WO2002001642A1 - Circuit de micro-ondes cryoelectronique comportant des contacts de josephson et utilisation de celui-ci - Google Patents

Circuit de micro-ondes cryoelectronique comportant des contacts de josephson et utilisation de celui-ci Download PDF

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Publication number
WO2002001642A1
WO2002001642A1 PCT/EP2001/006487 EP0106487W WO0201642A1 WO 2002001642 A1 WO2002001642 A1 WO 2002001642A1 EP 0106487 W EP0106487 W EP 0106487W WO 0201642 A1 WO0201642 A1 WO 0201642A1
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WO
WIPO (PCT)
Prior art keywords
josephson
contacts
microwave circuit
coplanar strip
cryoelectronic
Prior art date
Application number
PCT/EP2001/006487
Other languages
German (de)
English (en)
Inventor
Hans-Georg Meyer
Marco Schubert
Gerd Wende
Original Assignee
Institut für Physikalische Hochtechnologie e.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institut für Physikalische Hochtechnologie e.V. filed Critical Institut für Physikalische Hochtechnologie e.V.
Publication of WO2002001642A1 publication Critical patent/WO2002001642A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
    • G01R35/005—Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references
    • G01R35/007—Standards or reference devices, e.g. voltage or resistance standards, "golden references"
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N69/00—Integrated devices, or assemblies of multiple devices, comprising at least one superconducting element covered by group H10N60/00

Definitions

  • the invention relates to a cryoelectronic microwave circuit with a plurality of Josephson contacts and the use thereof.
  • Josephson facilities such as Josephson
  • coplanar strip lines are known in which two metallic strip lines with the width w and the
  • the four chains are connected in series in order to ensure optimal microwave excitation of the Josephson contacts the chains are microwave-connected in parallel.
  • all Josephson contacts must be connected in series. This problem is solved by so-called "dc-blocks", which allow the microwave to pass through but block the direct current.
  • the corresponding microwave with a frequency of 70 or 90 GHz over a n Waveguide and transformed via a so-called finline taper on the individual microstrip lines with the Josephson contacts as a continuous wave. So that a continuous wave can propagate on the microstrip lines, the microstrip lines are terminated with absorbent lines (load).
  • the integration of the Josephson contacts in a microstrip line has the disadvantage that in addition to the manufacture of the Josephson contacts, a thick dielectric and a second metal layer have to be produced as a ground.
  • the defect-free technological manufacture of the 1 ⁇ m to 3 ⁇ m thick dielectric causes great problems.
  • the so-called “dc blocks” have to be implemented technologically. All of this means an increased manufacturing effort.
  • SP Benz "Superconductor-normal-supercinductor junctions for programmable voltage standards" Appl. Phys. Lett., Vol 67, No. 18, pp. 2714-2716, Oct. 1995 described.
  • the Josephson contacts in the inner conductor a coplanar line (CPW: coplanar waveguide) integrated, the two outer ground lines of the coplanar line consist of pure superconducting material.
  • CPW coplanar waveguide
  • the disadvantage of producing the thick dielectric does not apply here, but the two outer ground conductors must be short-circuited for every curvature of the coplanar line in order to avoid the excitation of undesired modes. This necessary equipotential bonding is disadvantageous because it requires additional technological effort.
  • Another disadvantage is the "dc blocks” that are also required here. The circuit to be removed there is built up in segments of 512, 512, 1024, 2048 and 4096 Josephson contacts, which can be supplied separately with direct current.
  • the total voltage then results from the sum of the voltages of all individual segments, so that the total voltage can be adjusted again with high precision and additionally very quickly with the resolution of the smallest segment.
  • the invention is based on the object of specifying a microwave circuit in which Josephson contacts with a high integration density are supplied with a homogeneous microwave in order, for example, to be able to generate highly accurate voltages of up to 10 V.
  • the object is achieved in that the Josephson contacts in both strip conductors of a coplanar strip line (CPS: coplanar strips) are integrated.
  • CPS coplanar strip line
  • La a strip conductor with integrated Josephson contacts in a lateral section
  • Fig. Lb a coplanar stripline with integrated Josephson contacts in plan view
  • Fig. Lb in a section along a plane X-X
  • Fig. 2 shows an example of the use of a cryoelectronic microwave circuit as a voltage standard
  • Fig. 3 shows another example of the use of a cryo-electronic microwave circuit as a programmable voltage standard.
  • FIG. 1 a shows a strip conductor with integrated Josephson contacts 40 in a lateral section
  • FIG. 1b shows a coplanar strip line with integrated Josephson contacts according to FIG. La in a top view
  • FIG. 1c shows a section along a plane XX according to FIG.
  • a superconductor layer 41 with a thickness of 150 nm is first deposited on an oxidized Si substrate 3.
  • An insulation layer 42 with a thickness of approximately 2 nm and a further superconductor layer 43 with a thickness of 400 nm are applied thereon to form the individual Josephson contacts 40 with the structures shown schematically.
  • the Josephson contacts 40 can be replaced by SIS contacts (superconductor-insulator-superconductor Josephson contacts), such as Nb-Al2 ⁇ 3-Nb, or SNS contacts (superconductor-normal conductor-superconductor Josephson contacts), such as Nb-PdAu-Nb, or SINIS contacts ( Superconductor-insulator-normal conductor-insulator-superconductor Josephson contacts) such as Nb-Al2 ⁇ 3-Al-Al2 ⁇ 3-Nb.
  • the production such individual Josephson contacts 40 is also state of the art and does not require any further explanation at this point. It is important for the invention, however, that the Josephson contacts 40 are arranged at least in a coplanar strip line 1.
  • the spacing s of the two strip conductors can be freely selected and is 3 ⁇ m in the example.
  • the width w of a stripline can also be freely selected within limits and in the example can be between 1 ... 60 ⁇ m.
  • the wave resistance and the attenuation of the coplanar stripline can be set by the specific choice of the above-mentioned parameters.
  • the spacing s for example between 1 ⁇ m ... 5 ⁇ m and the width w of the Josephson contacts, the attenuation (in the example 0.2 db / cm) and the characteristic impedance (in the example 30 ... 200 ⁇ ) of the coplanar ones Stripline can be set.
  • the attenuation (in the example 0.2 db / cm) and the characteristic impedance (in the example 30 ... 200 ⁇ ) of the coplanar ones Stripline can be set.
  • the attenuation in the example 0.2 db / cm
  • the characteristic impedance in the example 30 ... 200 ⁇
  • FIG. 2 shows schematically the use of a coplanar strip line 1 with integrated Josephson contacts as a cryoelectronic microwave circuit for a voltage standard.
  • a microwave circuit is in particular part of a device for generating a high-precision voltage standard with the help of Josephson contacts.
  • Parts of this device which are not shown schematically in FIG. 2 of the drawing, such as conventional coolant containers, means for frequency stabilization, etc., are common specialist knowledge (see, for example, V. Kose, F. Melchert, "Quantum Dimensions in Electrical Measurement Technology", p. 24 -41, VCH Verlagsgesellschaft mbH, 1991) and therefore need not be explained in more detail here.
  • a sinusoidal microwave is coupled into the antenna 21 from a highly stable microwave source 2 with, for example, 70 GHz, to which the coplanar stripline 1 according to the invention is connected.
  • the coplanar stripline 1 with a superconducting coplanar stripline 6 high attenuation (load) completed to avoid standing waves.
  • the load in turn is short-circuited at the end in order to connect all Josephson contacts of the strip conductors 11, 12 in direct current in series (see arrows).
  • the total voltage is tapped at the contact surfaces 5, and the direct current can be supplied at the contact surfaces 5.
  • the comparison with a voltage to be calibrated is carried out by tapping the voltage signal at the contacts 5 and forwarding it to a nanovoltmeter, not shown, in accordance with the prior art. This provides a voltage standard for generating highly accurate voltages from 1 V to 10 V.
  • the circuit described above can also be used for high-precision potentiometer devices with Josephson contacts.
  • the Josephson contacts 40 In order to supply the Josephson contacts 40 with a sufficiently homogeneous microwave current, it may be necessary with a large number of Josephson contacts (e.g. SIS contacts from 20,000) to arrange the Josephson contacts in several parallel microwave chains, but at the same time the Josephson contacts must be connected in series. It can be seen from the basic circuit according to FIG. 3 that, for example, in the case of three power dividers 22 connected in cascade connection to one another and thus four parallel chains la, lb, lc, ld, the Josephson contacts 40 are automatically connected in series in terms of direct current. This means that no DC interruptions (dc block), as would be required in the other described waveguides according to the prior art, are necessary.
  • dc block no DC interruptions
  • Another type of circuit for a pulse-driven voltage standard with the coupling of a pulsed microwave is based on the defined temporal change in the incident frequency f.
  • the Josephson contacts are fed with a programmed pulse sequence.
  • Such a circuit type is in principle also already known (US Pat. No. 5,812,078) or (cf. CA Hamilton, CJ Burroughs, SP Benz "Josephson Voltage Standard - A Review", IEEE Trans. Appl. Supercond. Vol. 7, No. 2 , pp. 3756-3761, June 1997), but can be realized much more easily by the present invention.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)

Abstract

L'invention concerne un circuit de micro-ondes cryoélectronique comportant une pluralité de contacts de Josephson, ainsi que l'utilisation de celui-ci pour la production de tensions très précises. Selon l'invention, au moins une ligne à bande coplanaire (1) composée de deux microbandes individuelles (11, 12) constituées d'une pluralité de contacts de Josephson (40) montés en série, est disposée sur un substrat (3). Les deux microbandes individuelles (11, 12) sont disposées à un écart prédéfini (s), et la largeur (w) des bandes peut être prédéfinie de manière qu'une variation de l'écart (s) et de la largeur (w) permet de régler l'impédance caractéristique et l'amortissement de la ligne à bande coplanaire, et qu'une micro-onde peut être couplée dans la ligne à bande coplanaire sur un côté (21). Par ailleurs, la ligne à bande coplanaire est terminée sur l'autre côté par une ligne à bande coplanaire supraconductrice (6) d'amortissement élevé, de façon que tous les contacts de Josephson (40) de la ligne à bande coplanaire sont montés en série à la manière d'un circuit en courant continu, la tension totale pouvant être prélevée sur des surfaces de contact habituelles, et le courant continu pouvant être alimenté sur les surfaces de contact.
PCT/EP2001/006487 2000-06-29 2001-06-07 Circuit de micro-ondes cryoelectronique comportant des contacts de josephson et utilisation de celui-ci WO2002001642A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10033178A DE10033178C2 (de) 2000-06-29 2000-06-29 Kryoelektronischer Mikrowellenschaltkreis mit Josephsonkontakten und dessen Verwendung
DE10033178.5 2000-06-29

Publications (1)

Publication Number Publication Date
WO2002001642A1 true WO2002001642A1 (fr) 2002-01-03

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DE (1) DE10033178C2 (fr)
WO (1) WO2002001642A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10218695B4 (de) * 2002-04-26 2004-11-11 Institut für Physikalische Hochtechnologie e.V. Vorrichtung und Verfahren zur Erzeugung einer definierten Wechselspannung
DE102004002228B4 (de) * 2004-01-13 2008-07-10 Institut für Physikalische Hochtechnologie e.V. Kyroelektronischer Mikrowellenschaltkreis mit koplanaren Streifenleitungen und dessen Verwendung als Josephsonquantisierer

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0048813A2 (fr) * 1980-09-29 1982-04-07 International Business Machines Corporation Ensemble distribué de dispositifs de Josephson travaillant en cohérence
DE4137953A1 (de) * 1991-11-18 1993-05-19 Siemens Ag Mikrowellenschaltkreis einer josephson-einrichtung und verwendung des schaltkreises
DE19714191C1 (de) * 1997-04-07 1998-07-23 Inst Physikalische Hochtech Ev Mikrowellenschaltkreis mit Josephson-Elementen und Verwendung des Schaltkreises
US5812078A (en) * 1997-05-22 1998-09-22 Northrop Grumman Corporation Josephson junction digital to analog converter for accurate AC waveform synthesis

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0048813A2 (fr) * 1980-09-29 1982-04-07 International Business Machines Corporation Ensemble distribué de dispositifs de Josephson travaillant en cohérence
DE4137953A1 (de) * 1991-11-18 1993-05-19 Siemens Ag Mikrowellenschaltkreis einer josephson-einrichtung und verwendung des schaltkreises
DE19714191C1 (de) * 1997-04-07 1998-07-23 Inst Physikalische Hochtech Ev Mikrowellenschaltkreis mit Josephson-Elementen und Verwendung des Schaltkreises
US5812078A (en) * 1997-05-22 1998-09-22 Northrop Grumman Corporation Josephson junction digital to analog converter for accurate AC waveform synthesis

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
BENZ S P: "Superconductor-normal-superconductor junctions for programmable voltage standards", APPLIED PHYSICS LETTERS, vol. 67, no. 18, 30 October 1995 (1995-10-30), pages 2714 - 2716, XP000544289, ISSN: 0003-6951 *
SCHUBERT M ET AL: "SNS junction on Nb-Ti base for microwave circuits", 2000 APPLIED SUPERCONDUCTIVITY CONFERENCE, VIRGINIA BEACH, VA, USA, 17-22 SEPT. 2000, vol. 11, no. 1, March 2001 (2001-03-01), IEEE Transactions on Applied Superconductivity, pages 1066 - 1069, XP002180316, ISSN: 1051-8223 *

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DE10033178A1 (de) 2002-01-17

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