WO2004082008A8 - Cvd装置及びcvd装置のクリーニング方法 - Google Patents
Cvd装置及びcvd装置のクリーニング方法Info
- Publication number
- WO2004082008A8 WO2004082008A8 PCT/JP2004/003258 JP2004003258W WO2004082008A8 WO 2004082008 A8 WO2004082008 A8 WO 2004082008A8 JP 2004003258 W JP2004003258 W JP 2004003258W WO 2004082008 A8 WO2004082008 A8 WO 2004082008A8
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- cleaning
- frequency
- cvd apparatus
- upper electrode
- electrode
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32853—Hygiene
- H01J37/32862—In situ cleaning of vessels and/or internal parts
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4405—Cleaning of reactor or parts inside the reactor by using reactive gases
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Chemical & Material Sciences (AREA)
- Public Health (AREA)
- Epidemiology (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Plasma Technology (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/548,873 US20060201533A1 (en) | 2003-03-14 | 2004-03-12 | Cvd apparatus and method for cleaning cvd apparatus |
EP04720167.8A EP1612857B1 (en) | 2003-03-14 | 2004-03-12 | Cvd apparatus and method for cleaning cvd apparatus |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003070337 | 2003-03-14 | ||
JP2003-070337 | 2003-03-14 | ||
JP2003-187141 | 2003-06-30 | ||
JP2003187141A JP4264479B2 (ja) | 2003-03-14 | 2003-06-30 | Cvd装置のクリーニング方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2004082008A1 WO2004082008A1 (ja) | 2004-09-23 |
WO2004082008A8 true WO2004082008A8 (ja) | 2004-12-29 |
Family
ID=32992979
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2004/003258 WO2004082008A1 (ja) | 2003-03-14 | 2004-03-12 | Cvd装置及びcvd装置のクリーニング方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20060201533A1 (ja) |
EP (1) | EP1612857B1 (ja) |
JP (1) | JP4264479B2 (ja) |
WO (1) | WO2004082008A1 (ja) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006066540A (ja) | 2004-08-25 | 2006-03-09 | Tokyo Electron Ltd | 薄膜形成装置の洗浄方法及び薄膜形成装置 |
US7494943B2 (en) | 2005-10-20 | 2009-02-24 | Tokyo Electron Limited | Method for using film formation apparatus |
US20080099450A1 (en) * | 2006-10-30 | 2008-05-01 | Applied Materials, Inc. | Mask etch plasma reactor with backside optical sensors and multiple frequency control of etch distribution |
JP2009152539A (ja) * | 2007-11-30 | 2009-07-09 | National Institute Of Advanced Industrial & Technology | 半導体デバイスの連続製造方法及びチャンバー |
JP4531833B2 (ja) | 2007-12-05 | 2010-08-25 | 株式会社日立国際電気 | 基板処理装置、半導体装置の製造方法及びクリーニング方法 |
US8524112B2 (en) * | 2007-12-21 | 2013-09-03 | Solvay Fluor Gmbh | Process for the production of microelectromechanical systems |
EP2130940B1 (en) | 2008-05-30 | 2017-04-05 | Applied Materials, Inc. | Arrangement and method for removing alkali- or alkaline earth-metals from a vacuum coating chamber |
US8083859B2 (en) | 2008-05-30 | 2011-12-27 | Applied Materials, Inc. | Arrangement and method for removing alkali- or alkaline earth-metals from a vacuum coating chamber |
JP2012506620A (ja) * | 2008-10-21 | 2012-03-15 | アプライド マテリアルズ インコーポレイテッド | チャンバをクリーニングするプラズマ発生源とプロセス |
JP2012507834A (ja) * | 2008-11-04 | 2012-03-29 | フラウンホーファー−ゲゼルシャフト ツル フェルデルング デル アンゲヴァンテン フォルシュング エー ファウ | 平面基板をプラズマ加工する方法および装置 |
JP2010182937A (ja) * | 2009-02-06 | 2010-08-19 | Sharp Corp | プラズマクリーニング方法 |
US20120214312A1 (en) * | 2009-10-30 | 2012-08-23 | Solvay Sa | Method of plasma etching and plasma chamber cleaning using F2 and COF2 |
CN102098863B (zh) * | 2009-12-14 | 2013-09-11 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 用于等离子体加工设备的电极板和清除工艺沉积物的方法 |
US20110297088A1 (en) * | 2010-06-04 | 2011-12-08 | Texas Instruments Incorporated | Thin edge carrier ring |
JP2012015411A (ja) * | 2010-07-02 | 2012-01-19 | Tokyo Electron Ltd | 半導体装置の製造方法及び半導体装置 |
WO2012027187A1 (en) * | 2010-08-25 | 2012-03-01 | Linde Aktiengesellschaft | Deposition chamber cleaning using in situ activation of molecular fluorine |
US9017486B2 (en) | 2010-09-09 | 2015-04-28 | International Business Machines Corporation | Deposition chamber cleaning method including stressed cleaning layer |
JP5904877B2 (ja) * | 2012-05-29 | 2016-04-20 | 大陽日酸株式会社 | 炭化珪素除去方法 |
JP2013251325A (ja) * | 2012-05-30 | 2013-12-12 | Taiyo Nippon Sanso Corp | 炭化珪素除去装置及び炭化珪素除去方法 |
JP5973850B2 (ja) * | 2012-09-03 | 2016-08-23 | 大陽日酸株式会社 | クリーニング終点検知方法 |
WO2014123028A1 (ja) * | 2013-02-05 | 2014-08-14 | 株式会社日立国際電気 | クリーニング方法 |
JP5988102B2 (ja) * | 2013-03-01 | 2016-09-07 | パナソニックIpマネジメント株式会社 | プラズマクリーニング方法 |
US10784091B2 (en) | 2017-09-29 | 2020-09-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | Process and related device for removing by-product on semiconductor processing chamber sidewalls |
US10529581B2 (en) * | 2017-12-29 | 2020-01-07 | L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude | SiN selective etch to SiO2 with non-plasma dry process for 3D NAND device applications |
JP7091198B2 (ja) * | 2018-09-11 | 2022-06-27 | キオクシア株式会社 | プラズマ処理装置および半導体装置の製造方法 |
CN111370282B (zh) * | 2018-12-26 | 2022-06-24 | 江苏鲁汶仪器有限公司 | 一种等离子增强化学气相沉积腔室的清洗方法 |
CN114649178A (zh) * | 2020-12-18 | 2022-06-21 | 中微半导体设备(上海)股份有限公司 | 一种下电极组件及等离子体处理装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01113332U (ja) * | 1988-01-26 | 1989-07-31 | ||
JPH07288248A (ja) * | 1994-04-19 | 1995-10-31 | Toshiba Corp | 半導体素子用プラズマ装置 |
JP3350264B2 (ja) * | 1994-12-22 | 2002-11-25 | 松下電器産業株式会社 | プラズマクリーニング方法 |
JP3696983B2 (ja) * | 1996-06-17 | 2005-09-21 | キヤノン株式会社 | プラズマ処理方法およびプラズマ処理装置 |
JPH1072672A (ja) * | 1996-07-09 | 1998-03-17 | Applied Materials Inc | 非プラズマ式チャンバクリーニング法 |
JPH11204436A (ja) * | 1998-01-16 | 1999-07-30 | Sharp Corp | 電子デバイス製造装置 |
EP1086353A4 (en) * | 1998-06-12 | 2001-08-22 | On Line Techn Inc | METHOD AND APPARATUS FOR DETERMINING THE END OF CLEANING OF A TREATMENT CHAMBER OR THE END OF THE ENGRAVING OF A WAFER |
JP4112198B2 (ja) * | 2000-09-11 | 2008-07-02 | 財団法人地球環境産業技術研究機構 | クリーニングガス及びエッチングガス、並びにチャンバークリーニング方法及びエッチング方法 |
JP2002280376A (ja) * | 2001-03-22 | 2002-09-27 | Research Institute Of Innovative Technology For The Earth | Cvd装置のクリーニング方法およびそのためのクリーニング装置 |
US6932092B2 (en) * | 2002-11-22 | 2005-08-23 | Applied Materials, Inc. | Method for cleaning plasma enhanced chemical vapor deposition chamber using very high frequency energy |
-
2003
- 2003-06-30 JP JP2003187141A patent/JP4264479B2/ja not_active Expired - Lifetime
-
2004
- 2004-03-12 US US10/548,873 patent/US20060201533A1/en not_active Abandoned
- 2004-03-12 EP EP04720167.8A patent/EP1612857B1/en not_active Expired - Fee Related
- 2004-03-12 WO PCT/JP2004/003258 patent/WO2004082008A1/ja active Application Filing
Also Published As
Publication number | Publication date |
---|---|
EP1612857A1 (en) | 2006-01-04 |
JP2004343026A (ja) | 2004-12-02 |
EP1612857A4 (en) | 2009-02-25 |
JP4264479B2 (ja) | 2009-05-20 |
EP1612857B1 (en) | 2018-08-01 |
WO2004082008A1 (ja) | 2004-09-23 |
US20060201533A1 (en) | 2006-09-14 |
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