552765 A7 ___ _B7_ _ 五、發明説明（j 【技術領域】 本發明係關於能有效冷卻電樞，將線性馬達抑制於低 成本，且可避免周邊機器與配管等連結時所產生之保養等 麻煩的線性馬達之冷卻裝置。 【技術背景】 以往，被使用於工作機械之搬運機構或半導體製造裝 置之定位裝置，並以電樞爲活動元件及以磁場磁極爲固定 元件，使電樞沿磁場磁極較長方向予以相對性行走之可轉 線圈型線性馬達乃呈如圖6所示。該圖6卻是習知線性馬 達之正視剖面圖。 在圖示，3 1爲線性馬達，3 2爲電樞，3 3爲磁芯，3 4 爲電樞裝設板，3 5爲永久磁鐵，3 6爲磁轭，3 7爲電樞線 圏，38爲裝設螺絲，39爲冷媒通路，40爲模制樹脂。 在如此構成，沿具C字形狀剖面之磁軛3 6上較長方 向（與紙面呈垂直之方向）係設有極性交錯相異之多數永久 磁鐵3 5，由該磁軛3 6及該永久磁鐵3 5構成爲固定元件 。且介該永久磁鐵35與磁性空隙呈對向設有將電磁鋼板 層疊於永久磁鐵35高度方向所成之磁芯33。該磁芯33 卻在其溝槽內部捲繞電樞線圈37以模制樹脂40固定其周 圍’而由磁芯33及電樞線圈37構成爲活動元件。磁芯 3 3與電樞裝設板34則藉將裝設螺絲38鎖緊於電樞裝設 板34所設陰螺絲部（未圖示）加以螺定。又，電樞32之對 向於電樞線圈37位置乃設有冷媒通路39，其與冷媒通路 本紙浪尺度適用中國國家梯準（CNS ) A4規格（210X297公i --------衣— (請先閲讀背面之注意事項再填寫本頁) 訂 經濟部智慧財產苟員工消費合作社印製 -4- 552765 A7 __B7___ 五、發明説明（3 (請先閲讀背面之注意事項再填寫本頁) 39之間即以模制樹脂40予以固定，並由電樞32與冷媒 通路39構成一體構造之冷卻單元。又，電樞裝設板34卻 介工作台（未圖示）由線性導件加以支承，而利用線性導件 可使線性馬達沿工作台較長方向（與紙面呈垂直之方向）滑 動。 然，習知技術係有下述之問題。 爲提昇線性馬達3 1之推力，自未圖示之電源對電樞 線圏37繼續供應驅動電流時，由於電樞線圈37之內部電 阻增高致溫度上升而發熱量會增加。因此，電樞線圈37 之發熱被傳至冷媒通路39側，藉冷媒之強制對流之傳熱 進行熱交換。另，磁芯33由於損耗之增大致溫度上升而 發熱量亦增大。磁芯33之發熱雖介電樞裝設板34被傳熱 至電樞裝設板34頂部所固定之工作台（未圖示），惟自磁 芯3 3經由工作台側向外部放出之熱卻較依賴自然對流之 傳熱’致比起強制對流之傳熱其冷卻性能較低，而有促使 磁芯33及工作台發生熱變形之問題。尤其沿磁芯3 3較長 方向之翹曲頗大。 經濟部智慈財凌局員工消費合作社印製 又’向工作台傳熱所引起之熱變形，對於線性導件或 檢測器（均未圖示）卻賦予不良影響，致會發生定位精度之 誤差，而構成給高精度定位帶來障礙之原因。 由於電樞線圈37之溫度上升之影響，例如，電樞線 圈37本身產生絕緣劣化時，對應電樞32之更換，冷卻單 元亦需更換。又，被覆於電樞線圈37周圍之模制樹脂4〇 發生熱變形，且隨著其熱變形所致破損之影響，自冷媒通 本紙浪尺度適用中國國家梯準（CNS )Μ規格（210X297公釐) -5· 552765 A7 __B7_ 五、發明説明（3) 路39洩漏冷媒（液體）時，對應冷卻單元之更換，電樞32 亦需要更換。於是，由於電樞32與冷卻單元呈一體構造 ，致任何一方有所損傷即需全部新造，而關連到線性馬達 本體之成本。 如上述電樞32具液冷之冷卻單元以構成活動元件時 ，卻需要設於外部之幫浦（未圖示）及連接於該幫浦之配管 (未圖示），致構成複雜增多保養，並關連到包括周邊機器 之設計·製造上之成本。 本發明即爲解決上述問題所開發者，以提供一種低成 本，又不需要保養，而能提昇電樞之冷卻性能的線性馬達 之冷卻裝置爲目的。 【發明之開示】 本發明係爲在具有將極性交錯相異之多數永久磁鐵予 以鄰接並排配置之磁軛所成固定元件，與沿上述磁軛較長 方向介上述該永久磁鐵之磁鐵列及磁性空隙被予以對向配 置且在磁芯捲繞電樞線圏之電樞所成活動元件，與能將上 述固定元件或上述活動元件產生之熱予以向外部放熱以進 行熱交換之冷卻單元的線性馬達之冷卻裝置’含有爲裝設 沿上述電樞頂部較長方向配設之上述電樞所需之電樞裝設 板，與爲裝載介絕熱板被設置於上述電樞裝設板兩側之負 荷所需之工作台，而上述冷卻單元卻與上述工作台之間介 有空間，且由上述電樞裝設板與上述工作台間挾設之塊狀 高導熱構件所形成，該冷卻單元內部則設有多數散熱管同 本紙浪尺度適用中國國家稀率（CNS >八4規格（210X297公釐) (請先閲讀背面之注意事項再填寫本頁) 衣· 訂 經濟部智慧財產局員工消资合作社印製 -6- 552765 A7 _______B7_ _552765 A7 ___ _B7_ _ V. Description of the invention (j [Technical Field] The present invention relates to an armature that can be effectively cooled, a linear motor can be suppressed to a low cost, and troubles such as maintenance caused when peripheral equipment is connected to piping and the like can be avoided Cooling device for linear motor. [Technical background] In the past, it has been used as a positioning device for the conveying mechanism of a working machine or a semiconductor manufacturing device. The armature is used as a moving element and the magnetic field pole is used to fix the element. The rotatable coil type linear motor that is relatively opposed in the long direction is shown in Fig. 6. This figure is a front sectional view of a conventional linear motor. In the figure, 3 1 is a linear motor and 3 2 is an armature. , 3 3 is the magnetic core, 3 4 is the armature installation plate, 3 5 is the permanent magnet, 36 is the yoke, 37 is the armature line, 38 is the installation screw, 39 is the refrigerant path, and 40 is the mold. In this structure, a plurality of permanent magnets 3 5 with different polarities are arranged along the longer direction (direction perpendicular to the paper surface) of the yoke 3 6 having a C-shaped cross section, and the yoke 3 6 And the permanent magnet 3 5 is constituted as a solid A magnetic core 33 formed by stacking an electromagnetic steel plate in the height direction of the permanent magnet 35 is provided through the permanent magnet 35 and the magnetic gap. The magnetic core 33 is wound with an armature coil 37 inside its groove to Moulded resin 40 fixes its surroundings, and constitutes a movable element composed of a magnetic core 33 and an armature coil 37. The magnetic core 33 and the armature mounting plate 34 are locked to the armature mounting plate 34 by the mounting screws 38 The female screw part (not shown) is screwed. In addition, the armature 32 is opposite to the armature coil 37 and is provided with a refrigerant passage 39. The paper wave scale of the armature 32 and the refrigerant passage are applicable to China National Standards (CNS). A4 specifications (210X297 male i -------- clothing — (Please read the precautions on the back before filling out this page) Order printed by the Ministry of Economic Affairs Intellectual Property Govt. Consumer Cooperatives -4- 552765 A7 __B7___ 5. Description of the invention (3 (Please read the precautions on the back before filling this page) The 39 units are fixed with molded resin 40, and the armature 32 and the refrigerant passage 39 form a unitary cooling unit. The armature mounting plate 34, but the table (not shown) is supported by linear guides, and the use of linear It can make the linear motor slide along the longer direction of the table (the direction perpendicular to the paper surface). However, the conventional technology has the following problems. In order to increase the thrust of the linear motor 31, the power from When the pivotal coil 37 continues to supply the driving current, the heat generation will increase due to the increase in temperature due to the increase in the internal resistance of the armature coil 37. Therefore, the heat of the armature coil 37 is transmitted to the refrigerant path 39 side, and the forced convection of the refrigerant is performed by the refrigerant. Heat transfer is performed for heat exchange. In addition, the magnetic core 33 increases in temperature due to the increase in loss, and the heat generation also increases. Although the heat of the magnetic core 33 is transferred to the top of the armature mounting plate 34, the heat is transferred to the top of the armature mounting plate 34. A fixed workbench (not shown), but the heat emitted from the magnetic core 33 to the outside through the workbench side is more dependent on natural convection heat transfer, which has lower cooling performance than forced convection heat transfer, and has Promote the problem of thermal deformation of the magnetic core 33 and the table. Especially the warpage in the longer direction of the magnetic core 3 3 is quite large. Printed by the Consumer Cooperative of the Intellectual Property Office of the Ministry of Economic Affairs and “heat transfer caused by heat transfer to the workbench”, it has adverse effects on linear guides or detectors (both not shown), resulting in errors in positioning accuracy. , And constitute the cause of obstacles to high-precision positioning. Due to the influence of the temperature rise of the armature coil 37, for example, when the insulation of the armature coil 37 itself is deteriorated, the cooling unit needs to be replaced corresponding to the replacement of the armature 32. In addition, the molding resin 40 covered around the armature coil 37 undergoes thermal deformation, and with the effect of the damage caused by the thermal deformation, the self-refrigerant paper scale applies the Chinese National Standard (CNS) M standard (210X297). (Centi) -5 · 552765 A7 __B7_ V. Description of the Invention (3) When refrigerant (liquid) leaks from circuit 39, corresponding to the replacement of the cooling unit, the armature 32 also needs to be replaced. Therefore, since the armature 32 and the cooling unit have an integrated structure, if any of them is damaged, all new construction is needed, which is related to the cost of the linear motor body. For example, when the above-mentioned armature has 32 liquid-cooled cooling units to form a movable element, an external pump (not shown) and a piping (not shown) connected to the pump are required, resulting in complicated and increased maintenance. It also relates to the cost of designing and manufacturing the peripheral equipment. The present invention aims to provide a cooling device for a linear motor that can improve the cooling performance of an armature at a low cost and without maintenance, in order to solve the above problems. [Invention of the invention] The present invention is a fixed element formed by a yoke having a plurality of permanent magnets with mutually staggered polarities adjacently arranged side by side, and the magnet array and magnetic properties of the permanent magnet passing through the yoke along the longer direction thereof. The gap is linearly arranged with the movable element formed by the armature of the armature line wound around the magnetic core, and the linearity of the cooling unit that can release the heat generated by the fixed element or the movable element to the outside for heat exchange The cooling device of the motor includes an armature installation plate required for installing the armature arranged in a longer direction along the top of the armature, and a heat insulation plate provided on both sides of the armature installation plate for the loading medium. The workbench required by the load, but there is a space between the cooling unit and the workbench, and it is formed by the block-shaped high heat-conducting member provided between the armature installation plate and the workbench. The inside of the cooling unit Most cooling pipes with the same paper size are applicable to China's national thinning rate (CNS > 8 4 specifications (210X297 mm) (please read the precautions on the back before filling this page)) Printed by the Intellectual Property Bureau Staff Consumer Cooperatives -6- 552765 A7 _______B7_ _
五、發明説明（J 時’其配置上述散熱管放熱側之外周面乃設有具散熱片之 吸熱設備。 (請先閲讀背面之注意事項再填寫本頁) 又’在本發明，上述散熱管之收熱部係被配置於上述 電樞之較長方向中央部，另方之放熱部卻被配置於上述電 樞之較長方向端部。 又’在本發明，上述散熱管之收熱部係被配置於與上 述電樞線圈相對之對向位置。 又’在本發明，上述冷卻單元係藉鎖緊用裝設螺絲予 以裝脫自如螺定於電樞裝設板。 又’在本發明，上述散熱管之放熱側係被予以裝設風 扇馬達。 又，在本發明，上述冷卻單元係由內部具有並排多數 蛇行中空細管之構造之薄型板狀散熱管所構成。 又，在本發明，上述磁芯係爲將被分割之多數芯塊依 序予以並排嵌合連結而成。 【圖示之簡單說明】 經濟部智惡財產局員工消费合作社印t 圖1爲顯示本發明第1實施例之線性馬達，自圖2之 箭頭B方向予以觀看之正視圖。圖2爲將圖1線性馬達 之電樞自箭頭A方向予以觀看之側視圖。圖3爲顯示本 發明第2實施例之線性馬達，自圖4之箭頭D方向予以 覲看之正視圖。圖4爲將圖3線性馬達之電樞自箭頭c 方向予以觀看之側視圖。圖5爲顯示本發明第3實施例之 板狀散熱管全體立體圖，係透視內部者。圖6爲顯示習知 $紙伕尺度適用t國國家梂率(CNS ) A4規格（210 X29*7公釐) ' ~ --- 552765 A7 ____B7 五、發明説明（9 技術之線性馬達正視剖面圖。 符號說明 1 線性馬達 9 固定底座 2 電樞 10 冷卻單元 3 磁芯 11 散熱管 4 電疏裝設板 12 絕熱板 5 永久磁鐵 13 吸熱設備 6 磁車厄 14 工作台 7 8 電樞線圏 裝設螺絲 15、16 裝設螺絲 {請先閲讀背面之注意事項再填寫本頁} 衣 、11 【發明之最佳實施形態】 以下，參照圖示說明本發明之實施例。 經濟部智慧財產局員工消黄合作社印製 圖1爲顯示本發明第1實施例之線性馬達，自圖2 2 箭頭B方向予以觀看之正視圖。圖2爲將圖1線性馬達 之電樞自箭頭A方向予以觀看之側視圖，係透視其內部 者。 ΙΓ · 1爲線性馬達，2爲電樞，3爲磁芯，4爲電樞裝設丰反 ，5爲永久磁鐡，6爲磁軛，7爲電樞線圈，8爲裝設螺絲 ，9爲固定底座，10爲冷卻單元，11爲散熱管，12爲絕 熱板，1 3爲吸熱設備，14爲工作台，1 5、1 6爲裝設螺絲 。1 7爲將馬達導線與外部電源等予以連接之連結件。又 ，將磁芯3及電樞線圈7所成電樞2設爲活動元件，及將 ^紙伕尺度適用中國國家楳率（CNS )八4規格（210X297公釐） -8- 552765 A7 _____B7_____V. Description of the invention (at time J, the heat sink is equipped with a heat sink on the outer surface of the heat sink side. (Please read the precautions on the back before filling this page). Also in the present invention, the heat sink The heat-receiving portion is disposed at the central portion in the longer direction of the armature, while the other heat-releasing portion is disposed at the longer-direction end portion of the armature. It is arranged at a position opposite to the armature coil. In the present invention, the cooling unit is detachably screwed to the armature mounting plate by a locking screw. Also in the present invention, A fan motor is installed on the heat-radiating side of the heat-dissipating pipe. In the present invention, the cooling unit is a thin plate-like heat-dissipating pipe having a structure in which a plurality of meandering hollow thin tubes are arranged side by side. In the present invention, The above-mentioned magnetic core is formed by sequentially joining and joining the majority of the divided core blocks. [Simplified description of the figure] Printed by the Consumers ’Cooperative of the Intellectual Property Office of the Ministry of Economic Affairs Figure 1 shows the first embodiment of the present invention 2 is a front view of the linear motor viewed from the direction of arrow B in FIG. 2. FIG. 2 is a side view of the armature of the linear motor of FIG. 1 viewed from the direction of arrow A. FIG. 3 is a linear view showing a second embodiment of the present invention. The motor is a front view viewed from the direction of arrow D in Fig. 4. Fig. 4 is a side view of the armature of the linear motor of Fig. 3 viewed from the direction of arrow c. Fig. 5 is a plate shape showing a third embodiment of the present invention. A perspective view of the entire heat pipe, which is a perspective inside. Figure 6 shows the conventional $ paper scale applicable to the country's national rate (CNS) A4 specification (210 X29 * 7 mm) '~ --- 552765 A7 ____B7 V. Invention Explanation (9 technology of the front view of a linear motor. Symbol description 1 Linear motor 9 Fixed base 2 Armature 10 Cooling unit 3 Magnetic core 11 Radiator tube 4 Electrical installation plate 12 Thermal insulation plate 5 Permanent magnet 13 Heat absorbing equipment 6 Magnetic car 14 Workbench 7 8 Armature wire mounting screws 15, 16 Mounting screws {Please read the precautions on the back before filling out this page} Clothing, 11 [Best embodiment of the invention] The invention will be described below with reference to the drawings Example of the Ministry of Economy Printed by the staff of the property bureau, Yellow Cooperative, Figure 1 is a front view showing the linear motor of the first embodiment of the present invention, viewed from the direction of arrow B in Figure 2 2. Figure 2 is the armature of the linear motor of Figure 1 from the direction of arrow A The side view viewed is the one that sees through the inside. Γ1 · 1 is a linear motor, 2 is an armature, 3 is a magnetic core, 4 is an armature equipped with a ferrite, 5 is a permanent magnet, 6 is a yoke, 7 Is an armature coil, 8 is a mounting screw, 9 is a fixed base, 10 is a cooling unit, 11 is a heat pipe, 12 is a heat insulation plate, 13 is a heat absorbing device, 14 is a workbench, 1 5 and 16 are installations Screws. 1 7 is a connector that connects the motor lead to an external power source. In addition, the armature 2 formed by the magnetic core 3 and the armature coil 7 is used as a movable element, and the paper size is applied to the Chinese National Standard (CNS) 8-4 specification (210X297 mm) -8- 552765 A7 _____B7_____
五、發明说明（S 永久磁鐵5及磁軛6所成磁場磁極設爲固定元件’且使電 樞2行走之線性馬達基本構成卻與習知技術相同。 (請先閲讀背面之注意事項再填寫本頁) 本發明之構成即如下述。 在圖示，線性馬達1之電樞2頂部係配設有沿較長方 向裝設電樞2所需之電樞裝設板4，且在電樞裝設板4兩 側介樹脂等所成絕熱板1 2予以設置裝載負荷所需之工作 台14。電樞裝設板4及工作台14則藉將鎖緊用裝設螺絲 1 5螺定於電樞裝設板4所設陰螺絲部（未圖示）加以固定。 又，磁芯3及電樞裝設板4乃藉將裝設螺絲8鎖緊於電樞 裝設板4所設陰螺絲部（未圖示）予以螺定。 冷卻單元10卻被構成爲可裝脫自如於電樞裝設板4 。即，冷卻單元10與電樞裝設板4係將鎖緊用裝設螺絲 16穿過冷卻單元10所設通孔（未圖示）側後，將該裝設螺 絲1 6螺緊於電樞裝設板4所設陰螺絲部（未圖示）予以固 定。該冷卻單元10與上述工作台14之間乃介有空間S， 經濟部智慧財產局員工消f合作社印製 且甶電樞裝設板4與上述工作台14間挾設之塊狀高導熱 構件所形成。冷卻單元10內部則設有多數散熱管1 1同時 ，該散熱管11之一方收熱部被配置於電樞2較長方向之 中央部，另方放熱部被配置於電樞2較長方向之端部。又 ’散熱管1 1自線性馬達1正面觀看時恰好相對於電樞線 圈7並被配設於對向之位置。而冷卻單元1 0之被配置散 熱管11放熱側之外周面卻被裝設具散熱片之吸熱設備1 3 ’且由裝設螺絲16加以固定。在此，電樞裝設板4與冷 卻單元1 0之間爲促使冷卻單元1 0有效進行自電樞2之傳 本紙张尺度適用中國國家揉準（CNS ) A4规格（210X297公釐） -9- 552765 A7 B7 五、發明説明（i 熱即被塗敷硅酮脂膏等。 其次，就線性馬達之冷卻裝置之動作加以說明。 在上述構成，當自未圖示之電源向電樞線圏7供應驅 動電流時，電樞2隨之產生所定推力同時，電樞線圈7及 磁芯3亦起發熱。電樞線圈7及磁芯3之發熱乃經由電樞 裝設板4被傳至冷卻單元10之散熱管11收熱部，該收熱 部吸熱時即進行激烈泡核沸騰。泡核沸騰之斷續所致壓力 波則成爲振動波促使散熱管1 1內部密封之作動液產生振 動，並藉作動液之振動將大量之熱傳至散熱管1 1放熱部 。傳至散熱管1 1放熱部之熱卻又被傳至設於冷卻單元1 0 放熱面側之吸熱設備1 3。即，該電樞2發生之熱藉散熱 管11、吸熱設備1 3予以除去而進行熱交換。且藉抑制電 樞線圏7之溫度上升，可避免向電樞裝設板4與被隔熱工 作台14側之一切傳熱，以抑制對於工作台14之傳熱、熱 變形。 因此，本發明甶於具有爲裝設沿電樞2頂部較長方向 配設之電樞2所需之電樞裝設板4，與爲裝載介絕熱板1 2 予以設置於電樞裝設板4兩側之負荷所需之工作台14， 而被構成爲：冷卻單元10與工作台14之間介有空間S， 並由電樞裝設板4與工作台1 4間挾設之塊狀高導熱構件 予以形成，該冷卻單元i 0內部又設有多數散熱管1 1，且 其配置散熱管放熱側之外周面則設有具散熱片之吸熱設備 、故藉採取冷卻單元10不直接接觸於被隔熱工作台14， 卻直接接觸於電樞裝設板4之構造，能使電樞產生之熱僅 本紙張尺度適用中國國家梂準（CNS ) A4規格（210X297公釐） (請先閲讀背面之注意事項再填寫本頁) 衣 訂 經濟部智慧財產局員工消費合作社印製 -10- 552765 A7 B7_ 五、發明説明（$ (請先閲讀背面之注意事項再填寫本頁) 向冷卻單元1 0傳熱。其結果，能避免冷卻單元1 0因傳熱 致熱變形，以消除對於線性導件或檢測器等定位精度誤差 之影響，提供一種可高精度定位之線性馬達。 又，散熱管11係被構成爲：將一方收熱部配置於電 樞2較長方向之中央部側，及將另方放熱部配置於電樞2 較長方向之端部側，致能將例如以高推力移動活動元件時 所發生電樞2之熱，藉裝設於電樞2端部之散熱管11及 吸熱設備1 3，自電樞2之中央部側向端部側予以有效除 去。其結果，能防止電樞2之沿磁芯3較長方向之翹曲， 以抑制其熱變形。 又，散熱管11亦被配設於與電樞線圈7相對之對向 位置，致藉將電樞線圈7與散熱管11之傳熱路徑予以縮 短爲最短距離，而可減小電樞線圈7與散熱管11間之熱 阻，以提昇傳熱功能，有效加以冷卻。 經濟部智慈財產局8工消費合作社印製 又，將冷卻單元1 〇構成爲··藉裝設螺絲16可裝脫自 如裝設電樞2所用之電樞裝設板4，致電樞2與冷卻單元 1 0之任一方雖受損亦不必將線性馬達電樞全體予以新造 ，不需爲電樞2、工作台14之組合、分解花費工夫及成 本，故能抑制減輕線性馬達本體之成本。且，能避免習知 之周邊機器與配管等連接時所發生之保養等煩雜，而亦可 抑制包括周邊機器之設計·製造上之成本。 其次說明本發明第2實施例。 圖3爲顯示本發明第2實施例之線性馬達，自圖4之 箭頭D方向觀看之正視圖。圖4爲將圖3線性馬達之電 $紙浪尺度適用中國國家揉率（CNS ) A4規格（2丨0X297公釐） -11 - 552765 A7 B7___ 五、發明説明（3 樞自箭頭C方向予以觀看之側視圖° 在圖示，18爲吸熱設備，19爲風扇馬達，20爲套殼 (請先閲讀背面之注意事項再填寫本頁) 〇 第2實施例與第1實施例不同之處，乃在吸熱設備 1 8之放熱側予以設置被覆於散熱片部之風扇馬達19 ’以 強制性進行冷卻。該風扇馬達19卻被裝設於套殼20內。 又，其動作由於與第1實施例相同，故在此省略其說明。 第2實施例，由於在吸熱設備18裝設風扇馬達19， 致能將自冷卻單元1 〇向吸熱設備1 8之傳熱藉風扇馬達 1 9之排氣予以強制性向外部放熱，而更有效提高冷卻效 果。 其次說明本發明第3實施例。 圖5爲顯示本發明第3實施例之板狀散熱管全體立體 圖’係透視內部者。 經濟部智慈財產局員工消资合作社印敦 第3實施例異於第1實施例之點，卻在替代第1及第 2實施例之在圖1〜圖4所示冷卻單元，予以設置薄型彎 曲自如之板狀散熱管。茲將板狀散熱管之內部構造顯示於 圖5如下具體加以說明。又，該板狀散熱管之組合於線性 馬達之圖示則予以省略之。 該板狀散熱管2 1係呈導熱良好之金屬製薄板構件內 部並排多數蛇行中空細管2 i A之構造，將氟隆（聚四氟乙 烯）等液相作動液及氣相作動液所成兩相作動液予以密封 於細管2丨A內。欲將板狀散熱管2 1固定於電樞時，乃將 板狀散熱管21之收熱部2 1 B接觸於電樞表面，使放熱部 本紙伕尺度適用中國國家梂準（CNS ) A4規格（210X297公釐） ' -12 - 552765 A7 B7 五、發明説明（如 21C —部分予以接觸於吸熱設備。 如何所成第3實施例’由於將冷卻卓兀1 〇没成內部 並排多數蛇行中空細管2 1 A之構造之板狀散熱管2 1 ’致 雖小型其熱傳導率卻極高’能使熱移動迅速進行’比起第 1、第2實施例可更提昇冷卻效果。 又，本實施例，雖以在電樞線圈兩側配置永久磁鐵之 電流感應型構造線性馬達爲例加以說明’惟在電樞線圈單 側配置永久磁鐵之所謂間隙對向型構造之線性馬達’亦可 同樣使用本發明。 又，電樞之磁芯亦可使用將被分割多數芯塊予以依序 嵌合連結所成者，當使用者對線性馬達有較長衝程化之要 求時，藉以電樞採用分割磁芯，乃可對應電樞及工作台之 長度、裝設位置將冷卻單元及吸熱設備裝設於所盼位置， 不被線性馬達設計規劃所影響，予以提昇冷卻裝置之設置 性。 (請先閱讀背面之注意事項再填寫本頁) 、π 經濟部智慧財產局員工消費合作杜印% 【產業上之可利用】 如上，本發明有關之線性馬達之冷卻裝置，例如被利 用於工作機械之搬運機構或半導體製造裝置之定位裝置， 卻頗爲甚爲有用。 本紙張尺度適用中國國家標率（CNS ) Α4規格（210X297公釐） -13-V. Description of the invention (S The magnetic poles of the magnetic field formed by the permanent magnet 5 and the yoke 6 are set as fixed elements, and the basic structure of the linear motor that makes the armature 2 travel is the same as the conventional technology. (Please read the precautions on the back before filling (This page) The structure of the present invention is as follows. As shown in the figure, the armature 2 of the linear motor 1 is provided with an armature mounting plate 4 required to install the armature 2 in a longer direction. Insulation plates 12 made of resin, etc. are mounted on both sides of the mounting plate 4 to provide a workbench 14 required for loading. The armature mounting plate 4 and the workbench 14 are fixed by fixing screws 15 for fixing. The female screw portion (not shown) provided in the armature installation plate 4 is fixed. The magnetic core 3 and the armature installation plate 4 are locked by the installation screw 8 to the female provided in the armature installation plate 4. The screw portion (not shown) is screwed. The cooling unit 10 is configured to be detachable from the armature mounting plate 4. That is, the cooling unit 10 and the armature mounting plate 4 are set screws for locking. 16 After passing through the side of the through hole (not shown) provided in the cooling unit 10, screw the mounting screw 16 to the female screw portion (not shown) provided in the armature mounting plate 4. There is a space S between the cooling unit 10 and the above-mentioned workbench 14, which is printed by the staff of the Intellectual Property Bureau of the Ministry of Economic Affairs and printed by the cooperative and the block height is set between the armature installation board 4 and the above-mentioned workbench 14. It is formed by a heat-conducting member. The cooling unit 10 is provided with a plurality of heat-radiating pipes 11. At the same time, one heat-receiving portion of the heat-radiating pipe 11 is arranged at the central portion of the armature 2 in the longer direction, and the other heat-releasing portion is arranged at the armature. 2 The end in the longer direction. The heat pipe 1 1 is located opposite to the armature coil 7 when viewed from the front of the linear motor 1 and is arranged at the opposite position. The heat sink 11 of the cooling unit 10 is configured to release heat On the outer peripheral surface of the side, a heat absorbing device 1 3 ′ with a heat sink is installed and fixed by a mounting screw 16. Here, the armature mounting plate 4 and the cooling unit 10 are used to promote the effective implementation of the cooling unit 10. The paper size from the armature 2 is applicable to the Chinese National Standard (CNS) A4 (210X297 mm) -9- 552765 A7 B7 V. Description of the invention (i is coated with silicone grease, etc. Secondly, it is linear The operation of the motor cooling device will be described. When a driving current is supplied to the armature line 7 from a power source not shown, the armature 2 generates a predetermined thrust force at the same time, and the armature coil 7 and the magnetic core 3 also generate heat. The heat is transmitted to the heat-receiving part of the cooling pipe 10 of the cooling unit 10 through the armature installation plate 4. The heat-receiving part performs intense nucleate boiling when it absorbs heat. The pressure wave caused by the intermittent nucleate boiling becomes a vibration wave The vibration of the working fluid sealed inside the heat pipe 11 is caused to vibrate, and a large amount of heat is transferred to the heat dissipation pipe 11 by the vibration of the working fluid. The heat transferred to the heat dissipation unit 11 is transferred to the cooling unit. Unit 10 is a heat-absorbing device 13 on a heat-dissipating surface side. That is, heat generated by the armature 2 is removed by a heat-radiating pipe 11 and a heat-absorbing device 13 to perform heat exchange. Moreover, by suppressing the temperature rise of the armature wire 7, it is possible to avoid all heat transfer to the armature mounting plate 4 and the insulated workbench 14 side, so as to suppress heat transfer and thermal deformation to the workbench 14. Therefore, the present invention is provided with an armature mounting plate 4 required for mounting the armature 2 arranged along the top of the armature 2 in a longer direction, and is provided on the armature mounting plate for loading a thermal insulation plate 12 The working table 14 required for the loads on both sides of the 4 is constituted by a space S between the cooling unit 10 and the working table 14 and a block formed between the armature mounting plate 4 and the working table 14 A highly thermally conductive member is formed. The cooling unit i 0 is also provided with a large number of heat dissipation pipes 11, and the outer peripheral surface of the heat dissipation side of the heat dissipation pipe is provided with a heat absorbing device with a heat sink. Therefore, the cooling unit 10 is not directly contacted. The structure of the insulated workbench 14 but directly contacting the armature mounting plate 4 can make the heat generated by the armature only the paper size applies to China National Standard (CNS) A4 (210X297 mm) (please first Read the precautions on the back and fill in this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Clothing and Economy -10- 552765 A7 B7_ V. Description of the invention ($ (Please read the precautions on the back before filling out this page) To the cooling unit 10 heat transfer. As a result, the cooling unit 10 can be prevented from being caused by heat transfer. Thermal deformation to eliminate the influence on positioning accuracy errors such as linear guides or detectors, and to provide a linear motor that can be positioned with high accuracy. In addition, the heat pipe 11 is configured to place one heat receiving portion on the armature 2 and the other. The central part side in the long direction and the other heat radiation part are arranged on the end part side in the longer direction of the armature 2 so that, for example, the heat of the armature 2 generated when the movable element is moved with high thrust can be installed in the electric device. The heat dissipation tube 11 and the heat absorbing device 13 at the end of the armature 2 are effectively removed from the center portion side to the end portion side of the armature 2. As a result, the armature 2 can be prevented from warping along the longer direction of the magnetic core 3, In addition, the heat pipe 11 is also arranged at a position opposite to the armature coil 7, so that the heat transfer path between the armature coil 7 and the heat pipe 11 can be shortened to the shortest distance, so that Reduce the thermal resistance between the armature coil 7 and the heat pipe 11 to improve the heat transfer function and effectively cool it. Printed by the 8th Industrial Cooperative Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, the cooling unit 10 is constructed as a borrowing The armature mounting plate 4 used for mounting the armature 2 can be installed and removed with screws 16 Even if either one of the armature 2 and the cooling unit 10 is damaged, it is not necessary to rebuild the entire linear motor armature, and it is not necessary to spend time and cost for the assembly and disassembly of the armature 2 and the workbench 14, so it can suppress and reduce the linearity. The cost of the motor body. Also, it can avoid the troublesome maintenance that occurs when the conventional peripheral devices are connected to the piping, etc., and can also reduce the design and manufacturing costs including peripheral devices. Next, the second embodiment of the present invention will be described. 3 is a front view of the linear motor of the second embodiment of the present invention, as viewed from the direction of arrow D in FIG. 4. FIG. 4 is a diagram of applying the electric paper scale of the linear motor of FIG. 3 to the Chinese national kneading rate (CNS) A4 specification ( 2 丨 0X297 mm) -11-552765 A7 B7___ V. Description of the invention (3 Pivot side view viewed from the direction of arrow C) In the illustration, 18 is a heat absorption device, 19 is a fan motor, and 20 is a casing (please first Read the precautions on the back and fill in this page again.) The second embodiment differs from the first embodiment in that a fan motor 19 'is installed on the heat sink side of the heat sink 18 to cover the heat sink to force cooling. . The fan motor 19 is installed in the casing 20. Since the operation is the same as that of the first embodiment, its description is omitted here. In the second embodiment, since the fan motor 19 is installed in the heat absorbing equipment 18, the heat transfer from the cooling unit 10 to the heat absorbing equipment 18 can be forced to release heat to the outside by the exhaust of the fan motor 19, thereby more effectively improving Cooling effect. Next, a third embodiment of the present invention will be described. Fig. 5 is a perspective view showing the entire plate-shaped heat dissipation pipe according to the third embodiment of the present invention, which is a perspective view of the inside. The third embodiment of the Indun Cooperative in the Intellectual Property Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs is different from the first embodiment, but instead of the first and second embodiments, the cooling unit shown in FIGS. 1 to 4 is provided with a thin type. Flexible bending plate heat pipe. The internal structure of the plate-shaped heat pipe is shown in Fig. 5 and described below in detail. The illustration of the combination of the plate-shaped heat pipe and the linear motor is omitted. The plate-shaped heat dissipation tube 21 is a structure in which a plurality of meandering hollow thin tubes 2 i A are arranged side by side inside a thin metal plate member with good heat conduction, and is composed of a liquid phase fluid such as fluorine (polytetrafluoroethylene) and a gas phase fluid. The phase action fluid is sealed in a thin tube 2A. When fixing the plate-shaped heat pipe 21 to the armature, the heat-receiving portion 2 1 B of the plate-shaped heat pipe 21 is brought into contact with the surface of the armature, so that the paper size of the heat-dissipating portion applies to the Chinese National Standard (CNS) A4 (210X297mm) '-12-552765 A7 B7 V. Description of the invention (such as 21C-Partially contacted with heat-absorbing equipment. How to make the third embodiment' Since the cooling unit is not cooled, most of the serpentine hollow tubes are arranged side by side. 2 1 A structured plate-shaped heat pipe 2 1 'Although it has a small size, its heat conductivity is very high' It can make heat move quickly 'Compared with the first and second embodiments, the cooling effect can be improved. Also, this embodiment Although the current induction type linear motor with permanent magnets on both sides of the armature coil is used as an example to explain it, but the so-called gap-opposed type linear motor with permanent magnets on one side of the armature coil can also be used. In addition, the magnetic core of the armature can also be formed by sequentially inserting and connecting a plurality of divided core blocks, and when a user requires a longer stroke of a linear motor, the armature adopts a divided magnetic core. , Can correspond to electricity The length and installation position of the pivot and the workbench will install the cooling unit and heat absorbing equipment at the desired position, which will not be affected by the linear motor design and planning, and improve the installation of the cooling device. (Please read the precautions on the back before filling (This page), π Consumer cooperation between Intellectual Property Bureau of the Ministry of Economic Affairs, Du Yin% [Available in industry] As mentioned above, the cooling device of the linear motor related to the present invention is, for example, used for positioning of a work machine's transport mechanism or a semiconductor manufacturing device. Device, it is quite useful. This paper size applies to China National Standards (CNS) Α4 specification (210X297 mm) -13-