WO2003053864A1 - Machine de traitement d'eaux usees contenant du peroxyde d'hydrogene - Google Patents

Machine de traitement d'eaux usees contenant du peroxyde d'hydrogene Download PDF

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Publication number
WO2003053864A1
WO2003053864A1 PCT/JP2002/013353 JP0213353W WO03053864A1 WO 2003053864 A1 WO2003053864 A1 WO 2003053864A1 JP 0213353 W JP0213353 W JP 0213353W WO 03053864 A1 WO03053864 A1 WO 03053864A1
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WO
WIPO (PCT)
Prior art keywords
hydrogen peroxide
catalyst layer
reaction tower
catalyst
wastewater treatment
Prior art date
Application number
PCT/JP2002/013353
Other languages
English (en)
Japanese (ja)
Inventor
Kazuya Uesugi
Teruo Sugizaki
Original Assignee
Organo Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Organo Corporation filed Critical Organo Corporation
Priority to AU2002354263A priority Critical patent/AU2002354263A1/en
Priority to KR10-2003-7007697A priority patent/KR20040067838A/ko
Publication of WO2003053864A1 publication Critical patent/WO2003053864A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/24—Stationary reactors without moving elements inside
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/70—Treatment of water, waste water, or sewage by reduction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2101/00—Nature of the contaminant
    • C02F2101/10—Inorganic compounds
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
    • C02F2103/34—Nature of the water, waste water, sewage or sludge to be treated from industrial activities not provided for in groups C02F2103/12 - C02F2103/32
    • C02F2103/346—Nature of the water, waste water, sewage or sludge to be treated from industrial activities not provided for in groups C02F2103/12 - C02F2103/32 from semiconductor processing, e.g. waste water from polishing of wafers

Definitions

  • the present invention relates to an apparatus for treating various hydrogen peroxide-containing wastewater such as semiconductor manufacturing wastewater and food container cleaning wastewater.
  • Hydrogen peroxide is a clean chemical that excels in cleaning and disinfecting effects, and decomposes into oxygen and water after the reaction. Therefore, it is widely used as a detergent and disinfectant in manufacturing processes. For example, in a semiconductor device manufacturing plant, hydrogen peroxide is used for cleaning wafers in various processes.
  • Hydrogen peroxide used for cleaning and sterilization is discharged as waste liquid (water containing hydrogen peroxide) from the manufacturing process. It is not desirable to discharge this waste liquid directly into public waters because it has bactericidal activity and causes COD.
  • the treatment of wastewater containing hydrogen peroxide using a reduction catalyst has the advantages described above, but this treatment requires a relatively large-scale treatment facility as compared to treatment using a reducing agent and an enzyme agent. was there.
  • a hydrogen peroxide decomposition catalyst capable of performing an efficient treatment was used.
  • a treatment device for wastewater containing hydrogen peroxide is provided.
  • the present invention relates to a treatment apparatus for decomposing hydrogen peroxide into oxygen and water by flowing hydrogen peroxide-containing wastewater in an upward flow through a reaction tower filled with a hydrogen peroxide decomposition catalyst.
  • the hydrogen peroxide decomposition catalyst is divided into a plurality of layers in the vertical direction in the reaction tower, and is arranged without contacting at least the oxygen gas generated in the lowermost catalyst layer with the upper catalyst layer.
  • a gas vent pipe to be discharged outside the reaction tower is installed inside the reaction tower.
  • FIG. 1 is a schematic diagram showing an embodiment of a wastewater treatment apparatus containing hydrogen peroxide according to the present invention.
  • FIG. 2 is a plan view showing an upper catalyst support plate of the apparatus of FIG.
  • FIG. 3 is a schematic diagram of the experimental apparatus A used in the experimental example.
  • FIG. 4 is a schematic diagram of the experimental apparatus B used in the experimental example.
  • reaction efficiency is generally increased by improving the contact efficiency between the catalyst and the reaction target (in the present invention, hydrogen peroxide in water). Costs can be reduced.
  • the present inventors studied a method for preventing the generated bubbles of oxygen gas from inhibiting the contact between the catalyst and hydrogen peroxide.
  • the catalyst is divided into multiple layers in the vertical direction in the reaction tower, and the oxygen gas generated in the lower catalyst layer is removed.
  • the upper catalyst layer contacts the catalyst with hydrogen peroxide without being disturbed by the oxygen gas bubbles generated in the lower catalyst layer.
  • the hydrogen peroxide removal rate in the reaction tower was improved. At this time, it was found that by installing an oxygen gas discharge pipe in the reaction tower, it was possible to satisfactorily discharge the oxygen gas generated in the catalyst layer.
  • the apparatus according to the present embodiment is a treatment apparatus that decomposes hydrogen peroxide into oxygen and water by flowing hydrogen peroxide-containing wastewater in an upward flow through a reaction tower filled with a hydrogen peroxide decomposition catalyst.
  • the hydrogen peroxide decomposition catalyst is vertically divided into a plurality of layers in the reaction tower, and at least oxygen gas generated in the lowermost catalyst layer is transferred to the upper catalyst layer.
  • a gas vent pipe that discharges outside the reaction tower without contact is installed inside the reaction tower.
  • the number of layers of the hydrogen peroxide decomposition catalyst can be determined as appropriate, but it is usually appropriate to divide the catalyst into two to four layers, particularly two layers.
  • a gas vent pipe for discharging at least bubbles of oxygen gas generated in the lowermost catalyst layer to the outside of the reaction tower.
  • the type of hydrogen peroxide decomposition catalyst is not limited, and any catalyst can be used as long as it can reduce hydrogen peroxide to decompose it into oxygen and water.
  • the hydrogen peroxide decomposition catalyst include metal catalysts such as platinum, palladium, and manganese; and activated carbon. Further, a catalyst in which a metal such as platinum, palladium, or manganese is supported on a base made of activated carbon, alumina, silica, or the like can also be used.
  • the catalyst loading amount in each of the catalyst layers divided into a plurality of layers in the vertical direction depends on the concentration of hydrogen peroxide in the wastewater, the flow rate of the wastewater, and the target removal of hydrogen peroxide. Each can be set arbitrarily in consideration of the rate and the like. It is also possible to fill each catalyst layer with a different type of catalyst.
  • FIG. 1 is a schematic view showing an embodiment of a wastewater treatment apparatus containing hydrogen peroxide according to the present invention.
  • the reaction tower 2 is formed, for example, in a cylindrical shape.
  • the raw water supply pipe 4 is fixed to the bottom of the reaction tower 2 by being inserted from the outside.
  • a support gravel layer 6 is provided at the bottom of the reaction tower 2, and the raw water supply pipe 4 is opened in the support gravel layer 6.
  • a lower catalyst layer 8 an upper catalyst support plate 10, a support gravel layer 12, and an upper catalyst layer 14 are sequentially formed in this order.
  • the supporting gravel layers 6 and 12 support the lower catalyst layer 8 and the upper catalyst layer 14, respectively, and have a larger particle size than the catalyst particles constituting the lower catalyst layer 8 and the upper catalyst layer 14. It is composed of
  • An L-shaped treated water discharge pipe 16 having an open upper end is provided above the upper catalyst layer 14 to overflow and discharge treated water (supernatant water) in the reaction tower 2. Further, a gas outlet 18 for discharging the internal gas is provided at the upper end of the reaction tower 2.
  • a gas vent pipe 20 is provided to penetrate the upper catalyst support plate 10, the support gravel layer 12, and the upper catalyst layer 14 of the reaction tower 2.
  • the gas vent tube 20 has a lower end supported by an upper catalyst support plate 10 and an upper end supported by a gas vent tube support 22 disposed above the reaction tower 2.
  • the upper catalyst support plate 1 ⁇ supporting the gravel layer 12 and the upper catalyst layer 14 has eight water collecting ports (collector screens) 24 and four gas vent ports 2 as shown in Fig. 2. 6 are provided, and each gas vent 2 The lower end of 0 is connected. That is, in FIG. 1, only one gas vent pipe 20 is shown, but the gas vent pipes 20 are provided corresponding to the gas vent ports 26, and in this apparatus, a total of four gas vent pipes 20 are provided. Draft 20 is installed. Further, these gas vent pipes 20 pass through the upper catalyst layer 14 and open above the treated water level 30 at the top of the tower. That is, the upper end of the degassing pipe 20 is located above the upper end opening of the treated water discharge pipe 16.
  • the upper catalyst support plate 10 is disposed above the lower catalyst layer 8, and a space 32 is formed between the lower catalyst layer 8 and the upper catalyst support plate 10. .
  • the catalyst layer is divided into the upper and lower layers (the lower catalyst layer 8 and the upper catalyst layer 14) and arranged in the reaction tower 2, and the gas vent pipe bypassing the upper catalyst layer 14 is provided. 20 are provided.
  • the hydrogen peroxide-containing wastewater 28 is supplied from the raw water supply pipe 4 to the lower part of the reaction tower 2.
  • a support gravel layer 6 is provided at the lower part of the reaction tower 2, and the hydrogen peroxide-containing wastewater spreads throughout the bottom of the reaction tower 2 in the support gravel layer 6 c as described above.
  • a support plate 10 for the upper catalyst layer 14 is provided on the lower surface, a space 32 is formed below the support plate 10, and the lower catalyst 10 is provided on the support plate 10 as described above.
  • a gas vent 26 for collecting oxygen gas generated from the layer 8 is provided. The gas vent port 26 is connected to a gas vent pipe 20 extending above the upper catalyst layer 8 above the reaction tower 2.
  • the support plate 10 in the middle stage of the reaction tower is provided with a water collecting port 24 for guiding wastewater to the upper catalyst layer 14 separately from the gas venting port 26, and a part or all of the generated gas is removed.
  • the drained water is passed through the water collecting port 24 into the upper catalyst layer 14, and the hydrogen peroxide in the drain is further reduced and decomposed.
  • the oxygen gas generated in the upper catalyst layer 14 is discharged upward as it is.
  • the wastewater that has passed through the upper catalyst layer 14 reaches the water surface 30 at the top of the tower, and is discharged out of the reaction tower 2 from the treated water discharge pipe 16.
  • Oxygen gas from the lower catalyst layer 8 guided upward through the water surface through the gas vent pipe 20, and the upper catalyst layer 14 Oxygen gas is discharged out of the reaction tower 2 from the gas outlet 18 at the top of the tower.
  • This system treats wastewater containing hydrogen peroxide in an upward flow direction.
  • the catalyst is divided into two layers (lower catalyst layer 8 and upper catalyst layer 14) in the vertical direction, and is arranged.
  • a space 32 is formed between both layers, and oxygen gas generated in the lower catalyst layer 8 is discharged out of the reaction tower 2 without contacting the upper catalyst layer 14.
  • the upper catalyst layer 14 makes contact between the catalyst and hydrogen peroxide without being hindered by the oxygen gas generated in the lower catalyst layer 8, and as a result, the hydrogen peroxide removal rate in the reaction tower 2 is improved. .
  • the wastewater containing hydrogen peroxide is treated in an upward flow, so that the generated oxygen gas easily escapes above each catalyst layer.
  • a vent pipe 20 for discharging the generated oxygen gas is provided in the reaction tower 2.
  • the gas vent pipe 20 is installed outside the reaction tower 2, that is, when the gas vent pipe 20 is externally connected to the peripheral wall between the upper catalyst layer 14 and the lower catalyst layer 8 of the reaction tower 2, In comparison, the oxygen gas generated in the lower catalyst layer is discharged well out of the system.
  • the number of gas vents 26 and water collecting ports 24 provided on the support plate 10 and their locations can be arbitrarily set as long as the strength of the support plate 10 is sufficiently maintained.
  • the gas rise causes an air lift effect on water in the gas vent pipe 20
  • the water collecting port 24 has a diameter smaller than the size of the catalyst or a mesh-shaped or comb-shaped screen is provided so that the catalyst in the upper catalyst layer 14 does not fall downward.
  • the lower end opening position of the gas vent port 26 of the support plate 10 is located above the lower end opening position of the water collecting port 24.
  • the support plate 10 is not a flat plate but a shape that faces upward toward the gas vent 26 (shape of an inverted funnel), or a pipe-like member extending downward around the water intake 24 is attached. By doing so, the lower end of the gas vent 26 can be positioned below the water intake 24.
  • the effect of Ming was verified. That is, two sets of reaction towers of the same shape were prepared, A and B.
  • reference numeral 42 denotes a reaction tower
  • 44 denotes a raw water supply pipe
  • 46 denotes a lower catalyst layer
  • 48 denotes an upper catalyst support plate
  • 50 denotes an upper catalyst layer
  • 52 denotes a treated water discharge pipe.
  • Numeral 54 denotes a gas vent pipe connected to the gas vent of the support plate 48 (installed only in the experimental machine A), and numeral 56 denotes a water collecting port formed in the support plate 48.
  • the specifications of experimental units A and B are shown below.
  • Gas vent port 1 piece (center of support plate, diameter 15 mm)
  • Hydrogen peroxide decomposition catalyst used manganese supported catalyst
  • Catalyst filling height 500mm each for upper and lower
  • Catalyst filling amount 192mL each for upper and lower
  • Table 1 shows the hydrogen peroxide concentration and the hydrogen peroxide removal rate of the treated water of the experimental machine. As shown in Table 1, the concentration of hydrogen peroxide in the treated water and the removal rate of hydrogen peroxide in Experimental Unit A were all higher than those in Experimental Unit B in each water flow condition.
  • the hydrogen peroxide-containing wastewater treatment device of the present embodiment is intended to increase the contact efficiency between the hydrogen peroxide decomposition catalyst and hydrogen peroxide, to reduce the size of the device, save space, and reduce equipment costs. Can be.

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Water Supply & Treatment (AREA)
  • Treatment Of Water By Oxidation Or Reduction (AREA)
  • Catalysts (AREA)
  • Removal Of Specific Substances (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

Cette invention a trait à une machine de traitement d'eaux usées contenant du peroxyde d'hydrogène, faisant traverser, dans le sens ascendant, à ces eaux usées une tour de réaction (2) garnie d'un catalyseur de décomposition du peroxyde d'hydrogène, afin de décomposer celui-ci en oxygène et en eau, plusieurs couches catalytiques, une couche inférieure (8) et une couche supérieure (14) par exemple, étant disposées perpendiculairement dans cette tour de réaction (2). Un conduit de purge des gaz (20) est placé dans la tour de réaction (2) afin d'évacuer vers l'extérieur l'oxygène en phase gazeuse produit, au moins, dans la couche catalytique la plus basse et ce, sans que cet oxygène n'entre en contact avec une couche catalytique se trouvant au-dessus de la couche inférieure. Cette machine permet d'améliorer efficacement la mise en contact du peroxyde d'hydrogène avec le catalyseur. On peut, de ce fait, donner à cette machine les plus petites dimensions possibles, économiser de l'espace et réduire le coût de revient des équipements.
PCT/JP2002/013353 2001-12-21 2002-12-20 Machine de traitement d'eaux usees contenant du peroxyde d'hydrogene WO2003053864A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU2002354263A AU2002354263A1 (en) 2001-12-21 2002-12-20 Apparatus for treating waste water containing hydrogen peroxide
KR10-2003-7007697A KR20040067838A (ko) 2001-12-21 2002-12-20 과산화수소 함유 배수 처리 장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001390090A JP3894788B2 (ja) 2001-12-21 2001-12-21 過酸化水素含有排水処理装置
JP2001-390090 2001-12-21

Publications (1)

Publication Number Publication Date
WO2003053864A1 true WO2003053864A1 (fr) 2003-07-03

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Application Number Title Priority Date Filing Date
PCT/JP2002/013353 WO2003053864A1 (fr) 2001-12-21 2002-12-20 Machine de traitement d'eaux usees contenant du peroxyde d'hydrogene

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JP (1) JP3894788B2 (fr)
KR (1) KR20040067838A (fr)
CN (1) CN1275876C (fr)
AU (1) AU2002354263A1 (fr)
TW (1) TWI226311B (fr)
WO (1) WO2003053864A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5045099B2 (ja) * 2004-03-31 2012-10-10 栗田工業株式会社 超純水製造装置及び超純水製造装置の運転方法
JP2006087343A (ja) * 2004-09-24 2006-04-06 Kawakubo Seisakusho:Kk 小魚等の殺菌洗浄方法及びその装置
JP2006087342A (ja) * 2004-09-24 2006-04-06 Kawakubo Seisakusho:Kk 小魚等の殺菌洗浄方法及びその装置
JP4747357B2 (ja) * 2004-11-02 2011-08-17 株式会社カワクボ製作所 小魚等の殺菌洗浄方法及びその装置
KR100739825B1 (ko) * 2005-09-23 2007-07-13 한국과학기술원 다중 촉매층을 갖는 과산화수소 분해반응기
JP4919318B2 (ja) * 2005-12-07 2012-04-18 オルガノ株式会社 官能基導入用反応カラム、官能基導入装置及び官能基導入方法
JP4860008B1 (ja) * 2011-06-02 2012-01-25 株式会社アサカ理研 過酸化水素分解装置及び過酸化水素の分解方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61136482A (ja) * 1984-12-06 1986-06-24 Osamu Mihara 水浄化装置
JPS6227090A (ja) * 1985-07-26 1987-02-05 Japan Organo Co Ltd 過酸化水素の除去方法および装置
JPH10314760A (ja) * 1997-05-16 1998-12-02 Japan Organo Co Ltd 過酸化水素除去装置及び過酸化水素含有排水の処理方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61136482A (ja) * 1984-12-06 1986-06-24 Osamu Mihara 水浄化装置
JPS6227090A (ja) * 1985-07-26 1987-02-05 Japan Organo Co Ltd 過酸化水素の除去方法および装置
JPH10314760A (ja) * 1997-05-16 1998-12-02 Japan Organo Co Ltd 過酸化水素除去装置及び過酸化水素含有排水の処理方法

Also Published As

Publication number Publication date
JP3894788B2 (ja) 2007-03-22
KR20040067838A (ko) 2004-07-30
JP2003190972A (ja) 2003-07-08
CN1633395A (zh) 2005-06-29
CN1275876C (zh) 2006-09-20
TWI226311B (en) 2005-01-11
AU2002354263A1 (en) 2003-07-09
TW200301227A (en) 2003-07-01

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