WO2003004912A1 - Materiau d'obturation pour gorge a queue d'aronde - Google Patents

Materiau d'obturation pour gorge a queue d'aronde Download PDF

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Publication number
WO2003004912A1
WO2003004912A1 PCT/JP2002/006636 JP0206636W WO03004912A1 WO 2003004912 A1 WO2003004912 A1 WO 2003004912A1 JP 0206636 W JP0206636 W JP 0206636W WO 03004912 A1 WO03004912 A1 WO 03004912A1
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WO
WIPO (PCT)
Prior art keywords
dovetail groove
dovetail
sealing material
seal
members
Prior art date
Application number
PCT/JP2002/006636
Other languages
English (en)
Japanese (ja)
Inventor
Akira Ueda
Akira Muramatsu
Masahiro Imai
Original Assignee
Nippon Valqua Industries, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Valqua Industries, Ltd. filed Critical Nippon Valqua Industries, Ltd.
Publication of WO2003004912A1 publication Critical patent/WO2003004912A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/021—Sealings between relatively-stationary surfaces with elastic packing
    • F16J15/022—Sealings between relatively-stationary surfaces with elastic packing characterised by structure or material
    • F16J15/024—Sealings between relatively-stationary surfaces with elastic packing characterised by structure or material the packing being locally weakened in order to increase elasticity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/062—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces characterised by the geometry of the seat

Definitions

  • the present invention relates to a dovetail seal material and a seal structure, and more particularly, to a seal material that is attached to a joint of members and seals the joint in a vacuum device or piping equipment that requires high airtightness.
  • a seal material that is attached to a joint of members and seals the joint in a vacuum device or piping equipment that requires high airtightness.
  • JIS-B2401 specifies the size and shape of a dovetail groove in which an O-ring is mounted as a sealing material.
  • an O-ring which is a sealing material
  • a dovetail groove provided on the surface of one member.
  • Japanese Patent Application Laid-Open No. 10-318733 discloses a sealing material having a heart-shaped cross section.
  • a concave part is provided on a part of the circumference of the basic circular cross section, and both sides of the concave part are leg-shaped.
  • the shape formed by the concave portion and the leg portion is arranged along the inner shape of the dovetail groove, and the leg portion comes into contact with the bottom of the dovetail groove and is in close contact therewith.
  • the sealing ring can be mounted uniformly over the entire length in a stable posture without twisting or rolling inside the dovetail groove. It is said that the presence of the concave portion allows the resilience to work well and enhance the sealing function.
  • 11-336909 discloses that a crescent-shaped bulge is provided on the outer periphery of a main body having a circular cross section, and a concave portion is provided adjacent to the bulge.
  • the structure of the provided seal member has been proposed. It is said that one side of the main body and the bulging part is located on the bottom of the dovetail groove, so that the mounting posture is stable, and twisting and rolling hardly occur. Further, it is said that the sealing material is easily taken in and out by inserting and removing the sealing material by hooking the concave portion to the opening edge of the dovetail groove. Disclosure of the invention
  • the above-mentioned conventional dovetail groove sealing material has a problem that when the members to be sealed are tightened, the sealing material is easily entangled, and debris and powder missing from the sealing material are easily generated. There is.
  • the dovetail groove has an opening edge projecting in a wedge shape.
  • the seal material that has been compressed and swelled outward is caught on the opening edge of the dovetail groove, excessive stress is locally generated at that portion, and the seal material is easily damaged or chipped.
  • the sealing material rubs against the opening edge, generating abrasion powder. It is not preferable that debris or powder missing from the sealing material be mixed into the adjacent space or fluid.
  • the seal material caught on the opening edge of the dovetail groove is sandwiched between the member surfaces on both sides to be sealed, so that so-called penetration occurs.
  • the sealing material is sucked out to the vacuum side, and the above-described penetration is likely to occur. If penetration occurs, the sealing function does not increase even if the tightening pressure is increased. Leakage is likely to occur.
  • the injected sealing material is likely to be damaged or missing.
  • the durability of the sealing material also decreases. The suction of the sealing material by the vacuum can cause rolling and twisting of the sealing material.
  • An object of the present invention is to provide a dovetail seal material which is less likely to cause problems such as motion and torsion and has an excellent sealing function. Means for solving the problem
  • the dovetail groove sealing material seals between the two members by being attached to the dovetail groove provided on the surface of one of the members at the joint of the members and abutting against the surface of the other member
  • a dovetail seal material which is made of an elastic material and has a cross-sectional shape, a flat bottom arranged on the bottom surface of the dovetail, and right and left oblique sides rising obliquely outward from both sides of the bottom.
  • Left and right overhanging shoulders provided at the tip of each hypotenuse and located near the opening inside the dovetail groove, and provided at the center of the left and right overhanging shoulders and projecting upward from the opening of the dovetail groove.
  • a central convex portion is provided, and a concave portion is provided between the overhanging shoulder portion and the central convex portion, and is recessed inward from a tangent line between the overhanging shoulder portion and the central convex portion.
  • a sealing material is used in a place where a pair of members are face-to-face joined to each other to seal the joined place while maintaining high confidentiality.
  • junctions requiring high airtightness is the junction between the main chamber and the opening / closing lid of the processing chamber used in the semiconductor / liquid crystal manufacturing process.
  • a pair of members face each other at the joining point, and a dovetail groove is provided on the surface of one member, and a sealing material is attached to the dovetail groove.
  • the surface of the other member may be a simple flat surface, or a shallow groove or step may be provided at a location corresponding to the dovetail groove.
  • the basic cross-sectional structure of the dovetail groove is a roughly trapezoidal shape with the inner side wider than the opening. is there.
  • the bottom surface of the dovetail can be a flat surface parallel to the opening. Both sides of the dovetail can be slopes that slope inward from the bottom to the opening. The angle of inclination may be different on both sides.
  • the side surface may be a curved surface. The corner where the side and bottom meet and the inner edge of the opening can be rounded or chamfered.
  • the dovetail groove is arranged in an annular shape around the area to be sealed at the above-mentioned joint.
  • it is arranged in an annular shape surrounding the outer periphery of a vacuum space, a fluid passage, or the like.
  • the arrangement shape of the dovetail groove can be appropriately set according to the shape of the sealing portion, such as a circle, an oval, an oval, a rectangle, a polygon, and the like.
  • a dovetail groove may be provided on either side of the pair of members.
  • a dovetail groove can be provided on the bottom surface of a lid that opens and closes vertically.
  • the same technology as the ordinary O-ring and other dovetail seal materials can be adopted.
  • a natural or synthetic rubber material or elastic resin material can be used as long as it is an elastic material capable of elastic deformation required for the sealing function.
  • an appropriate material can be selected according to the conditions of the environment to be sealed (conditions such as the type of fluid, temperature, and pressure). For example, in the semiconductor field, when used in the opening / closing lid of a drying chamber, EPDM rubber that has excellent alcohol resistance and cleanliness and is relatively inexpensive can be used. In a corrosive environment such as under various plasma conditions, fluorine rubber is preferred.
  • the basic structure of the sealing material is an annular body or ring having a specific cross-sectional shape.
  • the ring diameter of the seal material and the arrangement shape of the ring are set in accordance with the ring diameter of the dovetail groove to be attached divided by the arrangement shape.
  • the cross-sectional shape of the sealing material includes a base, a hypotenuse, an overhanging shoulder, a central projection, and a recess, and the overall shape is a “dharma-like” shape.
  • the dovetail seal material of the present invention may be referred to as a Dharma-type seal material.
  • the bottom is flat.
  • the bottom of the dovetail is provided with the bottom side of the seal, so that the seal is not tilted or twisted and is stably arranged.
  • pressure is applied to the bottom of the dovetail groove.
  • the bottom surface may be entirely flat, or a part of the bottom may be provided with a dent or a groove.
  • the width of the bottom is smaller than the width of the opening of the dovetail groove, it is possible to smoothly pass through the opening of the dovetail groove from the bottom when attaching the sealing material to the dovetail groove.
  • the hypotenuse rises diagonally outward from both sides of the base.
  • the mounting operation is performed while the oblique side of the sealing material contacts the opening edge of the dovetail groove. It is preferable to have a shape that allows this mounting operation to be performed smoothly.
  • the right and left hypotenuses are set at the same inclination angle, but the inclination can be different if necessary.
  • the hypotenuse may be straight or curved inward or outward.
  • each of the left and right hypotenuses It is provided at the tip of each of the left and right hypotenuses. In the mounted state, the outer end of the overhanging shoulder comes into contact with the inner slope inside the opening edge of the dovetail groove. This prevents the sealing material from dropping out of the dovetail groove. It also has a function to determine the attitude and position of the sealing material in the dovetail groove.
  • the overhanging shoulder has a smooth outer shape, such as an arc, so that the dovetail groove can smoothly contact the inner slope, and the overhanging shoulder may be chipped or worn during handling and mounting. Can prevent.
  • a curved shape such as a semicircular shape, a semi-elliptical shape, and a semi-elliptical shape can be adopted.
  • Straight shapes such as triangular chevron, trapezoid, and rectangle can also be used.
  • a curved shape such as a circular arc at the corner.
  • a shape is selected in which local stress concentration is unlikely to occur and the sealing function can be exerted by moderate elastic deformation.
  • the outer shape of the concave portion exists inside the tangent line.
  • the concave portion may be any of a linear shape and a curved shape as long as the shape of the overhanging shoulder portion and the central convex portion can be smoothly connected.
  • the performance of the sealing material can be improved.
  • the dimensions and shape of the dovetail groove conditions specified by standards such as JIS-B2401 and AS5686A are adopted.
  • the dimensions of the sealing material are set according to the dimensions and shape of the dovetail groove determined in this way.
  • the dovetail seal material when the dimensions of the dovetail groove are height H, opening width G, and cross-sectional area A, it is effective to set the dovetail seal material to the following dimensional conditions.
  • the width of the base is too narrow, the stress generated on the base when pressure is applied becomes excessive, and the durability of the sealing material is reduced. If the width of the bottom is too wide, it will be difficult to install the dovetail into the dovetail from the bottom.
  • the width of the central convex portion is too wide, it tends to be caught or jammed at the opening edge of the dovetail groove. If the width of the central projection is too narrow, the deformation when pressure is applied becomes excessive, and the physical strength of the central projection decreases. However, depending on the conditions of use, a width narrower than the lower limit can be adopted.
  • the tightening margin cannot be secured at + when tightening the joints, and the components will easily come into direct contact with each other, making it difficult to exhibit a sufficient sealing function. If the total height is too large, it will swell greatly outward due to deformation, making it easier to come into contact with the opening edge of the dovetail groove or cause penetration. The central projection is excessively deformed, and the central projection is bent or damaged.
  • cross-sectional area is too large, it is difficult to be accommodated in the dovetail groove, and it is difficult to mount and remove. If the cross-sectional area is too small, the seal material will easily roll or twist in the dovetail groove, and the seal material will easily fall off the dovetail groove. Metal touch between members is also likely to occur. In addition, since the cross-sectional area is correlated with the overall deformation capacity and sealing ability of the sealing material, having an appropriate cross-sectional area improves the sealing function.
  • a cross-sectional area smaller than the lower limit may be usable.
  • the overhanging shoulder portion is too large, the overhanging shoulder portion is liable to be caught or jammed at the opening edge of the dovetail groove due to deformation under load. If the height of the overhanging shoulder is too small, the sealing material tends to move left and right or change its posture in the dovetail groove.
  • the overhanging shoulder so as to be located as close to the opening edge of the dovetail groove as possible and inside the opening edge.
  • the radius Rp3 affects the width Wp3 of the central protrusion. Specifically, the width Wp3 of the central protrusion is equivalent to twice the radius Rp3.
  • the radius Rpl affects the amount of contact between the overhanging shoulder and the inner slope of the dovetail groove and the stress generated.
  • Inclination angle of the hypotenuse 0 10 to 35 ° (with respect to the vertical line standing upright from the bottom) The smaller the inclination angle, the more smoothly the work of inserting the sealing material into the dovetail groove is possible. The overhang of the part is reduced.
  • annular dovetail groove inserts the same annular dovetail groove sealing material sequentially from one end.
  • the sealing material enters the dovetail opening from the bottom side. The transition is made so that the hypotenuse of the sealing material slides in contact with the opening edge of the dovetail groove.
  • the sealing material is elastically deformed so as to reduce the overall width. If the overhanging shoulder part is passed inside from the opening edge of the dovetail groove, the sealing material is attached to the dovetail groove.
  • the bottom of the dovetail groove abuts the bottom of the seal material, and the left and right overhanging shoulders of the seal material abut or approach the inner slope of the dovetail groove.
  • the position is determined in an appropriate state. This prevents rolling and twisting of the sealing material in the dovetail groove.
  • the left and right overhanging shoulders abut against the inner slope of the dovetail groove, so that the central recess is securely located in the space inside the opening edge of the dovetail groove.
  • the sealing material can be prevented from being unevenly contacted with or caught by the opening edge.
  • the amount of protrusion of the central protrusion projecting above the opening edge is also reliably set.
  • the sealing material is brought into contact with the surface of the mating member to seal the joint.
  • the sealing material mounted on the dovetail has the tip of the central projection projecting above the dovetail abutting against the surface of the mating member.
  • the entire sealing material including the concave portion, the overhanging shoulder portion, and the hypotenuse from the central convex portion is deformed so as to swell to the left and right outside.
  • the sealing function is exhibited in a sufficient area. If the bottom of the sealing material is in contact with the inner bottom surface of the dovetail, the sealing material is prevented from tilting or twisting. Even if a biased force is applied to the tip of the central projection to some extent, the sealing material can maintain a stable posture. For example, in an open / close operation that pivots on one side, the opening / closing lid and the main unit side may not be closed in an accurate parallel state, and the center member of the sealing material may fall down or bend by the mating member. In some cases. Even in such a case, it is difficult for the sealing material to be tilted or twisted.
  • auxiliary sealing material [Use of auxiliary sealing material]
  • the above-mentioned dovetail groove sealing material having a substantially Dharma shape can be used in combination with a sealing material having another structure.
  • auxiliary sealing material having a circular cross section at both bottom corners inside the dovetail groove.
  • a general-purpose o-ring can be used as the auxiliary sealing material.
  • the material and structure of the o-ring are not particularly limited. It is preferable to adopt the same material as the Dharma-shaped dovetail seal according to the use environment.
  • the space between the oblique side of the dovetail groove sealing material and the bottom corner of the dovetail groove is filled with the auxiliary sealing material in a state in which the dovetail groove sealing material is attached.
  • FIG. 1 is a cross-sectional view of a dovetail groove sealing material showing an embodiment of the present invention
  • FIG. 2 is a schematic view showing a dimensional structure of the dovetail groove sealing material
  • FIG. FIG. 4 is a cross-sectional view showing a use state of a sealing material for use
  • FIG. 4 is a diagram showing an analysis result of a compressive load-strain amount
  • FIG. 5 is a diagram showing a Mises stress measurement result of an example.
  • FIG. 6 is a diagram showing Mises stress measurement results of a comparative example
  • FIG. 7 is a schematic diagram showing a use state of another embodiment
  • FIG. 8 is a diagram of another embodiment.
  • FIG. 9 is a schematic view showing a use state
  • FIG. 9 is a sectional view showing a use state of another embodiment.
  • reference numeral 10 denotes a dovetail seal material
  • reference numeral 12 denotes a bottom side
  • reference numeral 14 denotes a hypotenuse.
  • Sign 1 6 is overhang shoulder
  • Reference numeral 17 denotes a concave portion
  • reference numeral 18 denotes a central convex portion
  • reference numeral 20 denotes a lower member
  • reference numeral 22 denotes a dovetail groove
  • reference numeral 24 denotes an opening edge
  • reference numeral 30 denotes an upper member.
  • the symbol 40 indicates an auxiliary sealing material.
  • the dovetail seal material 10 having a substantially Dharma shape is entirely made of an elastically deformable rubber material, and has a continuous annular shape with the cross-sectional shape shown.
  • an EPDM rubber with a hardness of about 65 HA can be used.
  • the cross-sectional shape of the dovetail seal material 10 has a flat bottom 12 and left and right oblique sides 14 and 14 rising outward from both ends of the bottom 12.
  • the tip of the hypotenuse 14 has an overhanging shoulder 16.
  • the overhanging shoulder 16 has an arc shape protruding outward.
  • the central convex portion 18 has a large arc shape protruding upward.
  • the connection point between the central convex portion 18 and the left and right overhanging shoulders 16 is as follows: A concave concave in an arc shape inside the tangent connecting the central convex portion 18 and the overhanging shoulder 16. It has an entry 17. Both the central convex portion 18 and the concave portion 17 and the concave portion 17 and the overhanging shoulder portion 16 are connected so as to smoothly transition.
  • the overall cross-sectional shape is roughly Dharma-shaped.
  • the overall shape of the dovetail groove sealing material 10 having the above-described basic structure is determined by defining the dimensions of each part. The naming of these dimensions is based on the attitude in which the dovetail groove sealing material 10 is mounted in the dovetail groove.
  • the total width Wpl is the widest V and the width dimension of the dovetail seal material 10, and specifically, is the dimension between the outer ends of the left and right overhanging shoulders 16 and 16. It is defined by the distance between the arcs of the radius Rpl constituting the left and right overhanging shoulders 16, 16.
  • the bottom width Wp2 is the width of the flat portion at the bottom of the dovetail seal material 10.
  • the total height Hpl is the height dimension of the highest point of the dovetail groove sealing material 10, specifically, the dimension from the bottom 12 to the upper end of the central projection 18. Since the central convex portion 18 is constituted by an arc having a radius Rp3, it is defined by the position of the center tip of the arc.
  • the overhang shoulder height Hp2 is the height from the bottom 12 to the upper end of the overhang shoulder 16.
  • the upper end of the overhanging shoulder 16 is curved at the boundary point between the overhanging shoulder 16 and the recess 17, that is, from the outward arc of the overhanging shoulder 16 to the inward arc of the recess 17. Is defined as the point at which changes.
  • the recess 17 is formed of an arc having a radius Rp2.
  • the central convex portion width Wp3 is the width of the widest portion of the central convex portion 18, specifically, at the lower left and right ends of the central convex portion 18, at the boundary point with the concave portion 17, that is, at the center. It is defined by the point at which the curvature changes from the outward arc force of the convex portion 18 to the inward arc of the concave portion 17.
  • the dovetail groove sealing material 10 is used by being attached to the dovetail groove 22.
  • the dovetail groove 22 is configured such that a plurality of members 20 and 30 such as a pressure vessel lid and a container body, an opening lid and a main body device of a vacuum device are arranged facing each other, and a gap between the two members 20 and 30 is provided. It is provided in places that need to be sealed.
  • the members 20 and 30 arranged vertically are joined, but the members 20 and 30 may face each other in the left-right direction ⁇ diagonal direction.
  • a dovetail groove 22 having a trapezoidal cross section is provided on the surface of one member 20.
  • the dovetail groove 22 is arranged on the upward surface of the lower member 2 ⁇ for easy understanding, but the downward surface of the upper member 30 is shown.
  • a dovetail groove 2 2 can also be provided in the hole.
  • the dovetail groove 22 is composed of a flat inner bottom surface and an inner slope rising on both sides thereof, and has a large width at the bottom side and a small width at the opening side.
  • the inner corner where the inner bottom surface and the inner slope intersect is smoothly connected in an arc shape.
  • the opening edge 24 has an arc shape with a small cross section.
  • the specific dimensions and shape of the dovetail groove 22 are specified in JIS standards and the like.
  • the height H from the inner bottom surface to the opening edge 24 and the inner width G of the opening edge 24 define the size of the dovetail groove 22.
  • the slope of the inner slope is usually set at 24 °. As shown by a two-dot chain line in FIG.
  • the dovetail groove sealing material 10 is inserted into the dovetail groove 22 from the bottom side 12 side. At this time, since the bottom width W P 2 of the dovetail groove sealing material 10 is smaller than the dovetail groove inner width G, the dovetail groove sealing material 10 is smoothly inserted into the dovetail groove 22 from the bottom 12 side. Is done.
  • the overhanging shoulder 16 Since the total width Wp 1 of the dovetail groove sealing material 10 at the overhanging shoulder 16 is larger than the inner width G of the dovetail groove at the opening edge 24 of the dovetail groove 2, the overhanging shoulder 16 is dovetail opening.
  • the dovetail groove sealing material 10 When passing through the edge 24, the dovetail groove sealing material 10 is elastically deformed. At this time, a large resistance is generated because the dovetail seal material 10 is deformed while the oblique side 14 of the dovetail seal material 10 is brought into contact with the opening edge 24 of the dovetail groove 2 to slide. The transition can be made smoothly without performing. Shows much better penetration than conventional ⁇ rings.
  • the bottom of the dovetail groove sealing material 10 abuts against the bottom of the dovetail groove 2.
  • the overhanging shoulder 16 comes into contact with the inner slope below the opening edge 24 of the dovetail groove 22.
  • the dovetail groove sealing material 10 is placed in a stable position with respect to the dovetail groove 22 in an appropriate posture.
  • Positioning with respect to the dovetail groove 22 is performed at three places: the bottom side 12 of the dovetail groove sealing material 10 and the left and right overhanging shoulders 16 and 16.
  • the overhanging shoulder 16 may not be in contact with the inner slope of the dovetail groove 22, but may be in close proximity.
  • another member 30 is arranged for the member 20 having the dovetail groove 22.
  • the members 20 and 30 are joined together by tightening and fixing the members 20 and 30 with a tightening bolt or the like (not shown).
  • the surface of the member 30 abuts on the upper end of the dovetail seal member 10, that is, the central convex portion 18, and deforms the groove seal member 10 so as to be crushed vertically.
  • the central portion 18 By compressing the dovetail groove sealing material 10 in the vertical direction, the central portion 18 is flattened by an arc, and is pressed against the surface of the member 30 with a constant area. By this pressure contact, a necessary sealing surface pressure is secured between the dovetail groove sealing member 10 and the member 30, and a sealing function is exhibited.
  • the bottom side 1 2 is pressed against the inner bottom surface of the dovetail groove 22.
  • the central convex portion 18 is crushed, the right and left hypotenuses 14 and 14 are deformed so as to bulge outward.
  • the overhanging shoulder 16 is pressed against the inner slope of the dovetail groove 22. Due to the contact between the base 1 2 and the inner bottom surface of the dovetail groove 2 2 and the contact between the overhanging shoulder 16 and the inner slope of the dovetail groove 22, the dovetail groove sealing material 10 and the member 20 are provided. Is sealed.
  • the base 12 contacts the bottom surface of the dovetail groove 22 with a relatively large area, the stress generated on the base 12 is relatively small and the amount of deformation is small.
  • the inverted trapezoidal shape extending from the base 12 to the overhanging shoulder 16 via the left and right oblique sides 14 and 14 has a structure that is not easily deformed by vertical compression.
  • the deformation of the sealing material 10 in the vertical direction is reduced. Even if the tightening force fluctuates or the surrounding pressure environment fluctuates, the amount of compressive deformation of the sealing material 10 hardly fluctuates. A good sealing function can always be exhibited regardless of changes in pressure conditions.
  • the dovetail groove sealing material 10 When the dovetail groove sealing material 10 is deformed so as to expand left and right, the side surface of the dovetail groove sealing material 10 approaches the opening edge 24 of the dovetail groove 22, but the dovetail groove 2 2 opening edge 2 Since the central convex portion 18 is to be disposed from the concave portion 17 above the overhanging shoulder portion 16 on the overhanging shoulder portion 16, it strongly contacts or is caught by the opening edge 24 of the dovetail groove 22. Is prevented. In the space above the opening edge 24, it is unlikely that a part of the dovetail seal material 10 swells outside the opening edge 24 and protrudes.
  • a seal material for a dovetail groove having a roughly Dharma shape having a structure shown in FIG. 12 was manufactured.
  • Esprene 5 ⁇ 1A EPDM rubber manufactured by Sumitomo Chemical Co., Ltd.
  • carbon black as a reinforcing agent, an antioxidant, a crosslinking agent, etc. are blended to form an elastic rubber material. did.
  • composition of each material was preformed and cut into strips.
  • the preform was mounted on a mold having a predetermined shape, and heated and pressed at 170 ° C. for 15 minutes to obtain a dovetail seal material.
  • the hardness of the elastic rubber material was 65 HA (measured according to the JIS standard).
  • the dimensions of the obtained dovetail seal material in the cross-sectional shape shown in FIG. 2 were as follows.
  • the dovetail groove sealing material has the above-mentioned cross-sectional shape, and has an annular shape with an inside diameter of 110 mm.
  • the performance of the manufactured substantially Dharma-shaped dovetail seal material 10 was evaluated.
  • As a comparative product an O-ring with the same rubber material and a cross-sectional diameter of ⁇ 12 mm was manufactured and a comparison test was performed.
  • Figure 4 shows the results.
  • the solid line shows the example and the broken line shows the comparative example.
  • the product (Dharma type) of the present invention requires a larger load value to generate the same strain, and is harder to deform. Also, from the slope of the graph, the change in the strain amount is small when the fluctuation amount of the compression load is the same. This confirms that the amount of distortion does not change even if the load applied to the sealing material changes in the usage environment, and that a stable sealing function can be exhibited.
  • a conventional seal test device was used.
  • the seal material was attached to the dovetail groove of the test device, and a space on one side of the seal material was evacuated under vacuum with a predetermined tightening force to generate a pressure difference between the space on the other side and the seal material.
  • the pressure on the vacuum suction side was measured to evaluate the sealing performance of the sealing material.
  • the comparative product can only obtain a very weak vacuum state (about 130 Pa) even in the initial state, and the pressure increases over time, causing pressure leakage.
  • the product (Dharma type) achieved an extremely high vacuum state (less than about 13 Pa) in the initial state, and a stable vacuum state was maintained over time.
  • test product was mounted on a seal structure between a main body of the vacuum chamber and an opening / closing lid that covers the main body, and the inside of the vacuum chamber was evacuated.
  • a dovetail groove is provided on the bottom of the opening / closing lid, and a sealant is attached.
  • the wear powder contains rubber powder, which is the material of the seal material, and aluminum powder, which is the material of the lid.In addition to the wear due to the rolling of the seal material, wear due to metal contact occurred was confirmed. In the case of the actual product, neither the rubber powder nor the aluminum powder was observed even after use for about 3 months.
  • the dovetail groove sealing material 10 of the embodiment shown in FIG. 5 has the same basic structure as that of the above-described embodiment, but has a partly different shape. The differences will be mainly described.
  • the intersection of base 1 2 and hypotenuse 14 is an arc of radius Rp4.
  • the base width Wp2 is defined by the width of the flat portion of the base 12 excluding the arc.
  • the central convex portion 18 has a substantially rectangular shape having a flat upper side and vertical sides on both sides, and right and left upper end corners are arcs having a radius Rp5.
  • a recessed portion 17 is provided which is formed from a protruding shoulder portion 16 and is formed by a concave arc having a radius Rp5 with an obliquely inwardly inclined side.
  • the overhang shoulder height Hp2 is defined by the boundary point between the overhang shoulder 16 and the hypotenuse of the recess 17.
  • the central width Wp3 is defined by the width of the rectangular central convex portion 17.
  • the slope of the hypotenuse of the recess 17 is more horizontal than the slope of the inner slope of the dovetail groove 2, so that the inner slope of the dovetail groove 2 only has an overhanging shoulder 16.
  • the recess 17 does not contact the inner slope of the dovetail groove 22.
  • the dovetail seal material 10 of the embodiment shown in FIG. 8 has the same basic structure as that of the above-described embodiment, but has a partially different shape. The differences will be mainly described.
  • a semicircular recess 19 is provided at the center of the side 12.
  • the central convex portion 18 is composed of an arc portion having a relatively small radius Rp5 and inclined sides extending on both sides of the arc portion, and passes through the concave arc-shaped concave portion 17 to the overhanging shoulder portion 16. It is smoothly connected.
  • the cross-sectional shape of the dovetail groove sealing material 10 may vary depending on the usage conditions and required performance, if the basic conditions are satisfied. It is possible to change.
  • the above-described dovetail groove sealing material 10 having a substantially Dharma shape shown in FIG. 1 and an auxiliary sealing material 40 made of a ring are used in combination.
  • the structures of the dovetail groove sealing material 10 and the dovetail groove 22 are the same as those of the embodiment.
  • the auxiliary sealing material 40 When attaching the dovetail groove sealing material 10 to the dovetail groove 22, the auxiliary sealing material 40 is mounted in advance.
  • a commercially available O-ring is used as it is as the capture sealing material 40.
  • auxiliary sealing material 40 Since the auxiliary sealing material 40 has a small diameter, it can easily pass through the opening edge 24 of the dovetail groove 22 and be inserted. Two auxiliary sealing materials 40 are arranged separately at the left and right corners.
  • the dovetail groove sealing material 10 is mounted in the dovetail groove 22 as described above.
  • the auxiliary sealing material 40 pushed right and left by the hypotenuse 14 of the dovetail sealing material 10 fits in the left and right corners.
  • the oblique side 14 of the dovetail seal material 10 is deformed by expanding and deforming the dovetail seal material 10 to the left and right. Press it into the corner to deform it.
  • the repulsive force generated by the elastic deformation of the auxiliary seal material 40 acts in a direction that prevents the dovetail groove seal material 10 from being deformed.
  • the deformation of the dovetail seal material 10 is suppressed, and the repulsive force against the tightening force of the members 20 and 30 increases. It is difficult for the surfaces of the members 20 and 30 to directly contact each other. Since the contact pressure between the members 20 and 30 and the dovetail seal material 10 or the stress at the contact portion is increased, the sealing function at the contact surface is enhanced.
  • the auxiliary seal material 40 only controls the deformation of the dovetail seal material 1 °.
  • a metal touch prevention function is further provided as compared with using the dovetail groove sealing material 10 alone. It is possible to increase. It is not necessary to change the design of the dovetail seal material 10 or use a specially excellent material for the dovetail seal material 10, and the auxiliary seal material 40 is relatively simple. Since a commercially available product having a structure may be used, the performance can be improved at low cost. Furthermore, the dimensions and shape of the auxiliary sealing material 40 must be changed. Thus, the sealing function can be adjusted.
  • One type of dovetail seal material 1 ⁇ can also be used for multiple applications and required performance. Industrial applicability
  • the dovetail groove sealing material according to the present invention has the above-described substantially Dharma-shaped cross-sectional shape. You can buy a mood. In the mounted state, the bottom is in contact with the inner bottom surface of the dovetail groove, and the left and right overhanging shoulders are arranged on the inner slope of the dovetail groove, so that it is stably mounted at an appropriate position and posture.
  • the sealing material does not roll, twist, or float out of the dovetail groove. In particular, even if the dovetail is turned downward, the overhanging shoulder reliably prevents the sealing material from falling off. Damage caused by a part of the sealing material coming into contact with the opening edge of the dovetail groove is well prevented.
  • the two members can be reliably sealed by pressure contact between the mating member and the central portion and pressure contact between the bottom and the inner surface of the dovetail.
  • the overhanging shoulder abuts against the inner slope of the dovetail groove, thereby suppressing excessive deformation of the sealing material, and exerting a good sealing function by strong pressure contact between the sealing material and both members. .

Abstract

Matériau d'obturation pour gorge à queue d'aronde ayant d'excellentes fonctions d'obturation et empêchant les risques de morsure, d'enroulement ou de torsion. En coupe, le matériau d'obturation (10) pour gorge à queue d'aronde se présente comme du matériau élastique comprenant un fond plat (12) situé du côté inférieur de la gorge à queue d'aronde (22), les côtés obliques gauche et droit (14) s'élevant inclinés vers l'extérieur des côtés opposés du fond (12), les parties d'épaulement gauche et droite (16) se trouvant dans la gorge à queue d'aronde (22) près de l'ouverture dans celle-ci, dans la partie avant des côtés obliques gauche et droit (14). Une saillie (18) est faite au centre des parties d'épaulement (16) et s'élève au-dessus de l'ouverture de la gorge à queue d'aronde (22). Des enfoncements (17) sont aménagés entre les parties d'épaulement (16) et la saillie centrale (18); ils sont situés en retrait par rapport à la tangente, vers les parties d'épaulement (16) et la saillie centrale (18).
PCT/JP2002/006636 2001-07-03 2002-07-01 Materiau d'obturation pour gorge a queue d'aronde WO2003004912A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001-202488 2001-07-03
JP2001202488A JP3946466B2 (ja) 2001-07-03 2001-07-03 蟻溝用シール材

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WO2003004912A1 true WO2003004912A1 (fr) 2003-01-16

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WO (1) WO2003004912A1 (fr)

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Publication number Priority date Publication date Assignee Title
US20210025497A1 (en) * 2019-07-26 2021-01-28 Valqua, Ltd. Support member

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Publication number Priority date Publication date Assignee Title
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JP4205966B2 (ja) * 2003-02-13 2009-01-07 Ｎｏｋ株式会社 密封装置
JP4430884B2 (ja) * 2003-04-14 2010-03-10 日本バルカー工業株式会社 蟻溝用シール材
JP2005003130A (ja) * 2003-06-12 2005-01-06 Nok Corp ガスケットの組付け方法及びガスケット
JP4689221B2 (ja) * 2003-11-10 2011-05-25 日本バルカー工業株式会社 複合シール材
US7866669B2 (en) 2004-09-17 2011-01-11 Nippon Valqua Industries, Ltd. Composite sealing material
KR100626034B1 (ko) 2004-11-13 2006-09-20 삼성에스디아이 주식회사 바이폴라 플레이트 및 직접액체연료전지 스택
JP4911275B2 (ja) * 2005-06-24 2012-04-04 Ｎｏｋ株式会社 密封構造
JP4922592B2 (ja) * 2005-09-28 2012-04-25 三菱電線工業株式会社 塗装機用密封構造及び塗装機
JP2007100882A (ja) * 2005-10-06 2007-04-19 Jtekt Corp センサ付きシール装置およびそれを用いた転がり軸受装置
JP4663538B2 (ja) * 2006-01-31 2011-04-06 日本バルカー工業株式会社 あり溝用シール材およびあり溝用シール材が装着された真空用ゲート弁
JP4871217B2 (ja) * 2007-06-04 2012-02-08 益岡産業株式会社 アリ溝用シール材
JP5134341B2 (ja) * 2007-11-12 2013-01-30 株式会社リケン フランジ式管継手及び鋼管の膨出部形成装置
US20090315277A1 (en) * 2008-06-23 2009-12-24 Kaori Iwamoto Rubber seal for semi-dynamic and dynamic applications
JP5644040B2 (ja) * 2008-09-30 2014-12-24 Toto株式会社 湯水混合カートリッジ
JP5245709B2 (ja) * 2008-10-16 2013-07-24 トヨタ紡織株式会社 締結構造及びこれを備える流体フィルタ
JP5307689B2 (ja) * 2009-10-27 2013-10-02 三菱電機株式会社 ドリフトチューブ線形加速器
JP5551947B2 (ja) * 2010-03-10 2014-07-16 東京エレクトロン株式会社 溝用シール材
JP2011080607A (ja) * 2011-01-26 2011-04-21 Daikin Industries Ltd 弾性シール部材
JP5977744B2 (ja) * 2011-07-04 2016-08-24 株式会社ミクニ ガスケット、スロットルボデー
JP6180714B2 (ja) * 2012-08-21 2017-08-16 Nok株式会社 機器ケースの開閉部分の防水構造
CN106090216A (zh) * 2016-07-01 2016-11-09 太重（天津）滨海重型机械有限公司 密封圈以及炭素挤压机
JP2019039446A (ja) * 2017-08-22 2019-03-14 株式会社バルカー シール構造
CN109538371B (zh) * 2018-09-18 2022-02-18 天津市巨星祥海机械有限公司 一种发动机外壳连接结构及连接方法
US20220099185A1 (en) * 2020-09-25 2022-03-31 Flowserve Management Company Pressure retained gasket seal with enhanced unloading resistance
CN112490157A (zh) * 2020-11-30 2021-03-12 上海诺硕电子科技有限公司 密封槽及半导体真空设备

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH074889A (ja) * 1993-06-17 1995-01-10 Iwai Kikai Kogyo Kk ガスケット自動嵌着機におけるガスケット補給装置
JP2000356267A (ja) * 1999-04-12 2000-12-26 Mitsubishi Cable Ind Ltd 低荷重シール

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH074889A (ja) * 1993-06-17 1995-01-10 Iwai Kikai Kogyo Kk ガスケット自動嵌着機におけるガスケット補給装置
JP2000356267A (ja) * 1999-04-12 2000-12-26 Mitsubishi Cable Ind Ltd 低荷重シール

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210025497A1 (en) * 2019-07-26 2021-01-28 Valqua, Ltd. Support member

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