WO2002028979A1 - Matiere abrasive a base de cerium et procede de production de ladite matiere - Google Patents

Matiere abrasive a base de cerium et procede de production de ladite matiere Download PDF

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Publication number
WO2002028979A1
WO2002028979A1 PCT/JP2001/002987 JP0102987W WO0228979A1 WO 2002028979 A1 WO2002028979 A1 WO 2002028979A1 JP 0102987 W JP0102987 W JP 0102987W WO 0228979 A1 WO0228979 A1 WO 0228979A1
Authority
WO
WIPO (PCT)
Prior art keywords
abrasive material
based abrasive
cerium based
concentration
particles
Prior art date
Application number
PCT/JP2001/002987
Other languages
English (en)
French (fr)
Inventor
Terunori Ito
Hidehiko Yamasaki
Naoyoshi Mochizuki
Yoshitsugu Uchino
Original Assignee
Mitsui Mining & Smelting Co.,Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Mining & Smelting Co.,Ltd. filed Critical Mitsui Mining & Smelting Co.,Ltd.
Priority to EP01919806A priority Critical patent/EP1243633A4/en
Priority to JP2002503065A priority patent/JP3960914B2/ja
Priority to AU2001246851A priority patent/AU2001246851A1/en
Priority to US10/111,405 priority patent/US6689178B2/en
Priority to KR10-2002-7006928A priority patent/KR100480760B1/ko
Priority to TW090122581A priority patent/TWI281492B/zh
Publication of WO2002028979A1 publication Critical patent/WO2002028979A1/ja

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1409—Abrasive particles per se
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
    • C01F17/00—Compounds of rare earth metals
    • C01F17/20—Compounds containing only rare earth metals as the metal element
    • C01F17/206—Compounds containing only rare earth metals as the metal element oxide or hydroxide being the only anion
    • C01F17/224—Oxides or hydroxides of lanthanides
    • C01F17/235—Cerium oxides or hydroxides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C19/00—Surface treatment of glass, not in the form of fibres or filaments, by mechanical means
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/61—Micrometer sized, i.e. from 1-100 micrometer
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/62—Submicrometer sized, i.e. from 0.1-1 micrometer
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/12—Surface area

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Geology (AREA)
  • Inorganic Chemistry (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Surface Treatment Of Glass (AREA)
  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
PCT/JP2001/002987 2000-10-02 2001-04-06 Matiere abrasive a base de cerium et procede de production de ladite matiere WO2002028979A1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
EP01919806A EP1243633A4 (en) 2000-10-02 2001-04-06 ABRASIVE CERIUM-BASED MATERIAL AND PROCESS FOR PRODUCING THE SAME
JP2002503065A JP3960914B2 (ja) 2000-10-02 2001-04-06 セリウム系研摩材及びセリウム系研摩材の製造方法
AU2001246851A AU2001246851A1 (en) 2000-10-02 2001-04-06 Cerium based abrasive material and method for producing cerium based abrasive material
US10/111,405 US6689178B2 (en) 2000-10-02 2001-04-06 Cerium based abrasive material and method for producing cerium based abrasive material
KR10-2002-7006928A KR100480760B1 (ko) 2000-10-02 2001-04-06 세륨계 연마재 및 세륨계 연마재의 제조방법
TW090122581A TWI281492B (en) 2000-10-02 2001-09-12 Cerium-oxide-based abrasive and method for producing the cerium-oxide-based abrasive

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2000-301791 2000-10-02
JP2000301624 2000-10-02
JP2000301791 2000-10-02
JP2000-301624 2000-10-02

Publications (1)

Publication Number Publication Date
WO2002028979A1 true WO2002028979A1 (fr) 2002-04-11

Family

ID=26601321

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2001/002987 WO2002028979A1 (fr) 2000-10-02 2001-04-06 Matiere abrasive a base de cerium et procede de production de ladite matiere

Country Status (8)

Country Link
US (1) US6689178B2 (ja)
EP (1) EP1243633A4 (ja)
JP (1) JP3960914B2 (ja)
KR (1) KR100480760B1 (ja)
CN (1) CN1177012C (ja)
AU (1) AU2001246851A1 (ja)
TW (1) TWI281492B (ja)
WO (1) WO2002028979A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006032966A (ja) * 2004-07-15 2006-02-02 Samsung Electronics Co Ltd 酸化セリウム研磨粒子及び該研磨粒子を含む組成物
KR101134596B1 (ko) 2005-09-15 2012-04-09 삼성코닝정밀소재 주식회사 세륨계 연마재 슬러리
JP2023052035A (ja) * 2017-10-31 2023-04-11 Hoya株式会社 研磨液、ガラス基板の製造方法、及び、磁気ディスクの製造方法

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* Cited by examiner, † Cited by third party
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JP4002740B2 (ja) * 2001-05-29 2007-11-07 三井金属鉱業株式会社 セリウム系研摩材の製造方法
JP2006514601A (ja) * 2002-06-07 2006-05-11 ザイモジェネティクス インコーポレイティッド ガンおよびその他の治療用途におけるｉｌ−２１の使用方法
JP4248889B2 (ja) * 2002-11-22 2009-04-02 Ａｇｃセイミケミカル株式会社 研磨材粒子の品質評価方法、研磨方法及びガラス研磨用研磨材
US6863825B2 (en) 2003-01-29 2005-03-08 Union Oil Company Of California Process for removing arsenic from aqueous streams
US20100187178A1 (en) * 2003-01-29 2010-07-29 Molycorp Minerals, Llc Process for removing and sequestering contaminants from aqueous streams
KR100630691B1 (ko) * 2004-07-15 2006-10-02 삼성전자주식회사 산화세륨 연마 입자 및 그 제조 방법과 ｃｍｐ용 슬러리조성물 및 그 제조 방법과 이들을 이용한 기판 연마 방법
TWI273632B (en) 2004-07-28 2007-02-11 K C Tech Co Ltd Polishing slurry, method of producing same, and method of polishing substrate
KR100637403B1 (ko) 2005-07-14 2006-10-23 주식회사 케이씨텍 연마 입자, 연마용 슬러리 및 이의 제조 방법
KR100641348B1 (ko) 2005-06-03 2006-11-03 주식회사 케이씨텍 Ｃｍｐ용 슬러리와 이의 제조 방법 및 기판의 연마 방법
JP5237542B2 (ja) * 2006-10-03 2013-07-17 三井金属鉱業株式会社 酸化セリウム系研摩材
US8066874B2 (en) * 2006-12-28 2011-11-29 Molycorp Minerals, Llc Apparatus for treating a flow of an aqueous solution containing arsenic
US20090107925A1 (en) * 2007-10-31 2009-04-30 Chevron U.S.A. Inc. Apparatus and process for treating an aqueous solution containing biological contaminants
US20090107919A1 (en) * 2007-10-31 2009-04-30 Chevron U.S.A. Inc. Apparatus and process for treating an aqueous solution containing chemical contaminants
US8349764B2 (en) 2007-10-31 2013-01-08 Molycorp Minerals, Llc Composition for treating a fluid
US8252087B2 (en) * 2007-10-31 2012-08-28 Molycorp Minerals, Llc Process and apparatus for treating a gas containing a contaminant
TW201038510A (en) * 2009-03-16 2010-11-01 Molycorp Minerals Llc Porous and durable ceramic filter monolith coated with a rare earth for removing contaminates from water
US20100258448A1 (en) * 2009-04-09 2010-10-14 Molycorp Minerals, Llc Use of a rare earth for the removal of antimony and bismuth
KR101105480B1 (ko) * 2009-10-19 2012-01-13 주식회사 케이씨텍 화학적 기계적 연마용 슬러리의 제조 방법 및 그를 이용하여 제조된 화학적 기계적 연마용 슬러리
MX2012005351A (es) * 2009-11-09 2012-11-23 Molycorp Minerals Llc Remocion de los colorantes con tierras raras.
JP2011110637A (ja) * 2009-11-25 2011-06-09 Asahi Glass Co Ltd 磁気ディスク用ガラス基板の製造方法
CN101899282A (zh) * 2010-06-23 2010-12-01 山东理工大学 气雾化快凝磁性磨料制备方法
US9233863B2 (en) 2011-04-13 2016-01-12 Molycorp Minerals, Llc Rare earth removal of hydrated and hydroxyl species
CN102492393B (zh) * 2011-11-17 2014-01-22 中冶宝钢技术服务有限公司 一种降低钢渣非金属磨料表面颗粒吸附物的方法
US9975787B2 (en) 2014-03-07 2018-05-22 Secure Natural Resources Llc Removal of arsenic from aqueous streams with cerium (IV) oxide compositions
WO2019049932A1 (ja) * 2017-09-11 2019-03-14 昭和電工株式会社 セリウム系研磨材用原料の製造方法、及びセリウム系研磨材の製造方法
CN114751438B (zh) * 2022-04-28 2023-09-08 浙江奥首材料科技有限公司 一种氧化铝磨料、制备方法、用途及包含其的硅片研磨液和研磨方法
CN116727600B (zh) * 2023-06-16 2024-01-26 广东万嘉精铸材料有限公司 一种精密铸造面层砂粉及其制备方法

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Publication number Priority date Publication date Assignee Title
GB2267389A (en) * 1992-05-26 1993-12-01 Toshiba Kk Polishing apparatus and method for planarizing layer on a semiconductor wafer
JPH10106987A (ja) * 1996-09-30 1998-04-24 Hitachi Chem Co Ltd 酸化セリウム研磨剤及び基板の研磨法
US5772780A (en) * 1994-09-30 1998-06-30 Hitachi, Ltd. Polishing agent and polishing method
JPH10183103A (ja) * 1996-12-25 1998-07-14 Seimi Chem Co Ltd セリウム系研磨材の製造方法
EP0939431A1 (en) * 1996-09-30 1999-09-01 Hitachi Chemical Co., Ltd. Cerium oxide abrasive and method of abrading substrates
JP2000160137A (ja) * 1998-11-30 2000-06-13 Hitachi Chem Co Ltd 研磨剤及び基板の研磨法
JP2000173955A (ja) * 1998-12-04 2000-06-23 Hitachi Ltd 半導体装置の製造方法及び平坦化加工装置
WO2000037578A1 (en) * 1998-12-21 2000-06-29 Showa Denko K. K. Cerium oxide slurry for polishing, process for preparing the slurry, and process for polishing with the slurry
JP2000273443A (ja) * 1999-03-23 2000-10-03 Asahi Glass Co Ltd ディスプレイ用ガラス基板の研磨用砥材、研磨方法および砥材の品質評価方法

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US3131039A (en) * 1961-10-12 1964-04-28 Frederick C Nonamaker Process for preparing a polishing compound
FR2617153B1 (fr) * 1987-06-26 1991-04-05 Rhone Poulenc Chimie Procede d'obtention d'un oxyde cerique et oxyde cerique a nouvelles caracteristiques morphologiques
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SG72802A1 (en) * 1997-04-28 2000-05-23 Seimi Chem Kk Polishing agent for semiconductor and method for its production
US6063306A (en) * 1998-06-26 2000-05-16 Cabot Corporation Chemical mechanical polishing slurry useful for copper/tantalum substrate
JP3560484B2 (ja) * 1998-08-05 2004-09-02 昭和電工株式会社 Ｌｓｉデバイス研磨用研磨材組成物及び研磨方法
JP3624722B2 (ja) * 1998-11-18 2005-03-02 本田技研工業株式会社 メタノール改質触媒及びそれを用いたメタノール改質触媒装置
DE60031857T2 (de) * 1999-06-18 2007-09-13 Hitachi Chemical Co., Ltd. Verwendung eines cmp schleifmittels
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Patent Citations (9)

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Publication number Priority date Publication date Assignee Title
GB2267389A (en) * 1992-05-26 1993-12-01 Toshiba Kk Polishing apparatus and method for planarizing layer on a semiconductor wafer
US5772780A (en) * 1994-09-30 1998-06-30 Hitachi, Ltd. Polishing agent and polishing method
JPH10106987A (ja) * 1996-09-30 1998-04-24 Hitachi Chem Co Ltd 酸化セリウム研磨剤及び基板の研磨法
EP0939431A1 (en) * 1996-09-30 1999-09-01 Hitachi Chemical Co., Ltd. Cerium oxide abrasive and method of abrading substrates
JPH10183103A (ja) * 1996-12-25 1998-07-14 Seimi Chem Co Ltd セリウム系研磨材の製造方法
JP2000160137A (ja) * 1998-11-30 2000-06-13 Hitachi Chem Co Ltd 研磨剤及び基板の研磨法
JP2000173955A (ja) * 1998-12-04 2000-06-23 Hitachi Ltd 半導体装置の製造方法及び平坦化加工装置
WO2000037578A1 (en) * 1998-12-21 2000-06-29 Showa Denko K. K. Cerium oxide slurry for polishing, process for preparing the slurry, and process for polishing with the slurry
JP2000273443A (ja) * 1999-03-23 2000-10-03 Asahi Glass Co Ltd ディスプレイ用ガラス基板の研磨用砥材、研磨方法および砥材の品質評価方法

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Title
See also references of EP1243633A4 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006032966A (ja) * 2004-07-15 2006-02-02 Samsung Electronics Co Ltd 酸化セリウム研磨粒子及び該研磨粒子を含む組成物
KR101134596B1 (ko) 2005-09-15 2012-04-09 삼성코닝정밀소재 주식회사 세륨계 연마재 슬러리
JP2023052035A (ja) * 2017-10-31 2023-04-11 Hoya株式会社 研磨液、ガラス基板の製造方法、及び、磁気ディスクの製造方法
JP7547449B2 (ja) 2017-10-31 2024-09-09 Hoya株式会社 研磨液、ガラス基板の製造方法、及び、磁気ディスクの製造方法

Also Published As

Publication number Publication date
US20030000150A1 (en) 2003-01-02
KR20020070296A (ko) 2002-09-05
TWI281492B (en) 2007-05-21
AU2001246851A1 (en) 2002-04-15
CN1177012C (zh) 2004-11-24
KR100480760B1 (ko) 2005-04-07
US6689178B2 (en) 2004-02-10
JP3960914B2 (ja) 2007-08-15
JPWO2002028979A1 (ja) 2004-02-12
CN1394229A (zh) 2003-01-29
EP1243633A4 (en) 2009-05-27
EP1243633A1 (en) 2002-09-25

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