WO2003021665A1 - Contenant destine a un substrat de precision - Google Patents

Contenant destine a un substrat de precision Download PDF

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Publication number
WO2003021665A1
WO2003021665A1 PCT/JP2002/008652 JP0208652W WO03021665A1 WO 2003021665 A1 WO2003021665 A1 WO 2003021665A1 JP 0208652 W JP0208652 W JP 0208652W WO 03021665 A1 WO03021665 A1 WO 03021665A1
Authority
WO
WIPO (PCT)
Prior art keywords
container
precision substrate
component
ppb
argon gas
Prior art date
Application number
PCT/JP2002/008652
Other languages
English (en)
French (fr)
Inventor
Tadahiro Ohmi
Toshihiko Jimbo
Toshihide Murakami
Original Assignee
Zeon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zeon Corporation filed Critical Zeon Corporation
Priority to EP02760759A priority Critical patent/EP1429380A4/en
Priority to US10/487,840 priority patent/US7781035B2/en
Priority to JP2003525903A priority patent/JP4470017B2/ja
Publication of WO2003021665A1 publication Critical patent/WO2003021665A1/ja

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H01L21/67306—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterized by a material, a roughness, a coating or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67313—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67313—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements
    • H01L21/67316—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements characterized by a material, a roughness, a coating or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
    • H01L21/67323—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls characterized by a material, a roughness, a coating or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
    • H01L21/6733—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls characterized by a material, a roughness, a coating or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67353—Closed carriers specially adapted for a single substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67359—Closed carriers specially adapted for containing masks, reticles or pellicles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67386—Closed carriers characterised by the construction of the closed carrier
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
    • Y10T428/1303—Paper containing [e.g., paperboard, cardboard, fiberboard, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
    • Y10T428/1352—Polymer or resin containing [i.e., natural or synthetic]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
    • Y10T428/1352—Polymer or resin containing [i.e., natural or synthetic]
    • Y10T428/1355—Elemental metal containing [e.g., substrate, foil, film, coating, etc.]
    • Y10T428/1359—Three or more layers [continuous layer]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
    • Y10T428/1352—Polymer or resin containing [i.e., natural or synthetic]
    • Y10T428/1386—Natural or synthetic rubber or rubber-like compound containing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
    • Y10T428/1352—Polymer or resin containing [i.e., natural or synthetic]
    • Y10T428/139—Open-ended, self-supporting conduit, cylinder, or tube-type article

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
PCT/JP2002/008652 2001-08-28 2002-08-28 Contenant destine a un substrat de precision WO2003021665A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP02760759A EP1429380A4 (en) 2001-08-28 2002-08-28 CONTAINER FOR PRECISION SUBSTRATE
US10/487,840 US7781035B2 (en) 2001-08-28 2002-08-28 Container for precision substrate
JP2003525903A JP4470017B2 (ja) 2001-08-28 2002-08-28 精密基板用容器

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001257460 2001-08-28
JP2001-257460 2001-08-28

Publications (1)

Publication Number Publication Date
WO2003021665A1 true WO2003021665A1 (fr) 2003-03-13

Family

ID=19085116

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2002/008652 WO2003021665A1 (fr) 2001-08-28 2002-08-28 Contenant destine a un substrat de precision

Country Status (4)

Country Link
US (1) US7781035B2 (ja)
EP (1) EP1429380A4 (ja)
JP (1) JP4470017B2 (ja)
WO (1) WO2003021665A1 (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005173556A (ja) * 2003-11-18 2005-06-30 Net Plastic:Kk 大型精密シート状（半）製品用密封容器
WO2008026733A1 (fr) 2006-08-31 2008-03-06 Zeon Corporation Polymères de polymérisation par ouverture de cycle à base de norbornène hydrogéné, composition de résine et objets moulés
WO2008062564A1 (fr) * 2006-11-24 2008-05-29 Sumitomo Electric Industries, Ltd. Organe disposé dans un contenant de stockage de tranches et procédé de fabrication d'un tel organe
JP2008141131A (ja) * 2006-12-05 2008-06-19 Shin Etsu Polymer Co Ltd ウェーハ輸送ケース
JP2011018771A (ja) * 2009-07-09 2011-01-27 Shin Etsu Polymer Co Ltd 基板収納容器
WO2018207575A1 (ja) * 2017-05-12 2018-11-15 株式会社ダイセル 接着剤層形成装置、半導体チップ製造ライン、及び積層体の製造方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101195707B1 (ko) * 2007-12-20 2012-10-29 가부시키가이샤 호소카와 요코 의료 용기용 다층체 및 의료 용기
US10655219B1 (en) * 2009-04-14 2020-05-19 Goodrich Corporation Containment structure for creating composite structures
US10689753B1 (en) * 2009-04-21 2020-06-23 Goodrich Corporation System having a cooling element for densifying a substrate
WO2015037176A1 (ja) * 2013-09-11 2015-03-19 信越ポリマー株式会社 フォトマスクブランクス基板収納容器
US9470394B2 (en) * 2014-11-24 2016-10-18 Cree, Inc. LED light fixture including optical member with in-situ-formed gasket and method of manufacture
JP6339490B2 (ja) * 2014-12-17 2018-06-06 信越化学工業株式会社 Ｃｚシリコン単結晶の製造方法
KR102673842B1 (ko) * 2021-10-27 2024-06-10 (주)코스탯아이앤씨 전자파 차폐 반도체 수납용 트레이 및 그의 제조 방법

Citations (10)

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Publication number Priority date Publication date Assignee Title
EP0436372A2 (en) * 1989-12-26 1991-07-10 Nippon Zeon Co., Ltd. Thermoplastic materials and article made therefrom
JPH08288377A (ja) * 1995-04-18 1996-11-01 Sony Corp ウェーハ収納体
JPH1174337A (ja) * 1997-08-28 1999-03-16 Nippon Zeon Co Ltd 熱可塑性樹脂製容器
JPH11163115A (ja) * 1997-11-28 1999-06-18 Shin Etsu Polymer Co Ltd ウェーハ押さえ部材、これを組み込んだウェーハ収納用容器
JPH11307622A (ja) * 1998-04-17 1999-11-05 Komatsu Ltd 半導体ウェハ包装容器
JP2000007085A (ja) * 1998-06-15 2000-01-11 Sumika Chemical Analysis Service Ltd 保管運搬用の容器
JP2000063505A (ja) * 1998-08-26 2000-02-29 Teijin Chem Ltd 薄板収納搬送容器用ポリカーボネート樹脂
JP2000143833A (ja) * 1998-11-11 2000-05-26 Chisso Corp オレフィン系樹脂組成物よりなる成形体
JP2001192458A (ja) * 2000-01-06 2001-07-17 Nippon Zeon Co Ltd 脂環構造含有重合体樹脂の保存方法
JP2001200143A (ja) * 2000-01-20 2001-07-24 Nippon Zeon Co Ltd 光反射体及び樹脂組成物

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JP2816864B2 (ja) * 1989-07-07 1998-10-27 大塚化学株式会社 搬送用ウエーハバスケット及び収納ケース
TW318861B (ja) * 1994-08-16 1997-11-01 Mitsui Toatsu Chemicals
EP1006134B1 (en) * 1997-08-19 2003-10-15 Nippon Zeon Co., Ltd. Norbornene polymer and process for the preparation thereof
JP3282584B2 (ja) * 1998-06-02 2002-05-13 信越ポリマー株式会社 精密部材用収納容器

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0436372A2 (en) * 1989-12-26 1991-07-10 Nippon Zeon Co., Ltd. Thermoplastic materials and article made therefrom
JPH08288377A (ja) * 1995-04-18 1996-11-01 Sony Corp ウェーハ収納体
JPH1174337A (ja) * 1997-08-28 1999-03-16 Nippon Zeon Co Ltd 熱可塑性樹脂製容器
JPH11163115A (ja) * 1997-11-28 1999-06-18 Shin Etsu Polymer Co Ltd ウェーハ押さえ部材、これを組み込んだウェーハ収納用容器
JPH11307622A (ja) * 1998-04-17 1999-11-05 Komatsu Ltd 半導体ウェハ包装容器
JP2000007085A (ja) * 1998-06-15 2000-01-11 Sumika Chemical Analysis Service Ltd 保管運搬用の容器
JP2000063505A (ja) * 1998-08-26 2000-02-29 Teijin Chem Ltd 薄板収納搬送容器用ポリカーボネート樹脂
JP2000143833A (ja) * 1998-11-11 2000-05-26 Chisso Corp オレフィン系樹脂組成物よりなる成形体
JP2001192458A (ja) * 2000-01-06 2001-07-17 Nippon Zeon Co Ltd 脂環構造含有重合体樹脂の保存方法
JP2001200143A (ja) * 2000-01-20 2001-07-24 Nippon Zeon Co Ltd 光反射体及び樹脂組成物

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP1429380A4 *

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4675601B2 (ja) * 2003-11-18 2011-04-27 株式会社 ネットプラスチック 大型精密シート状製品および半製品用密封容器
JP2005173556A (ja) * 2003-11-18 2005-06-30 Net Plastic:Kk 大型精密シート状（半）製品用密封容器
JP5613981B2 (ja) * 2006-08-31 2014-10-29 日本ゼオン株式会社 ノルボルネン系開環重合体水素化物、樹脂組成物および成形体
US8586160B2 (en) 2006-08-31 2013-11-19 Zeon Corporation Hydrogenated norbornene-based ring-opening polymerization polymer, resin composition, and molded object
WO2008026733A1 (fr) 2006-08-31 2008-03-06 Zeon Corporation Polymères de polymérisation par ouverture de cycle à base de norbornène hydrogéné, composition de résine et objets moulés
US8685510B2 (en) 2006-08-31 2014-04-01 Zeon Corporation Hydrogenated norbornene-based ring-opening polymerization polymer, resin composition, and molded object
EP2305729A1 (en) 2006-08-31 2011-04-06 Zeon Corporation Hydrogenated norbornene-based ring-opening polymerization polymer, resin composition, and molded object
US8647730B2 (en) 2006-08-31 2014-02-11 Zeon Corporation Hydrogenated norbornene-based ring-opening polymerization polymer, resin composition, and molded object
US8481166B2 (en) 2006-08-31 2013-07-09 Zeon Corporation Hydrogenated norbornene-based ring-opening polymerization polymer, resin composition, and molded object
JP2008130982A (ja) * 2006-11-24 2008-06-05 Sumitomo Electric Ind Ltd ウエハ収納容器内に設ける部材およびその製造方法
WO2008062564A1 (fr) * 2006-11-24 2008-05-29 Sumitomo Electric Industries, Ltd. Organe disposé dans un contenant de stockage de tranches et procédé de fabrication d'un tel organe
JP2008141131A (ja) * 2006-12-05 2008-06-19 Shin Etsu Polymer Co Ltd ウェーハ輸送ケース
JP2011018771A (ja) * 2009-07-09 2011-01-27 Shin Etsu Polymer Co Ltd 基板収納容器
WO2018207575A1 (ja) * 2017-05-12 2018-11-15 株式会社ダイセル 接着剤層形成装置、半導体チップ製造ライン、及び積層体の製造方法
CN110651355A (zh) * 2017-05-12 2020-01-03 株式会社大赛璐 粘接剂层形成装置、半导体芯片生产线、及层叠体的制造方法
CN110651355B (zh) * 2017-05-12 2024-01-12 株式会社大赛璐 粘接剂层形成装置、半导体芯片生产线、及层叠体的制造方法

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US20040224110A1 (en) 2004-11-11
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US7781035B2 (en) 2010-08-24
EP1429380A4 (en) 2009-07-15
EP1429380A1 (en) 2004-06-16

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