WO2002024602A1 - Ceramique piezo-electrique et element en ceramique piezo-electrique - Google Patents
Ceramique piezo-electrique et element en ceramique piezo-electrique Download PDFInfo
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- WO2002024602A1 WO2002024602A1 PCT/JP2001/007993 JP0107993W WO0224602A1 WO 2002024602 A1 WO2002024602 A1 WO 2002024602A1 JP 0107993 W JP0107993 W JP 0107993W WO 0224602 A1 WO0224602 A1 WO 0224602A1
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- piezoelectric ceramic
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- 239000000919 ceramic Substances 0.000 title claims abstract description 88
- 229910052797 bismuth Inorganic materials 0.000 claims abstract description 11
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 4
- 239000001301 oxygen Substances 0.000 claims abstract description 4
- 229910052751 metal Inorganic materials 0.000 claims description 14
- 150000001875 compounds Chemical class 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 229910052779 Neodymium Inorganic materials 0.000 claims description 3
- 229910052788 barium Inorganic materials 0.000 claims description 3
- 229910052746 lanthanum Inorganic materials 0.000 claims description 3
- 229910052684 Cerium Inorganic materials 0.000 claims description 2
- 229910052692 Dysprosium Inorganic materials 0.000 claims description 2
- 229910052688 Gadolinium Inorganic materials 0.000 claims description 2
- 229910052777 Praseodymium Inorganic materials 0.000 claims description 2
- 229910052772 Samarium Inorganic materials 0.000 claims description 2
- 229910052745 lead Inorganic materials 0.000 claims description 2
- 229910052749 magnesium Inorganic materials 0.000 claims description 2
- 229910052706 scandium Inorganic materials 0.000 claims description 2
- 229910052712 strontium Inorganic materials 0.000 claims description 2
- 229910052727 yttrium Inorganic materials 0.000 claims description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 abstract 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract 2
- 150000001622 bismuth compounds Chemical class 0.000 abstract 2
- 229910052791 calcium Inorganic materials 0.000 abstract 2
- 239000011575 calcium Substances 0.000 abstract 2
- 239000010936 titanium Substances 0.000 abstract 2
- 241000331231 Amorphocerini gen. n. 1 DAD-2008 Species 0.000 abstract 1
- 239000000203 mixture Substances 0.000 description 12
- 239000000463 material Substances 0.000 description 9
- 238000010304 firing Methods 0.000 description 7
- 238000000605 extraction Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000010287 polarization Effects 0.000 description 3
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 2
- 150000002611 lead compounds Chemical class 0.000 description 2
- 229910000464 lead oxide Inorganic materials 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 230000009291 secondary effect Effects 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B18/00—Layered products essentially comprising ceramics, e.g. refractory products
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- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/46—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
- C04B35/462—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates
- C04B35/465—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates
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- C04B35/46—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
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- C04B35/475—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on bismuth titanates
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- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
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- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
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Definitions
- the present invention relates to a piezoelectric ceramic and a piezoelectric ceramic element using the same, and in particular, for example, a piezoelectric ceramic useful as a material for a piezoelectric ceramic element such as a piezoelectric ceramic filter, a piezoelectric ceramic oscillator, and a piezoelectric ceramic oscillator, and a piezoelectric ceramic element using the same. It relates to the piezoelectric ceramic element used. '' Background technology
- piezoelectric ceramic filters piezoelectric Ceramic used in piezoelectric ceramic element such as a piezoelectric ceramic oscillator Contact Yopi piezoelectric ceramic vibrator, lead zirconate titanate (P b (T i x Z r! _ X) O 3.) or lead titanate and (P b T i O 3) is a piezoelectric ceramic whose main component is widely used.
- piezoelectric ceramics containing lead zirconate titanate or lead titanate as a main component contain a large amount of lead in the composition and lead oxides evaporate during the manufacturing process, resulting in poor product uniformity. There was a problem. In order to prevent this problem, it is preferable to use a piezoelectric ceramic containing no lead in the composition or a piezoelectric ceramic containing only a small amount of lead in the composition. Is preferably as small as possible. .
- the piezoelectric ceramic mainly composed of C a B i 4 T i 4 0 5 bismuth layered compounds such as, for containing no lead oxide in its composition, to solve the aforementioned problems It is attracting attention as a material.
- C a B i 4 T i 4 0 1 5 as a main component comprises contain no lead or lead compounds at all, or only small amounts, piezoelectric showing the Qmax enough to be practical use
- An object of the present invention is to provide a piezoelectric ceramic useful as a material for a ceramic element and a piezoelectric ceramic element using the same.
- the piezoelectric ceramic according to the present invention is a piezoelectric ceramic containing a bismuth layered compound composed of Ca, Bi, Ti and oxygen as a main component.
- a b: c the relationship of 0.15 ⁇ a / c ⁇ 0.25 and 3.5 ⁇ (2a + 3b) / c ⁇ 3.88 is satisfied.
- It is a piezoelectric ceramic characterized in that: '
- the divalent metal element other than Ca or the trivalent metal element other than B i is 0.1 mol 1 or less (0) with respect to T i and 1 mo 1 in the main component. Is not included).
- the divalent metal element other than Ca contained in the main component is at least one selected from, for example, Mg, Sr, Ba, and Pb.
- the trivalent metal elements other than Bi contained in the main component are, for example, Sc, Y, La, Ce, Pr, Nd, Sm, Gd, It is at least one selected from Dy, Er and ⁇ Yb.
- the piezoelectric ceramic according to the present invention may contain Zr less than 0.25 mo1 (not including 0) with respect to Ti and 1 mo1 in the main component. Furthermore, the piezoelectric ceramic according to the present invention may contain 1.5% by weight or less (excluding 0) of Mn in terms of Mn'CO 3 •.
- the piezoelectric ceramic element according to the present invention includes a piezoelectric ceramic comprising the piezoelectric ceramic according to the present invention, and an electrode formed on the piezoelectric ceramic. And a piezoelectric ceramic element.
- a piezoelectric ceramic in a piezoelectric ceramic mainly composed of a bismuth layered compound composed of Ca, Bi, Ti and oxygen, C a, B i and Bi in the bismuth layered compound which is a main component are contained.
- T i a: b: c
- the range is limited so as to satisfy the relationship, because a practically usable Qmax cannot be obtained outside this range.
- a divalent metal element other than Ca or a trivalent metal element other than Bi is 0.1 mol 1 or less with respect to T i and lmo 1 in the main component. (Not including 0), the effect of the present invention becomes more remarkable.
- the content of divalent metal elements other than C a or trivalent metal elements other than B i was set to 0.1 lmo 1 or less (excluding 0) for T i and 1 mo 1 in the main component.
- FIG. 1 is a perspective view showing an example of a piezoelectric ceramic vibrator to which the present invention is applied.
- FIG. 2 is a cross-sectional view of the piezoelectric ceramic vibrator shown in FIG. BEST MODE FOR CARRYING OUT THE INVENTION
- Electrodes were printed on some of the formed sheets with platinum paste.
- the electrode-printed sheet and the unprinted sheet are crimped and fired at 950 ° ( ⁇ 110 ° C), in an insulating oil of 100 ° C ⁇ 200 ° C, :
- a DC voltage of L0kVZmm was applied for 10 to 30 minutes to perform polarization processing, and the energy confinement type piezoelectric ceramic vibrator (sample) shown in Fig. 1 and Fig. 2 was produced. Is the direction perpendicular to the electrodes, as indicated by the arrows in Figure 2.
- the piezoelectric ceramic vibrator 10 includes, for example, a rectangular parallelepiped piezoelectric ceramic 12.
- the piezoelectric ceramic 12 includes two piezoelectric layers 12a and 12b. These piezoelectric cells
- the lamic layers 12a and 12b are made of piezoelectric ceramic having the above composition formula, and are laminated and integrally formed.
- these piezoelectric ceramic layers 12a and 12b are polarized in the same thickness direction, as shown by arrows in FIG.
- a circular vibrating electrode 14a is formed at the center between the piezoelectric ceramic layers 12a and 12b, and a T-shape extends from the vibrating electrode 14a to one end surface of the piezoelectric ceramic 12.
- the extraction electrode 16a is formed.
- a circular vibrating electrode 14b is formed at the center, and a T-shaped extraction electrode extends from the vibrating electrode 14b to the other end surfaces of the piezoelectric ceramics 1, 2. 16 b is formed.
- a circular vibrating electrode 14c is formed at the center thereof, and a T-shaped, for example, is formed from the vibrating electrode 14c to the other end surface of the piezoelectric ceramic 12
- An extraction electrode 16c is formed. That is, the vibrating electrodes 14a, 14b, and 14c match when the piezoelectric ceramic 12 is viewed vertically from above.
- the vibrating electrode 14a is the vibrating electrodes 14b and 14c. Located in the middle between.
- One external terminal 20a is connected to the extraction electrode 16a via a lead 18a, and another lead 18b is connected to the extraction electrodes 16b and 16c.
- the other external terminal 20 b is connected via the other terminal.
- the piezoelectric ceramic vibrator 10 when a voltage is applied between the external terminals 20a and 20b, a potential difference is generated between the vibrating electrodes 14a and the vibrating electrodes 14b and 14c. Longitudinal vibration The second high frequency mode can be excited.
- Qmax is the condition under which the largest Qmax was obtained among samples of the same composition (calcination temperature, firing temperature, temperature of insulating oil during polarization, and DC voltage). Is the value for The value of Q max varies depending on the shape of the sample, the vibration mode, and the type of electrode, but if it is 15 or more under the conditions used here, it can be considered to be a practical level.
- each of the samples according to the examples of the present invention has a Q max of 15 or more, and is used as a material for a piezoelectric ceramic element, particularly, a piezoelectric ceramic oscillator. It is clear that it is a useful piezoelectric ceramic. Therefore, according to the present invention, it is possible to obtain a piezoelectric ceramic useful as a material for a piezoelectric ceramic element or the like containing no or only a small amount of lead or a lead compound and exhibiting a practically usable Qmax.
- the samples according to an embodiment of the present invention are all equipped with a C a B i 4 T i 4 0 larger Q max be formed by the following firing temperature for firing the E 5. Therefore, as a secondary effect of the present invention, the firing temperature It can be seen that the degree can be reduced. By lowering the firing temperature in this way, it is possible to reduce the energy required for firing, such as power, and to reduce the manufacturing cost by extending the life of the pods that store the piezoelectric ceramic during firing. Becomes
- the piezoelectric ceramic according to the present invention is not limited to the composition of the above embodiment, but is 0.15 aZc, 0.25, and 3.5 ⁇ (2a + 3b) / c ⁇ As long as the relationship of 8.88 was satisfied, it was confirmed that the Qmax force was S 15 or more.
- Qmax is an example of the thickness longitudinal vibration secondary high frequency mode, but the effect of the present invention is not limited to the thickness longitudinal vibration secondary high frequency mode, and the thickness shear vibration and the It is also effective in other vibration modes used for piezoelectric ceramic elements, especially piezoelectric ceramic oscillators, such as the fundamental wave of thickness longitudinal vibration, as in the case of thickness longitudinal vibration secondary high frequency.
- the piezoelectric ceramic of the present invention can be used for various piezoelectric ceramic elements, and is particularly suitably used for a piezoelectric ceramic oscillator.
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Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP01965647A EP1327615B1 (en) | 2000-09-22 | 2001-09-14 | Piezoelectric ceramic and piezoelectric ceramic element comprising the same |
DE60139492T DE60139492D1 (de) | 2000-09-22 | 2001-09-14 | Piezoelectrische keramik und piezoelektrisches element dieses enthaltend |
US10/130,675 US6753642B2 (en) | 2000-09-22 | 2001-09-14 | Piezoelectric ceramic and piezoelectric ceramic element including the same |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000-288101 | 2000-09-22 | ||
JP2000288101A JP3815197B2 (ja) | 2000-09-22 | 2000-09-22 | 圧電磁器組成物およびそれを用いた圧電セラミック素子 |
Publications (1)
Publication Number | Publication Date |
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WO2002024602A1 true WO2002024602A1 (fr) | 2002-03-28 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/JP2001/007993 WO2002024602A1 (fr) | 2000-09-22 | 2001-09-14 | Ceramique piezo-electrique et element en ceramique piezo-electrique |
Country Status (8)
Country | Link |
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US (1) | US6753642B2 (ja) |
EP (1) | EP1327615B1 (ja) |
JP (1) | JP3815197B2 (ja) |
KR (1) | KR100470101B1 (ja) |
CN (1) | CN1145594C (ja) |
DE (1) | DE60139492D1 (ja) |
TW (1) | TW567508B (ja) |
WO (1) | WO2002024602A1 (ja) |
Families Citing this family (4)
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JP4147954B2 (ja) * | 2002-03-25 | 2008-09-10 | 株式会社村田製作所 | 圧電素子の製造方法 |
JP2006169032A (ja) * | 2004-12-15 | 2006-06-29 | Ngk Spark Plug Co Ltd | 圧電磁器組成物および圧電素子 |
JP5072760B2 (ja) * | 2008-07-28 | 2012-11-14 | 京セラ株式会社 | 圧電磁器およびそれを用いた圧電素子 |
GB2538055B (en) * | 2015-04-28 | 2017-04-19 | Advanced Risc Mach Ltd | Data processing apparatus having a cache |
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- 2000-09-22 JP JP2000288101A patent/JP3815197B2/ja not_active Expired - Fee Related
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2001
- 2001-09-14 KR KR10-2002-7006220A patent/KR100470101B1/ko not_active IP Right Cessation
- 2001-09-14 DE DE60139492T patent/DE60139492D1/de not_active Expired - Lifetime
- 2001-09-14 CN CNB018028241A patent/CN1145594C/zh not_active Expired - Fee Related
- 2001-09-14 EP EP01965647A patent/EP1327615B1/en not_active Expired - Lifetime
- 2001-09-14 US US10/130,675 patent/US6753642B2/en not_active Expired - Lifetime
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- 2001-09-21 TW TW090123350A patent/TW567508B/zh not_active IP Right Cessation
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Also Published As
Publication number | Publication date |
---|---|
US20030001460A1 (en) | 2003-01-02 |
EP1327615A1 (en) | 2003-07-16 |
DE60139492D1 (de) | 2009-09-17 |
EP1327615A4 (en) | 2006-05-24 |
KR100470101B1 (ko) | 2005-02-05 |
US6753642B2 (en) | 2004-06-22 |
CN1145594C (zh) | 2004-04-14 |
TW567508B (en) | 2003-12-21 |
JP3815197B2 (ja) | 2006-08-30 |
EP1327615B1 (en) | 2009-08-05 |
JP2002097073A (ja) | 2002-04-02 |
KR20020063574A (ko) | 2002-08-03 |
CN1392871A (zh) | 2003-01-22 |
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