vacuum pump
WO2008035113A1 (en) 2006-09-22 2008-03-27 Edwards Limited Vacuum pump
GB0618745D0 (en) 2006-09-22 2006-11-01 Boc Group Plc Molecular drag pumping mechanism
DE102011080796B4 (en) 2011-08-11 2023-05-25 Aktiebolaget Skf Axially load bearing arrangement
JP5999176B2 (en) 2012-04-04 2016-09-28 株式会社島津製作所 Vacuum pump
CN103644145B (en) * 2013-12-04 2016-01-27 江苏大学 A kind of hot water circulating pump suspension body of coil pipe cooling structure
JP6458414B2 (en) * 2014-09-10 2019-01-30 株式会社島津製作所 Vacuum pump
DE102018115160A1 (en) * 2018-06-25 2020-01-02 Ebm-Papst St. Georgen Gmbh & Co. Kg Holder for a pivot bearing
GB2581203A (en) * 2019-02-11 2020-08-12 Edwards Ltd Vacuum pump
EP4183031A1 (en) * 2020-07-20 2023-05-24 Milwaukee Electric Tool Corporation Electric motor bearing assembly and method

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2452025A1 (en) * 1979-03-20 1980-10-17 Aerospatiale PRACTICALLY NULL AXIAL ROLLING BEARING
DE2942008A1 (en) * 1979-10-17 1981-04-30 Leybold Heraeus Gmbh & Co Kg Shaft bearing for turbo-molecular vacuum pump - has spring rings fitted around double bearings to centralise rotor
JPS60252194A (en) * 1984-05-28 1985-12-12 Shimadzu Corp Turbo molecular pump
US4655616A (en) * 1985-09-25 1987-04-07 Magtrol, Inc. Computer direct disc drive with magnetically stabilized shaft
FR2735535B1 (en) * 1995-06-16 1997-07-11 Cit Alcatel TURBOMOLECULAR PUMP
DE19709205A1 (en) * 1997-03-06 1998-09-10 Leybold Vakuum Gmbh Vacuum pump shaft bearing mounting
ITTO980453A1 (en) * 1998-05-27 1999-11-29 Varian Spa COMPACT VACUUM PUMP
DE19955517A1 (en) * 1999-11-18 2001-05-23 Leybold Vakuum Gmbh High-speed turbopump
DE10043235A1 (en) * 2000-09-02 2002-03-14 Leybold Vakuum Gmbh vacuum pump
JP4703845B2 (en) * 2000-12-26 2011-06-15 株式会社トプコン Small rotation motor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109026826A (en) * 2018-09-18 2018-12-18 台州德基水泵科技有限公司 A kind of noise reduction self priming pump
CN109026826B (en) * 2018-09-18 2024-03-29 台州德基水泵科技有限公司 Noise-reducing self-priming pump

Also Published As

Publication number Publication date
DE10320851A1 (en) 2004-11-25
WO2004099622A1 (en) 2004-11-18

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