WO2004099622A1 - Turbopump - Google Patents

Turbopump Download PDF

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Publication number
WO2004099622A1
WO2004099622A1 PCT/EP2004/004713 EP2004004713W WO2004099622A1 WO 2004099622 A1 WO2004099622 A1 WO 2004099622A1 EP 2004004713 W EP2004004713 W EP 2004004713W WO 2004099622 A1 WO2004099622 A1 WO 2004099622A1
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WO
WIPO (PCT)
Prior art keywords
housing
ring
outer ring
bearing
rotor
Prior art date
Application number
PCT/EP2004/004713
Other languages
German (de)
French (fr)
Inventor
Christian Beyer
Heinrich Engländer
Original Assignee
Leybold Vakuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum Gmbh filed Critical Leybold Vakuum Gmbh
Publication of WO2004099622A1 publication Critical patent/WO2004099622A1/en

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/051—Axial thrust balancing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C25/00—Bearings for exclusively rotary movement adjustable for wear or play
    • F16C25/06—Ball or roller bearings
    • F16C25/08—Ball or roller bearings self-adjusting
    • F16C25/086—Ball or roller bearings self-adjusting with magnetic means to preload the bearing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C27/00—Elastic or yielding bearings or bearing supports, for exclusively rotary movement
    • F16C27/06—Elastic or yielding bearings or bearing supports, for exclusively rotary movement by means of parts of rubber or like materials
    • F16C27/066—Ball or roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00—Bearings with rolling contact, for exclusively rotary movement
    • F16C19/54—Systems consisting of a plurality of bearings with rolling friction
    • F16C19/546—Systems with spaced apart rolling bearings including at least one angular contact bearing
    • F16C19/547—Systems with spaced apart rolling bearings including at least one angular contact bearing with two angular contact rolling bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Definitions

  • the invention relates to a turbomolecular pump or a turbovacuum pump and in particular to the mounting of the rotor shaft in a turbovacuum pump.
  • DE 197 09 205 AI (Leybold) describes a vacuum pump with a shaft bearing in which the rotor shaft is mounted in roller bearings.
  • the roller bearings are ball bearings, the outer ring of which is axially supported on the housing.
  • the outer ring sits in a sliding sleeve, which is surrounded by a damping elastomeric O-ring.
  • a high-speed turbopump of a similar type is described in DE 199 55 517 AI (Leybold).
  • the outer ring of the ball bearing supporting the rotor shaft is supported on the housing in physical contact with the housing.
  • the invention has for its object to improve the bearing of the rotor shaft with regard to the rotor vibrations transmitted to the housing in a turbo vacuum pump.
  • the support device which supports the outer ring of a rolling bearing on the housing side, consists of at least one rolling bearing from a magnet arrangement of two repelling magnets that form an axial air gap.
  • the bearing arrangement according to the invention brings about contactless axial support of the bearings on the housing, as a result of which the transmission of rotor vibrations to the housing is reduced.
  • Two repulsive magnetic ring pairs are installed on the bearing contact surfaces to the housing, which form a very small air gap.
  • the air gap is only in the order of magnitude of the wave play.
  • One ring is supported against the housing and the other ring against the outer ring of the rolling bearing.
  • the negative rigidity of the magnet arrangement ensures that the ball bearings are preloaded.
  • the contactless axial support of the bearings prevents the additional transmission of radial vibratory movements due to friction. Misalignments of the bearing outer rings are also compensated for.
  • the invention is particularly applicable to high-speed turbo vacuum pumps in which the speed is above 15,000 rpm.
  • the invention has particularly favorable effects in a speed range above 27,000 rpm.
  • the invention is applicable to turbomolecular pumps and other turbovacuum pumps, such as turbostream pumps.
  • the outer ring of the rolling bearing is axially movably guided in a sliding sleeve of the housing.
  • the 'sliding sleeve can be held movable in an elastic O-ring.
  • Fig. 1 shows a longitudinal section through a turbomolecular pump
  • FIG. 2 is an enlarged. Representation of detail II from FIG. 1.
  • the turbomolecular pump shown has a stator 10 with numerous inwardly projecting stator disks 11, which is mounted in the pump part 12b of a housing 12.
  • the housing 12 also includes a motor part 12a.
  • Rotor disks 13 of a rotor 14 protrude between the stator disks 11.
  • the distances between the stator disks and rotor disks are of the order of millimeters. If the circumferential If the speed at the outer edge of the rotor disks is in the order of magnitude of the average thermal speed of the gas molecules to be pumped, the pumping effect is achieved to the desired extent. This is the case at rotor speeds of around 36,000 rpm up to 72,000 rpm.
  • the rotor 14 is mounted on a rotor shaft 15 which is mounted in the motor part 12a of the housing 12 with two bearing devices 16 and 17.
  • the rotor 18 is fastened on the rotor shaft 15 between the two bearing devices 16, 17. This has several permanent magnets arranged in a distributed manner.
  • the windings 19 of the motor 20 are located in a recess of the motor part 12a of the housing.
  • the recess is sealed with a sleeve 24 which is permeable to magnetic fields.
  • the bearing device 16 facing the rotor 14 is arranged in a bore in the motor part 12a. It contains a roller bearing 21, which is designed here as a ball bearing, and an axially acting support device.
  • the bearing device 17 of the rear end of the rotor shaft is accommodated in a housing cover 23 of the motor part 12a. It also contains a roller bearing 21a and a magnetic support device 22a.
  • the rotor shaft 15 rotates at a speed of over 27,000 rpm, whereby the rotor 14 also rotates. This creates a high vacuum in the pump part 12b of the housing 12.
  • the outlet of the pump is connected to a backing pump that counteracts the gas that is expelled Atmosphere condensed. For this reason, the pump part is sealed off from the motor part by a plurality of seals 25, 26 and 27, the interior of the sleeve 24 being assigned to the vacuum region.
  • the bearing device 16 is described below with reference to FIG. 2.
  • the bearing device 17 is designed in a corresponding manner.
  • the roller bearing 21 has an inner ring 30 which sits on a section of the rotor shaft 15 and presses against an annular shoulder 31 of the rotor shaft.
  • the inner ring 30 is supported on the opposite side by a sleeve 32, the end of which presses against a wall 33 of the pump part 12b.
  • the inner ring 30 is fixed immovably on the rotor shaft 15 by a clamping device 29 (FIG. 1).
  • a supporting force which is generated by the support device 22, acts on the outer ring 34 from the rotor side (in the drawings: from above). This support force tends to push the outer ring 34 down and prevent it from moving upward.
  • the design of the ball bearing prevents the outer ring from migrating downwards.
  • the support device 22 consists of a magnet arrangement consisting of a first magnet 35, which is supported on the motor part 12a and a second magnet 36, which is supported on the outer ring 34 of the roller bearing 21.
  • Both magnets 35, 36 are ring magnets which surround the sleeve 32 and are magnetized axially to the rotor shaft. These are permanent magnets, the same poles (eg north poles) facing each other, so that the magnets 35, 36 repel each other.
  • the bearing with the magnet arrangement is positioned such that there is a very small air gap 37 of the order of a tenth of a millimeter between the magnets 35, 36.
  • the outer ring 34 of the roller bearing 21 is contained in a sliding sleeve 38, which in turn is guided in a corresponding recess in the pump part 12b of the housing.
  • an O-ring 40 made of elastomer material, which projects into an outer ring groove of the sliding sleeve 38.
  • the O-ring 40 enables the sliding sleeve 38 to be able to adapt to misalignments to a certain extent and, on the other hand, has a vibration-damping effect.
  • the bearing device 17 at the rear end of the rotor shaft 15 is generally designed in the same way. It has two ring-shaped magnets 35, 36 which are axially polarized and face one another with poles of the same name.
  • the outer magnet 35 is supported in the cover 23 of the motor part 12a and the other magnet 36 is supported on the outer ring of the roller bearing 21a.
  • a sliding sleeve 38 is also provided here. However, the sliding sleeve is not absolutely necessary in both cases.

Abstract

The invention relates to a turbovacuum pump for producing a high vacuum. Said turbovacuum pump comprises a rotor shaft (15) which rotates at high speed and is mounted between two rolling bearings (21,21a). The outer ring (34) of a rolling bearing is prestressed in the axial direction by means of a magnet arrangement consisting of two annular magnets (35,36) between which an air gap (37) is formed, preventing the transmission of noise-creating vibrations from the rotor to the housing (12).

Description

Turbopumpe turbopump
Die Erfindung betrifft eine Turbomolekularpumpe oder eine Turbovakuumpumpe und insbesondere die Lagerung der Rotorwelle in einer Turbovakuumpumpe.The invention relates to a turbomolecular pump or a turbovacuum pump and in particular to the mounting of the rotor shaft in a turbovacuum pump.
In DE 197 09 205 AI (Leybold) ist eine Vakuumpumpe mit Wellenlagerung beschrieben, bei der die Rotorwelle in Wälzlagern gelagert ist. Die Wälzlager sind Kugellager, deren Außenring jeweils an dem Gehäuse axial abgestützt ist. Der Außenring sitzt in einer Gleithülse, die von einem dämpfenden elastomeren O-Ring umgeben ist . Eine schnelllaufende Turbopumpe ähnlicher Art ist in DE 199 55 517 AI (Leybold) beschrieben. Auch hierbei ist der Außenring des die Rotorwelle lagernden Kugellagers in physischem Kontakt zu dem Gehäuse an diesem abgestützt.DE 197 09 205 AI (Leybold) describes a vacuum pump with a shaft bearing in which the rotor shaft is mounted in roller bearings. The roller bearings are ball bearings, the outer ring of which is axially supported on the housing. The outer ring sits in a sliding sleeve, which is surrounded by a damping elastomeric O-ring. A high-speed turbopump of a similar type is described in DE 199 55 517 AI (Leybold). Here, too, the outer ring of the ball bearing supporting the rotor shaft is supported on the housing in physical contact with the housing.
Der Erfindung liegt die Aufgabe zugrunde, bei einer Turbovakuumpumpe die Lagerung der Rotorwelle im Hinblick auf die auf das Gehäuse übertragenen Rotorschwingungen zu verbessern.The invention has for its object to improve the bearing of the rotor shaft with regard to the rotor vibrations transmitted to the housing in a turbo vacuum pump.
Die Lösung dieser Aufgabe erfolgt erfindungsgemäß mit den im Patentanspruch 1 angegebenen Merkmalen. Hiernach besteht die Abstützvorrichtung, die den Außenring eines Wälzlagers gehäuseseitig abstützt, bei mindestens einem Wälzlager aus einer Magnetanordnung aus zwei sich abstoßenden, einen axialen Luftspalt bildenden Magneten.This object is achieved according to the invention with the features specified in claim 1. According to this, the support device, which supports the outer ring of a rolling bearing on the housing side, consists of at least one rolling bearing from a magnet arrangement of two repelling magnets that form an axial air gap.
Die erfindungsgemäße Lageranordnung bewirkt eine berührungslose axiale Abstützung der Lager am Gehäuse, wodurch die Übertragung von Rotorschwingungen auf das Gehäuse verringert wird. An den Lageranlageflächen zum Gehäuse sind je zwei abstoßend wirkende Magnetringpaare installiert, die einen sehr geringen Luftspalt bilden. Der Luftspalt ist nur in der Größenordnung des Wellenspiels. Jeweils ein Ring stützt sich gegen das Gehäuse ab und der andere Ring gegen den Außenring des Wälzlagers. Die negative Steifigkeit der Magnetanordnung sorgt für die erforderliche Vorspannung der Kugellager. Durch die berührungslose axiale Abstützung der Lager wird die zusätzliche Übertragung radialer Schwingbewegungen durch Reibung vermieden. Ebenso werden Fluchtungsfehler der Lageraußenringe zueinander kompensiert . Die Erfindung ist insbesondere bei schnelllaufenden Turbovakuumpumpen anwendbar, bei denen die Drehzahl über 15.000 U/min liegt. Besonders günstige Auswirkungen hat die Erfindung in einem Drehzahlbereich oberhalb von 27.000 U/min. Die Erfindung ist anwendbar bei Turbomolekularpumpen und anderen Turbovakuumpumpen, wie beispielsweise Turbostream-Pumpen.The bearing arrangement according to the invention brings about contactless axial support of the bearings on the housing, as a result of which the transmission of rotor vibrations to the housing is reduced. Two repulsive magnetic ring pairs are installed on the bearing contact surfaces to the housing, which form a very small air gap. The air gap is only in the order of magnitude of the wave play. One ring is supported against the housing and the other ring against the outer ring of the rolling bearing. The negative rigidity of the magnet arrangement ensures that the ball bearings are preloaded. The contactless axial support of the bearings prevents the additional transmission of radial vibratory movements due to friction. Misalignments of the bearing outer rings are also compensated for. The invention is particularly applicable to high-speed turbo vacuum pumps in which the speed is above 15,000 rpm. The invention has particularly favorable effects in a speed range above 27,000 rpm. The invention is applicable to turbomolecular pumps and other turbovacuum pumps, such as turbostream pumps.
Gemäß einer bevorzugten Ausfuhrungsform der Erfindung ist der Außenring des Wälzlagers in einer Gleithülse des Gehäuses axial bewegbar geführt. Die' Gleithülse kann in einem elastischen O-Ring beweglich gehalten sein.According to a preferred embodiment of the invention, the outer ring of the rolling bearing is axially movably guided in a sliding sleeve of the housing. The 'sliding sleeve can be held movable in an elastic O-ring.
Im Folgenden werden unter Bezugnahme auf die Zeichnungen Aus- führungsbeispiele der Erfindung näher erläutert .Exemplary embodiments of the invention are explained in more detail below with reference to the drawings.
Es zeigen:Show it:
Fig. 1 einen Längsschnitt durch eine Turbomolekularpumpe, undFig. 1 shows a longitudinal section through a turbomolecular pump, and
Fig. 2 eine vergrößerte. Darstellung der Einzelheit II aus Figur 1.Fig. 2 is an enlarged. Representation of detail II from FIG. 1.
Die dargestellte Turbomolekularpumpe weist einen Stator 10 mit zahlreichen nach innen abstehenden Statorscheiben 11 auf, der in dem Pumpenteil 12b eines Gehäuses 12 montiert ist. Das Gehäuse 12 enthält außerdem einen Motorteil 12a.The turbomolecular pump shown has a stator 10 with numerous inwardly projecting stator disks 11, which is mounted in the pump part 12b of a housing 12. The housing 12 also includes a motor part 12a.
Zwischen die Statorscheiben 11 ragen Rotorscheiben 13 eines Rotors 14. Die Abstände zwischen den Stator- und Rotorscheiben liegen in der Größenordnung von Millimetern. Wenn die Umfangs- geschwindigkeit am Außenrand der Rotorscheiben in die Größenordnung der mittleren thermischen Geschwindigkeit der zu pumpenden Gasmoleküle kommt, wird die Pumpwirkung in dem angestrebten Umfang erreicht. Dies ist bei Rotordrehzahlen von etwa 36.000 U/min bis zu 72.000 U/min der Fall.Rotor disks 13 of a rotor 14 protrude between the stator disks 11. The distances between the stator disks and rotor disks are of the order of millimeters. If the circumferential If the speed at the outer edge of the rotor disks is in the order of magnitude of the average thermal speed of the gas molecules to be pumped, the pumping effect is achieved to the desired extent. This is the case at rotor speeds of around 36,000 rpm up to 72,000 rpm.
Der Rotor 14 ist an einer Rotorwelle 15 montiert, die in dem Motorteil 12a des Gehäuses 12 mit zwei Lagervorrichtungen 16 und 17 gelagert ist. Zwischen den beiden Lagervorrichtungen 16,17 ist auf der Rotorwelle 15 der Läufer 18 befestigt. Dieser weist mehrere verteilt angeordnete Permanentmagnete auf. In einer Ausnehmung des Motorteils 12a des Gehäuses befinden sich die Wicklungen 19 des Motors 20. Die Ausnehmung ist mit einer für Magnetfelder durchlässigen Hülse 24 abdichtend verschlossen.The rotor 14 is mounted on a rotor shaft 15 which is mounted in the motor part 12a of the housing 12 with two bearing devices 16 and 17. The rotor 18 is fastened on the rotor shaft 15 between the two bearing devices 16, 17. This has several permanent magnets arranged in a distributed manner. The windings 19 of the motor 20 are located in a recess of the motor part 12a of the housing. The recess is sealed with a sleeve 24 which is permeable to magnetic fields.
Die dem Rotor 14 zugewandte Lagervorrichtung 16 ist in einer Bohrung des Motorteils 12a angeordnet. Sie enthält ein Wälzlager 21, das hier als Kugellager ausgebildet ist, und eine axial wirkende Abstützvorrichtung.The bearing device 16 facing the rotor 14 is arranged in a bore in the motor part 12a. It contains a roller bearing 21, which is designed here as a ball bearing, and an axially acting support device.
Die Lagervorrichtung 17 des rückwärtigen Endes der Rotorwelle ist in einem Gehäusedeckel 23 des Motorteils 12a untergebracht. Sie enthält ebenfalls ein Wälzlager 21a und eine magnetische Abstützvorrichtung 22a.The bearing device 17 of the rear end of the rotor shaft is accommodated in a housing cover 23 of the motor part 12a. It also contains a roller bearing 21a and a magnetic support device 22a.
Während des Betriebes rotiert die Rotorwelle 15 mit einer Drehzahl von über 27.000 U/min, wodurch der Rotor 14 ebenfalls rotiert. Dadurch entsteht in dem Pumpenteil 12b des Gehäuses 12 ein Hochvakuum. Der Auslass der Pumpe ist dabei mit einer Vorvakuumpumpe verbunden, die das ausgestoßene Gas gegen Atmosphäre verdichtet. Aus diesem Grund ist der Pumpenteil gegenüber dem Motorteil durch mehrere Dichtungen 25,26 und 27 abgedichtet, wobei das Innere der Hülse 24 dem Vakuumbereich zuzuordnen ist.During operation, the rotor shaft 15 rotates at a speed of over 27,000 rpm, whereby the rotor 14 also rotates. This creates a high vacuum in the pump part 12b of the housing 12. The outlet of the pump is connected to a backing pump that counteracts the gas that is expelled Atmosphere condensed. For this reason, the pump part is sealed off from the motor part by a plurality of seals 25, 26 and 27, the interior of the sleeve 24 being assigned to the vacuum region.
Unter Bezugnahme auf Figur 2 wird nachstehend die Lagervorrichtung 16 beschrieben. Die Lagervorrichtung 17 ist in entsprechender Weise ausgeführt.The bearing device 16 is described below with reference to FIG. 2. The bearing device 17 is designed in a corresponding manner.
Das Wälzlager 21 weist einen Innenring 30 auf, der auf einem Abschnitt der Rotorwelle 15 sitzt und gegen eine Ringschulter 31 der Rotorwelle drückt. Der Innenring 30 ist auf der gegenüberliegenden Seite durch eine Hülse 32 abgestützt, die mit ihrem Ende gegen eine Wand 33 des Pumpenteils 12b drückt. Durch eine Spannvorrichtung 29 (Figur 1) ist der Innenring 30 axial unverrückbar auf der Rotorwelle 15 fixiert.The roller bearing 21 has an inner ring 30 which sits on a section of the rotor shaft 15 and presses against an annular shoulder 31 of the rotor shaft. The inner ring 30 is supported on the opposite side by a sleeve 32, the end of which presses against a wall 33 of the pump part 12b. The inner ring 30 is fixed immovably on the rotor shaft 15 by a clamping device 29 (FIG. 1).
Auf den Außenring 34 wirkt von der Rotorseite her (in den Zeichnungen: von oben) eine Stützkraft, die durch die Abstütz- vorrichtung 22 erzeugt wird. Diese Stützkraft ist bestrebt, den Außenring 34 nach unten zu drücken und ein Bewegen nach oben zu verhindern. Ein Auswandern des Außenringes nach unten wird durch die Konstruktion des Kugellagers verhindert.A supporting force, which is generated by the support device 22, acts on the outer ring 34 from the rotor side (in the drawings: from above). This support force tends to push the outer ring 34 down and prevent it from moving upward. The design of the ball bearing prevents the outer ring from migrating downwards.
Die Abstützvorrichtung 22 besteht aus einer Magnetanordnung aus einem ersten Magneten 35, der an dem Motorteil 12a abgestützt ist und einem zweiten Magneten 36, der an dem Außenring 34 des Wälzlagers 21 abgestützt ist. Beide Magnete 35,36 sind Ringmagnete, die die Hülse 32 umgeben und axial zur Rotorwelle magnetisiert sind. Es handelt sich um Dauermagnete, deren gleiche Pole (z.B. Nordpole) einander zugewandt sind, so dass die Magnete 35,36 sich gegenseitig abstoßen. Das Lager mit der Magnetanordnung ist so positioniert, dass zwischen den Magneten 35,36 ein sehr geringer Luftspalt 37 in der Größenordnung eines Zehntel Millimeters besteht.The support device 22 consists of a magnet arrangement consisting of a first magnet 35, which is supported on the motor part 12a and a second magnet 36, which is supported on the outer ring 34 of the roller bearing 21. Both magnets 35, 36 are ring magnets which surround the sleeve 32 and are magnetized axially to the rotor shaft. These are permanent magnets, the same poles (eg north poles) facing each other, so that the magnets 35, 36 repel each other. The bearing with the magnet arrangement is positioned such that there is a very small air gap 37 of the order of a tenth of a millimeter between the magnets 35, 36.
Der Außenring 34 des Wälzlagers 21 ist in einer Gleithülse 38 enthalten, welche ihrerseits in einer entsprechenden Ausnehmung des Pumpenteils 12b des Gehäuses geführt ist. In einer Innenringnut 39 der Ausnehmung sitzt ein aus Elastomermaterial bestehender O-Ring 40, der in eine äußere Ringnut der Gleithülse 38 hineinragt. Der O-Ring 40 ermöglicht eine gewisse Anpassungsfähigkeit der Gleithülse 38 an Fluchtungsfehler und er wirkt andererseits schwingungsdämpfend .The outer ring 34 of the roller bearing 21 is contained in a sliding sleeve 38, which in turn is guided in a corresponding recess in the pump part 12b of the housing. In an inner ring groove 39 of the recess there is an O-ring 40 made of elastomer material, which projects into an outer ring groove of the sliding sleeve 38. The O-ring 40 enables the sliding sleeve 38 to be able to adapt to misalignments to a certain extent and, on the other hand, has a vibration-damping effect.
Die Lagervorrichtung 17 am rückwärtigen Ende der Rotorwelle 15 ist generell in gleicher Weise ausgebildet. Sie weist zwei ringförmige Magnete 35,36 auf, die axial polarisiert und mit gleichnamigen Polen einander zugewandt sind. Der äußere Magnet 35 ist in dem Deckel 23 des Motorteils 12a abgestützt und der andere Magnet 36 ist an dem Außenring des Wälzlagers 21a abgestützt. Wie aus Figur 1 ersichtlich ist, ist auch hier eine Gleithülse 38 vorgesehen. Die Gleithülse ist jedoch in beiden Fällen nicht zwingend erforderlich. The bearing device 17 at the rear end of the rotor shaft 15 is generally designed in the same way. It has two ring-shaped magnets 35, 36 which are axially polarized and face one another with poles of the same name. The outer magnet 35 is supported in the cover 23 of the motor part 12a and the other magnet 36 is supported on the outer ring of the roller bearing 21a. As can be seen from FIG. 1, a sliding sleeve 38 is also provided here. However, the sliding sleeve is not absolutely necessary in both cases.

Claims

PATENTANSPRUCHE PATENT CLAIMS
Turbovakuumpumpe mit einem Gehäuse (12), das den Stator eines Motors (20) enthält, und mit einer Rotorwelle (15) , die in Wälzlagern (21,21a), welche einen Innenring (30) und einen Außenring (34) aufweisen, in dem Gehäuse (12) gelagert ist, wobei der Außenring (34) des Wälzlagers mit einer elastischen Abstützvorrichtung (22) an dem Gehäuse (12) abgestützt, ist',Turbovacuum pump with a housing (12), which contains the stator of a motor (20), and with a rotor shaft (15), which in roller bearings (21, 21a), which have an inner ring (30) and an outer ring (34), in is mounted on the housing (12), the outer ring (34) of the roller bearing being supported on the housing (12) by an elastic support device (22),
d a d u r c h g e k e n n z e i c h n e t ,characterized ,
dass bei mindestens einem der Wälzlager (21,21a) die Abstützvorrichtung (22) aus einer Magnetanordnung aus zwei sich abstoßenden, einen axialen Luftspalt (37) bildenden Magneten (35,36) besteht.that in at least one of the roller bearings (21, 21a) the support device (22) consists of a magnet arrangement consisting of two repelling magnets (35, 36) forming an axial air gap (37).
Turbovakuumpumpe nach Anspruch 1, dadurch gekennzeichnet, dass die Magnete (35,36) Ringmagnete mit axialer Polarisierung sind.Turbovacuum pump according to claim 1, characterized in that the magnets (35,36) are ring magnets with axial polarization.
Turbovakuumpumpe nach Anspruch 1 oder , dadurch gekennzeichnet, dass der Außenring (34) des Wälzlagers in einer Gleithülse (38) des Gehäuses (12) axial bewegbar geführt ist.Turbovacuum pump according to claim 1 or, characterized in that the outer ring (34) of the rolling bearing is axially movably guided in a sliding sleeve (38) of the housing (12).
Turbovakuumpumpe nach Anspruch 3, dadurch gekennzeichnet, dass die Gleithülse (38) in einem elastischen O-Ring (40) beweglich gehalten ist. Turbovacuum pump according to claim 3, characterized in that the sliding sleeve (38) is movably held in an elastic O-ring (40).
PCT/EP2004/004713 2003-05-09 2004-05-04 Turbopump WO2004099622A1 (en)

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US20100104428A1 (en) * 2006-09-22 2010-04-29 Martin Ernst Tollner Molecular drag pumping mechanism
CN103644145A (en) * 2013-12-04 2014-03-19 江苏大学 Hot water circulating pump suspension body of coiler cooling structure
CN104185736A (en) * 2012-04-04 2014-12-03 株式会社岛津制作所 Vacuum pump
US20160069391A1 (en) * 2014-09-10 2016-03-10 Shimadzu Corporation Vacuum pump
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WO2008035113A1 (en) 2006-09-22 2008-03-27 Edwards Limited Vacuum pump
US20100104428A1 (en) * 2006-09-22 2010-04-29 Martin Ernst Tollner Molecular drag pumping mechanism
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CN104185736A (en) * 2012-04-04 2014-12-03 株式会社岛津制作所 Vacuum pump
US10590961B2 (en) 2012-04-04 2020-03-17 Shimadzu Corporation Vacuum pump
CN103644145A (en) * 2013-12-04 2014-03-19 江苏大学 Hot water circulating pump suspension body of coiler cooling structure
CN103644145B (en) * 2013-12-04 2016-01-27 江苏大学 A kind of hot water circulating pump suspension body of coil pipe cooling structure
US20160069391A1 (en) * 2014-09-10 2016-03-10 Shimadzu Corporation Vacuum pump
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