WO2003013816A1 - Method and device for scribing brittle material substrate - Google Patents

Method and device for scribing brittle material substrate Download PDF

Info

Publication number
WO2003013816A1
WO2003013816A1 PCT/JP2002/008152 JP0208152W WO03013816A1 WO 2003013816 A1 WO2003013816 A1 WO 2003013816A1 JP 0208152 W JP0208152 W JP 0208152W WO 03013816 A1 WO03013816 A1 WO 03013816A1
Authority
WO
WIPO (PCT)
Prior art keywords
glass substrate
mother glass
laser spot
coolant
area
Prior art date
Application number
PCT/JP2002/008152
Other languages
English (en)
French (fr)
Inventor
Haruo Wakayama
Original Assignee
Mitsuboshi Diamond Industrial Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsuboshi Diamond Industrial Co., Ltd. filed Critical Mitsuboshi Diamond Industrial Co., Ltd.
Priority to JP2003518795A priority Critical patent/JPWO2003013816A1/ja
Publication of WO2003013816A1 publication Critical patent/WO2003013816A1/ja

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/09—Severing cooled glass by thermal shock
    • C03B33/091—Severing cooled glass by thermal shock using at least one focussed radiation beam, e.g. laser beam
    • C03B33/093—Severing cooled glass by thermal shock using at least one focussed radiation beam, e.g. laser beam using two or more focussed radiation beams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B23K26/386—Removing material by boring or cutting by boring of blind holes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/146—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor the fluid stream containing a liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/09—Severing cooled glass by thermal shock
    • C03B33/091—Severing cooled glass by thermal shock using at least one focussed radiation beam, e.g. laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Thermal Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Laser Beam Processing (AREA)
PCT/JP2002/008152 2001-08-10 2002-08-08 Method and device for scribing brittle material substrate WO2003013816A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003518795A JPWO2003013816A1 (ja) 2001-08-10 2002-08-08 脆性材料基板のスクライブ方法およびスクライブ装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001244749 2001-08-10
JP2001-244749 2001-08-10

Publications (1)

Publication Number Publication Date
WO2003013816A1 true WO2003013816A1 (en) 2003-02-20

Family

ID=19074634

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2002/008152 WO2003013816A1 (en) 2001-08-10 2002-08-08 Method and device for scribing brittle material substrate

Country Status (5)

Country Link
JP (1) JPWO2003013816A1 (ja)
KR (1) KR100551527B1 (ja)
CN (1) CN1242458C (ja)
TW (1) TW583046B (ja)
WO (1) WO2003013816A1 (ja)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100794284B1 (ko) * 2001-09-29 2008-01-11 삼성전자주식회사 비금속 기판 절단 방법
JPWO2006046525A1 (ja) * 2004-10-25 2008-05-22 三星ダイヤモンド工業株式会社 クラック形成方法およびクラック形成装置
JP2008183599A (ja) * 2007-01-31 2008-08-14 Japan Steel Works Ltd:The 高脆性非金属材料製の被加工物の加工方法及びその装置
JP2008246808A (ja) * 2007-03-30 2008-10-16 Japan Steel Works Ltd:The 高脆性非金属材料製の被加工物の加工方法及びその装置
JP2009066613A (ja) * 2007-09-11 2009-04-02 Mitsuboshi Diamond Industrial Co Ltd 脆性材料基板の分断装置および分断方法
US8383983B2 (en) 2009-03-25 2013-02-26 Samsung Display Co., Ltd. Substrate cutting apparatus and method of cutting substrate using the same
US8445814B2 (en) 2009-03-25 2013-05-21 Samsung Display Co., Ltd. Substrate cutting apparatus and method of cutting substrate using the same
US10538453B2 (en) 2015-03-27 2020-01-21 Schott Ag Method for cutting glass using a laser, and glass produced according to the method

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005024497B4 (de) * 2005-05-27 2008-06-19 Schott Ag Verfahren zum mechanischen Brechen von geritzten flachen Werkstücken aus sprödbrüchigem Material
CN101513692B (zh) * 2008-02-21 2011-09-07 富士迈半导体精密工业（上海）有限公司 激光切割脆性材料的方法及装置
JP2011079690A (ja) * 2009-10-06 2011-04-21 Leo:Kk 回折格子を用いた厚板ガラスのレーザ熱応力割断
KR200451896Y1 (ko) * 2010-02-12 2011-01-18 주식회사 예림임업 문틀 체결용 브래킷
US11420894B2 (en) 2015-04-24 2022-08-23 Nanoplus Ltd. Brittle object cutting apparatus and cutting method thereof
JP6904567B2 (ja) * 2017-09-29 2021-07-21 三星ダイヤモンド工業株式会社 スクライブ加工方法及びスクライブ加工装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993020015A1 (en) * 1992-04-02 1993-10-14 Fonon Technology Limited Splitting of non-metallic materials
JPH0912327A (ja) * 1995-06-26 1997-01-14 Corning Inc ガラス切断方法および装置
JPH1034364A (ja) * 1996-07-25 1998-02-10 Souei Tsusho Kk 複数点熱源による脆性材料の割断加工方法
US6112967A (en) * 1997-04-14 2000-09-05 Schott Glas Method and apparatus for cutting through a flat workpiece made of brittle material, especially glass
JP2000281371A (ja) * 1999-03-09 2000-10-10 Corning Inc レーザスコアリングにおける亀裂深さの制御

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993020015A1 (en) * 1992-04-02 1993-10-14 Fonon Technology Limited Splitting of non-metallic materials
JPH0912327A (ja) * 1995-06-26 1997-01-14 Corning Inc ガラス切断方法および装置
JPH1034364A (ja) * 1996-07-25 1998-02-10 Souei Tsusho Kk 複数点熱源による脆性材料の割断加工方法
US6112967A (en) * 1997-04-14 2000-09-05 Schott Glas Method and apparatus for cutting through a flat workpiece made of brittle material, especially glass
JP2000281371A (ja) * 1999-03-09 2000-10-10 Corning Inc レーザスコアリングにおける亀裂深さの制御

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100794284B1 (ko) * 2001-09-29 2008-01-11 삼성전자주식회사 비금속 기판 절단 방법
JPWO2006046525A1 (ja) * 2004-10-25 2008-05-22 三星ダイヤモンド工業株式会社 クラック形成方法およびクラック形成装置
JP4722054B2 (ja) * 2004-10-25 2011-07-13 三星ダイヤモンド工業株式会社 クラック形成方法およびクラック形成装置
JP2008183599A (ja) * 2007-01-31 2008-08-14 Japan Steel Works Ltd:The 高脆性非金属材料製の被加工物の加工方法及びその装置
WO2008099663A1 (ja) * 2007-01-31 2008-08-21 The Japan Steel Works, Ltd. 高脆性非金属材料製の被加工物の加工方法及びその装置
JP2008246808A (ja) * 2007-03-30 2008-10-16 Japan Steel Works Ltd:The 高脆性非金属材料製の被加工物の加工方法及びその装置
JP2009066613A (ja) * 2007-09-11 2009-04-02 Mitsuboshi Diamond Industrial Co Ltd 脆性材料基板の分断装置および分断方法
US8383983B2 (en) 2009-03-25 2013-02-26 Samsung Display Co., Ltd. Substrate cutting apparatus and method of cutting substrate using the same
TWI392554B (zh) * 2009-03-25 2013-04-11 Samsung Display Co Ltd 基板切割設備及使用其切割基板的方法
US8445814B2 (en) 2009-03-25 2013-05-21 Samsung Display Co., Ltd. Substrate cutting apparatus and method of cutting substrate using the same
US10538453B2 (en) 2015-03-27 2020-01-21 Schott Ag Method for cutting glass using a laser, and glass produced according to the method

Also Published As

Publication number Publication date
KR20040017249A (ko) 2004-02-26
TW583046B (en) 2004-04-11
KR100551527B1 (ko) 2006-02-13
JPWO2003013816A1 (ja) 2004-11-25
CN1541155A (zh) 2004-10-27
CN1242458C (zh) 2006-02-15

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