WO2002063749A1 - Dispositif de refroidissement d'un moteur lineaire - Google Patents

Dispositif de refroidissement d'un moteur lineaire Download PDF

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Publication number
WO2002063749A1
WO2002063749A1 PCT/JP2002/000898 JP0200898W WO02063749A1 WO 2002063749 A1 WO2002063749 A1 WO 2002063749A1 JP 0200898 W JP0200898 W JP 0200898W WO 02063749 A1 WO02063749 A1 WO 02063749A1
Authority
WO
WIPO (PCT)
Prior art keywords
armature
heat
linear motor
cooling unit
cooling device
Prior art date
Application number
PCT/JP2002/000898
Other languages
English (en)
Japanese (ja)
Inventor
Hirotomi Urata
Masahiko Tanabe
Yasuhiro Miyamoto
Original Assignee
Kabushiki Kaisha Yaskawa Denki
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kabushiki Kaisha Yaskawa Denki filed Critical Kabushiki Kaisha Yaskawa Denki
Publication of WO2002063749A1 publication Critical patent/WO2002063749A1/fr

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K9/00—Arrangements for cooling or ventilating
    • H02K9/22—Arrangements for cooling or ventilating by solid heat conducting material embedded in, or arranged in contact with, the stator or rotor, e.g. heat bridges
    • H02K9/225—Heat pipes

Definitions

  • the present invention can efficiently cool the armature, reduce the cost of the linear motor main body, and eliminate the need for force and the troublesome maintenance that occurs when connecting peripheral equipment and piping.
  • the present invention relates to a cooling device for a linear motor capable of performing the following.
  • FIG. 6 is a front sectional view of a conventional linear motor.
  • 3 1 is a linear motor
  • 3 2 is an armature
  • 3 3 is a core
  • 3 4 is an armature mounting plate
  • 3 5 is a permanent magnet
  • 3 6 is a field yoke
  • 3 7 is an armature coil
  • 3 8 Is a mounting port
  • 39 is a refrigerant passage
  • 40 is a mold resin.
  • a plurality of permanent magnets 35 are arranged such that the polarities are alternately different along the longitudinal direction (perpendicular to the paper) on the field yoke 36 having a U-shaped cross section.
  • the field yoke 36 and the permanent magnet 35 constitute a stator.
  • a core 33 formed by laminating electromagnetic steel sheets in the height direction of the permanent magnet 35 is provided facing the permanent magnet 35 via a magnetic gap.
  • the core 33 has an armature coil 37 wound inside its slot and the periphery thereof is fixed with a mold resin 40.
  • the core 33 and the armature coil 37 constitute a mover.
  • the core 33 'and the armature mounting plate 34 are fastened by screwing mounting bolts 38 into female threads (not shown) provided on the armature mounting plate 34.
  • the armature 32 is provided with a refrigerant passage 39 at a position facing the armature coil 37, and is fixed between the armature 32 and the refrigerant passage 39 with a mold resin 40.
  • the refrigerant passage 39 forms an integral cooling unit.
  • the armature mounting plate 34 is supported by a linear guide (not shown) via a table (not shown), and the linear motor is used to move the linear motor along the longitudinal direction of the table (perpendicular to the paper). To slide.
  • the prior art has the following problems.
  • the heat released to the outside is largely due to heat transfer by natural convection, and the cooling capacity is smaller than that of forced convection heat transfer, so there is a problem that the core 33 and the table are thermally deformed.
  • the core 33 has a large warp along the longitudinal direction.
  • the present invention has been made in order to solve the above-described problems, and has a low-cost, maintenance-free, linear motor cooling device capable of improving armature cooling performance.
  • the purpose is to provide.
  • an @stable element comprising a field yoke in which a plurality of permanent magnets having different polarities are alternately arranged side by side, and a magnet row of the permanent magnets and a magnetic gap along a longitudinal direction of the field yoke.
  • a linear motor having a mover composed of an armature having an armature coil wound around a core and a cooling unit exchanging heat so that heat generated by the stator or the mover can be radiated to the outside.
  • An armature mounting plate for mounting the armature which is disposed along the longitudinal direction of the upper part of the armature, and a heat insulating plate on both sides of the armature mounting plate.
  • a table for mounting the mounted load the cooling unit being provided through a space between the cooling unit and the table, and a cooling unit provided between the armature mounting plate and the table.
  • Sandwich A heat sink having a plurality of heat pipes provided inside the cooling unit and having a fin on an outer peripheral surface on which a heat radiation side of the heat pipe is disposed. Is provided.
  • the heat pipe is arranged such that one heat receiving portion is located at a central portion in the longitudinal direction of the armature, and the other heat radiating portion is located at an end portion in the longitudinal direction of the armature. It is a thing.
  • the heat pipe is disposed at a position facing the armature coil.
  • the cooling unit is fixed by a fastening mounting port so that the cooling unit can be freely removed from the armature mounting plate.
  • a fan motor is provided on a heat radiation side of the heat sink.
  • the cooling unit is constituted by a thin sheet-shaped heat pipe having a structure in which a number of hollow thin tubes meandering inside are arranged.
  • the core includes a plurality of divided core blocks that are sequentially arranged and fitted and connected.
  • FIG. 1 is a linear motor showing a first embodiment of the present invention, and is a front view as seen from the direction of arrow B in FIG.
  • FIG. 2 is a side view of the armature of the relay motor shown in FIG.
  • FIG. 3 is a front view of a linear motor according to a second embodiment of the present invention, as viewed from the direction of arrow D in FIG.
  • FIG. 4 is a side view of the armature of the linear motor in FIG.
  • FIG. 5 is an overall perspective view of a sheet-like heat pipe showing a third embodiment of the present invention, as seen through the inside.
  • FIG. 6 is a front sectional view of a linear motor showing a conventional technique.
  • FIG. 1 shows a linear motor according to a first embodiment of the present invention, and is a front view as viewed from the direction of arrow B in FIG.
  • FIG. 2 is a side view of the armature of the lower motor in FIG. The inside is seen through.
  • 1 is a linear motor
  • 2 is an armature
  • 3 is a core
  • 4 is an armature mounting plate
  • 5 is a permanent magnet
  • 6 is a field yoke
  • 7 is an armature coil
  • 8 is a mounting bolt
  • 9 is a fixed base
  • 10 is A cooling unit
  • 11 is a heat pipe
  • 12 is a heat insulating plate
  • 13 is a heat sink
  • 14 is a table
  • 15 and 16 are mounting bolts.
  • 17 is a connector for connecting the motor lead wire to an external power supply.
  • a basic motor of a reversing motor in which an armature 2 including a core 3 and an armature coil 7 is used as a mover, and a field pole including a permanent magnet 5 and a field yoke 6 is used as a stator and the armature 2 travels.
  • the configuration is the same as the conventional technology.
  • the configuration of the present invention is as follows.
  • an armature mounting plate 4 for mounting the armature 2 in the longitudinal direction is disposed above the armature 2 of the linear motor 1, and loads are mounted on both sides of the armature mounting plate 4.
  • Table 14 is mounted via a heat insulating plate 12 made of resin or the like.
  • the armature mounting plate 4 and the table 14 are fixed by screwing fastening bolts 15 into female threads (not shown) provided on the armature mounting plate 4.
  • the core 3 and the armature mounting plate 4 are attached to female threads (not shown) provided on the armature mounting plate 4.
  • the attached port 8 is screwed in and fixed.
  • the cooling unit 10 is configured to be freely detachable from the armature mounting plate 4. That is, the cooling unit 10 and the armature mounting plate 4 are mounted on the armature mounting plate 4 after the mounting bolts 16 for fastening are passed through the through holes (not shown) provided in the retreat unit 10. Screw 16 into the female screw (not shown).
  • the cooling tub 10 is provided between the table 14 and the table 14 via a space S, and is a block-shaped high heat conductive member provided so as to be sandwiched between the armature mounting plate 4 and the table 14. It is formed of a member.
  • a plurality of heat pipes 11 are provided inside the cooling unit 10, and the heat pipe 11 has one heat receiving portion at the center in the longitudinal direction of the armature 2 and the other heat radiating portion at the center.
  • the child is arranged so that it is on the end side in the long side direction.
  • the heat pipe 11 is provided at a position facing the armature coil 7 when viewed from the front of the linear motor 1. Further, a heat sink 13 having fins is provided on the outer peripheral surface of the cooling unit 10 where the heat radiating side of the heat pipe 11 is arranged, and is fixed by a mounting bolt 16.
  • silicon grease or the like is applied between the armature mounting plate 4 and the cooling unit 10 so that heat from the armature 2 can be efficiently transmitted to the cooling unit 10. .
  • the present invention provides an armature mounting plate 4 for mounting the armature 2 disposed along the longitudinal direction of the upper part of the armature 2, and heat insulating plates 12 on both sides of the armature mounting plate 4.
  • a table 14 for mounting the mounted load is provided, a cooling unit 10 is provided between the table 14 and the table 14 via a space S, and between the armature mounting plate 4 and the table 14
  • a plurality of heat pipes 11 are provided inside the cooling unit 10, and fins are provided on the outer peripheral surface on which the heat radiation side of the heat pipes 11 is arranged. Since the heat sink 13 is provided, the cooling unit 10 does not directly contact the thermally insulated table 14 but directly contacts the armature mounting plate 4 to generate heat generated by the armature.
  • the heat pipe 11 has a configuration in which one heat receiving portion is arranged at the center portion in the longitudinal direction of the armature 2 and the other heat radiating portion is arranged at the end portion in the longitudinal direction of the armature 2.
  • the heat of the armature part 2 generated when the mover is moved with high thrust is transferred to the center of the armature 2 by the heat pipe 11 and the heat sink 13 provided at the end of the armature 2. It can be efficiently removed from the side to the end. As a result, warpage in the longitudinal direction of the core portion 3 of the armature can be prevented, and thermal deformation can be suppressed.
  • the heat transfer path between the armature coil 7 and the heat pipe 11 is set to the shortest distance, so that the The heat resistance between the child coil 7 and the heat pipe 11 can be reduced, heat transfer can be increased, and cooling can be performed efficiently.
  • the cooling unit 10 is configured to be detachable from the armature mounting plate 4 on which the armature 2 is mounted by using the mounting bolts 16, so that either the armature 2 or the cooling unit 10 is provided. Even if one of them is damaged, the new armature armature and table 14 can be assembled and disassembled without the need for new production of armature armatures. Therefore, the cost of the linear motor body can be reduced. In addition, it is also possible to eliminate the need for any troublesome maintenance or the like that has conventionally occurred when connecting peripheral devices to piping, etc., and to reduce the design and manufacturing costs including peripheral devices. Next, a second embodiment of the present invention will be described.
  • FIG. 3 is a front view of a linear motor according to a second embodiment of the present invention, as viewed from the direction of arrow D in FIG.
  • FIG. 4 is a side view of the armature of the linear motor shown in FIG.
  • 18 is a heat sink
  • 19 is a fan motor
  • 20 is a casing.
  • the difference between the second embodiment and the first embodiment is that a fan motor 19 is provided on the heat radiation side of the heat sink 18 so as to cover the fin portion, and cooling is forcibly performed. .
  • the fan motor 19 is mounted on the casing 20. The operation is the same as that of the first embodiment, and the description is omitted.
  • the heat transferred from the cooling unit 10 to the heat sink 18 is forced outward by the exhaust of the fan motor 19.
  • the heat is dissipated in a specific way, and the cooling effect can be more effectively increased.
  • FIG. 5 is an overall perspective view of a sheet-like heat pipe showing a third embodiment of the present invention, and is a perspective view of the inside. .
  • the third embodiment is different from the first and second embodiments in that the cooling unit shown in FIGS. 1 to 4 of the first and second embodiments is replaced with a thin and bendable sheet heat sink. This is the point where a single pipe is provided.
  • the internal structure of the sheet heat pipe is shown in FIG. 5 and will be specifically described below. The illustration in which the sheet heat pipe is incorporated in a linear motor is omitted.
  • the sheet-like heat pipe 21 has a structure in which a number of meandering hollow thin tubes 21A are lined up inside a thin metal member having good heat conductivity, and is composed of a liquid-phase working liquid such as Freon and a gas-phase working liquid. Two-phase working fluid is sealed in a small tube 21A.
  • Sheet heat When the heat sink 21 is fixed to the armature, the heat receiving part 21 B of the sheet heat pipe 21 is brought into contact with the surface of the armature, and a part of the heat radiating part 21 C is brought into contact with the heat sink. .
  • the cooling unit is a sheet-like heat pipe 21 having a structure in which a number of hollow capillary tubes 21 A meandering inside are arranged, so that the heat unit is small in size but heat.
  • the conductivity is extremely high, heat can be transferred quickly, and the cooling effect can be improved as compared with the first and second embodiments.
  • the core of the armature may be formed by connecting a plurality of divided core blocks in sequence and mating and connecting them.
  • the cooling unit and heat sink can be mounted at desired positions according to the armature and table length and mounting position, and the installation of the cooling device is not affected by the design specifications of the linear motor. Can be improved.
  • the cooling device for a linear motor is useful, for example, as a device used for a feed mechanism of a machine tool or a positioning device of a semiconductor manufacturing apparatus.

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Motor Or Generator Cooling System (AREA)
  • Linear Motors (AREA)

Abstract

L'invention concerne un dispositif de refroidissement d'un moteur linéaire, comprenant un stator pourvu d'un aimant permanent (5) et d'un bloc de déviation de champ (6), un rotor présentant un induit (2), dont une bobine (7) est enroulée autour d'un noyau (3), et une unité de refroidissement (10). Selon cette invention, cet unité de refroidissement (10), qui est constituée d'un élément fortement thermoconducteur en forme de bloc pouvant être démonté d'une plaque de montage (4) de l'induit, est déposée sur une table (14) à travers un espace. Une pluralité de conduites de chaleur (11) est installée dans l'unité de refroidissement (10). Les parties de réception calorifique des conduites de chaleur (11) sont disposées sur le côté longitudinal central de l'induit (2), de sorte que des parties rayonnement de chaleur sont positionnées sur le côté longitudinal d'extrémité de l'induit (2). On installe un dissipateur thermique à ailettes (13) sur les conduites de chaleur (11), en contact avec les surfaces périphériques extérieures de ces dernières, en plaçant le côté rayonnement de chaleur sur lesdites conduites. Selon cette invention, cette unité de refroidissement du moteur linéaire, capable d'éliminer toute maintenance et d'augmenter les performances de refroidissement de l'induit, peut être produite à coût réduit.
PCT/JP2002/000898 2001-02-06 2002-02-04 Dispositif de refroidissement d'un moteur lineaire WO2002063749A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001029399A JP4636354B2 (ja) 2001-02-06 2001-02-06 リニアモータおよびそれを備えたテーブル送り装置
JP2001-29399 2001-02-06

Publications (1)

Publication Number Publication Date
WO2002063749A1 true WO2002063749A1 (fr) 2002-08-15

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JP (1) JP4636354B2 (fr)
TW (1) TW552765B (fr)
WO (1) WO2002063749A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6847132B2 (en) * 2001-07-10 2005-01-25 Canon Kabushiki Kaisha Electromagnetic actuator having an armature coil surrounded by heat-conducting anisotropy material and exposure apparatus
WO2006056548A2 (fr) * 2004-11-22 2006-06-01 Siemens Aktiengesellschaft Machine electrique comportant un actionneur rotatif et lineaire
FR2900287A1 (fr) * 2006-04-20 2007-10-26 Sidel Participations Support pour un moteur electrique lineaire comportant des moyens de compensation thermique
US7732950B2 (en) 2004-07-25 2010-06-08 Ts Heatronics Co., Ltd. Linear or curved mobile motor and its radiator

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4811550B2 (ja) * 2001-08-20 2011-11-09 株式会社安川電機 リニアモータ電機子およびリニアモータ
JP4105586B2 (ja) * 2003-05-14 2008-06-25 ヤマハ発動機株式会社 リニアモータ式単軸ロボット
JP2006033910A (ja) * 2004-07-12 2006-02-02 Sumitomo Heavy Ind Ltd リニアモータ及びこのリニアモータを用いたステージ装置
KR100826823B1 (ko) * 2004-07-12 2008-05-02 스미도모쥬기가이고교 가부시키가이샤 리니어 모터 및 이 리니어 모터를 이용한 스테이지장치
JP2007089245A (ja) * 2005-09-20 2007-04-05 Yaskawa Electric Corp 平面サーボモータ
JP5426180B2 (ja) * 2009-01-20 2014-02-26 富士機械製造株式会社 リニアモータ
JP5355105B2 (ja) * 2009-01-20 2013-11-27 富士機械製造株式会社 直線駆動装置および電子回路部品装着機
US9825508B2 (en) 2012-03-26 2017-11-21 Fuji Machine Mfg. Co., Ltd. Linear motor device
KR101445862B1 (ko) * 2013-08-01 2014-09-30 미래산업 주식회사 리니어모터용 가동자 및 이를 포함하는 리니어모터
JP6386042B2 (ja) * 2014-06-13 2018-09-05 株式会社Ｆｕｊｉ リニアモータ
CN107114011B (zh) * 2015-01-19 2020-04-14 株式会社富士 元件安装装置用头单元
JP6482401B2 (ja) * 2015-06-19 2019-03-13 住友重機械工業株式会社 リニアモータの冷却ユニット
JP6788664B2 (ja) * 2016-03-29 2020-11-25 住友重機械工業株式会社 リニアモータ、ボイスコイルモータ、ステージ装置
TWI713284B (zh) * 2019-05-16 2020-12-11 大銀微系統股份有限公司 線性馬達動子及所結合平台間之冷卻機構
KR102124357B1 (ko) * 2019-05-28 2020-06-22 하이윈 마이크로시스템 코포레이션 리니어 모터 가동자 및 그 결합 플랫폼 사이의 냉각 기구
CN115549396A (zh) * 2022-10-27 2022-12-30 广东畅能达科技发展有限公司 一种基于超薄均热板的直线电机液冷散热结构

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6005310A (en) * 1997-10-02 1999-12-21 Mfm Technology, Inc. Brushless linear motor slider
JP2000050613A (ja) * 1998-07-29 2000-02-18 Shicoh Eng Co Ltd リニアモータ
JP2000228860A (ja) * 1999-02-08 2000-08-15 Yaskawa Electric Corp リニアモータの冷却装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6005310A (en) * 1997-10-02 1999-12-21 Mfm Technology, Inc. Brushless linear motor slider
JP2000050613A (ja) * 1998-07-29 2000-02-18 Shicoh Eng Co Ltd リニアモータ
JP2000228860A (ja) * 1999-02-08 2000-08-15 Yaskawa Electric Corp リニアモータの冷却装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6847132B2 (en) * 2001-07-10 2005-01-25 Canon Kabushiki Kaisha Electromagnetic actuator having an armature coil surrounded by heat-conducting anisotropy material and exposure apparatus
US7732950B2 (en) 2004-07-25 2010-06-08 Ts Heatronics Co., Ltd. Linear or curved mobile motor and its radiator
WO2006056548A2 (fr) * 2004-11-22 2006-06-01 Siemens Aktiengesellschaft Machine electrique comportant un actionneur rotatif et lineaire
WO2006056548A3 (fr) * 2004-11-22 2009-02-26 Siemens Ag Machine electrique comportant un actionneur rotatif et lineaire
US8026640B2 (en) 2004-11-22 2011-09-27 Siemens Aktiengesellschaft Electric machine having a rotary and a linear actuator
FR2900287A1 (fr) * 2006-04-20 2007-10-26 Sidel Participations Support pour un moteur electrique lineaire comportant des moyens de compensation thermique
WO2007122135A1 (fr) * 2006-04-20 2007-11-01 Sidel Participations Support pour un moteur electrique lineaire comportant des moyens de compensation thermique et de refroidissement
US7755226B2 (en) 2006-04-20 2010-07-13 Sidel Participations Stand for a linear electric motor comprising thermal compensation and cooling means

Also Published As

Publication number Publication date
TW552765B (en) 2003-09-11
JP4636354B2 (ja) 2011-02-23
JP2002238238A (ja) 2002-08-23

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