WO2004008163A3 - Ensemble conçu pour relier electriquement un composant de verification a une machine de verification servant a verifier les circuits electriques se trouvant sur ledit composant de verification - Google Patents

Ensemble conçu pour relier electriquement un composant de verification a une machine de verification servant a verifier les circuits electriques se trouvant sur ledit composant de verification Download PDF

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Publication number
WO2004008163A3
WO2004008163A3 PCT/US2003/022125 US0322125W WO2004008163A3 WO 2004008163 A3 WO2004008163 A3 WO 2004008163A3 US 0322125 W US0322125 W US 0322125W WO 2004008163 A3 WO2004008163 A3 WO 2004008163A3
Authority
WO
WIPO (PCT)
Prior art keywords
assembly
contactor
clamping
test component
tested
Prior art date
Application number
PCT/US2003/022125
Other languages
English (en)
Other versions
WO2004008163A2 (fr
Inventor
Donald P Ii Richmond
Jovan Jovanovic
Frank O Uher
Original Assignee
Aehr Test Systems
Donald P Ii Richmond
Jovan Jovanovic
Frank O Uher
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/197,104 external-priority patent/US6867608B2/en
Priority claimed from US10/197,133 external-priority patent/US6853209B1/en
Application filed by Aehr Test Systems, Donald P Ii Richmond, Jovan Jovanovic, Frank O Uher filed Critical Aehr Test Systems
Priority to EP03764698A priority Critical patent/EP1523685A2/fr
Priority to AU2003249276A priority patent/AU2003249276A1/en
Priority to JP2004521866A priority patent/JP2005533254A/ja
Publication of WO2004008163A2 publication Critical patent/WO2004008163A2/fr
Publication of WO2004008163A3 publication Critical patent/WO2004008163A3/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07378—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate adapter, e.g. space transformers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2863—Contacting devices, e.g. sockets, burn-in boards or mounting fixtures

Abstract

Dans un mode de réalisation, la présente invention concerne un ensemble de vérification conçu pour relier électriquement un composant de vérification à une machine de vérification servant à vérifier les circuits électriques se trouvant sur ledit composant de vérification. Cet ensemble de vérification comprend un ensemble contacteur destiné à être interconnecté avec le composant de vérification, un ensemble sonde conçu pour supporter mécaniquement l'ensemble contacteur et relier électriquement cet ensemble contacteur à la machine de vérification, ainsi qu'un mécanisme de serrage constitué d'un premier élément de serrage ainsi que d'un second élément de serrage, ces éléments de serrage étant sollicités l'un vers l'autre pour exercer une force de serrage destinée à déformer des bosses de contact d'une connexion électrique entre l'ensemble sonde et l'ensemble contacteur.
PCT/US2003/022125 2002-07-16 2003-07-15 Ensemble conçu pour relier electriquement un composant de verification a une machine de verification servant a verifier les circuits electriques se trouvant sur ledit composant de verification WO2004008163A2 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP03764698A EP1523685A2 (fr) 2002-07-16 2003-07-15 Ensemble con u pour relier electriquement un composant de verification a une machine de verification servant a verifier les circuits electriques se trouvant sur ledit composant de verification
AU2003249276A AU2003249276A1 (en) 2002-07-16 2003-07-15 Assembly for connecting a test device to an object to be tested
JP2004521866A JP2005533254A (ja) 2002-07-16 2003-07-15 被試験部品上の電気回路を試験するために被試験部品を試験機械に電気的に接続するための組立体

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US10/197,104 US6867608B2 (en) 2002-07-16 2002-07-16 Assembly for electrically connecting a test component to a testing machine for testing electrical circuits on the test component
US10/197,133 2002-07-16
US10/197,104 2002-07-16
US10/197,133 US6853209B1 (en) 2002-07-16 2002-07-16 Contactor assembly for testing electrical circuits

Publications (2)

Publication Number Publication Date
WO2004008163A2 WO2004008163A2 (fr) 2004-01-22
WO2004008163A3 true WO2004008163A3 (fr) 2004-06-10

Family

ID=30117843

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/022125 WO2004008163A2 (fr) 2002-07-16 2003-07-15 Ensemble conçu pour relier electriquement un composant de verification a une machine de verification servant a verifier les circuits electriques se trouvant sur ledit composant de verification

Country Status (6)

Country Link
EP (1) EP1523685A2 (fr)
JP (1) JP2005533254A (fr)
KR (1) KR20050029215A (fr)
CN (1) CN100523826C (fr)
AU (1) AU2003249276A1 (fr)
WO (1) WO2004008163A2 (fr)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100956472B1 (ko) 2005-04-27 2010-05-07 에어 테스트 시스템즈 전자 장치들을 테스트하기 위한 장치
CN101051067B (zh) * 2006-04-03 2010-08-11 航天科工防御技术研究试验中心 电连接器综合检测控制装置设计方法
MY152599A (en) 2007-02-14 2014-10-31 Eles Semiconductor Equipment S P A Test of electronic devices at package level using test boards without sockets
EP1959265A1 (fr) 2007-02-16 2008-08-20 Eles Semiconductor Equipment S.P.A. Test de circuits intégrés sur une tranche avec une cartouche laissant leur surface exposée
US7557594B2 (en) * 2007-08-14 2009-07-07 Electro Scientific Industries, Inc. Automated contact alignment tool
US7800382B2 (en) 2007-12-19 2010-09-21 AEHR Test Ststems System for testing an integrated circuit of a device and its method of use
CN101545926B (zh) * 2008-03-25 2011-05-11 旺矽科技股份有限公司 探针测试装置
DE102009012021B4 (de) * 2009-03-10 2011-02-03 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Messvorrichtung zur elektrischen Vermessung einer einseitig an einer Messseite elektrisch kontaktierbaren Messstruktur
TWI440412B (zh) * 2011-12-28 2014-06-01 Princo Corp 超薄多層基板之封裝方法
CN103808969A (zh) * 2012-11-08 2014-05-21 富泰华工业（深圳）有限公司 用于承载待测试电子装置的治具
CN103808979A (zh) * 2012-11-08 2014-05-21 富泰华工业（深圳）有限公司 用于承载待测试电子装置的治具
CN105548859A (zh) * 2015-12-09 2016-05-04 上海精密计量测试研究所 用于环境测试的测试设备及方法
CN106200239B (zh) * 2016-09-14 2019-03-15 海信集团有限公司 光机照明系统
US10782316B2 (en) * 2017-01-09 2020-09-22 Delta Design, Inc. Socket side thermal system
CN114814522A (zh) 2017-03-03 2022-07-29 雅赫测试系统公司 电子测试器
WO2022076333A1 (fr) 2020-10-07 2022-04-14 Aehr Test Systems Appareil d'essai électronique
WO2023278632A1 (fr) 2021-06-30 2023-01-05 Delta Design, Inc. Système de régulation de température comprenant un ensemble contacteur

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5313157A (en) * 1990-10-31 1994-05-17 Hughes Aircraft Company Probe for jesting an electrical circuit chip
EP0639777A1 (fr) * 1993-08-21 1995-02-22 Hewlett-Packard Company Inspection des composants électriques utilisant une sonde
US6137297A (en) * 1999-01-06 2000-10-24 Vertest Systemsn Corp. Electronic test probe interface assembly and method of manufacture
US6292007B1 (en) * 1997-05-19 2001-09-18 Si Diamond Technology Inc. Probe head assembly
US20020075025A1 (en) * 1999-06-30 2002-06-20 Masahiro Tanaka Semiconductor testing tool

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5313157A (en) * 1990-10-31 1994-05-17 Hughes Aircraft Company Probe for jesting an electrical circuit chip
EP0639777A1 (fr) * 1993-08-21 1995-02-22 Hewlett-Packard Company Inspection des composants électriques utilisant une sonde
US6292007B1 (en) * 1997-05-19 2001-09-18 Si Diamond Technology Inc. Probe head assembly
US6137297A (en) * 1999-01-06 2000-10-24 Vertest Systemsn Corp. Electronic test probe interface assembly and method of manufacture
US20020075025A1 (en) * 1999-06-30 2002-06-20 Masahiro Tanaka Semiconductor testing tool

Also Published As

Publication number Publication date
AU2003249276A1 (en) 2004-02-02
JP2005533254A (ja) 2005-11-04
CN100523826C (zh) 2009-08-05
CN1668929A (zh) 2005-09-14
KR20050029215A (ko) 2005-03-24
EP1523685A2 (fr) 2005-04-20
WO2004008163A2 (fr) 2004-01-22
AU2003249276A8 (en) 2004-02-02

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