WO2001099261A1 - Moteur lineaire - Google Patents
Moteur lineaire Download PDFInfo
- Publication number
- WO2001099261A1 WO2001099261A1 PCT/JP2000/004001 JP0004001W WO0199261A1 WO 2001099261 A1 WO2001099261 A1 WO 2001099261A1 JP 0004001 W JP0004001 W JP 0004001W WO 0199261 A1 WO0199261 A1 WO 0199261A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- coil
- armature
- coil layer
- pitch
- secondary side
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
- H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K3/00—Details of windings
- H02K3/46—Fastening of windings on the stator or rotor structure
- H02K3/47—Air-gap windings, i.e. iron-free windings
Definitions
- the present invention relates to a constant motor for constant speed feed, which requires small throttling and pitching of a thrust force movable armature, and to a reversing motor for high speed positioning.
- Some conventional motors have a concentrated winding armature coil that is arranged without overlapping. However, these motors are suitable for applications that require low speed ripple because no cogging occurs. In addition, since it has a simple structure in which concentrated coils are arranged without being overlapped, insulation is easy and application to a voltage of 200 V is possible.
- FIG. 9 is a front sectional view of the linear motor viewed from the moving direction of the mover
- FIG. 10 is a plan sectional view taken along line AA in FIG. 9
- FIG. 11 is a side view showing an armature portion.
- the linear motor 1 includes a movable part 2 and a fixed part 3.
- the movable part 2 includes a so-called coreless type armature part 4 and an armature part support 5 to which the armature part 4 is attached.
- the armature part 4 is configured by arranging a plurality of, for example, six, concentratedly wound armature coils 6 in a line in the traveling direction and molding with a resin 7.
- the armature coil 6 basically has a three-phase three-coil four-pole structure, and the coil pitch Pc of the armature coil 6 is 4Z3XPm.
- the six armature coils 6 are arranged in the order of U, W, and V phases from the left on the paper.
- the shape of the concentrated winding armature coil 6 is such that two coil sides 6 that mainly generate thrust facing the secondary sides 8a and 8b are parallel to each other. I have. These six armature coils 6 are arranged in a line in the traveling direction.
- the fixed part 3 has secondary side parts 8 a and 8 b as so-called field poles made of permanent magnets, and a secondary side part as a so-called back yoke to which the secondary fiU parts 8 a and 8 b are attached.
- Body 9a, 9b The permanent magnets constituting the two fire side portions 8a and 8b are arranged at every Pm pitch so as to have a different polarity from the adjacent permanent magnets.
- the permanent magnets facing each other are arranged side by side so that they have different polarities.
- the secondary side portions 8a and 8b and the armature portion 4 are opposed to each other and are arranged in parallel in the traveling direction, and the two secondary side support members 9a and 9b are They are connected and supported by the support member 10.
- Thrust ripples occur due to the use of concentrated winding armature coils.
- the present invention has been made to solve such a problem, and an object of the present invention is to provide a reour motor having good insulation between armature coils, easy assembly, and extremely small thrust ripple. .
- the present invention is directed to a secondary side support body having a plurality of field poles, to which two fire side portions are attached, facing the 27 fire side portion via a gap,
- An armature portion support having an armature portion having a plurality of concentratedly wound armature coils, wherein the secondary side portion and the armature portion face each other and are parallel to the traveling direction.
- the field poles on the secondary side are arranged in the moving direction of the movable part so as to be different from the adjacent poles at every Pm pitch.
- the present invention has the following effects.
- the phase bands can be distributed, and the variation and displacement of the magnetization of field poles such as permanent magnets can be reduced.
- the amount of thrust calipers can be reduced.
- FIG. 1 is a coil layout diagram showing a first embodiment of the present invention.
- FIG. 2 is a graph showing a relationship between a winding coefficient and a loss with respect to a coil width WcZ magnet pitch Pm in one armature coil.
- FIG. 3 is a front sectional view of a lower motor according to a second embodiment of the present invention.
- FIG. 4 is a coil layout diagram showing a second embodiment of the present invention.
- FIG. 5 is a coil layout diagram showing a third embodiment of the present invention.
- FIG. 6 is a coil layout diagram showing a fourth embodiment of the present invention.
- FIG. 7 is a coil layout diagram showing a fifth embodiment of the present invention.
- FIG. 8 is a coil layout diagram showing a fifth embodiment of the present invention.
- FIG. 1 is a coil layout diagram showing a first embodiment of the present invention.
- FIG. 2 is a graph showing a relationship between a winding coefficient and a loss with respect to a coil width WcZ magnet pitch Pm
- FIG. 9 is a front sectional view showing a linear motor according to the related art.
- FIG. 10 is a plan sectional view taken along line A_A, in FIG.
- FIG. 11 is a diagram of a Koinore rooster in a conventional technique.
- the basic structure of the linear motor according to the present invention is substantially the same as the structure of the linear motor according to the prior art except for the armature, and the same or corresponding members as those in FIGS. 9 to 11 are denoted by the same reference numerals. And the description is omitted.
- FIG. 1 is a side view of an armature section showing an arrangement of armature coils according to a first embodiment of the present invention.
- the armature section 4 is configured by molding a concentrated winding armature coil 6 arranged in a line in the traveling direction with a resin 7.
- the armature coil 6 is composed of six coils in three phases, and when the pitch of the field poles on the secondary side is P m, the coil pitch P c of the centrally wound armature coil 6 is
- the arrangement of these six armature coils 6 is, from the left in the drawing, a forward winding U-phase coil, a reverse winding V-phase coil, a forward winding W-phase coil, and a reverse winding U-phase coil. , A forward winding V-phase coil, and a reverse winding W-phase coil.
- FIG. 2 shows the relationship between the winding coefficient and the loss when a predetermined thrust is generated with respect to the coil width WcZ magnet pitch Pm for one armature coil 6.
- Al and A2 are those using an armature coil 6 in which the ratio of the air core width (space width at the center of the coil) to the coil width Wc is 0.6, and Bl and B2 are the coil widths.
- An armature coil 6 with an air core width ratio of 0.4 to Wc is used, and Cl and C2 indicate those using an armature coil 6 with an air core width ratio of 0.2 to the coil width Wc. ing.
- the coil pitch Pc is set to 5/3 XPm, it is necessary to consider Wc / Pm to be 5/3 or less.
- the winding coefficient is maximum at Wc / Pm around 4/3.
- the coil width Wc can be determined by the size of the field pole pitch Pm and the required insulation interval. For example, if the field pole pitch Pm is 18 mm and Wc / Pm that can reduce the loss is 4-3,
- the distance between the armature coils 6 is as large as 6 mm.
- FIG. 3 is a front sectional view of the linear motor viewed from the traveling direction of the movable part
- FIG. 4 is a view showing a coil arrangement of the armature part.
- the fixing part 3 of the second embodiment has the same structure as that of the first embodiment.
- the difference from the first embodiment lies in the structure of the armature unit 4.
- the armature section 4 has two coil layers in which concentrated winding armature coils 6 are arranged in a row in the traveling direction, a nonmagnetic insulator 11 is inserted between the coil layers, and the whole is made of resin / Redo and configure and review.
- the first coil layer 6a on the left side of the drawing and the second coil layer 6b on the right side of the drawing each have the coil pitch P c of the concentrated winding armature coil 6 assuming that the field pole pitch is P m.
- the second coil layer is arranged in the order of a U-phase coil having a reverse winding, a V-phase coil having a forward winding, and a W-phase coil having a reverse winding.
- This configuration has the same effect as the first embodiment. Also, when the armature section 4 is viewed from the side (when viewed from the secondary side), a place where coils of different phases overlap appears. In other words, in the armature portion 4, since the phase bands are distributed in the thickness direction of the air gap between the armature portion 4 and the secondary side portions 8a and 8b, the magnetization of the field poles such as the permanent magnets has a deviation from the position deviation. Thrust ripples generated by such factors can be reduced.
- This third embodiment is different from the second embodiment!
- the arrangement method of the armature coil 6 of the armature section 4 is changed.
- the first coil layer and the second coil layer have the same coil arrangement, except that the first coil layer and the second coil layer are shifted by 2/3 XP m (electrical angle 120 degrees). are doing.
- the first coil layer is a U-phase coil having a forward winding, a V-phase coil having a reverse winding, and a W-phase coil having a forward winding.
- the winding V-phase coil, the reverse winding W-phase coil, and the forward winding U-phase coil are arranged in this order.
- the same effect as in the second embodiment can be obtained.
- the displacement between the first coil layer 6a and the second coil layer 6b is measured. Since the angle is reduced to 120 degrees, there is an advantage that the length of the armature portion 4 can be reduced.
- the fourth embodiment is different from the second and third embodiments in that the method of mounting the coil of the armature portion 4 is changed.
- the coil arrangement of the first coil layer 6a and the second coil layer 6b is the same, but the first coil layer 6a and the second coil layer 6b are 1/3 XP m ( (Electrical angle 60 degrees).
- the first coil layer 6a is arranged from the left in the order of a U-phase coil having a forward winding, a V-phase coil having a reverse winding, and a W-phase coil having a forward winding.
- the second coil layer 6b is arranged from the left.
- the W-phase coil with reverse winding, the U-phase coil with forward winding, and the V-phase coil with reverse winding are arranged in this order.
- the fourth embodiment can also achieve the same effects as those of the second and third embodiments, but the fourth embodiment has the first coil layer 6a and the second coil layer. Since the displacement of 6b is reduced to 60 degrees in electrical angle, there is a merit force s that can further reduce the length of the armature portion 4.
- the fifth embodiment is the first embodiment described above! This is different from the fourth embodiment in that the coil width and the coil pitch of the electronic part 4 are changed.
- the coil width Wc of all coils, Wc 4/3 X Pm
- the coil pitch Pc ' is set to 4/3 XP m rather than / 3 XP m, so that the length of the electronic part can be reduced. It is composed. Thereby, the lower motor can be manufactured at low cost.
- the insulator 11 is inserted between the first coil layer 6a and the second coil layer 6b.
- the insulator 11 may be formed of a small pudding substrate in which the connection between the first coil layer 6a and the second coil layer 6b is patterned. In this case, the connection processing between the armature coils 6 can be simplified.
- the present invention is not limited to the configuration of each of the above embodiments, and may have the following configuration.
- Either the armature part or the 27 fire side part may be a stator or a mover.
- the armature portion is not of the coreless type, but may be of a type having a core.
- the present invention can be used in the field of manufacturing and providing a linear motor for constant-speed feeding or high-speed positioning, which requires a small thrust ripple and a small moving and pitching of a mover.
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Electromagnetism (AREA)
- Power Engineering (AREA)
- Linear Motors (AREA)
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13681999A JP3550678B2 (ja) | 1999-05-18 | 1999-05-18 | リニアモータ |
US10/311,226 US6800968B1 (en) | 2000-06-19 | 2000-06-19 | Linear motor |
PCT/JP2000/004001 WO2001099261A1 (fr) | 1999-05-18 | 2000-06-19 | Moteur lineaire |
EP00937307A EP1311056B1 (en) | 2000-06-19 | 2000-06-19 | Linear motor |
DE60044039T DE60044039D1 (de) | 2000-06-19 | 2000-06-19 | Linearmotor |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13681999A JP3550678B2 (ja) | 1999-05-18 | 1999-05-18 | リニアモータ |
PCT/JP2000/004001 WO2001099261A1 (fr) | 1999-05-18 | 2000-06-19 | Moteur lineaire |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2001099261A1 true WO2001099261A1 (fr) | 2001-12-27 |
Family
ID=11736160
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2000/004001 WO2001099261A1 (fr) | 1999-05-18 | 2000-06-19 | Moteur lineaire |
Country Status (4)
Country | Link |
---|---|
US (1) | US6800968B1 (ja) |
EP (1) | EP1311056B1 (ja) |
DE (1) | DE60044039D1 (ja) |
WO (1) | WO2001099261A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006046173A1 (en) * | 2004-10-28 | 2006-05-04 | Koninklijke Philips Electronics N.V. | Linear motor coil assembly and linear motor |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3870413B2 (ja) * | 2002-08-20 | 2007-01-17 | 株式会社安川電機 | コアレスリニアモータ |
EP1507329A1 (de) * | 2003-08-14 | 2005-02-16 | Inventio Ag | Elektromotor, Aufzug mit einer mit einem Elektromotor bewegbaren Kabine und Aufzug mit einer Kabine und mit einem Elektromotor zur Bewegung eines Führungselements relativ zu der Kabine |
DE102006023493B4 (de) * | 2006-05-18 | 2008-07-10 | Intrasys Gmbh Innovative Transport-Systeme | Mehrphasiges Wicklungsteil für einen Linearmotor oder Lineargenerator |
CN102185460A (zh) * | 2011-05-05 | 2011-09-14 | 雅科贝思精密机电(上海)有限公司 | 具有补偿齿槽力和吸引力的双线圈直线电机 |
DE102011111352B4 (de) * | 2011-08-29 | 2015-11-26 | Otto-Von-Guericke-Universität Magdeburg | Elektromotor mit eisenloser Wicklung |
CN103840588B (zh) * | 2012-11-26 | 2016-08-17 | 直得科技股份有限公司 | 无铁心式线性马达线圈组合件结构及其单元线圈 |
DE102012025324A1 (de) * | 2012-12-22 | 2014-06-26 | Festo Ag & Co. Kg | Stator für einen Lineardirektantrieb und elektrodynamisches Antriebssystem |
DE202013012261U1 (de) * | 2013-10-28 | 2015-11-23 | Chieftech Precision Co., Ltd. | Spulengruppe eines kernlosen Linearmotors und deren Spule |
CN104702012B (zh) * | 2013-12-10 | 2017-05-31 | 上海微电子装备有限公司 | 线圈结构及直线电机 |
NL2018129A (en) | 2016-02-12 | 2017-08-21 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method |
WO2017137181A1 (en) * | 2016-02-12 | 2017-08-17 | Asml Netherlands B.V. | Multiphase linear motor, multiphase planar motor, stage, lithographic apparatus and device manufacturing method |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5863074A (ja) * | 1981-10-09 | 1983-04-14 | Takahashi Yoshiteru | 直流型半導体リニアモ−タ |
JPS6146893U (ja) * | 1984-08-29 | 1986-03-28 | 旭化成工業株式会社 | リニアアクチユエ−タ用部品 |
JPS62195375U (ja) * | 1986-05-29 | 1987-12-11 | ||
US5075583A (en) | 1989-04-28 | 1991-12-24 | Toyota Shatai Kabushiki Kaisha | Brushless DC linear motor |
JPH04183264A (ja) * | 1990-11-16 | 1992-06-30 | Ntn Corp | ブラシレスリニアモータの電機子 |
EP0905869A2 (en) | 1997-09-24 | 1999-03-31 | Canon Kabushiki Kaisha | Linear motor mechanism for exposure apparatus, and device manufacturing method using the same |
JPH11122903A (ja) | 1997-10-20 | 1999-04-30 | Fuji Elelctrochem Co Ltd | リニアモータ |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3942050A (en) * | 1973-07-05 | 1976-03-02 | Bbc Brown Boveri & Company Limited | Linear motor winding |
JPS62195375A (ja) | 1986-02-24 | 1987-08-28 | Sumikin Coke Co Ltd | 無水ナフタル酸の製造方法 |
-
2000
- 2000-06-19 US US10/311,226 patent/US6800968B1/en not_active Expired - Lifetime
- 2000-06-19 EP EP00937307A patent/EP1311056B1/en not_active Expired - Lifetime
- 2000-06-19 DE DE60044039T patent/DE60044039D1/de not_active Expired - Lifetime
- 2000-06-19 WO PCT/JP2000/004001 patent/WO2001099261A1/ja active IP Right Grant
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5863074A (ja) * | 1981-10-09 | 1983-04-14 | Takahashi Yoshiteru | 直流型半導体リニアモ−タ |
JPS6146893U (ja) * | 1984-08-29 | 1986-03-28 | 旭化成工業株式会社 | リニアアクチユエ−タ用部品 |
JPS62195375U (ja) * | 1986-05-29 | 1987-12-11 | ||
US5075583A (en) | 1989-04-28 | 1991-12-24 | Toyota Shatai Kabushiki Kaisha | Brushless DC linear motor |
JPH04183264A (ja) * | 1990-11-16 | 1992-06-30 | Ntn Corp | ブラシレスリニアモータの電機子 |
EP0905869A2 (en) | 1997-09-24 | 1999-03-31 | Canon Kabushiki Kaisha | Linear motor mechanism for exposure apparatus, and device manufacturing method using the same |
JPH11122903A (ja) | 1997-10-20 | 1999-04-30 | Fuji Elelctrochem Co Ltd | リニアモータ |
Non-Patent Citations (1)
Title |
---|
See also references of EP1311056A4 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006046173A1 (en) * | 2004-10-28 | 2006-05-04 | Koninklijke Philips Electronics N.V. | Linear motor coil assembly and linear motor |
Also Published As
Publication number | Publication date |
---|---|
EP1311056A1 (en) | 2003-05-14 |
EP1311056B1 (en) | 2010-03-17 |
US6800968B1 (en) | 2004-10-05 |
DE60044039D1 (de) | 2010-04-29 |
EP1311056A4 (en) | 2007-02-28 |
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